公开(公告)号：US20080067891A1

公开(公告)日：2008-03-20

申请号：US11902184

申请日：2007-09-19

申请人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Takashi Matsuda ,  Shogo Inoue ,  Michio Miura ,  Satoru Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H01L41/08

CPC分类号： H03H9/02559 ,  H03H9/0057 ,  H03H9/02574 ,  H03H9/02929 ,  H03H9/14538 ,  H03H9/6469

摘要： An acoustic wave device includes a piezoelectric substrate, a first dielectric film formed on the piezoelectric substrate, and electrodes that are provided on the first dielectric film and excite an acoustic wave, the electrodes including electrode fingers. At least a part of the first dielectric film is cut out between adjacent electrode fingers among the electrode fingers.

摘要翻译： 声波装置包括压电基板，形成在压电基板上的第一电介质膜，以及设置在第一电介质膜上并激发声波的电极，电极包括电极指。 在电极指中相邻的电极指之间切出第一电介质膜的至少一部分。

公开(公告)号：US20070278898A1

公开(公告)日：2007-12-06

申请号：US11806988

申请日：2007-06-05

申请人： Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/25

CPC分类号： H03H9/0222 ,  H03H9/02834 ,  H03H9/02929

摘要： An acoustic boundary wave device includes a first medium having piezoelectricity, electrodes that are provided on the first medium and excite acoustic waves, a second medium made of a material different from the first medium and provided on the first medium so as to cover the electrodes, and a third medium that has a heat conductivity higher than that of the second medium and is provided so as to contact an upper surface of the second medium and at least a part of side surfaces of the second medium.

摘要翻译： 声界波设备包括具有压电性的第一介质，设置在第一介质上的电极和激发声波，由与第一介质不同的材料制成的第二介质，并设置在第一介质上以覆盖电极， 以及具有比第二介质的热导率高的第三介质，并且设置成与第二介质的上表面和第二介质的至少一部分侧表面接触。

公开(公告)号：US07573178B2

公开(公告)日：2009-08-11

申请号：US11898474

申请日：2007-09-12

申请人： Shogo Inoue ,  Hiroyoshi Yasuda ,  Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Shogo Inoue ,  Hiroyoshi Yasuda ,  Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H01L41/08

CPC分类号： H03H9/02559 ,  H03H9/0222 ,  H03H9/02574

摘要： An acoustic wave device includes a piezoelectric substrate, comb electrodes formed above the piezoelectric substrate, and a first dielectric film provided so as to cover the comb electrodes, the first dielectric film having empty spaces associated with fingers of the comb electrodes.

摘要翻译： 声波装置包括压电基板，形成在压电基板上方的梳形电极和设置成覆盖梳状电极的第一电介质膜，第一电介质膜具有与梳状电极的指状物相关联的空白空间。

公开(公告)号：US07466061B2

公开(公告)日：2008-12-16

申请号：US11806988

申请日：2007-06-05

申请人： Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/25

CPC分类号： H03H9/0222 ,  H03H9/02834 ,  H03H9/02929

摘要： An acoustic boundary wave device includes a first medium having piezoelectricity, electrodes that are provided on the first medium and excite acoustic waves, a second medium made of a material different from the first medium and provided on the first medium so as to cover the electrodes, and a third medium that has a heat conductivity higher than that of the second medium and is provided so as to contact an upper surface of the second medium and at least a part of side surfaces of the second medium.

摘要翻译： 声界波设备包括具有压电性的第一介质，设置在第一介质上的电极和激发声波，由与第一介质不同的材料制成的第二介质，并设置在第一介质上以覆盖电极， 以及具有比第二介质的热导率高的第三介质，并且设置成与第二介质的上表面和第二介质的至少一部分侧表面接触。

公开(公告)号：US20070229192A1

公开(公告)日：2007-10-04

申请号：US11711893

申请日：2007-02-28

申请人： Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

发明人： Michio Miura ,  Satoru Matsuda ,  Takashi Matsuda ,  Masanori Ueda ,  Seiichi Mitobe

IPC分类号： H03H9/00

CPC分类号： H03H9/0222 ,  H03H9/02559 ,  H03H9/14541 ,  H03H9/6483

摘要： An elastic boundary wave device includes a LiNbO3 substrate, an electrode exciting an elastic wave and provided on the substrate, and a silicon oxide film provided on the substrate to cover the electrode, and parameters of the elastic boundary wave device have any one of ranges, where “θ” is a rotation Y cut angle of the substrate, “a” is a ratio of copper density with respect to a density of a material used as the electrode, “λ” is a wavelength of the elastic wave excited by the electrode, “h” is a film thickness of the electrode, “H” is a thickness of the silicon oxide film.

