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    Anti-stiction technique for electromechanical systems and electromechanical device employing same
    11.
    发明申请
    Anti-stiction technique for electromechanical systems and electromechanical device employing same 有权

    公开(公告)号：US20060246631A1

    公开(公告)日：2006-11-02

    申请号：US11115828

    申请日：2005-04-27

    申请人： Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    发明人： Markus Lutz ,  Aaron Partridge ,  Wilhelm Frey ,  Markus Ulm ,  Matthias Metz ,  Brian Stark ,  Gary Yama

    IPC分类号： H01L21/44

    CPC分类号： B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

    摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

    Tri-axis accelerometer having a single proof mass and fully differential output signals
    12.
    发明申请
    Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
    三轴加速度计具有单个检测质量和全差分输出信号

    公开(公告)号：US20080053228A1

    公开(公告)日：2008-03-06

    申请号：US11513669

    申请日：2006-08-30

    申请人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    发明人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    IPC分类号： G01P15/00

    CPC分类号： G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

    摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

    摘要翻译： 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。

    Structural element having a coplanar line
    15.
    发明授权
    Structural element having a coplanar line 失效
    具有共面线的结构元件

    公开(公告)号：US07224239B2

    公开(公告)日：2007-05-29

    申请号：US10974621

    申请日：2004-10-27

    申请人： Markus Ulm ,  Joerg Schoebel

    发明人： Markus Ulm ,  Joerg Schoebel

    IPC分类号： H01P1/24

    CPC分类号： H01P3/003 ,  H01P1/268

    摘要： Novel concepts are proposed for line terminations of coplanar lines that are as anechoic as possible, having a neutral wire and two outer conductors that are situated at least from section to section on both sides of the neutral wire, the line termination including at least one resistor element, via which the neutral wire is connected at its end with the two outer conductors. A connection at the end between the two outer conductors exists independently of the at least one resistor element. Alternatively or in supplementation to this, at least one resistor element of the line termination is situated at a slanting angle to the neutral wire, i.e. at an angle which is either greater or less than 90°.

    摘要翻译： 提出了用于尽可能消音的共面线的线路终端的新概念，具有中性线和至少位于中性线的两侧上的截面的两个外部导体，线路终端包括至少一个电阻器 元件，中性线在其端部与两个外导体连接。 在两个外部导体之间的端部处的连接独立于至少一个电阻器元件存在。 作为替代或补充，线路终端的至少一个电阻器元件以与中性线的倾斜角度定位，即以大于或小于90°的角度。

    Tri-axis accelerometer having a single proof mass and fully differential output signals
    17.
    发明授权
    Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
    三轴加速度计具有单个检测质量和全差分输出信号

    公开(公告)号：US07757555B2

    公开(公告)日：2010-07-20

    申请号：US11513669

    申请日：2006-08-30

    申请人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    发明人： Zhiyu Pan ,  Christoph Lang ,  Gary Yama ,  Matthias Metz ,  Markus Ulm

    IPC分类号： G01P15/08

    CPC分类号： G01P15/09 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18 ,  G01P2015/084 ,  Y10T29/42

    摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

    摘要翻译： 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。