Imaging element having transfer gate structure comprising a trench

    公开(公告)号:US11069727B2

    公开(公告)日:2021-07-20

    申请号:US16482397

    申请日:2018-02-19

    Abstract: The imaging element includes, within a pixel, a semiconductor substrate, a photoelectric conversion unit formed in the semiconductor substrate, a first charge storage unit that stores a charge generated by the photoelectric conversion unit, and a first transfer gate unit formed on an opposite surface of the semiconductor substrate on an opposite side of a light incident surface and used for transfer of a charge from the photoelectric conversion unit to the first charge storage unit. The first transfer gate unit includes a first electrode embedded in a first trench formed in the semiconductor substrate from the opposite surface of the semiconductor substrate. The photoelectric conversion unit includes the first electrode, and a second electrode surrounding at least a portion of a periphery of the first electrode.

    SOLID-STATE IMAGE SENSOR, CONTROL METHOD FOR THE SAME, AND ELECTRONIC DEVICE
    13.
    发明申请
    SOLID-STATE IMAGE SENSOR, CONTROL METHOD FOR THE SAME, AND ELECTRONIC DEVICE 审中-公开
    固态图像传感器,其控制方法和电子设备

    公开(公告)号:US20130327924A1

    公开(公告)日:2013-12-12

    申请号:US13904280

    申请日:2013-05-29

    Inventor: Takashi Machida

    Abstract: There is provided a solid-state image sensor including unit pixels each including a photoelectric transducer which generates a charge corresponding to an amount of incident light and accumulates the charge therein, a first transfer gate which transfers the charge accumulated in the photoelectric transducer, a charge holding region in which the charge transferred from the photoelectric transducer by the first transfer gate is held, a second transfer gate which transfers the charge held in the charge holding region, a floating diffusion region in which the charge transferred from the charge holding region by the second transfer gate is held to be read out as a signal, and a reset section which resets the charge in the floating diffusion region. The first transfer gate and the reset section are connected to an identical drive section through a drive line shared thereby, and are simultaneously driven by the drive section.

    Abstract translation: 提供一种固态图像传感器,其包括单位像素,每个单位像素包括光电转换器,该光电变换器产生与入射光量相对应的电荷并在其中累积电荷;传输积累在光电变换器中的电荷的第一传输门, 保持由第一传输门从光电传感器传送的电荷的保持区域,传送保持在电荷保持区域中的电荷的第二传输栅极,其中从电荷保持区转移的电荷由 保持第二传输门口作为信号被读出,以及复位部分,其复位浮动扩散区域中的电荷。 第一传输门和复位部分通过共享的驱动线路连接到相同的驱动部分,并由驱动部分同时驱动。

    Imaging apparatus, driving method, and electronic device

    公开(公告)号:US11128823B2

    公开(公告)日:2021-09-21

    申请号:US16088142

    申请日:2017-03-17

    Abstract: Provided is an imaging apparatus that includes a pixel array portion, a plurality of unit pixels in the pixel array portion, and a driving unit that controls an operation of the unit pixel. The unit pixel includes a photoelectric converter, a charge retention unit that retains a charge, a charge-voltage converter that converts the charge into a voltage, a first transmitting unit that transmits the charge from the photoelectric converter to the charge retention unit, a second transmitting unit that transmits the charge from the photoelectric converter to the charge-voltage converter, and a third transmitting unit that transmits the charge from the charge retention unit to the charge-voltage converter.

    Solid-state image sensor, imaging device, and electronic device

    公开(公告)号:US10313618B2

    公开(公告)日:2019-06-04

    申请号:US15945539

    申请日:2018-04-04

    Abstract: The present technology relates to a solid-state image sensor, an imaging device, and an electronic device capable of switching FD conversion efficiency in all pixels of a solid-state image sensor. A photodiode performs photoelectric conversion on incident light. A floating diffusion (FD) stores charge obtained by the photodiode. FD2, which is a second FD to which the capacity of an additional capacitor MIM is added, adds the capacity to the FD. The additional capacitor MIM is constituted by a first electrode formed by a wiring layer and a second electrode formed by a metallic light blocking film provided on a surface of a substrate on which the photodiode is formed. Switching between the FD and FD+FD2 allows switching of the FD conversion efficiency. The present technology is applicable to a CMOS image sensor.

