公开(公告)号：US07566940B2

公开(公告)日：2009-07-28

申请号：US11490880

申请日：2006-07-21

Applicant: Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

Inventor： Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

IPC: H01L29/82

CPC classification number: G02B26/001 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0307 ,  B81B2203/053

Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

Abstract translation: MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或由导电可移动层中的凹陷下方的柱支撑。 在某些实施例中，铆钉结构的部分延伸穿过可移动层并接触下面的层。 在其他实施例中，用于形成刚性支撑结构的材料也可以用于钝化与MEMS装置电连接的其它暴露的电引线，保护电引线免受损坏或其他干扰。

公开(公告)号：US20090135464A1

公开(公告)日：2009-05-28

申请号：US12367422

申请日：2009-02-06

Applicant: Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/02

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Abstract translation: 光调制器被布置为干涉式显示元件的行和列的阵列。 每个元素被划分成子行子元素。 阵列连接线将工作信号发送到显示元件，其中一条连接线对应于阵列中的一行显示元件。 子阵列连接线电连接到每个阵列连接线。 开关将来自每个阵列连接线的操作信号传输到子行以实现灰度调制。

公开(公告)号：US07489428B2

公开(公告)日：2009-02-10

申请号：US11649439

申请日：2007-01-03

Applicant: Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/08 ,  G02B26/00

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Abstract translation: 光调制器被布置为干涉式显示元件的行和列的阵列。 每个元素被划分成子行子元素。 阵列连接线将工作信号发送到显示元件，其中一条连接线对应于阵列中的一行显示元件。 子阵列连接线电连接到每个阵列连接线。 开关将来自每个阵列连接线的操作信号传输到子行以实现灰度调制。

公开(公告)号：US07460291B2

公开(公告)日：2008-12-02

申请号：US10644312

申请日：2003-08-19

Applicant: Jeffrey Brian Sampsell ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/00

CPC classification number: B82Y20/00 ,  G01J3/26 ,  G02B6/12 ,  G02B26/001 ,  G02B2006/12104 ,  G02F1/13725 ,  G02F1/216 ,  G02F2203/03 ,  G09G3/3466

Abstract: A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.

Abstract translation: 公开了一种可分离调制器架构。 调制器具有从空腔上的柔性层悬挂的反射镜。 柔性层还形成用于镜子的支撑和支撑柱。 另一种可分离的调制器架构具有悬挂在空腔上的反射镜。 调制器由支持和支持柱支持。 支撑柱包括在支撑柱塞上的柔性层。 总线结构可以形成在布置在支撑柱上的柔性层上。

公开(公告)号：US07161728B2

公开(公告)日：2007-01-09

申请号：US10731989

申请日：2003-12-09

Applicant: Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Brian Sampsell ,  Clarence Chui ,  Manish Kothari

IPC: G02B26/00 ,  G02B27/00 ,  G02F1/07 ,  G09G3/34 ,  G01B9/02

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

公开(公告)号：US20060077156A1

公开(公告)日：2006-04-13

申请号：US11192438

申请日：2005-07-28

Applicant: Clarence Chui ,  Manish Kothari

Inventor： Clarence Chui ,  Manish Kothari

IPC: G09G3/34

CPC classification number: G02B26/001 ,  G09G3/3466

Abstract: An interferometric modulator is provided having a faster deformation time constant on actuation than relaxation time constant upon release from actuation. In some embodiments, apertures are formed in a mechanical membrane to decrease pressure, including liquid and/or gas pressures, on the membrane when actuated. In other embodiments, a dampening layer is disposed in close proximity above the membrane to apply greater downward pressure on the membrane and therefore slow the motion of the membrane when released from an actuated state. Other embodiments comprise structures, such as a heating element or vacuum device, to manipulate pressures above and/or below the mechanical membrane to affect the mechanical persistence of the display device.

