公开(公告)号：US08368019B2

公开(公告)日：2013-02-05

申请号：US13247979

申请日：2011-09-28

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/10

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

摘要： A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

摘要翻译： 粒子束系统包括用于产生一次粒子束13的粒子束源5，用于将一次粒子束13聚焦在物平面23中的物镜19; 粒子检测器17; 以及布置在物镜和物平面之间的X射线检测器47。 X射线检测器包括多个半导体检测器，每个半导体检测器具有朝向物体平面的检测表面51。 膜位于物体平面和半导体检测器的检测表面之间，其中不同的半导体检测器具有位于前面的不同的膜，不同的膜相对于二次电子透射率不同。

公开(公告)号：US20110031215A1

公开(公告)日：2011-02-10

申请号：US12806111

申请日：2010-08-05

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： G01N23/083 ,  G01N23/00 ,  C23F1/00

CPC分类号： G01N23/2252 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24465 ,  H01J2237/2448

摘要： An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

摘要翻译： 检查方法包括将颗粒束聚焦到样品上; 操作位于样品附近的至少一个检测器; 将由所述至少一个检测器产生的检测信号分配给不同的强度间隔; 基于分配给所述强度间隔的检测信号，确定与入射到所述检测器上的电子有关的至少一个第一信号分量; 以及基于分配给所述强度间隔的检测信号，确定与入射在所述检测器上的X射线有关的至少一个第二信号分量。

公开(公告)号：US08450215B2

公开(公告)日：2013-05-28

申请号：US12806111

申请日：2010-08-05

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： H01L21/302 ,  H01L21/461

CPC分类号： G01N23/2252 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24465 ,  H01J2237/2448

摘要： An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

摘要翻译： 检查方法包括将颗粒束聚焦到样品上; 操作位于样品附近的至少一个检测器; 将由所述至少一个检测器产生的检测信号分配给不同的强度间隔; 基于分配给所述强度间隔的检测信号，确定与入射到所述检测器上的电子有关的至少一个第一信号分量; 以及基于分配给所述强度间隔的检测信号，确定与入射在所述检测器上的X射线有关的至少一个第二信号分量。

公开(公告)号：US20120025078A1

公开(公告)日：2012-02-02

申请号：US13247995

申请日：2011-09-28

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： G01T1/24 ,  H01J37/26

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

摘要： A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

公开(公告)号：US08064714B2

公开(公告)日：2011-11-22

申请号：US11808283

申请日：2007-06-08

申请人： Michael Albiez

发明人： Michael Albiez

IPC分类号： G06K9/40

CPC分类号： G06K9/0014 ,  G06T7/11 ,  G06T7/12 ,  G06T7/136 ,  G06T2207/10056 ,  G06T2207/20221 ,  G06T2207/30024

摘要： A method for binarizing a digital gray value image includes generating a binary edge image from the gray value image so as to cause existing edges to be determined as line areas around an edge; and, thereafter, computing a mean value of gray values of the gray value image in all regions which correspond to the line areas around an edge of the binary edge image with the mean value defining a threshold value for the generation of a binarized gray value image.

摘要翻译： 二值化数字灰度图像的方法包括从灰度值图像生成二进制边缘图像，以使现有边缘被确定为边缘周围的线区域; 然后，计算与二值边缘图像的边缘周围的线区域相对应的所有区域中的灰度值图像的灰度值的平均值，其中平均值定义用于生成二值化灰度值图像的阈值 。

公开(公告)号：US20100102223A1

公开(公告)日：2010-04-29

申请号：US12460166

申请日：2009-07-14

申请人： Michael Albiez ,  Wolfram Buhler

发明人： Michael Albiez ,  Wolfram Buhler

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/026 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/0044 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2809

摘要： A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.

摘要翻译： 用于处理物体的表面的方法和特别适用于执行该方法的装置提供了借助于粒子束来检查物体的表面以抵消物体上的电荷累积的方法。 供应气体以将电荷从表面输送和/或中和。

公开(公告)号：US20080044095A1

公开(公告)日：2008-02-21

申请号：US11808283

申请日：2007-06-08

申请人： Michael Albiez

发明人： Michael Albiez

IPC分类号： G06K9/72

CPC分类号： G06K9/0014 ,  G06T7/11 ,  G06T7/12 ,  G06T7/136 ,  G06T2207/10056 ,  G06T2207/20221 ,  G06T2207/30024

摘要： A method for binarizing a digital gray value image includes generating a binary edge image from the gray value image so as to cause existing edges to be determined as line areas around an edge; and, thereafter, computing a mean value of gray values of the gray value image in all regions which correspond to the line areas around an edge of the binary edge image with the mean value defining a threshold value for the generation of a binarized gray value image.

摘要翻译： 二值化数字灰度图像的方法包括从灰度值图像生成二进制边缘图像，以使现有边缘被确定为边缘周围的线区域; 然后，计算与二值边缘图像的边缘周围的线区域相对应的所有区域中的灰度值图像的灰度值的平均值，其中平均值定义用于生成二值化灰度值图像的阈值 。

公开(公告)号：US08481933B2

公开(公告)日：2013-07-09

申请号：US12460166

申请日：2009-07-14

申请人： Michael Albiez ,  Wolfram Buhler

发明人： Michael Albiez ,  Wolfram Buhler

IPC分类号： H01J37/26

CPC分类号： G01N23/2251 ,  H01J37/026 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/0044 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2809

摘要： A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.

摘要翻译： 用于处理物体的表面的方法和特别适用于执行该方法的装置提供了借助于粒子束来检查物体的表面以抵消物体上的电荷累积的方法。 供应气体以将电荷从表面输送和/或中和。

公开(公告)号：US20120025077A1

公开(公告)日：2012-02-02

申请号：US13247979

申请日：2011-09-28

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

摘要： A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

摘要翻译： 粒子束系统包括用于产生一次粒子束13的粒子束源5，用于将一次粒子束13聚焦在物平面23中的物镜19; 粒子检测器17; 以及布置在物镜和物平面之间的X射线检测器47。 X射线检测器包括多个半导体检测器，每个半导体检测器具有朝向物体平面的检测表面51。 膜位于物体平面和半导体检测器的检测表面之间，其中不同的半导体检测器具有位于前面的不同的膜，不同的膜相对于二次电子透射率不同。