MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE
    11.
    发明申请
    MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE 有权
    具有振荡质量和强度的微电子设备,以及控制微电子设备的方法

    公开(公告)号:US20140260609A1

    公开(公告)日:2014-09-18

    申请号:US13799243

    申请日:2013-03-13

    CPC classification number: G01C19/5762 G01C19/5726

    Abstract: A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

    Abstract translation: 微机电装置包括:主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器,被配置为检测所述可移动质量块的当前振荡频率; 以及强制级,其电容耦合到所述可移动质量块,并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS
    12.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS 有权
    具有补码信号成分的微电子陀螺仪

    公开(公告)号:US20140190258A1

    公开(公告)日:2014-07-10

    申请号:US14151426

    申请日:2014-01-09

    CPC classification number: G01C19/5776 G01C19/5726

    Abstract: A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

    Abstract translation: 陀螺仪包括:可相对于支撑体移动的质量块; 用于根据驱动轴保持质量在振荡中的驱动回路; 读取装置,其提供表示身体的角速度的输出信号; 以及补偿装置,用于相对于质量的振荡速度衰减正交的寄生信号分量。 读取装置包括放大器,其根据感测轴提供指示质量位置的换能信号。 补偿装置与放大器形成控制回路,从换能信号中提取表示换能信号中的正交分量的误差信号,并向放大器提供补偿信号,以便衰减误差信号。

    Driving circuit for controlling a MEMS oscillator of resonant type

    公开(公告)号:US12209864B2

    公开(公告)日:2025-01-28

    申请号:US17847003

    申请日:2022-06-22

    Abstract: A driving circuit for controlling a MEMS oscillator includes a digital conversion stage to acquire a differential sensing signal indicative of a displacement of a movable mass of the MEMS oscillator, and to convert the differential sensing signal of analog type into a digital differential signal of digital type. Processing circuitry is configured to generate a digital control signal of digital type as a function of the comparison between the digital differential signal and a differential reference signal indicative of a target amplitude of oscillation of the movable mass which causes the resonance of the MEMS oscillator. An analog conversion stage includes a ΣΔ DAC and is configured to convert the digital control signal into a PDM control signal of analog type. A filtering stage of low-pass type, by filtering the PDM control signal, generates a control signal for controlling the amplitude of oscillation of the movable mass.

    Microelectromechanical sensor with differentiated performances and method of controlling a microelectromechanical sensor
    16.
    发明授权
    Microelectromechanical sensor with differentiated performances and method of controlling a microelectromechanical sensor 有权
    微机电传感器具有差异化的性能和控制微机电传感器的方法

    公开(公告)号:US09372085B2

    公开(公告)日:2016-06-21

    申请号:US13648218

    申请日:2012-10-09

    CPC classification number: G01C19/5712 G01C19/5719

    Abstract: A microelectromechanical sensor includes a supporting structure and a sensing mass, which is elastically coupled to the supporting structure, is movable with respect thereto with one degree of freedom in response to movements according to an axis and is coupled to the supporting structure through a capacitive coupling. A sensing device senses, on terminals of the capacitive coupling, transduction signals indicative of displacements of the first sensing mass according to the degree of freedom. The sensing device includes at least one first reading chain, having first operative parameters, one second reading chain, having second operative parameters different from the first operative parameters, and one selective electrical connection structure that couples the first reading chain and the second reading chain to the first terminals.

    Abstract translation: 微机电传感器包括支撑结构和弹性耦合到支撑结构的感测块,其响应于根据轴线的运动而具有相对于其自由度移动并通过电容耦合耦合到支撑结构 。 感测装置在电容耦合的端子上感测到根据自由度指示第一感测质量的位移的转导信号。 感测装置包括至少一个第一读取链,其具有第一操作参数,一个第二读取链,具有与第一操作参数不同的第二操作参数,以及将第一阅读链和第二阅读链耦合到一个选择性电连接结构 第一个终端。

    Microelectromechanical gyroscope with self-calibration function and method of calibrating a microelectromechanical gyroscope
    17.
    发明授权
    Microelectromechanical gyroscope with self-calibration function and method of calibrating a microelectromechanical gyroscope 有权
    具有自校准功能的微机电陀螺仪和校准微机电陀螺仪的方法

    公开(公告)号:US09212910B2

    公开(公告)日:2015-12-15

    申请号:US13648215

    申请日:2012-10-09

    CPC classification number: G01C19/5776

    Abstract: A microelectromechanical gyroscope having a supporting structure; a mass capacitively coupled to the supporting structure and movable with a first degree of freedom and a second degree of freedom, in response to rotations of the supporting structure about an axis; driving components, for keeping the mass in oscillation according to the first degree of freedom; a read interface for detecting transduction signals indicating the capacitive coupling between the mass and the supporting structure; and capacitive compensation modules for modifying the capacitive coupling between the mass and the supporting structure. Calibration components detect systematic errors from the transduction signals and modify the capacitive compensation modules as a function of the transduction signals so as to attenuate the systematic errors.

