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公开(公告)号：US20090218506A1
公开(公告)日：2009-09-03
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译： 从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。 束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。 因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级 电子束充分分离。 此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。 因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。
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公开(公告)号：USRE36610E
公开(公告)日：2000-03-14
申请号：US883957
申请日：1997-06-27
CPC分类号： F04D19/046 , F04B37/06
摘要： An evacuation apparatus and method using a turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port of the turbomolecular pump is disclosed. A heat exchanger is provided at the suction port side of the turbomolecular pump to freeze-trap gas molecules from being cooled by a helium refrigerator.The gate valve is disposed upstream of the heat exchanger and is provided in a suction pipe which extends between the vacuum vessel and the turbomolecular pump. In exhausting the vacuum vessel, the gate valve is opened and, in this state, the turbomolecular pump and the helium refrigerator are run. During regeneration, the gate valve is closed, the turbomolecular pump is run, and the heat exchanger is heated by means of a heater or by operation of the helium refrigator being suspended, thereby sublimating molecules freeze-trapped in the heat exchanger.
摘要翻译： 一种使用涡轮分子泵的排气装置和方法，该涡轮分子泵具有设置有多个转子叶片的转子和设置有多个定子叶片的间隔件，使得气体分子从吸入口被吸入， 公开了涡轮分子泵。 在涡轮分子泵的吸入口侧设置有热交换器，以将气体分子冷冻而不被氦制冷机冷却。 闸阀设置在热交换器的上游，并且设置在在真空容器和涡轮分子泵之间延伸的吸入管中。 在排空真空容器时，打开闸阀，在这种状态下运行涡轮分子泵和氦制冷机。 在再生期间，闸阀关闭，涡轮分子泵运行，并且热交换器通过加热器或通过悬浮的氦气回流器的操作被加热，从而升华分子被冻结在热交换器中。
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公开(公告)号：US08530869B2
公开(公告)日：2013-09-10
申请号：US13184047
申请日：2011-07-15
申请人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
发明人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70858 , G03F7/70916 , G03F7/70983 , H05G2/005
摘要： An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point.
摘要翻译： 极紫外光源装置包括将目标供给到真空室中的目标供给单元，将激光输出到真空室中的激光振荡器，通过反射从目标发射的极紫外光而向外部输出极紫外光的集光镜 通过在真空室中的等离子体发光点用激光照射等离子体，以及离子碎片去除单元，其至少一部分位于包括等离子体发光点的遮蔽区域中。
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公开(公告)号：US08067732B2
公开(公告)日：2011-11-29
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
IPC分类号： G01N23/00
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译： 从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。 束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。 因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级 电子束充分分离。 此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。 因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。
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公开(公告)号：US5875168A
公开(公告)日：1999-02-23
申请号：US891594
申请日：1997-07-11
申请人： Mikio Ogusu , Shinji Ohba , Hiroshi Sobukawa
发明人： Mikio Ogusu , Shinji Ohba , Hiroshi Sobukawa
CPC分类号： G11B17/057 , G11B33/08 , G11B7/08582
摘要： A first adjusting base made of a leaf spring material is supported on a holder in such a manner that the first adjusting base crosses the moving direction of the holder and is slightly pivotable about a first pivot axis which is parallel to a disk surface. A second adjusting base made of a leaf spring material is supported on the first adjusting base in such a manner that the second adjusting base crosses the first pivot axis and is slightly pivotable about a second pivot axis. The first and second adjusting bases are biased in a slightly pivoting direction by their own elasticity and, by turning screws which restrict the biasing, the first and second bases are pivoted to adjust the direction of an optical axis of a pickup head. Shaking of the pickup head is prevented and shock to the pickup head is absorbed by elasticity of the first and second adjusting bases whereby the device can be made compact and light.
