Ultrasound transducer device and method of manufacturing the same

    公开(公告)号:US09802224B2

    公开(公告)日:2017-10-31

    申请号:US14365647

    申请日:2012-12-13

    CPC classification number: B06B1/0292 Y10T29/49005

    Abstract: The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves, the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b), the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substratesides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a, 10b), the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10). The substrate (10) further comprises a substrate membrane (23) covering the substrate cavity (17). The substrate cavity (17) is located in a region of the substrate (10) underneath the cMUT cell (30). The present invention further relates to a method of manufacturing such ultrasound transducer device.

    ULTRASOUND TRANSDUCER DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20180029077A1

    公开(公告)日:2018-02-01

    申请号:US15729699

    申请日:2017-10-11

    CPC classification number: B06B1/0292 Y10T29/49005

    Abstract: The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves, the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b), the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substrate sides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a, 10b), the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10). The substrate (10) further comprises a substrate membrane (23) covering the substrate cavity (17). The substrate cavity (17) is located in a region of the substrate (10) underneath the cMUT cell (30). The present invention further relates to a method of manufacturing such ultrasound transducer device.

    ULTRASOUND TRANSDUCER ASSEMBLY AND METHOD FOR MANUFACTURING AN ULTRASOUND TRANSDUCER ASSEMBLY
    16.
    发明申请
    ULTRASOUND TRANSDUCER ASSEMBLY AND METHOD FOR MANUFACTURING AN ULTRASOUND TRANSDUCER ASSEMBLY 审中-公开
    超声波传感器总成及制造超声波传感器总成的方法

    公开(公告)号:US20170008030A1

    公开(公告)日:2017-01-12

    申请号:US15117848

    申请日:2015-03-02

    Abstract: The present invention relates to an ultrasound transducer assembly (10), in particular for intravascular ultrasound systems. The ultrasound transducer assembly comprises at least one silicon substrate element (30) including an ultrasound transducer element (14) for emitting and receiving ultrasound waves and including electrical connectors for electrically connecting the transducer element. The substrate element has a top surface (44), a bottom surface (46) and a side surface connecting the top surface and the bottom surface. An isolation layer (32, 50) forms the side surface for electrically isolating the substrate element.

    Abstract translation: 本发明涉及超声换能器组件(10),特别是涉及血管内超声系统。 超声换能器组件包括至少一个硅衬底元件(30),其包括用于发射和接收超声波的超声换能器元件(14),并且包括用于电连接换能器元件的电连接器。 衬底元件具有顶表面(44),底表面(46)和连接顶表面和底表面的侧表面。 隔离层(32,50)形成用于电绝缘衬底元件的侧表面。

    SEAMLESS TILING TO BUILD A LARGE DETECTOR
    17.
    发明申请
    SEAMLESS TILING TO BUILD A LARGE DETECTOR 有权
    无缝梯子建立大型探测器

    公开(公告)号:US20140307850A1

    公开(公告)日:2014-10-16

    申请号:US14356553

    申请日:2012-11-06

    Abstract: The present invention relates to a detector tile, a detector panel arrangement, an X-ray detector, an X-ray imaging system, and a method for providing a detector tile for a seamless detector surface with a continuous pixel array. In order to build a large area detector with reduced gap appearance, a detector tile (30) is provided having a flat primary substrate (32) and a surface layer (34) with a circuitry arrangement (36). The surface layer is arranged on a front side (38) of the primary substrate covering the primary substrate. The circuitry arrangement comprises a number of detector pixels (40) providing a pixel array (42), wherein at least one connection opening (44) is provided in the surface layer and the flat primary substrate at least at one edge of the detector tile, which connection opening is leading from the surface layer to the rear of the substrate for guiding electrical connection elements between the front side and the rear of the detector tiles. At all circumferential edges of the detector tile, the surface layer comprises at least portions (46) with pixels, which portions extend to the edge.

