Circular scanning technique for large area imaging

    公开(公告)号:US10735674B2

    公开(公告)日:2020-08-04

    申请号:US16322296

    申请日:2017-09-19

    Abstract: A system for generating an image of a region of interest (ROI) of a target object, the system including a camera, a target stage configured to receive the target object, the target stage configured to provide a translational movement and a rotational movement of the target object, and a controller. The controller is configured to control the camera and target stage to iteratively shift the target along scan trajectories of sample locations to capture images of each of a plurality of concentric rings and sub-rings of a predefined radial pitch over the ROI, the sample locations represented by polar coordinates defining sectors of each of the sub-rings. The controller is further configured to extract super resolution (SR) pixels from the images to reconstruct an SR image of each of the rings in the polar coordinates, and project the SR images into Cartesian coordinate images.

    Sensor for Simultaneous Measurement of Thickness and Lateral Position of a Transparent Object
    20.
    发明申请
    Sensor for Simultaneous Measurement of Thickness and Lateral Position of a Transparent Object 有权
    用于同时测量透明物体的厚度和横向位置的传感器

    公开(公告)号:US20130278756A1

    公开(公告)日:2013-10-24

    申请号:US13788507

    申请日:2013-03-07

    CPC classification number: G01C11/02 G01B11/028 G01B11/06

    Abstract: System for measuring thickness and lateral position of a transparent object. The system includes a camera having a sensor for receiving light, the camera including an objective lens for focusing on an object plane and having an optical axis and a field of view. A source of light is provided to illuminate a surface having variations in reflected light intensity. The surface is spaced apart from the objective lens and disposed at an angle with respect to the optical axis of the objective lens. A transparent object disposed fully or partially between the objective lens and the surface will shift the position of the object plane, the shift in object plane being proportional to the thickness of the object, and the transparent object, when partially inserted between the objective lens and the surface, will focus a fraction of the light on a lower plane, this fraction of light being proportional to the fraction of the lens field of view occupied by the transparent object that is related to lateral position.

    Abstract translation: 用于测量透明物体的厚度和横向位置的系统。 该系统包括具有用于接收光的传感器的相机,该相机包括用于聚焦在物平面上并具有光轴和视场的物镜。 提供光源以照射具有反射光强度变化的表面。 该表面与物镜间隔开并且相对于物镜的光轴以一定角度设置。 在物镜和表面之间完全或部分地设置的透明物体将使物平面的位置移动,物平面中的偏移与物体的厚度成比例,以及透明物体,当部分地插入在物镜和 该表面将使一小部分光聚焦在下平面上,这部分光与透明物体所占据的与横向位置相关的视场视野的分数成正比。

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