摘要翻译： 弹性边界波装置包括LiNbO 3 3衬底，激发弹性波并设置在衬底上的电极和设置在衬底上以覆盖电极的氧化硅膜以及弹性边界的参数 波长装置具有任何一个范围，其中“θ”是基板的旋转Y切割角，“a”是铜密度相对于用作电极的材料的密度的比率，“λ”是波长 由电极激发的弹性波，“h”是电极的膜厚，“H”是氧化硅膜的厚度。

公开(公告)号：US20090212659A1

公开(公告)日：2009-08-27

申请号：US12431427

申请日：2009-04-28

申请人： Satoru MATSUDA ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

发明人： Satoru MATSUDA ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H01L41/04

CPC分类号： H03H9/0222 ,  H03H9/02818

摘要： An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

摘要翻译： 弹性边界波装置包括具有压电性的第一介质，激发弹性波并设置在第一介质上的电极，由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质，以及 设在第二介质上的吸音部。

公开(公告)号：US20070210676A1

公开(公告)日：2007-09-13

申请号：US11714157

申请日：2007-03-06

申请人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

发明人： Satoru Matsuda ,  Michio Miura ,  Takashi Matsuda ,  Masanori Ueda

IPC分类号： H01L41/00

CPC分类号： H03H9/0222 ,  H03H9/02818

摘要： An elastic boundary wave device includes a first medium with piezoelectricity, an electrode exciting an elastic wave and provided on the first medium, a second medium made of a different material from the first medium and provided on the first medium to cover the electrode, and a sound absorbing portion provided on the second medium.

摘要翻译： 弹性边界波装置包括具有压电性的第一介质，激发弹性波并设置在第一介质上的电极，由与第一介质不同的材料制成并设置在第一介质上以覆盖电极的第二介质，以及 设在第二介质上的吸音部。

公开(公告)号：US07331092B2

公开(公告)日：2008-02-19

申请号：US10806148

申请日：2004-03-23

申请人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda ,  Hideki Takagi

发明人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda ,  Hideki Takagi

IPC分类号： H04R17/10

CPC分类号： H03H3/08 ,  H03H9/02574 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49016 ,  Y10T29/49126

摘要： A method of manufacturing a surface acoustic device that has a surface acoustic wave filter including comb-like electrodes, electrode pads, and wiring patterns formed on a joined substrate produced by joining a piezoelectric substrate and a supporting substrate to each other. This method includes the steps of: activating at least one of the joining surfaces of the piezoelectric substrate and the supporting substrate; and joining the piezoelectric substrate and the supporting substrate in such a manner that the activated joining surfaces face each other.

摘要翻译： 一种表面声学装置的制造方法，其具有包括梳状电极，电极焊盘和布线图案的表面声波滤波器，所述梳状电极，电极焊盘和布线图案形成在通过将压电基板和支撑基板彼此接合而制成的接合基板上。 该方法包括以下步骤：激活压电衬底和支撑衬底的至少一个接合表面; 以及使活化的接合面彼此面对的方式接合压电基板和支撑基板。

公开(公告)号：US06933810B2

公开(公告)日：2005-08-23

申请号：US10724577

申请日：2003-12-01

申请人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda

发明人： Michio Miura ,  Takashi Matsuda ,  Yoshio Satoh ,  Masanori Ueda

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/64 ,  H03H9/72 ,  H03H9/25

CPC分类号： H03H9/02834 ,  H03H9/02559

摘要： A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes are formed, and a second surface, and a support substrate joined to the second surface of the piezoelectric substrate. The piezoelectric substrate is made of lithium, tantalate, and the support substrate is made of sapphire. The following expressions being satisfied: T/t 10  (2) where T is a thickness of the piezoelectric substrate, t is a thickness of the support substrate, and λ is a wavelength of a surface acoustic filter, propagated along the first surface of the piezoelectric substrate.

摘要翻译： 表面声波装置包括具有形成有梳状电极的第一表面和第二表面的压电基板和连接到压电基板的第二表面的支撑基板。 压电基板由钽酸锂制成，支撑基板由蓝宝石制成。 满足以下表达式：<？in-line-formula description =“In-line Formulas”end =“lead”？> T / t <1/3（1）<？in-line-formula description =“In- 行公式“end =”tail“？> <？in-line-formula description =”In-line Formulas“end =”lead“？> T / lambda> 10（2）<？in-line-formula description = 在线公式“end =”tail“？>其中T是压电基板的厚度，t是支撑基板的厚度，λ是表面声滤波器的波长，沿着压电的第一表面传播 基质。

公开(公告)号：US06903630B2

公开(公告)日：2005-06-07

申请号：US10437908

申请日：2003-05-15

申请人： Michio Miura ,  Masahiko Imai ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

发明人： Michio Miura ,  Masahiko Imai ,  Takashi Matsuda ,  Masanori Ueda ,  Osamu Ikata

IPC分类号： H03H9/25 ,  H03H9/64 ,  H03H9/72

CPC分类号： H03H9/6436 ,  H03H9/6483 ,  H03H9/725

摘要： A surface acoustic wave device includes multiple SAW resonators formed on a piezoelectric substrate and connected in a ladder arrangement, the piezoelectric substrate having a polarization inverted region on which either a series-arm resonator or a parallel-arm resonator is formed.

摘要翻译： 表面声波装置包括形成在压电基板上并以梯形布置连接的多个SAW谐振器，压电基板具有在其上形成有串联臂谐振器或并联臂谐振器的偏振反转区域。