公开(公告)号：US09377482B2

公开(公告)日：2016-06-28

申请号：US14193981

申请日：2014-02-28

Applicant: STMicroelectronics S.r.l.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Sarah Zerbini

IPC: G01P15/097

CPC classification number: G01P15/0975 ,  G01P15/097

Abstract: A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.

Abstract translation: 用于z轴共振加速度计的检测结构具有通过弹性锚定元件锚固到基底的惯性块，以便悬挂在基底上方，并且执行围绕属于属于第一轴的第一旋转轴的旋转的惯性运动 响应于沿相对于平面横向的垂直轴作用的外部加速度，所述惯性质量的主延伸面; 以及第一谐振器元件和第二谐振器元件，其通过相应的弹性支撑元件机械耦合到惯性块，其使得能够在谐振条件下围绕第二旋转轴线和第三旋转轴线旋转。 特别地，第二旋转轴线和第三旋转轴线彼此平行，并且还平行于惯性质量块的第一旋转轴线。

公开(公告)号：US09340413B2

公开(公告)日：2016-05-17

申请号：US14035798

申请日：2013-09-24

Applicant: STMicroelectronics S.r.l.

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Luca Coronato

IPC: H04R25/00 ,  B81C1/00 ,  B81B3/00 ,  H04R7/24 ,  H04R19/00 ,  H04R31/00 ,  H04R19/04

CPC classification number: B81C1/00182 ,  B81B3/0035 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R7/24 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49005

Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.

公开(公告)号：US20140174183A1

公开(公告)日：2014-06-26

申请号：US14193981

申请日：2014-02-28

Applicant: STMicroelectronics S.r.l.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Sarah Zerbini

IPC: G01P15/097

CPC classification number: G01P15/0975 ,  G01P15/097

Abstract: A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.

Abstract translation: 用于z轴共振加速度计的检测结构具有通过弹性锚定元件锚固到基底的惯性块，以便悬挂在基底上方，并且执行围绕属于属于第一轴的第一旋转轴的旋转的惯性运动 响应于沿相对于平面横向的垂直轴作用的外部加速度，所述惯性质量的主延伸面; 以及第一谐振器元件和第二谐振器元件，其通过相应的弹性支撑元件机械耦合到惯性块，其使得能够在谐振条件下围绕第二旋转轴线和第三旋转轴线旋转。 特别地，第二旋转轴线和第三旋转轴线彼此平行，并且还平行于惯性质量块的第一旋转轴线。

公开(公告)号：US08733172B2

公开(公告)日：2014-05-27

申请号：US13789476

申请日：2013-03-07

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract translation: 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US20140077798A1

公开(公告)日：2014-03-20

申请号：US13905006

申请日：2013-05-29

Applicant: STMicroelectronics S.r.l.

Inventor： Lorenzo Baldo ,  Francesco Procopio ,  Sarah Zerbini

IPC: G01R33/028

CPC classification number: G01R33/0286 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/038

Abstract: Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.

Abstract translation: 两个悬挂质量被配置为使得在相互横向上在磁力计平面中流动的相应电流流动，并且电容耦合到下电极。 移动感测电极由第一悬浮质量携带并且电容耦合到相应的固定感测电极。 第一悬挂质量被配置为在存在具有在第一水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的。 第二悬挂质量被配置为在存在具有在第二水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的，并且第一悬挂质量被配置为在平行于 并且在存在具有在垂直方向上的分量的磁场的情况下横向于在第一悬浮质量块中流动的电流。

公开(公告)号：US20140015525A1

公开(公告)日：2014-01-16

申请号：US13929635

申请日：2013-06-27

Applicant: STMicroelectronics S.r.l.

Inventor： Dario Paci ,  Sarah Zerbini ,  Benedetto Vigna

IPC: G01R33/09

CPC classification number: G01R33/096 ,  G01R33/0017 ,  G01R33/0052 ,  G01R33/0206

Abstract: A magnetic-field sensor includes: a chip including a substrate having a first surface and an insulating layer covering the first surface; first and second magnetoresistors each extending into the insulating layer and having a main axis of magnetization and a secondary axis of magnetization; a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor; a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor. The main axes of magnetization extending transversely to each other and the secondary axes of magnetization extending transversely to each other. The first and second magnetoresistors extend into the insulating layer at a first distance and a second distance, respectively, that differ from one another, from the first surface.

Abstract translation: 磁场传感器包括：芯片，其包括具有覆盖第一表面的第一表面和绝缘层的基板; 第一和第二磁阻器各自延伸到绝缘层中并且具有主轴的磁化和次级磁化轴; 第一磁场发生器，被配置为产生具有沿着所述第一磁电阻的主磁化轴的场线的第一磁场; 第二磁场发生器被配置为产生具有沿着第二磁阻的主磁化轴的场线的第二磁场。 磁化的主轴线彼此横向延伸，磁化的副轴相互横向延伸。 第一和第二磁阻器分别从第一表面延伸到彼此不同的第一距离和第二距离处的绝缘层。

公开(公告)号：US20130180334A1

公开(公告)日：2013-07-18

申请号：US13789476

申请日：2013-03-07

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract translation: 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US11519932B2

公开(公告)日：2022-12-06

申请号：US17192465

申请日：2021-03-04

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Rizzini ,  Gabriele Gattere ,  Sarah Zerbini

IPC: G01P15/03 ,  B81B3/00 ,  G01P15/18 ,  G01P15/08 ,  G01P15/125

Abstract: A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass along a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary and one secondary stopper elements. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

公开(公告)号：US20210285981A1

公开(公告)日：2021-09-16

申请号：US17192465

申请日：2021-03-04

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Rizzini ,  Gabriele Gattere ,  Sarah Zerbini

IPC: G01P15/03 ,  B81B3/00

Abstract: A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

公开(公告)号：US10894713B2

公开(公告)日：2021-01-19

申请号：US15863051

申请日：2018-01-05

Applicant: STMicroelectronics S.r.l.

Inventor： Ernesto Lasalandra ,  Angelo Merassi ,  Sarah Zerbini

IPC: B81C1/00 ,  B81B3/00 ,  G01C19/56 ,  G01C19/5755 ,  G01P1/00 ,  G01P15/125 ,  G01P15/18 ,  H03H9/02 ,  G01P15/08

Abstract: A micro-electromechanical device includes a semiconductor substrate, in which a first microstructure and a second microstructure of reference are integrated. The first microstructure and the second microstructure are arranged in the substrate so as to undergo equal strains as a result of thermal expansions of the substrate. Furthermore, the first microstructure is provided with movable parts and fixed parts with respect to the substrate, while the second microstructure has a shape that is substantially symmetrical to the first microstructure but is fixed with respect to the substrate. By subtracting the changes in electrical characteristics of the second microstructure from those of the first, variations in electrical characteristics of the first microstructure caused by changes in thermal expansion or contraction can be compensated for.