Magnetic memory cell
    12.
    发明申请
    Magnetic memory cell 有权
    磁记忆体

    公开(公告)号:US20080219042A1

    公开(公告)日:2008-09-11

    申请号:US11715097

    申请日:2007-03-07

    IPC分类号: G11C11/16

    CPC分类号: G11C11/15

    摘要: By inserting a spin polarizing layer (typically pure iron) within the free layer of a MTJ or GMR memory cell, dR/R can be improved without significantly affecting other free layer properties such as Hc. Additional performance improvements can be achieved by also inserting a surfactant layer (typically oxygen) within the free layer.

    摘要翻译: 通过在MTJ或GMR存储器单元的自由层内插入自旋偏振层(通常为纯铁),可以改善dR / R,而不显着影响其它自由层性质如Hc。 还可以通过在自由层内插入表面活性剂层(通常为氧)来实现另外的性能改进。

    Ultra thin seed layer for CPP or TMR structure
    13.
    发明申请
    Ultra thin seed layer for CPP or TMR structure 有权
    用于CPP或TMR结构的超薄种子层

    公开(公告)号:US20070146928A1

    公开(公告)日:2007-06-28

    申请号:US11317598

    申请日:2005-12-23

    IPC分类号: G11B5/127

    摘要: Improved magnetic devices have been fabricated by replacing the conventional seed layer (typically Ta) with a bilayer of Ru on Ta. Although both Ru and Ta layers are ultra thin (between 5 and 20 Angstroms), good exchange bias between the seed and the AFM layer (IrMn about 70 Angstroms thick) is retained. This arrangement facilitates minimum shield-to-shield spacing and gives excellent performance in CPP, CCP-CPP, or TMR configurations.

    摘要翻译: 已经通过用Ta上的Ru的双层代替常规种子层(通常为Ta)来制造改进的磁性器件。 虽然Ru和Ta层都是超薄的(5到20埃之间),但保留种子和AFM层之间良好的交换偏差(约为70埃的IrMn)。 这种安排有助于最小的屏蔽间隔,并在CPP,CCP-CPP或TMR配置中提供出色的性能。

    TMR Device with Novel Free Layer Structure
    15.
    发明申请
    TMR Device with Novel Free Layer Structure 有权
    具有新型自由层结构的TMR器件

    公开(公告)号:US20130001189A1

    公开(公告)日:2013-01-03

    申请号:US13561206

    申请日:2012-07-30

    IPC分类号: G11B5/33

    摘要: A composite free layer having a FL1/insertion/FL2 configuration where a top surface of FL1 is treated with a weak plasma etch is disclosed for achieving enhanced dR/R while maintaining low RA, and low λ in TMR or GMR sensors. The weak plasma etch removes less than about 0.2 Angstroms of FL1 and is believed to modify surface structure and possibly increase surface energy. FL1 may be CoFe, CoFe/CoFeB, or alloys thereof having a (+) λ value. FL2 may be CoFe, NiFe, or alloys thereof having a (−) λ value. The thin insertion layer includes at least one magnetic element such as Co, Fe, and Ni, and at least one non-magnetic element. When CoFeBTa is selected as insertion layer, the CoFeB:Ta ratio is from 1:1 to 4:1.

    摘要翻译: 公开了具有FL1 /插入/ FL2配置的复合自由层,其中用弱等离子体蚀刻处理FL1的顶表面,以实现增强的dR / R,同时保持低的RA和TMR或GMR传感器中的低λ。 弱等离子体蚀刻去除了小于约0.2埃的FL1,据信可以改变表面结构并可能增加表面能。 FL1可以是具有(+)λ值的CoFe,CoFe / CoFeB或其合金。 FL2可以是具有( - )λ值的CoFe,NiFe或其合金。 薄插入层包括至少一种诸如Co,Fe和Ni的磁性元件和至少一种非磁性元件。 当选择CoFeBTa作为插入层时,CoFeB:Ta的比例为1:1至4:1。

    TMR or CPP structure with improved exchange properties
    16.
    发明授权
    TMR or CPP structure with improved exchange properties 有权
    具有改进的交换性能的TMR或CPP结构

    公开(公告)号:US07978439B2

    公开(公告)日:2011-07-12

    申请号:US11820251

    申请日:2007-06-19

    IPC分类号: G11B5/39

    摘要: An insertion layer is provided between an AFM layer and an AP2 pinned layer in a GMR or TMR element to improve exchange coupling properties by increasing Hex and the Hex/Hc ratio without degrading the MR ratio. The insertion layer may be a 1 to 15 Angstrom thick amorphous magnetic layer comprised of at least one element of Co, Fe, or Ni, and at least one element having an amorphous character selected from B, Zr, Hf, Nb, Ta, Si, or P, or a 1 to 5 Angstrom thick non-magnetic layer comprised of Cu, Ru, Mn, Hf, or Cr. Preferably, the content of the one or more amorphous elements in the amorphous magnetic layer is less than 40 atomic %. Optionally, the insertion layer may be formed within the AP2 pinned layer. Examples of an insertion layer are CoFeB, CoFeZr, CoFeNb, CoFeHf, CoFeNiZr, CoFeNiHf, and CoFeNiNbZr.

