Cross-point memory and methods for forming of the same

    公开(公告)号:US11114613B2

    公开(公告)日:2021-09-07

    申请号:US16866302

    申请日:2020-05-04

    Abstract: The disclosed technology generally relates to integrated circuit devices, and in particular to cross-point memory arrays and methods for fabricating the same. Line stacks are formed, including a storage material line disposed over lower a conductive line. Upper conductive lines are formed over and crossing the line stacks, exposing portions of the line stacks between adjacent upper conductive lines. After forming the upper conductive lines, storage elements are formed at intersections between the lower conductive lines and the upper conductive lines by removing storage materials from exposed portions of the line stacks, such that each storage element is laterally surrounded by spaces. A continuous sealing material laterally surrounds each of the storage elements.

    CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME

    公开(公告)号:US20190288194A1

    公开(公告)日:2019-09-19

    申请号:US16360756

    申请日:2019-03-21

    Abstract: The disclosed technology generally relates to integrated circuit devices, and in particular to cross-point memory arrays and methods for fabricating the same. Line stacks are formed, including a storage material line disposed over lower a conductive line. Upper conductive lines are formed over and crossing the line stacks, exposing portions of the line stacks between adjacent upper conductive lines. After forming the upper conductive lines, storage elements are formed at intersections between the lower conductive lines and the upper conductive lines by removing storage materials from exposed portions of the line stacks, such that each storage element is laterally surrounded by spaces. A continuous sealing material laterally surrounds each of the storage elements.

    CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME

    公开(公告)号:US20180006217A1

    公开(公告)日:2018-01-04

    申请号:US15689256

    申请日:2017-08-29

    Abstract: The disclosed technology generally relates to integrated circuit devices, and in particular to cross-point memory arrays and methods for fabricating the same. Line stacks are formed, including a storage material line disposed over lower a conductive line. Upper conductive lines are formed over and crossing the line stacks, exposing portions of the line stacks between adjacent upper conductive lines. After forming the upper conductive lines, storage elements are formed at intersections between the lower conductive lines and the upper conductive lines by removing storage materials from exposed portions of the line stacks, such that each storage element is laterally surrounded by spaces. A continuous sealing material laterally surrounds each of the storage elements.

    CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME
    18.
    发明申请
    CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME 有权
    跨点存储器及其制造方法

    公开(公告)号:US20160056208A1

    公开(公告)日:2016-02-25

    申请号:US14468036

    申请日:2014-08-25

    Abstract: The disclosed technology generally relates to integrated circuit devices, and in particular to cross-point memory arrays and methods for fabricating the same. Line stacks are formed, including a storage material line disposed over lower a conductive line. Upper conductive lines are formed over and crossing the line stacks, exposing portions of the line stacks between adjacent upper conductive lines. After forming the upper conductive lines, storage elements are formed at intersections between the lower conductive lines and the upper conductive lines by removing storage materials from exposed portions of the line stacks, such that each storage element is laterally surrounded by spaces. A continuous sealing material laterally surrounds each of the storage elements.

    Abstract translation: 所公开的技术通常涉及集成电路器件,特别涉及交叉点存储器阵列及其制造方法。 形成线堆叠,包括设置在导线下方的存储材料线。 上导电线形成在线堆叠上并与线堆叠交叉,使相邻的上导线之间的线堆叠的部分暴露。 在形成上导线之后,通过从线堆叠的暴露部分去除存储材料,使得每个存储元件被空间横向包围,在下导电线和上导线之间的交叉处形成存储元件。 连续的密封材料横向围绕每个存储元件。

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