公开(公告)号：US20110049361A1

公开(公告)日：2011-03-03

申请号：US12804507

申请日：2010-07-22

申请人： Dirk Preikszas ,  Michael Albiez

发明人： Dirk Preikszas ,  Michael Albiez

IPC分类号： G01N23/00 ,  G21K1/08

CPC分类号： H01J37/09 ,  H01J37/15 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0455 ,  H01J2237/0492 ,  H01J2237/14 ,  H01J2237/2002 ,  H01J2237/26 ,  H01J2237/31749

摘要： A particle beam apparatus includes a first aperture unit having an adjustable aperture opening. The particle beam apparatus may include a first condenser lens having a first pole shoe and a second pole shoe. Both the first pole shoe and the second pole shoe may be adjustable relative to a second aperture unit independently of each other. The second aperture unit may be designed as a pressure stage aperture separating a first area having a vacuum at a first pressure, and a second area having a vacuum at a second pressure. Additionally, a method for adjusting a beam current in a particle beam apparatus is provided.

摘要翻译： 粒子束装置包括具有可调开口开口的第一孔单元。 粒子束装置可以包括具有第一极靴和第二极靴的第一聚光透镜。 第一极靴和第二极靴都可以相对于第二孔单元彼此独立地调节。 第二孔单元可以被设计为在第一压力下分离具有真空的第一区域和在第二压力下具有真空的第二区域的压力级孔。 此外，提供了一种用于调整粒子束装置中的束电流的方法。

公开(公告)号：US20080013853A1

公开(公告)日：2008-01-17

申请号：US11808282

申请日：2007-06-08

申请人： Michael Albiez ,  Armin Hayn ,  Owain Evans

发明人： Michael Albiez ,  Armin Hayn ,  Owain Evans

IPC分类号： G06K9/40

CPC分类号： G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T2207/20012 ,  G06T2207/20032

摘要： A method for processing a digital gray value image includes the steps of: generating a binary edge image from the gray value image so that edges present in the gray value image are determined as line areas around the edges; applying a sharpness algorithm in the gray value image within regions which correspond to the line areas; and, carrying out a smoothing process in the gray value image within regions which lie outside of the line areas so that an additional smoothed, sharpened gray value image is generated.

摘要翻译： 一种处理数字灰度值图像的方法包括以下步骤：从灰度图像生成二进制边缘图像，使得存在于灰度图像中的边缘被确定为边缘周围的线区域; 在与行区域对应的区域内的灰度图像中应用锐度算法; 并且在位于行区域之外的区域内的灰度值图像中进行平滑处理，从而生成附加的平滑化，锐化的灰度值图像。

公开(公告)号：US08131102B2

公开(公告)日：2012-03-06

申请号：US11808282

申请日：2007-06-08

申请人： Michael Albiez ,  Armin Hayn ,  Owain Evans

发明人： Michael Albiez ,  Armin Hayn ,  Owain Evans

IPC分类号： G06K9/40

CPC分类号： G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T2207/20012 ,  G06T2207/20032

摘要： A method for processing a digital gray value image includes the steps of: generating a binary edge image from the gray value image so that edges present in the gray value image are determined as line areas around the edges; applying a sharpness algorithm in the gray value image within regions which correspond to the line areas; and, carrying out a smoothing process in the gray value image within regions which lie outside of the line areas so that an additional smoothed, sharpened gray value image is generated.

摘要翻译： 一种处理数字灰度值图像的方法包括以下步骤：从灰度图像生成二进制边缘图像，使得存在于灰度图像中的边缘被确定为边缘周围的线区域; 在与行区域对应的区域内的灰度图像中应用锐度算法; 并且在位于行区域之外的区域内的灰度值图像中进行平滑处理，从而生成附加的平滑化，锐化的灰度值图像。

公开(公告)号：US07888643B2

公开(公告)日：2011-02-15

申请号：US12222087

申请日：2008-08-01

申请人： Michael Albiez

发明人： Michael Albiez

IPC分类号： G01N23/00

CPC分类号： H01J37/20 ,  H01J37/21 ,  H01J37/22 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/2482

摘要： The invention relates to a focusing and positioning ancillary device for a particle-optical scanning microscope, a particle-optical scanning microscope including a corresponding positioning aid, and a method for focusing and positioning an object in a particle-optical scanning microscope. The focusing and positioning ancillary device includes an illuminating device, a camera, a display and a control unit. The illuminating device produces a collimated or focused light beam at an angle to the particle-optical beam axis which intersects the particle-optical beam axis at a predetermined position. The camera is sensitive to the wavelength of the light beam and records an image of the object, which is positioned on the object table, at a second angle to the particle-optical beam axis. The control unit produces an image captured by the camera on the display together with a marking which indicates the position of the particle-optical beam axis in the image.