    摘要翻译: 在GMR或TMR元件中的AFM层和AP2钉扎层之间设置插入层,以通过增加Hex和Hex / Hc比来提高交换耦合性能,而不降低MR比。 插入层可以是由至少一种Co,Fe或Ni元素组成的1至15埃厚的非晶磁性层,以及至少一种具有选自B,Zr,Hf,Nb,Ta,Si ,或P,或由Cu,Ru,Mn,Hf或Cr组成的1〜5埃厚的非磁性层。 优选地,非晶磁性层中的一种或多种非晶质元素的含量小于40原子%。 可选地,插入层可以形成在AP2钉扎层内。 插入层的实例是CoFeB,CoFeZr,CoFeNb,CoFeHf,CoFeNiZr,CoFeNiHf和CoFeNiNbZr。

    TMR device with novel free layer stucture
    17.
    发明申请
    TMR device with novel free layer stucture 有权
    TMR器件具有新颖的自由层结构

    公开(公告)号:US20100177449A1

    公开(公告)日:2010-07-15

    申请号:US12319972

    申请日:2009-01-14

    IPC分类号: G11B5/33 B05D5/12

    摘要: A composite free layer having a FL1/insertion/FL2 configuration is disclosed for achieving high dR/R, low RA, and low λ in TMR or GMR sensors. Ferromagnetic FL1 and FL2 layers have (+) λ and (−) λ values, respectively. FL1 may be CoFe, CoFeB, or alloys thereof with Ni, Ta, Mn, Ti, W, Zr, Hf, Tb, or Nb. FL2 may be CoFe, NiFe, or alloys thereof with Ni, Ta, Mn, Ti, W, Zr, Hf, Tb, Nb, or B. The thin insertion layer includes at least one magnetic element such as Co, Fe, and Ni, and at least one non-magnetic element selected from Ta, Ti, W, Zr, Hf, Nb, Mo, V, Cr, or B. In a TMR stack with a MgO tunnel barrier, dR/R>60%, λ˜1×10−6, and RA=1.2 ohm-um2 when FL1 is CoFe/CoFeB/CoFe, FL2 is CoFe/NiFe/CoFe, and the insertion layer is CoTa or CoFeBTa.

    摘要翻译: 公开了具有FL1 /插入/ FL2配置的复合自由层,用于在TMR或GMR传感器中实现高dR / R,低RA和低λ。 铁磁FL1和FL2层分别具有(+)λ和( - )λ值。 FL1可以是CoFe,CoFeB或其与Ni,Ta,Mn,Ti,W,Zr,Hf,Tb或Nb的合金。 FL2可以是CoFe,NiFe或其与Ni,Ta,Mn,Ti,W,Zr,Hf,Tb,Nb或B的合金。薄插入层包括至少一种诸如Co,Fe和Ni 以及选自Ta,Ti,W,Zr,Hf,Nb,Mo,V,Cr或B中的至少一种非磁性元素。在具有MgO隧道势垒的TMR堆叠中,dR / R> 60%,λ 〜1×10-6,当FL1为CoFe / CoFeB / CoFe时,RA = 1.2ohm-um2,FL2为CoFe / NiFe / CoFe,插入层为CoTa或CoFeBTa。

    Process of manufacturing a TMR device
    20.
    发明授权
    Process of manufacturing a TMR device 有权
    制造TMR器件的过程

    公开(公告)号:US07497007B2

    公开(公告)日:2009-03-03

    申请号:US11181176

    申请日:2005-07-14

    IPC分类号: G11B5/187

    摘要: A high performance TMR element is fabricated by inserting an oxygen surfactant layer (OSL) between a pinned layer and AlOx tunnel barrier layer in a bottom spin valve configuration. The pinned layer preferably has a SyAP configuration with an outer pinned layer, a Ru coupling layer, and an inner pinned layer comprised of CoFeXBY/CoFeZ wherein x=0 to 70 atomic %, y=0 to 30 atomic %, and z=0 to 100 atomic %. The OSL is formed by treating the CoFez layer with oxygen plasma. The AlOx tunnel barrier has improved uniformity of about 2% across a 6 inch wafer and can be formed from an Al layer as thin as 5 Angstroms. As a result, the Hin value can be decreased by ⅓ to about 32 Oe. A dR/R of 25% and a RA of 3 ohm-cm2 have been achieved for TMR read head applications.

    摘要翻译: 通过在底部自旋阀配置中的钉扎层和AlOx隧道势垒层之间插入氧表面活性剂层(OSL)来制造高性能TMR元件。 钉扎层优选具有带外部被钉扎层,Ru耦合层和由CoFeXBY / CoFeZ组成的内部钉扎层的SyAP构型,其中x = 0至70原子%,y = 0至30原子%,z = 0 至100原子%。 通过用氧等离子体处理CoFez层形成OSL。 AlOx隧道势垒在6英寸晶片上提高了约2%的均匀性,并且可以由薄至5埃的Al层形成。 结果,Hin值可以减少1/3至约32Oe。 对于TMR读头应用,已经实现了25%的dR / R和3ohm-cm 2的RA。