    Abstract translation: 本发明涉及检测器瓦片,检测器面板装置,X射线检测器,X射线成像系统以及用于提供具有连续像素阵列的无缝检测器表面的检测器瓦片的方法。 为了构建具有减小的间隙外观的大面积检测器,提供了具有平坦主要基底(32)和具有电路装置(36)的表面层(34)的检测器瓦片(30)。 表面层布置在覆盖初级基底的主要基底的前侧(38)上。 电路装置包括提供像素阵列(42)的多个检测器像素(40),其中至少一个连接开口(44)至少在检测器瓦片的一个边缘处设置在表面层和平坦初级基底中, 该连接开口从表面层引导到基板的后部,用于引导检测器瓦片的前侧和后部之间的电连接元件。 在检测器瓦片的所有圆周边缘处,表面层至少包括具有像素的部分(46),该部分延伸到边缘。

    ULTRASOUND TRANSDUCER DEVICE AND METHOD OF MANUFACTURING THE SAME
    18.
    发明申请
    ULTRASOUND TRANSDUCER DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    超声波传感器装置及其制造方法

    公开(公告)号:US20140307528A1

    公开(公告)日:2014-10-16

    申请号:US14365647

    申请日:2012-12-13

    CPC classification number: B06B1/0292 Y10T29/49005

    Abstract: The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves, the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b), the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substratesides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a, 10b), the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10). The substrate (10) further comprises a substrate membrane (23) covering the substrate cavity (17). The substrate cavity (17) is located in a region of the substrate (10) underneath the cMUT cell (30). The present invention further relates to a method of manufacturing such ultrasound transducer device.

    Abstract translation: 本发明涉及一种包括至少一个用于传送和/或接收超声波的cMUT单元(30)的超声换能器装置,所述cMUT单元(30)包括细胞膜(30a)和细胞膜下方的空腔(30b) 。 所述装置还包括具有第一侧面(10a)和第二侧面(10b)的基底(10),所述至少一个cMUT单元(30)布置在所述基底(10)的第一侧面(10a)上。 衬底(10)包括在垂直于衬底(10a,10b)的方向上延伸到衬底(10)中的衬底基底层(12)和多个相邻的沟槽(17a),其中每个形成间隔物(12a) 在相邻的沟槽(17a)之间。 衬底(10)还包括连接凹槽(17a)的连接腔(17b),并且在与基底侧面(10a,10b),沟槽(17a)和连接腔(17b)平行的方向上延伸 在衬底(10)中形成衬底腔(17)。 衬底(10)还包括覆盖衬底腔(17)的衬底膜(23)。 衬底空腔(17)位于cMUT电池(30)下方的衬底(10)的区域中。 本发明还涉及制造这种超声波换能器装置的方法。

    PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH STRESS LAYER
    19.
    发明申请
    PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH STRESS LAYER 有权
    预应力电容微电脑转换器电池与应力层

    公开(公告)号:US20140251014A1

    公开(公告)日:2014-09-11

    申请号:US14349077

    申请日:2012-10-26

    CPC classification number: G01H9/008 B06B1/0292 Y10T29/49005

    Abstract: The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).

    Abstract translation: 本发明涉及一种包括基底(12)的预折叠电容微加工的换能器单元(10)和设置在总膜面积(Atotal)之上的隔膜(14),其中,腔 所述膜(14)和所述基板(12),所述膜包括孔(15)和围绕所述孔(15)的边缘部分(14a)。 电池(10)还包括膜(14)上的应力层(17),应力层(17)相对于膜(14)具有预定的应力值,应力层(17)适于提供 在所述膜(14)上朝向所述基板(12)的方向上的弯曲力矩使得所述膜(14)的边缘部分(14a)折叠到所述基板(12)。 本发明还涉及一种制造这种预塌缩的电容微加工的换能器单元(10)的方法。

    ELECTRICALLY ISOLATED CATHETER WITH WIRELESS SENSORS
    20.
    发明申请
    ELECTRICALLY ISOLATED CATHETER WITH WIRELESS SENSORS 审中-公开
    电动隔离导管与无线传感器

    公开(公告)号:US20140194753A1

    公开(公告)日:2014-07-10

    申请号:US14208647

    申请日:2014-03-13

    Abstract: A local power-delivery/data-reception unit is installed within an insertion end of a sealed catheter. The local power-delivery/data-reception unit wirelessly powers a separately sealed sensor that is attached to the insertion end and configured for wirelessly sending a data signal to the local power-delivery/data-reception unit. The catheter may further feature a remote power-delivery/data-reception unit disposed within the handle and configured for wirelessly communicating with the local power-delivery/data-reception unit and a controller for controlling the sensor.

    Abstract translation: 局部送电/数据接收单元安装在密封导管的插入端内。 本地供电/数据接收单元无线地对附接到插入端的单独密封的传感器供电,并被配置为将数据信号无线发送到本地电力传送/数据接收单元。 导管还可以具有设置在手柄内并被配置为与本地供电/数据接收单元无线通信的远程电力传送/数据接收单元和用于控制传感器的控制器。

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