Method of manufacturing a semiconductor device and processing apparatus
    11.
    发明申请
    Method of manufacturing a semiconductor device and processing apparatus 有权
    制造半导体器件和处理装置的方法

    公开(公告)号:US20090130860A1

    公开(公告)日:2009-05-21

    申请号:US12216596

    申请日:2008-07-08

    IPC分类号: H01L21/31 C23C16/00

    摘要: To remove the deposit including a high dielectric constant film deposited on an inside of a processing chamber, by using a cleaning gas activated only by heat. The method includes the steps of: loading a substrate or a plurality of substrates into the processing chamber; performing processing to deposit the high dielectric constant film on the substrate by supplying processing gas into the processing chamber; unloading the processed substrate from the inside of the processing chamber; and cleaning the inside of the processing chamber by supplying a halide gas and an oxygen based gas into the processing chamber, and removing the deposit including the high dielectric constant film deposited on the inside of the processing chamber, and in the step of cleaning the inside of the processing chamber, the concentration of the oxygen based gas in the halide gas and the oxygen based gas is set to be less than 7%.

    摘要翻译: 为了除去沉积在处理室内部的高介电常数膜的沉积物,通过使用仅通过加热活化的清洗气体。 该方法包括以下步骤:将衬底或多个衬底装载到处理室中; 进行处理,通过向处理室供给处理气体,将高介电常数膜沉积在基板上; 从处理室的内部卸载经处理的基板; 以及通过向所述处理室中供给卤化物气体和氧气基气体来清洁所述处理室的内部,以及去除包括沉积在所述处理室内部的所述高介电常数膜的沉积物,以及在所述处理室的内部清洁步骤 处理室中的卤化物气体和氧气基气体中的氧基气体的浓度设定为小于7%。

    Vehicle front body structure
    12.
    发明申请
    Vehicle front body structure 失效
    车前体结构

    公开(公告)号:US20070215402A1

    公开(公告)日:2007-09-20

    申请号:US11709121

    申请日:2007-02-22

    IPC分类号: B60K5/00 B60J7/00

    摘要: A bridge-shaped frame member is disposed on a front side frame in front of a suspension tower so as to extend vertically and stride over a No. 4 mount. Accordingly, there can be provided a vehicle front body structure that can attain a proper energy absorption of the front side frame with its axial compression can be attained at a vehicle crash.

    摘要翻译: 桥式框架构件设置在悬架的前方的前侧框架上,以便垂直延伸并跨越4号底座。 因此,可以提供一种可以在车辆碰撞时获得能够获得前侧框架的适当能量吸收并且其轴向压缩的车辆前体结构。

    Coated inorganic hardened product
    16.
    发明授权
    Coated inorganic hardened product 失效
    涂层无机硬化产品

    公开(公告)号:US5190804A

    公开(公告)日:1993-03-02

    申请号:US770492

    申请日:1991-10-03

    摘要: A coating composition, a coated inorganic hardened product having a cured layer formed from the coating composition, and a process for producing the coated hardened product.A coating composition comprising the following components (A) to (C);(A) an organosilane oligomer solution containing silica particles dispersed therein, said solution being obtained by partially hydrolyzing a hydrolyzable organosilane represented by the formulaR.sup.1.sub.n SiX.sub.4-n (I) wherein R.sup.1 which may be the same or different each represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 8 carbon atoms, n is an integer of from 0 to 3, and X represents a hydrolyzable group, in a colloidal silica dispersed in an organic solvent or water,(B) a polyorganosiloxane having a silanol group in the molecule thereof, represented by the average composition formulaR.sup.2.sub.a Si(OH).sub.b O.sub.(4-a-b)/2 (II) wherein R.sup.2 which may be the same or different each represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 8 carbon atoms, and a and b are numbers satisfying the following equations:0.2.ltoreq.a.ltoreq.20.0001.ltoreq.b.ltoreq.3a+b.ltoreq.4, and(C) a catalyst.

    摘要翻译: 涂料组合物,具有由涂料组合物形成的固化层的涂覆无机硬化产品,以及制备涂覆硬化产品的方法。 包含以下成分(A)〜(C)的涂料组合物; (A)含有分散在其中的二氧化硅颗粒的有机硅烷低聚物溶液,所述溶液通过部分水解由式R 1 n SiX 4-n(I)表示的可水解的有机硅烷而得到,其中可以相同或不同的R表示取代或未取代的单价烃 具有1〜8个碳原子的基团,n为0〜3的整数,X为水解性基团,分散在有机溶剂或水中的胶体二氧化硅,(B)分子内具有硅烷醇基的聚有机硅氧烷 由其平均组成式R2aSi(OH)bO(4-ab)/ 2(II)表示,其中可相同或不同的R2各自表示具有1至8个碳原子的取代或未取代的一价烃基,和 b是符合以下等式的数字:0.2 和(C)催化剂。

    Vehicle front body structure
    19.
    发明授权
    Vehicle front body structure 失效
    车前体结构

    公开(公告)号:US07703805B2

    公开(公告)日:2010-04-27

    申请号:US11709121

    申请日:2007-02-22

    IPC分类号: B62D21/09

    摘要: A bridge-shaped frame member is disposed on a front side frame in front of a suspension tower so as to extend vertically and stride over a No. 4 mount. Accordingly, there can be provided a vehicle front body structure that can attain a proper energy absorption of the front side frame with its axial compression can be attained at a vehicle crash.

    摘要翻译: 桥式框架构件设置在悬架的前方的前侧框架上,以便垂直延伸并跨越4号底座。 因此,可以提供一种可以在车辆碰撞时获得能够获得前侧框架的适当能量吸收并且其轴向压缩的车辆前体结构。