摘要翻译： 本发明涉及一种用于粒子光学扫描显微镜的聚焦和定位辅助装置，包括相应的定位辅助装置的粒子光学扫描显微镜以及用于在物镜光学扫描显微镜中聚焦和定位物体的方法。 聚焦定位辅助装置包括照明装置，相机，显示器和控制单元。 照明装置产生与在预定位置处与颗粒光束轴线相交的粒子 - 光束轴成一定角度的准直或聚焦的光束。 相机对光束的波长敏感，并以与粒子光束轴成第二个角度记录位于物体台上的物体的图像。 控制单元产生由相机在显示器上拍摄的图像以及指示图像中的粒子 - 光束轴的位置的标记。

公开(公告)号：US20100200750A1

公开(公告)日：2010-08-12

申请号：US12658476

申请日：2010-02-08

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： H01J37/26 ,  H01J37/28 ,  H01J37/244 ,  H01J37/10

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

摘要： A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

摘要翻译： 粒子束系统包括用于产生一次粒子束13的粒子束源5，用于将一次粒子束13聚焦在物平面23中的物镜19; 粒子检测器17; 以及布置在物镜和物平面之间的X射线检测器47。 X射线检测器包括多个半导体检测器，每个半导体检测器具有朝向物体平面的检测表面51。 膜位于物体平面和半导体检测器的检测表面之间，其中不同的半导体检测器具有位于前面的不同的膜，不同的膜相对于二次电子透射率不同。

公开(公告)号：US20080315120A1

公开(公告)日：2008-12-25

申请号：US12222087

申请日：2008-08-01

申请人： Michael Albiez

发明人： Michael Albiez

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： H01J37/20 ,  H01J37/21 ,  H01J37/22 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/2482

摘要： The invention relates to a focusing and positioning ancillary device for a particle-optical scanning microscope, a particle-optical scanning microscope including a corresponding positioning aid, and a method for focusing and positioning an object in a particle-optical scanning microscope. The focusing and positioning ancillary device includes an illuminating device, a camera, a display and a control unit. The illuminating device produces a collimated or focused light beam at an angle to the particle-optical beam axis which intersects the particle-optical beam axis at a predetermined position. The camera is sensitive to the wavelength of the light beam and records an image of the object, which is positioned on the object table, at a second angle to the particle-optical beam axis. The control unit produces an image captured by the camera on the display together with a marking which indicates the position of the particle-optical beam axis in the image.

摘要翻译： 本发明涉及一种用于粒子光学扫描显微镜的聚焦和定位辅助装置，包括相应的定位辅助装置的粒子光学扫描显微镜以及用于在物镜光学扫描显微镜中聚焦和定位物体的方法。 聚焦定位辅助装置包括照明装置，相机，显示器和控制单元。 照明装置产生与在预定位置处与颗粒光束轴线相交的粒子 - 光束轴成一定角度的准直或聚焦的光束。 相机对光束的波长敏感，并以与粒子光束轴成第二个角度记录位于物体台上的物体的图像。 控制单元产生由相机在显示器上拍摄的图像以及指示图像中的粒子 - 光束轴的位置的标记。

公开(公告)号：US11139140B2

公开(公告)日：2021-10-05

申请号：US12804507

申请日：2010-07-22

申请人： Dirk Preikszas ,  Michael Albiez

发明人： Dirk Preikszas ,  Michael Albiez

IPC分类号： H01J37/09 ,  H01J37/141 ,  H01J37/15 ,  H01J37/28 ,  H01J37/26

摘要： A particle beam apparatus includes a first aperture unit having an adjustable aperture opening. The particle beam apparatus may include a first condenser lens having a first pole shoe and a second pole shoe. Both the first pole shoe and the second pole shoe may be adjustable relative to a second aperture unit independently of each other. The second aperture unit may be designed as a pressure stage aperture separating a first area having a vacuum at a first pressure, and a second area having a vacuum at a second pressure. Additionally, a method for adjusting a beam current in a particle beam apparatus is provided.

公开(公告)号：US08368020B2

公开(公告)日：2013-02-05

申请号：US13247995

申请日：2011-09-28

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/10

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

摘要： A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

公开(公告)号：US08368019B2

公开(公告)日：2013-02-05

申请号：US13247979

申请日：2011-09-28

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/10

CPC分类号： H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

摘要： A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

摘要翻译： 粒子束系统包括用于产生一次粒子束13的粒子束源5，用于将一次粒子束13聚焦在物平面23中的物镜19; 粒子检测器17; 以及布置在物镜和物平面之间的X射线检测器47。 X射线检测器包括多个半导体检测器，每个半导体检测器具有朝向物体平面的检测表面51。 膜位于物体平面和半导体检测器的检测表面之间，其中不同的半导体检测器具有位于前面的不同的膜，不同的膜相对于二次电子透射率不同。

公开(公告)号：US20110031215A1

公开(公告)日：2011-02-10

申请号：US12806111

申请日：2010-08-05

申请人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

发明人： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC分类号： G01N23/083 ,  G01N23/00 ,  C23F1/00

CPC分类号： G01N23/2252 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24465 ,  H01J2237/2448

摘要： An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

摘要翻译： 检查方法包括将颗粒束聚焦到样品上; 操作位于样品附近的至少一个检测器; 将由所述至少一个检测器产生的检测信号分配给不同的强度间隔; 基于分配给所述强度间隔的检测信号，确定与入射到所述检测器上的电子有关的至少一个第一信号分量; 以及基于分配给所述强度间隔的检测信号，确定与入射在所述检测器上的X射线有关的至少一个第二信号分量。