摘要:
To remove the deposit including a high dielectric constant film deposited on an inside of a processing chamber, by using a cleaning gas activated only by heat. The method includes the steps of: loading a substrate or a plurality of substrates into the processing chamber; performing processing to deposit the high dielectric constant film on the substrate by supplying processing gas into the processing chamber; unloading the processed substrate from the inside of the processing chamber; and cleaning the inside of the processing chamber by supplying a halide gas and an oxygen based gas into the processing chamber, and removing the deposit including the high dielectric constant film deposited on the inside of the processing chamber, and in the step of cleaning the inside of the processing chamber, the concentration of the oxygen based gas in the halide gas and the oxygen based gas is set to be less than 7%.
摘要:
A bridge-shaped frame member is disposed on a front side frame in front of a suspension tower so as to extend vertically and stride over a No. 4 mount. Accordingly, there can be provided a vehicle front body structure that can attain a proper energy absorption of the front side frame with its axial compression can be attained at a vehicle crash.
摘要:
A coating resin composition is able to form a coating film having not only high hardness and weatherability but also high toughness, and can be cured both at room temperature and by heating curing, and further which is good at storage stability.The coating resin composition consists essentially of a silica-dispersed oligomer solution of organosilane prepared by partially hydrolyzing a hydrolyzable organosilane represented by a formula R.sup.1.sub.n SiX.sub.4-n, in colloidal silica dispersed in an organic solvent, water or a mixture thereof, and an acrylic resin which is a copolymer of acrylate or methacrylate represented by a formula, CH.sub.2 .dbd.CR.sup.2 (COOR.sup.3), and a curing catalyst. This composition is used by separating the components into two solutions and then mixing thereof as required. A resin-coated article comprises a cured resin layer of the coating resin composition on the surface of a substrate.
摘要:
A coating composition, a coated inorganic hardened product having a cured layer formed from the coating composition, and a process for producing the coated hardened product.A coating composition comprising the following components (A) to (C);(A) an organosilane oligomer solution containing silica particles dispersed therein, said solution being obtained by partially hydrolyzing a hydrolyzable organosilane represented by the formulaR.sup.1.sub.n SiX.sub.4-n (I) wherein R.sup.1 which may be the same or different each represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 8 carbon atoms, n is an integer of from 0 to 3, and X represents a hydrolyzable group, in a colloidal silica dispersed in an organic solvent or water,(B) a polyorganosiloxane having a silanol group in the molecule thereof, represented by the average composition formulaR.sup.2.sub.a Si(OH).sub.b O.sub.(4-a-b)/2 (II) wherein R.sup.2 which may be the same or different each represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 8 carbon atoms, and a and b are numbers satisfying the following equations:0.2.ltoreq.a.ltoreq.20.0001.ltoreq.b.ltoreq.3a+b.ltoreq.4, and(C) a catalyst.
摘要翻译:涂料组合物,具有由涂料组合物形成的固化层的涂覆无机硬化产品,以及制备涂覆硬化产品的方法。 包含以下成分(A)〜(C)的涂料组合物; (A)含有分散在其中的二氧化硅颗粒的有机硅烷低聚物溶液,所述溶液通过部分水解由式R 1 n SiX 4-n(I)表示的可水解的有机硅烷而得到,其中可以相同或不同的R表示取代或未取代的单价烃 具有1〜8个碳原子的基团,n为0〜3的整数,X为水解性基团,分散在有机溶剂或水中的胶体二氧化硅,(B)分子内具有硅烷醇基的聚有机硅氧烷 由其平均组成式R2aSi(OH)bO(4-ab)/ 2(II)表示,其中可相同或不同的R2各自表示具有1至8个碳原子的取代或未取代的一价烃基,和 b是符合以下等式的数字:0.2 = a = 2 0.0001 = b = 3 a + b 4>和(C)催化剂。
摘要:
A semiconductor substrate arranged in a vacuum treating chamber is heated by using microwaves. The chamber is provided with a window plate pervious to microwaves, on which window plate the substrate is mounted. A microwave generator is arranged outside of the chamber. The radiated microwaves are guided to the window plate, penetrate it, and are absorbed by the semiconductor substrate, with result that the substrate is directly heated to a predetermined temperature in a short time. Since no microwaves leak through the substrate, no parts in the chamber are heated.
摘要:
To remove the deposit including a high dielectric constant film deposited on an inside of a processing chamber, by using a cleaning gas activated only by heat. The method includes the steps of: loading a substrate or a plurality of substrates into the processing chamber; performing processing to deposit the high dielectric constant film on the substrate by supplying processing gas into the processing chamber; unloading the processed substrate from the inside of the processing chamber; and cleaning the inside of the processing chamber by supplying a halide gas and an oxygen based gas into the processing chamber, and removing the deposit including the high dielectric constant film deposited on the inside of the processing chamber, and in the step of cleaning the inside of the processing chamber, the concentration of the oxygen based gas in the halide gas and the oxygen based gas is set to be less than 7%.
摘要:
A bridge-shaped frame member is disposed on a front side frame in front of a suspension tower so as to extend vertically and stride over a No. 4 mount. Accordingly, there can be provided a vehicle front body structure that can attain a proper energy absorption of the front side frame with its axial compression can be attained at a vehicle crash.
摘要:
A coating resin composition is able to form a coating film having not only high hardness and weatherability but also high toughness, and can be cured both at room temperature and by heating curing, and further which is good at storage stability. The coating resin composition consists essentially of a silica-dispersed oligomer solution of organosilane prepared by partially hydrolyzing a hydrolyzable organosilane represented by a formula R1nSiX4−n, in colloidal silica dispersed in an organic solvent, water or a mixture thereof, and an acrylic resin which is a copolymer of acrylate or methacrylate represented by a formula, CH2═CR2(COOR3), and a curing catalyst. This composition is used by separating the components into two solutions and then mixing thereof as required. A resin-coated article comprises a cured resin layer of the coating resin composition on the surface of a substrate.
摘要翻译:涂料树脂组合物能够形成不仅具有高硬度和耐候性,而且具有高韧性的涂膜,并且可以在室温下固化并通过加热固化,并且进一步具有良好的储存稳定性。涂料树脂组合物包含 基本上由分散在有机溶剂中的胶体二氧化硅,水或其混合物中的部分水解由式R 1 n SiX 4-n表示的可水解的有机硅烷制备的有机硅烷的二氧化硅分散低聚物溶液和作为丙烯酸酯共聚物的丙烯酸树脂 或甲基丙烯酸酯,由式CH 2 = CR 2(COOR 3)表示,和固化催化剂。 通过将组分分离成两种溶液然后根据需要进行混合来使用该组合物。 树脂涂布制品包括在基材表面上的涂覆树脂组合物的固化树脂层。