    Abstract translation: 一种具有支撑结构的微电子陀螺仪; 电容耦合到所述支撑结构并且响应于所述支撑结构围绕轴的旋转以第一自由度和第二自由度移动的质量; 驱动部件,用于根据第一自由度保持质量摆动; 用于检测表示所述质量块和所述支撑结构之间的电容耦合的转导信号的读取界面; 以及用于修改质量块和支撑结构之间的电容耦合的电容补偿模块。 校准组件检测来自转导信号的系统误差,并修改电容补偿模块作为转导信号的函数,以便衰减系统误差。

    Microelectromechanical gyroscope having a resonant driving loop with controlled oscillation amplitude and method of controlling a microelectromechanical gyroscope

    公开(公告)号:US11885619B2

    公开(公告)日:2024-01-30

    申请号:US17847000

    申请日:2022-06-22

    CPC classification number: G01C19/5712

    Abstract: A microelectromechanical gyroscope includes a support structure, a driving mass movable according to a driving axis; and an oscillating microelectromechanical loop. The microelectromechanical loop has a resonance frequency and a loop gain and includes the driving mass, a sensing interface that senses a position of the driving mass, and a gain control stage that maintains a modulus of the loop gain at a unitary value at the resonance frequency. The gain control stage includes a sampler and an transconductance operational amplifier in an open-loop configuration. The sampler acquires samples of a loop signal from the sensing interface in a first operative condition and transfers them to the transconductance operational amplifier in a second operative condition. The sampler decouples the transconductance operational amplifier from the sensing interface in the first operative condition and in the second operative condition.

    Capacitance to voltage converter with a leakage compensation loop
    19.
    发明授权
    Capacitance to voltage converter with a leakage compensation loop 有权
    具有漏电补偿回路的电容电压转换器

    公开(公告)号:US09455668B1

    公开(公告)日:2016-09-27

    申请号:US14947908

    申请日:2015-11-20

    Abstract: A method and apparatus for compensating current leakage is disclosed. In the method and apparatus, a differential amplifier receives a first input signal and a second input signal and outputs a first output signal and a second output signal. The first output signal is filtered to obtain a first filtered signal. The first filtered signal is compared to the first input signal and a first compensation signal is outputted having a first voltage that is a function of a difference between a voltage of the first filtered signal and a voltage of the first input signal. Current leakage in the first input signal is compensated for using the first compensation signal.

    Abstract translation: 公开了一种用于补偿电流泄漏的方法和装置。 在该方法和装置中,差分放大器接收第一输入信号和第二输入信号,并输出第一输出信号和第二输出信号。 对第一输出信号进行滤波以获得第一滤波信号。 将第一滤波信号与第一输入信号进行比较,并输出具有作为第一滤波信号的电压与第一输入信号的电压之差的函数的第一电压的第一补偿信号。 使用第一补偿信号补偿第一输入信号中的电流泄漏。

    Dual input single output regulator for an inertial sensor
    20.
    发明授权
    Dual input single output regulator for an inertial sensor 有权
    用于惯性传感器的双输入单输出调节器

    公开(公告)号:US09329649B2

    公开(公告)日:2016-05-03

    申请号:US13683937

    申请日:2012-11-21

    CPC classification number: G06F1/26 Y10T307/696

    Abstract: A dual input single output (DISO) regulator, includes a comparator configured to receive a first and second power supply signal and to provide a first compared signal; a first switch configured to couple the first power supply source to an intermediate node, and a second switch configured to couple the second power supply source to the intermediate node; a control logic circuit, coupled to the first comparator, to the first switch, and to the second switch, and configured to receive the compared signal to control the first and the second switch in a first and second operating condition based on the compared signal. The intermediate node being biased by an intermediate power supply signal correlated to the first or second power supply signal. The DISO regulator includes a low-dropout regulator, configured to provide a regulated power supply signal based on the intermediate power supply signal.

    Abstract translation: 双输入单输出(DISO)调节器包括比较器,被配置为接收第一和第二电源信号并提供第一比较信号; 配置为将第一电源耦合到中间节点的第一开关和被配置为将第二电源耦合到中间节点的第二开关; 耦合到第一比较器的控制逻辑电路连接到第一开关和第二开关,并且被配置为接收比较的信号,以基于所比较的信号在第一和第二操作条件下控制第一和第二开关。 中间节点被与第一或第二电源信号相关的中间电源信号偏置。 DISO调节器包括一个低压差稳压器,配置成基于中间电源信号提供稳压电源信号。

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