Abstract translation: 提供了一种干涉式调制器，其在致动时具有更快的变形时间常数，而不是从致动释放时的松弛时间常数。 在一些实施例中，在机械膜中形成孔，以在致动时减小膜上的压力，包括液体和/或气体压力。 在其它实施例中，阻尼层设置在膜附近，以便在膜上施加更大的向下的压力，并且因此在从致动状态释放时减慢膜的运动。 其他实施例包括诸如加热元件或真空装置的结构，以操纵机械膜上方和/或下方的压力以影响显示装置的机械持久性。

公开(公告)号：US20050231791A1

公开(公告)日：2005-10-20

申请号：US11150566

申请日：2005-06-10

Applicant: Jeffrey Sampsell ,  Clarence Chui ,  Manish Kothari

Inventor： Jeffrey Sampsell ,  Clarence Chui ,  Manish Kothari

IPC: G09G3/20 ,  G09G3/34 ,  G02B26/00

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2074 ,  G09G3/2081 ,  G09G2300/06 ,  G09G2310/0267 ,  G09G2310/0297

Abstract: A light modulator is arranged as array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Abstract translation: 光调制器被布置为干涉式显示元件的行和列的阵列。 每个元素被划分成子行子元素。 阵列连接线将工作信号发送到显示元件，其中一条连接线对应于阵列中的一行显示元件。 子阵列连接线电连接到每个阵列连接线。 开关将来自每个阵列连接线的操作信号传输到子行以实现灰度调制。

公开(公告)号：US08735225B2

公开(公告)日：2014-05-27

申请号：US12415986

申请日：2009-03-31

Applicant: Lauren Palmateer ,  William J. Cummings ,  Brian Gally ,  Clarence Chui ,  Manish Kothari

Inventor： Lauren Palmateer ,  William J. Cummings ,  Brian Gally ,  Clarence Chui ,  Manish Kothari

IPC: H01L23/31

CPC classification number: B81B7/0038 ,  B81C2203/019 ,  G02B26/001

Abstract: Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.

Abstract translation: 公开了用于封装诸如干涉式调制器阵列之类的MEMS装置的方法和系统。 MEMS器件封装结构的一个实施例包括具有化学反应物吸气剂的密封。 MEMS器件封装的另一实施例包括具有吸气剂的主密封件和靠近主密封件的外周边的次级密封件。 MEMS器件封装的另一个实施例包括位于MEMS器件封装内部并且靠近封装密封件的内周边的吸气剂。

公开(公告)号：US08402647B2

公开(公告)日：2013-03-26

申请号：US12868656

申请日：2010-08-25

Applicant: Clarence Chui ,  Gaurav Sethi ,  Jonathan Charles Griffiths ,  Manish Kothari

Inventor： Clarence Chui ,  Gaurav Sethi ,  Jonathan Charles Griffiths ,  Manish Kothari

IPC: H05K3/30

CPC classification number: B23P11/00 ,  G02B6/0036 ,  G02B6/0038 ,  G02B6/0053 ,  G02B6/0065 ,  Y10T29/49002 ,  Y10T29/49131 ,  Y10T29/49155 ,  Y10T29/49208 ,  Y10T29/49826 ,  Y10T29/49904

Abstract: Methods of manufacturing light panels having at least one re-entrant turning feature. In one embodiment, a method of manufacturing a light panel includes providing a base layer, providing a cover layer, and coupling the cover layer to the base layer to form at least one re-entrant turning feature between the base layer and the cover layer. In another embodiment, a method of manufacturing a light panel includes providing a base layer, forming at least one receiving space in the base layer, providing at least one prismatic block, and coupling at least a portion of the prismatic block into the receiving space such that re-entrant turning features are formed between the prismatic block and the base layer.

Abstract translation: 制造具有至少一个重新转向特征的轻型面板的方法。 在一个实施例中，制造光面板的方法包括提供基底层，提供覆盖层，以及将覆盖层耦合到基底层，以在基底层和覆盖层之间形成至少一个重复的转动特征。 在另一个实施例中，一种制造光面板的方法包括提供基底层，在基底层中形成至少一个接收空间，提供至少一个棱柱形块，并将棱柱形块的至少一部分连接到接收空间中， 在棱柱块和基层之间形成了转向特征。

公开(公告)号：US08278726B2

公开(公告)日：2012-10-02

申请号：US12861778

申请日：2010-08-23

Applicant: Mark W. Miles ,  John Batey ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

Inventor： Mark W. Miles ,  John Batey ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

IPC: H01L29/84

CPC classification number: B81B3/0086 ,  B81C2201/0109 ,  B81C2201/014 ,  B81C2201/053 ,  G02B26/001

Abstract: In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

Abstract translation: 在一个实施例中，本发明提供一种用于制造微机电系统装置的方法。 该方法包括制造包括具有特征机电响应的膜的第一层和特征光学响应，其中特征光学响应是期望的，并且特征机电响应是不期望的; 以及通过在所述微机电系统装置的启动期间至少减少其上的电荷积累来修改所述第一层的特征机电响应。