摘要翻译： 由板簧材料制成的第一调节基座以这样的方式被支撑在保持器上，使得第一调节基座跨过保持器的移动方向，并且能够绕平行于盘表面的第一枢转轴线稍微地枢转。 由板簧材料制成的第二调节基座以这样的方式支撑在第一调节基座上，使得第二调节基座与第一枢转轴线相交并且可围绕第二枢转轴线稍微转动。 第一调节基座和第二调节基座通过其自身的弹性以稍微的枢转方向偏置，并且通过转动限制偏置的螺钉，第一和第二基座枢转以调节拾取头的光轴的方向。 防止拾取头的晃动，并且通过第一和第二调节基座的弹性来吸收对拾取头的冲击，由此可使装置紧凑且轻便。
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公开(公告)号：US5062271A
公开(公告)日：1991-11-05
申请号：US519377
申请日：1990-05-04
CPC分类号： F04D19/046 , F04B37/06 , Y10S417/901
摘要： An evacuation apparatus and method using a turbomolecular pump having a rotor provided with a plurality of rotor blades and a spacer provided with a plurality of stator blades so that gas molecules are sucked in from a suction port, compressed and discharged from an exhaust port of the turbomolecular pump is disclosed. A heat exchanger is provided at the suction port side of the turbomolecular pump to freeze-trap gas molecules from being cooled by a helium refrigerator.The gate valve is disposed upstream of the heat exchanger and is provided in a suction pipe which extends between the vacuum vessel and the turbomolecular pump. In exhausting the vacuum vessel, the gate valve is opened and, in this state, the turbomolecular pump and the helium refrigerator are run. During regeneration, the gate valve is closed, the turbomolecular pump is run, and the heat exchanger is heated by means of a heater or by operation of the helium refrigator being suspended, thereby sublimating molecules freeze-trapped in the heat exchanger.
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公开(公告)号：US08109744B2
公开(公告)日：2012-02-07
申请号：US12410780
申请日：2009-03-25
CPC分类号： F04D19/042 , F04D17/168 , F04D29/0513 , F04D29/28
摘要： An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, a main shaft for supporting the rotor blades, and a bearing and motor section having a motor for rotating the main shaft and a bearing mechanism for supporting the main shaft rotatably. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft.
摘要翻译： 无油涡轮真空泵能够将室内的气体从大气压降至高真空。 涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分，用于支撑转子叶片的主轴以及具有用于使主轴旋转的马达的轴承和马达部分以及用于 可旋转地支撑主轴。 气体轴承用作用于沿推力方向支撑主轴的轴承，在气体轴承的静止部分的两个表面上形成螺旋槽，并且具有螺旋槽的固定部分设置在上部旋转部分和 固定在主轴上的下部旋转部。
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公开(公告)号：US06382249B1
公开(公告)日：2002-05-07
申请号：US09671745
申请日：2000-09-29
IPC分类号： C23C1600
CPC分类号： F04D25/00 , C23C16/4412 , F04D17/168 , F04D19/046 , Y10T137/86139 , Y10T137/86163
摘要： A vacuum exhaust system comprising a vacuum chamber; means for introducing a gas into the vacuum chamber; a main pump for exhausting the vacuum chamber and reducing a pressure of the vacuum chamber to a desired pressure; an auxiliary pump disposed downstream from the main pump; and piping for connecting them, wherein an outer diameter of connecting piping as a connection between the main pump and the auxiliary pump is ½ inch (12.7 mm) or less; and a length of the connecting piping and capability of the auxiliary pump are combined so that a back pressure of the main pump becomes 5 Torr or more. This vacuum exhaust system can realize cost reduction through a saving in entire space, simplification of piping construction work, and so on.