    Solid-state image taking device and electronic apparatus
    16.
    发明授权
    Solid-state image taking device and electronic apparatus 有权
    固态摄像装置和电子装置

    公开(公告)号:US09167184B2

    公开(公告)日:2015-10-20

    申请号:US14087281

    申请日:2013-11-22

    Inventor: Takashi Machida

    Abstract: A solid-state image taking device including a pixel section and a scan driving section wherein on each pixel column included in the pixel area determined in advance to serve as a pixel column having the unit pixels laid out in the scan direction, the opto-electric conversion section and the electric-charge holding section are laid out alternately and repeatedly, and on each of the pixel columns in the pixel area determined in advance, two the electric-charge holding sections of two adjacent ones of the unit pixels are laid out disproportionately toward one side of the scan direction with respect to the optical-path limiting section or the opto-electric conversion section.

    Abstract translation: 一种包括像素部分和扫描驱动部分的固态图像获取装置,其中包括在预先确定的像素列中的每个像素列上具有沿扫描方向布置的单位像素的像素列,光电 转换部分和电荷保持部分交替重复布置,并且在预先确定的像素区域中的每个像素列上,两个相邻单位像素的电荷保持部分不成比例地布置 相对于光路限制部或光电转换部朝向扫描方向的一侧。

    Solid-state image sensor, method for the same, and electronic device
    17.
    发明授权
    Solid-state image sensor, method for the same, and electronic device 有权
    固态图像传感器,相同的方法和电子设备

    公开(公告)号:US09142576B2

    公开(公告)日:2015-09-22

    申请号:US14026643

    申请日:2013-09-13

    Inventor: Takashi Machida

    Abstract: There is provided a solid-state image sensor including a photoelectric conversion part which generates a charge corresponding to received light and accumulates the charge therein, a charge holding part in which before the charge accumulated in the photoelectric conversion part is transferred to a floating diffusion region, the charge is held for a predetermined time, a first transfer gate which transfers the charge accumulated in the photoelectric conversion part to the charge holding part, a second transfer gate which transfers the charge held in the charge holding part to the floating diffusion region, and a charge discharging gate which discharges the charge in the photoelectric conversion part. Before charge accumulation in the photoelectric conversion part for the next frame is started, part of the charge accumulated in the charge holding part is discharged.

    Abstract translation: 提供了一种固态图像传感器,其包括:光电转换部,其生成与接收的光对应的电荷并在其中累积电荷;电荷保持部,其中在光电转换部中累积的电荷被转移到浮动扩散区 将电荷保持预定时间,将在光电转换部中累积的电荷传送到电荷保持部的第一传输门,将保持在电荷保持部中的电荷转移到浮动扩散区的第二传输门, 以及对光电转换部中的电荷进行放电的电荷放电门。 在下一帧的光电转换部分中的电荷累积开始之前,累积在电荷保持部分中的部分电荷被放电。

    Solid-state imaging device, method of manufacturing solid-state imaging device and electronic apparatus
    18.
    发明授权
    Solid-state imaging device, method of manufacturing solid-state imaging device and electronic apparatus 有权
    固态成像装置,固态成像装置和电子装置的制造方法

    公开(公告)号:US09450003B2

    公开(公告)日:2016-09-20

    申请号:US14609661

    申请日:2015-01-30

    Abstract: A solid-state imaging device including a photoelectric conversion element operable to generate electric charge according to the amount of incident light and to accumulate the electric charge in the inside thereof, an electric-charge holding region in which the electric charge generated through photoelectric conversion by the photoelectric conversion element is held until read out, and a transfer gate having a complete transfer path through which the electric charge accumulated in the photoelectric conversion element is completely transferred into the electric-charge holding region, and an intermediate transfer path through which the electric charge generated by the photoelectric conversion element during an exposure period and being in excess of a predetermined charge amount is transferred into the electric-charge holding region. The complete transfer path and the intermediate transfer path are formed in different regions.

