公开(公告)号：US09296111B2

公开(公告)日：2016-03-29

申请号：US13948039

申请日：2013-07-22

Applicant: LuxVue Technology Corporation

Inventor： Andreas Bibl ,  Paul Argus Parks

IPC: G01B11/00 ,  B25J15/00 ,  G01D5/347 ,  H01L21/68 ,  H01L21/67

CPC classification number: B25J15/0085 ,  G01D5/347 ,  H01L21/67144 ,  H01L21/681

Abstract: Micro pick up arrays and methods for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array alignment encoder detects relative position between a micro pick up array having an encoder scale and a target substrate having a corresponding reference scale. In an embodiment, the micro pick up array alignment encoder facilitates alignment of the micro pick up array with the target substrate.

Abstract translation: 公开了用于从载体衬底传送微器件的微拾取阵列和方法。 在一个实施例中，微拾取阵列对准编码器检测具有编码器刻度的微拾取阵列和具有相应参考刻度的目标衬底之间的相对位置。 在一个实施例中，微拾取阵列对准编码器有利于微拾取阵列与目标衬底的对准。

公开(公告)号：US20150321338A1

公开(公告)日：2015-11-12

申请号：US14273298

申请日：2014-05-08

Applicant: LuxVue Technology Corporation

Inventor： Paul Argus Parks ,  Nile Alexander Light ,  Stephen P. Bathurst ,  John A. Higginson ,  Andreas Bibl

IPC: B25J7/00

CPC classification number: B25J7/00 ,  B25J9/0015 ,  B25J18/007 ,  H01L2224/7565 ,  H01L2224/75822 ,  Y10T74/20354

Abstract: Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

Abstract translation: 公开了用于将微器件或微阵列阵列转移到衬底或从衬底传送微阵列的系统和方法。 在一个实施例中，远程中心机器人允许微拾取阵列和目标基板之间的即时对准。 远程中心机器人可以包括独立移动并共享远程旋转中心的多个对称联动。 在一个实施例中，远程旋转中心可以定位在微拾取阵列的表面处，以防止在传送期间损坏微器件阵列。

公开(公告)号：US20140241843A1

公开(公告)日：2014-08-28

申请号：US13776158

申请日：2013-02-25

Applicant: LUXVUE TECHNOLOGY CORPORATION

Inventor： Dariusz Golda ,  John A. Higginson ,  Andreas Bibl ,  Paul Argus Parks ,  Stephen Paul Bathurst

IPC: B25J15/00 ,  B25J11/00

CPC classification number: B25J9/1015 ,  B25J7/00 ,  B25J9/0015 ,  B25J15/0052 ,  B25J15/0085 ,  B25J17/0208 ,  H01L21/67144 ,  H01L21/67721 ,  H01L21/68 ,  H01L21/6833 ,  H01L24/75 ,  H01L24/95 ,  H01L2224/75251 ,  H01L2224/75252 ,  H01L2224/75282 ,  H01L2224/7565 ,  H01L2224/75723 ,  H01L2224/75725 ,  H01L2224/75823 ,  H01L2224/759 ,  H01L2224/75901 ,  H01L2224/7592 ,  H01L2224/7598 ,  H01L2224/75984 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/1461 ,  H01L2924/00

Abstract: Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.

Abstract translation: 公开了用于从载体衬底传送微器件的系统和方法。 在一个实施例中，质量传递工具操纵器组件允许在微拾取阵列上的静电转印头阵列和载体衬底上的微器件阵列之间的主动对准。 可以检测质量传递工具操纵器组件的柔性元件的位移，以控制静电转印头阵列与微器件阵列之间的对准。