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11.发明申请Analog data-input device provided with a pressure sensor of a microelectromechanical type 有权具有微机电类型的压力传感器的模拟数据输入装置公开(公告)号：US20060262088A1
公开(公告)日：2006-11-23
申请号：US11393377
申请日：2006-03-30
IPC分类号： G09G5/00
CPC分类号： G06F3/041 , G01L9/0045 , G01L9/0054 , G01L19/141 , G01L19/147 , G06F3/0338 , H01H13/785 , H01H2201/02 , H01H2201/036 , H01H2221/012 , H01H2239/01 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2924/16195 , H01L2924/181 , H01L2924/00012 , H01L2924/00014
摘要： In a data-input device an actuator element that can be manually actuated, and a sensor mechanically coupled to the actuator element. The sensor is formed in a body of semiconductor material housing a first sensitive element, which detects the actuation of the actuator element and generates electrical control signals. The first sensitive element is a microelectromechanical pressure sensor, formed by: a cavity made within the body; a diaphragm made in a surface portion of the body and suspended above the cavity; and piezoresistive transducer elements integrated in peripheral surface portions of the diaphragm in order to detect its deformations upon actuation of the actuator element.
摘要翻译： 在数据输入装置中，可以手动致动的致动器元件和机械地联接到致动器元件的传感器。 传感器形成在容纳第一敏感元件的半导体材料体中，该第一敏感元件检测致动元件的致动并产生电控制信号。 第一敏感元件是微机电压力传感器，其由以下部件形成：在体内形成的空腔; 隔膜，其制造在主体的表面部分中并悬挂在空腔上方; 以及压电换能器元件，其集成在隔膜的外周表面部分中，以便在致动元件致动时检测其变形。
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公开(公告)号：US20100327864A1
公开(公告)日：2010-12-30
申请号：US12826330
申请日：2010-06-29
IPC分类号： G01R33/02
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。
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公开(公告)号：US08289021B2
公开(公告)日：2012-10-16
申请号：US12826330
申请日：2010-06-29
IPC分类号： G01R33/02
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。
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公开(公告)号：US08901925B2
公开(公告)日：2014-12-02
申请号：US13608965
申请日：2012-09-10
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。
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公开(公告)号：US20130000136A1
公开(公告)日：2013-01-03
申请号：US13608965
申请日：2012-09-10
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。
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16.发明授权Read/write transducer for hard disk drives with optical position measuring system, and manufacturing process thereof 有权用于具有光学位置测量系统的硬盘驱动器的读/写传感器及其制造过程公开(公告)号：US06924958B2
公开(公告)日：2005-08-02
申请号：US10001922
申请日：2001-11-13
IPC分类号： G11B5/596
CPC分类号： G01R33/0286 , G11B5/59677
摘要： Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.
摘要翻译： 这里描述了一种用于具有双驱动级的硬盘驱动器的读/写换能器，包括至少一个硬盘和至少一个承载读/写换能器的悬架。 读/写换能器包括具有基本上平行六面体形状的支撑体，布置在支撑体的前表面上的读/写头和在制造过程中在支撑体的一个侧面上限定的光栅 读/写传感器。 该光栅能够使用激光发射器以光学方式测量读/写换能器相对于相应悬架的位置，该激光发射器向激光束发射和指向光栅;以及激光接收器，被布置成拦截由 光栅并输出位置信号，基于此可以以简单的方式计算读/写换能器相对于相应悬架的位置。
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公开(公告)号：US20120223402A1
公开(公告)日：2012-09-06
申请号：US13446976
申请日：2012-04-13
IPC分类号： H01L29/84
CPC分类号： G01L9/0073 , G01L9/0045
摘要： A capacitive semiconductor pressure sensor, comprising: a bulk region of semiconductor material; a buried cavity overlying a first part of the bulk region; and a membrane suspended above said buried cavity, wherein, said bulk region and said membrane are formed in a monolithic substrate, and in that said monolithic substrate carries structures for transducing the deflection of said membrane into electrical signals, wherein said bulk region and said membrane form electrodes of a capacitive sensing element, and said transducer structures comprise contact structures in electrical contact with said membrane and with said bulk region.