    Abstract translation: 一种固态成像装置,包括光电转换元件,该光电转换元件可操作以根据入射光量产生电荷并在其内积累电荷;电荷保持区域,其中通过光电转换产生的电荷由 光电转换元件被保持直到读出,并且具有完全转移光电转换元件中的电荷完全转移到电荷保持区域中的传输路径的传输门,以及中间传输路径, 在曝光期间由光电转换元件产生的超过预定电荷量的电荷被转移到电荷保持区域中。 完整的传送路径和中间传送路径形成在不同的区域中。

    SOLID-STATE IMAGING DEVICE, METHOD FOR DRIVING THE SAME, METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC DEVICE
    19.
    发明申请
    SOLID-STATE IMAGING DEVICE, METHOD FOR DRIVING THE SAME, METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC DEVICE 有权
    固态成像装置,其驱动方法,其制造方法和电子装置

    公开(公告)号:US20140084143A1

    公开(公告)日:2014-03-27

    申请号:US14119271

    申请日:2012-07-05

    Abstract: A solid-state imaging device includes a photoelectric conversion section configured to generate photocharges and a transfer gate that transfers the photocharges to a semiconductor region. A method for driving a unit pixel includes a step of accumulating photocharges in a photoelectric conversion section and a step of accumulating the photocharges in a semiconductor region. A method of forming a solid-state imaging device includes implanting ions into a well layer through an opening in a mask, implanting additional ions into the well layer through an opening in another mask, and implanting other ions into the well layer through an opening in yet another mask. An electronic device includes the solid-state imaging device.

    Abstract translation: 固态成像装置包括被配置为产生光电荷的光电转换部分和将光电荷转移到半导体区域的传输门。 用于驱动单位像素的方法包括在光电转换部分中累积光电荷的步骤和在半导体区域中积累光电荷的步骤。 形成固态成像装置的方法包括通过掩模中的开口将离子注入阱层,通过另一掩模中的开口将额外的离子注入到阱层中,并通过其中的开口将其它离子注入到阱层中 又一个面具。 电子设备包括固态成像装置。

    SOLID-STATE IMAGE SENSOR, METHOD FOR THE SAME, AND ELECTRONIC DEVICE
    20.
    发明申请
    SOLID-STATE IMAGE SENSOR, METHOD FOR THE SAME, AND ELECTRONIC DEVICE 有权
    固态图像传感器,其相关方法和电子设备

    公开(公告)号:US20140084138A1

    公开(公告)日:2014-03-27

    申请号:US14026643

    申请日:2013-09-13

    Inventor: Takashi Machida

    Abstract: There is provided a solid-state image sensor including a photoelectric conversion part which generates a charge corresponding to received light and accumulates the charge therein, a charge holding part in which before the charge accumulated in the photoelectric conversion part is transferred to a floating diffusion region, the charge is held for a predetermined time, a first transfer gate which transfers the charge accumulated in the photoelectric conversion part to the charge holding part, a second transfer gate which transfers the charge held in the charge holding part to the floating diffusion region, and a charge discharging gate which discharges the charge in the photoelectric conversion part. Before charge accumulation in the photoelectric conversion part for the next frame is started, part of the charge accumulated in the charge holding part is discharged.

    Abstract translation: 提供了一种固态图像传感器,其包括:光电转换部,其生成与接收的光对应的电荷并在其中累积电荷;电荷保持部,其中在光电转换部中累积的电荷被转移到浮动扩散区 将电荷保持预定时间,将在光电转换部中累积的电荷传送到电荷保持部的第一传输门,将保持在电荷保持部中的电荷转移到浮动扩散区的第二传输门, 以及对光电转换部中的电荷进行放电的电荷放电门。 在下一帧的光电转换部分中的电荷累积开始之前,累积在电荷保持部分中的部分电荷被放电。

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