公开(公告)号：US11888464B2

公开(公告)日：2024-01-30

申请号：US18081084

申请日：2022-12-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro Ogura ,  Keiichi Yamaguchi ,  Masahiro Oshio ,  Takashi Yamazaki

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  G01C19/5607 ,  H03H3/04 ,  H03H9/10 ,  G01C19/5621 ,  G01C19/5628 ,  G01C19/5663 ,  G01C19/5656

CPC classification number: H03H9/21 ,  G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01C19/5656 ,  G01C19/5663 ,  H03H3/02 ,  H03H3/04 ,  H03H9/0533 ,  H03H9/0547 ,  H03H9/0595 ,  H03H9/1014 ,  H03H2003/026 ,  H03H2003/0492

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US11088657B2

公开(公告)日：2021-08-10

申请号：US16911446

申请日：2020-06-25

Applicant: Seiko Epson Corporation

Inventor： Kenichi Kurokawa ,  Yukio Kitahara ,  Takashi Yamazaki ,  Akihiko Ebina

IPC: H03B5/32 ,  H01L41/047 ,  H03H9/15

Abstract: A vibration element includes: a base; an arm continuous with the base; a first electrode that includes a first layer of titanium nitride and a second layer containing nitrogen, titanium, and oxygen, and is disposed on the arm; an aluminum nitride layer in contact with the second layer; and a second electrode disposed on the aluminum nitride layer.

公开(公告)号：US11025222B2

公开(公告)日：2021-06-01

申请号：US16253712

申请日：2019-01-22

Applicant: Seiko Epson Corporation

Inventor： Seiichiro Ogura ,  Keiichi Yamaguchi ,  Masahiro Oshio ,  Takashi Yamazaki

IPC: G01C19/5607 ,  G01C19/5621 ,  H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  H03H3/04 ,  H03H9/10

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US10662055B2

公开(公告)日：2020-05-26

申请号：US15961564

申请日：2018-04-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki ,  Akihiko Ebina ,  Osamu Kawauchi ,  Yoshihiko Yokoyama

IPC: B81B7/00 ,  B81C1/00

Abstract: A MEMS element includes a surface silicon layer on which an element is formed and on which a first electrode and a second electrode as element electrodes and an electrode pad connected to the first electrode and the second electrode are disposed, and in which a first wiring through-hole is disposed at a position overlapping with the electrode pad of the surface silicon layer and a wiring electrode electrically connected to the electrode pad is disposed in the first wiring through-hole, in plan view.

公开(公告)号：US09231554B2

公开(公告)日：2016-01-05

申请号：US14166029

申请日：2014-01-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki

IPC: H03H9/21 ,  H03H9/05

CPC classification number: H03H9/21 ,  H03H9/0542 ,  H03H9/0547

Abstract: A tuning fork type vibrator element, as a vibrator element, includes a base formed on a plane including a first axis and a second axis orthogonal to the first axis, a connection portion extending in a first axis direction from the base, with a thickness thereof being smaller than that of the base and a vibrating arm extending in the first axis direction from one end portion of the connection portion, with a thickness thereof being the same as that of the connection portion, in which the vibrating arm performs flexural vibration along a vertical direction with respect to the plane, and in which the connection portion is provided such that a relationship between a length L2 in the first axis direction of the connection portion and a length L1 in the first axis direction of the vibrating arm falls within a range of L1/15≦L2≦L1.

Abstract translation: 作为振子元件的音叉式振动元件包括形成在包括第一轴线和与第一轴线正交的第二轴线的平面上的基座，从底座沿第一轴线方向延伸的连接部分，其厚度 小于基座的长度的振动臂和从连接部的一个端部沿第一轴线方向延伸的振动臂，其厚度与连接部的厚度相同，其中振动臂沿着连接部的一个端部进行弯曲振动 并且其中连接部分设置成使得连接部分的第一轴线方向上的长度L2与振动臂的第一轴线方向上的长度L1之间的关系落在一个范围内 的L1 / 15＆nlE; L2＆nlE; L1。