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公开(公告)号：US08637821B2
公开(公告)日：2014-01-28
申请号：US13168415
申请日：2011-06-24
Applicant: Bart Buijsse , Peter Christiaan Tiemeijer
Inventor： Bart Buijsse , Peter Christiaan Tiemeijer
CPC classification number: H01J37/263 , H01J37/09 , H01J2237/043 , H01J2237/223 , H01J2237/2614 , H01J2237/2802
Abstract: The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.
Abstract translation: 本发明涉及一种放置在TEM衍射平面中的阻挡构件。 它类似于用于单边带成像的刀刃，但仅阻挡在小角度偏转的电子。 结果，根据本发明的TEM的对比度传递函数将等于低频下的单边带显微镜的对比度传递函数，而与正常显微镜在低频下相同。 优选地，阻挡构件阻挡的最高频率使得没有阻挡构件的显微镜将显示为0.5的CTF。
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公开(公告)号：US20130062520A1
公开(公告)日：2013-03-14
申请号：US13446908
申请日：2012-04-13
Applicant: Alexander Henstra , Maarten Bischoff , Uwe Luecken , Peter Christiaan Tiemeijer
Inventor： Alexander Henstra , Maarten Bischoff , Uwe Luecken , Peter Christiaan Tiemeijer
CPC classification number: H01J37/26 , H01J37/153 , H01J2237/1532
Abstract: A charged particle apparatus is equipped with a third stigmator positioned between the objective lens and a detector system, as a result of which a third degree of freedom is created for reducing the linear distortion.Further, a method of using said three stigmators, comprises exciting the first stigmator to reduce astigmatism when imaging the sample, exciting the second stigmator to reduce astigmatism when imaging the diffraction plane, and exciting the third stigmator to reduce the linear distortion.
Abstract translation: 带电粒子装置配备有位于物镜和检测器系统之间的第三标示器，结果为了减少线性失真产生了第三自由度。 此外，使用所述三个标记器的方法包括：激光所述第一标示器以在对所述样品进行成像时减少散光，激励所述第二标示器以在对所述衍射平面进行成像时减少散光，以及激励所述第三施放器以减少所述线性失真。
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公开(公告)号：US20110315876A1
公开(公告)日：2011-12-29
申请号：US13168415
申请日：2011-06-24
Applicant: Bart Buijsse , Peter Christiaan Tiemeijer
Inventor： Bart Buijsse , Peter Christiaan Tiemeijer
IPC: H01J37/295
CPC classification number: H01J37/263 , H01J37/09 , H01J2237/043 , H01J2237/223 , H01J2237/2614 , H01J2237/2802
Abstract: The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.
Abstract translation: 本发明涉及一种放置在TEM衍射平面中的阻挡构件。 它类似于用于单边带成像的刀刃，但仅阻挡在小角度偏转的电子。 结果，根据本发明的TEM的对比度传递函数将等于低频下的单边带显微镜的对比度传递函数，而与正常显微镜在低频下相同。 优选地，阻挡构件阻挡的最高频率使得没有阻挡构件的显微镜将显示为0.5的CTF。
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公开(公告)号：US08859966B2
公开(公告)日：2014-10-14
申请号：US13106726
申请日：2011-05-12
Applicant: Peter Christiaan Tiemeijer , Bert Henning Freitag , Sorin Lazar
Inventor： Peter Christiaan Tiemeijer , Bert Henning Freitag , Sorin Lazar
CPC classification number: H01J37/05 , H01J37/28 , H01J2237/057 , H01J2237/2802 , H01J2237/2804
Abstract: The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.
Abstract translation: 本发明提供了多个检测器，其检测已经通过样品的电子。 检测器优选在电子通过通过根据其能量分离电子的棱镜之后检测电子。 不同能量范围的电子然后由不同的检测器检测，优选地，至少一个检测器测量当电子通过样品时由电子损失的能量。 本发明的一个实施例为核心损耗电子提供EELS，同时从低损耗电子提供亮场STEM信号。
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Patent Agency Ranking
公开(公告)号：US08405027B2
公开(公告)日：2013-03-26
申请号：US13182992
申请日：2011-07-14
Applicant: Sorin Lazar , Bert Henning Freitag , Peter Christiaan Tiemeijer
Inventor： Sorin Lazar , Bert Henning Freitag , Peter Christiaan Tiemeijer
IPC: G01N23/04
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/1534 , H01J2237/24465 , H01J2237/24485 , H01J2237/2802
Abstract: A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the resolution of the microscope and is positioned in the real image plane, which provides improved contrast, particularly for light elements.