摘要翻译： 一种电容半导体压力传感器，包括：半导体材料的主体区域; 覆盖大块区域的第一部分的掩埋腔; 以及悬浮在所述掩埋腔上方的膜，其中所述体积区域和所述膜形成在整体式衬底中，并且所述整体式衬底承载用于将所述膜的偏转转换成电信号的结构，其中所述体积区域和所述膜 形成电容感测元件的电极，并且所述换能器结构包括与所述膜电连接并与所述体积区域接触的接触结构。
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18.发明授权Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type 有权电子设备包括MEMS器件和带孔衬底，特别是LGA或BGA型公开(公告)号：US08043881B2
公开(公告)日：2011-10-25
申请号：US12969022
申请日：2010-12-15
IPC分类号： H01L29/84
CPC分类号： B81B7/0061 , B81B7/007 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/1461 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
摘要翻译： 电子设备包括设置有通过开口的基板和包括活性表面的MEMS器件，其中MEMS器件的一部分对流体的化学/物理变化敏感。 MEMS器件的有源表面面向衬底并与其间隔开，敏感部分与开口对准。 保护封装至少部分地包括MEMS器件和衬底，至少留下MEMS器件的敏感部分，并暴露衬底的开口。 屏障元件位于围绕敏感部分的区域中，以实现用于MEMS器件的保护结构，使得敏感部分是自由的。
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19.发明申请SUBSTRATE-LEVEL ASSEMBLY FOR AN INTEGRATED DEVICE, MANUFACTURING PROCESS THEREOF AND RELATED INTEGRATED DEVICE 有权集成器件的基板级组件及其制造工艺及相关的集成器件公开(公告)号：US20080315333A1
公开(公告)日：2008-12-25
申请号：US12102709
申请日：2008-04-14
申请人： Chantal Combi , Benedetto Vigna , Federico Giovanni Ziglioli , Lorenzo Baldo , Manuela Magugliani , Ernesto Lasalandra , Caterina Riva
发明人： Chantal Combi , Benedetto Vigna , Federico Giovanni Ziglioli , Lorenzo Baldo , Manuela Magugliani , Ernesto Lasalandra , Caterina Riva
CPC分类号： B81B7/0061 , B81B7/02 , B81B2201/0235 , B81B2201/0264 , B81C1/0023 , H01L2224/48091 , H01L2224/73265 , H01L2924/1461 , H01L2924/3025 , H04R1/04 , H04R19/005 , H01L2924/00014 , H01L2924/00
摘要： A substrate-level assembly having a device substrate of semiconductor material with a top face and housing a first integrated device, including a buried cavity formed within the device substrate, and with a membrane suspended over the buried cavity in the proximity of the top face. A capping substrate is coupled to the device substrate above the top face so as to cover the first integrated device in such a manner that a first empty space is provided above the membrane. Electrical-contact elements electrically connect the integrated device with the outside of the substrate-level assembly. In one embodiment, the device substrate integrates at least a further integrated device provided with a respective membrane, and a further empty space, fluidically isolated from the first empty space, is provided over the respective membrane of the further integrated device.
摘要翻译： 一种基板级组件，其具有具有顶面的半导体材料的器件基板并且容纳第一集成器件，所述第一集成器件包括形成在所述器件衬底内的掩埋腔，以及悬挂在所述顶面附近的所述掩埋腔上的膜。 封盖衬底在顶面上方连接到器件衬底，以便以这样的方式覆盖第一集成器件，使得在膜上方设置第一空白空间。 电接触元件将集成器件与衬底级组件的外部电连接。 在一个实施例中，器件衬底集成了至少一个设置有相应膜的集成器件，并且在另一个集成器件的相应膜上提供了与第一空白空间流体隔离的另外的空白空间。
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公开(公告)号：US20080261345A1
公开(公告)日：2008-10-23
申请号：US12163110
申请日：2008-06-27
IPC分类号： H01L21/00
CPC分类号： G01L9/0073 , G01L9/0045
摘要： Method for manufacturing a semiconductor pressure sensor, wherein, in a silicon substrate, trenches are dug and delimit walls; a closing layer is epitaxially grown, that closes the trenches at the top and forms a suspended membrane; a heat treatment is performed so as to cause migration of the silicon of the walls and to form a closed cavity underneath the suspended membrane; and structures are formed for transducing the deflection of the suspended membrane into electrical signals.
摘要翻译： 制造半导体压力传感器的方法，其中在硅衬底中，挖沟和界定壁; 闭合层外延生长，封闭顶部的沟槽并形成悬浮膜; 进行热处理以使壁的硅迁移并在悬浮膜下方形成封闭空腔; 并且形成用于将悬浮膜的偏转转换成电信号的结构。
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