摘要翻译： 一种真空排气系统，包括一个真空室; 用于将气体引入真空室的装置; 用于排出真空室并将真空室的压力降低到所需压力的主泵; 辅助泵设置在主泵的下游; 和用于连接它们的管道，其中作为主泵和辅助泵之间的连接的连接管的外径为1/2英寸（12.7mm）或更小; 并且连接管道的长度和辅助泵的能力被组合，使得主泵的背压变为5托或更大。 该真空排气系统可以通过节省整个空间实现成本降低，简化管道施工工作等。
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19.发明授权Liquid delivery device, method of controlling such liquid delivery device, and liquid delivery pump 失效液体输送装置，控制这种液体输送装置的方法和液体输送泵
公开(公告)号：US6092994A
公开(公告)日：2000-07-25
申请号：US14992
申请日：1998-01-28
申请人： Shigekazu Yamamoto , Tetsuma Ikegami , Hiroshi Sobukawa , Shun-ichi Aiyoshizawa , Toshiharu Nakazawa , Yoshinori Ojima
发明人： Shigekazu Yamamoto , Tetsuma Ikegami , Hiroshi Sobukawa , Shun-ichi Aiyoshizawa , Toshiharu Nakazawa , Yoshinori Ojima
IPC分类号： F04C2/16 , F04C15/00 , F04D3/02 , F04D13/06 , F04D15/00 , F04D29/04 , F04D29/048 , F17D1/14 , H02K7/09 , H02K7/14 , H02K29/00 , H02P6/22 , F04B23/10 , F01C1/16
CPC分类号： F04D29/048 , F04D13/0646 , F04D15/0066 , F04D3/02
摘要： A screw pump includes a casing having inlet and outlet ports and a pump rotor rotatably mounted in the casing and having screw threads communicating with said inlet and outlet ports. The pump rotor is rotated by a reversible speed-controllable motor, typically a DC brushless motor, mounted in the casing to deliver a liquid such as a chemical solution from the inlet port through a liquid passage defined by the screw threads to the outlet port.
摘要翻译： 螺杆泵包括具有入口和出口的壳体和可转动地安装在壳体中的泵转子，并且具有与所述入口和出口连通的螺纹。 泵转子通过安装在壳体中的可逆速度可控电动机（通常为DC无刷电动机）旋转，以将来自入口的液体（例如化学溶液）通过由螺纹限定的液体通道输出到出口。
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公开(公告)号：US6002659A
公开(公告)日：1999-12-14
申请号：US891219
申请日：1997-07-10
申请人： Mikio Ogusu , Shinji Ohba , Hiroshi Sobukawa
发明人： Mikio Ogusu , Shinji Ohba , Hiroshi Sobukawa
IPC分类号： G11B17/03 , G11B17/035 , G11B17/04 , G11B17/043 , G11B25/04 , G11B33/02
CPC分类号： G11B17/043
摘要： A movable guide for receiving a caddy is provided movably in the loading and unloading directions on a main chassis. The movable guide is moved by a drive mechanism from an eject position to a disk drive position. An arrangement is made so that by an action of front and rear guide pins engaged in front and rear cam slits of the main chassis, when the movable guide is at the eject position, a turntable of a traverse unit disposed below the main chassis is spaced by a predetermined distance from a disk and, as the movable guide is moved in the loading direction, approaches gradually to the disk and, when the movable guide reaches the disk drive position, the turntable is attracted to the disk. The turntable approaches the disk upwardly relatively from beneath the disk and is attracted smoothly to the disk by a series of continuous operation.
摘要翻译： 在主底盘上沿装载和卸载方向可移动地设置有用于接收球童的活动导轨。 可动引导件通过驱动机构从排出位置移动到盘驱动位置。 进行这样的布置，使得通过与主底盘的前凸轮槽和后凸轮槽啮合的前后导向销的作用，当可移动导向件处于排出位置时，设置在主底架下方的横动单元的转台间隔开 并且当可移动导向装置在装载方向上移动时，其逐渐靠近盘片，并且当可移动导向件到达盘片驱动位置时，转盘被吸引到盘片上。 转盘从盘下方向上靠近盘，并通过一系列连续操作平滑地吸引到盘上。
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