Abstract translation: 扫描共聚焦透射电子显微镜包括在样品下方的引导偏转器和校正器。 显微镜使用优选地显着大于显微镜的分辨率的检测器，并且位于实像平面中，其提供改善的对比度，特别是对于光元件。
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16.发明申请Method for Centering an Optical Element in a TEM Comprising a Contrast Enhancing Element 有权在包含对比增强元件的TEM中对准光学元件的方法公开(公告)号：US20120199756A1
公开(公告)日：2012-08-09
申请号：US13367251
申请日：2012-02-06
Applicant: Bart Buijsse , Peter Christiaan Tiemeijer , Martinus Petrus Maria Bierhoff
IPC: H01J3/26
CPC classification number: H01J37/26 , H01J37/265 , H01J2237/1501 , H01J2237/2614
Abstract: A method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM) is disclosed. The TEM is equipped with an objective lens for guiding a beam of electrons to a sample, a diffraction plane in which at least a beam of unscattered electrons is focused and a structure to enhance the Contrast Transfer Function (CTF) which is situated in the diffraction plane or an image thereof.
Abstract translation: 公开了一种用于调整或对准透射电子显微镜（TEM）中的一个或多个光学元件的方法。 TEM配备有用于将电子束引导到样品的物镜，其中至少一束不散射电子被聚焦的衍射平面和用于增强位于衍射中的对比度传递函数（CTF）的结构 平面或其图像。
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公开(公告)号：US08071954B2
公开(公告)日：2011-12-06
申请号：US12478707
申请日：2009-06-04
Applicant: Raymond Wagner , Hendrik Nicolaas Slingerland , Frank Jeroen Pieter Schuurmans , Peter Christiaan Tiemeijer
Inventor： Raymond Wagner , Hendrik Nicolaas Slingerland , Frank Jeroen Pieter Schuurmans , Peter Christiaan Tiemeijer
CPC classification number: H01J37/26 , H01J2237/2614
Abstract: The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure (15) and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.
Abstract translation: 本发明涉及一种用于TEM的混合相位板。 根据本发明的相位板类似于安装有Zernike相位板的Boersch相位板。 结果，根据本发明的相位板类似于用于电子散射的Boersch相位板，使得它们通过中心结构（15）的外部并且类似于Zernike相位板，用于穿过中心结构的孔的散射电子。 将本发明的相位板与Zernike相位板进行比较的优点在于，对于以大角度散射的电子，不会由箔吸收或散射电子，导致TEM具有更好的高分辨率性能。 将本发明的相位板与Boersch相位板相比较，中央结构的小型化的要求不那么严格。
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公开(公告)号：US07915584B2
公开(公告)日：2011-03-29
申请号：US12370542
申请日：2009-02-12
Applicant: Peter Christiaan Tiemeijer , Alan Frank De Jong
Inventor： Peter Christiaan Tiemeijer , Alan Frank De Jong
CPC classification number: H01J37/153 , H01J37/263 , H01J2237/2614
Abstract: The invention relates to a TEM with a corrector (330) to improve the image quality and a phase plate (340) to improve contrast. The improved TEM comprises a correction system completely placed between the objective lens and the phase plate, and uses the lenses of the corrector to form a magnified image of the diffraction plane on the phase plate.
Abstract translation: 本发明涉及具有改善图像质量的校正器（330）和改善对比度的相位板（340）的TEM。 改进的TEM包括完全放置在物镜和相位板之间的校正系统，并且使用校正器的透镜在相位板上形成衍射平面的放大图像。
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19.发明授权Particle-optical apparatus comprising a fixed diaphragm for the monochromator filter 失效粒子光学装置包括用于单色器滤光器的固定光圈
公开(公告)号：US5838004A
公开(公告)日：1998-11-17
申请号：US849205
申请日：1997-06-02
Applicant: Peter Christiaan Tiemeijer , J. Chmelik , Pieter Kruit
Inventor： Peter Christiaan Tiemeijer , J. Chmelik , Pieter Kruit
CPC classification number: H01J37/05 , H01J2237/057
Abstract: An electron microscope comprises an energy-selective filter (10) which is arranged ahead of the high-voltage field in the electron gun (2). Because the filter carries high-voltage potential and is arranged within the gun space (14) which is filled with SF.sub.6 gas, problems arise regarding electrical and mechanical passages to the filter. Notably the centering of the filter is problematic. In order to enable suitable aperture adjustment of the filter nevertheless (for current limitation and for avoiding optical aberrations introduced into the beam by the filter), there is provided an entrance diaphragm (30) which is rigidly connected to the filter parts, notably to a pole face or to a field-defining closing piece (48a) of the filter.
Abstract translation: PCT No.PCT / IB96 / 01029 Sec。 371日期：1997年6月2日 102（e）日期1996年6月2日PCT提交1996年10月1日PCT公布。 公开号WO97 / 13268 日期1997年04月10日电子显微镜包括设置在电子枪（2）中的高压场前方的能量选择滤光器（10）。 因为过滤器承载高压电位并且被布置在填充有SF 6气体的枪空间（14）内，所以关于过滤器的电和机械通道出现问题。 值得注意的是过滤器的中心是有问题的。 为了使滤波器适当的孔径调节（为了限制电流并避免由滤波器引入到光束中的光学像差），提供了一个入口隔膜（30），其刚性地连接到过滤器部件，特别是一个 极面或过滤器的场界定闭合件（48a）。
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