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    WATERPROOF SWITCH ACTUATABLE BY A FLUID SUCH AS AIR AND USABLE IN PARTICULAR FOR ACTIVATING AN INHALATOR APPARATUS, SUCH AS AN ELECTRONIC CIGARETTE
    11.
    发明申请
    WATERPROOF SWITCH ACTUATABLE BY A FLUID SUCH AS AIR AND USABLE IN PARTICULAR FOR ACTIVATING AN INHALATOR APPARATUS, SUCH AS AN ELECTRONIC CIGARETTE 有权

    公开(公告)号：US20210114867A1

    公开(公告)日：2021-04-22

    申请号：US17072813

    申请日：2020-10-16

    Applicant: STMicroelectronics S.r.l.

    Inventor： Enri DUQI ,  Fabrizio CERINI ,  Lorenzo BALDO

    IPC: B81B7/02 ,  A24F40/51 ,  B81B7/00

    Abstract: A MEMS switch is actuatable by a fluid, and includes a piezoelectric pressure sensor that detects the movement of a fluid generating a negative pressure. The piezoelectric pressure sensor is formed by a chip of semiconductor material having a through cavity and a sensitive membrane, which extends over the through cavity and has a first and a second surface. The piezoelectric pressure sensor is mounted on a face of a board having a through hole so that the through cavity overlies and is in fluid connection with the through hole. The board has a fixing structure, which enables securing in an opening of a partition wall separating a first and a second space from each other. The board is arranged so that the first surface of the sensitive membrane faces the first space, and the second surface of the sensitive membrane faces the second space.

    MEMBRANE MICROFLUIDIC VALVE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF
    13.
    发明申请
    MEMBRANE MICROFLUIDIC VALVE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF 审中-公开

    公开(公告)号：US20200326010A1

    公开(公告)日：2020-10-15

    申请号：US16842474

    申请日：2020-04-07

    Applicant: STMicroelectronics S.r.l.

    Inventor： Enri DUQI ,  Lorenzo BALDO

    IPC: F16K31/00 ,  H01L41/09 ,  B23P15/00

    Abstract: A microfluidic valve formed in a body having a first and a second surface; an inlet channel extending in the body from the second surface; a first transverse channel extending in the body in a transverse direction with respect to the inlet channel; and an outlet channel extending in the body from the first surface. The inlet channel, the first transverse channel and the outlet channel form a fluidic path. The microfluidic valve further has an occluding portion, formed by the body and extending over the transverse channel; and a piezoelectric actuator coupled to the occluding portion and configured to move the occluding portion from an opening position of the valve, where the occluding portion does not interfere with the fluidic path, and a closing position of the valve, where the occluding portion interferes with and interrupts the fluidic path.

    MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANUFACTURING PROCESS THEREOF
    14.
    发明申请
    MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANUFACTURING PROCESS THEREOF 审中-公开

    公开(公告)号：US20200262699A1

    公开(公告)日：2020-08-20

    申请号：US16869159

    申请日：2020-05-07

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Enri DUQI ,  Lorenzo BALDO ,  Marco DEL SARTO ,  Mikel AZPEITIA URQUIA

    IPC: B81C1/00 ,  B81B3/00 ,  B81B7/00

    Abstract: A micro-electro-mechanical device, comprising a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region facing the first buried cavity; a second cavity facing the first buried cavity; a decoupling trench extending from the monolithic body and separating the sensitive region from a peripheral portion of the monolithic body; a cap die, forming an ASIC, bonded to and facing the first face of the monolithic body; and a first gap between the cap die and the monolithic body. The device also comprises at least one spacer element between the monolithic body and the cap die; at least one stopper element between the monolithic body and the cap die; and a second gap between the stopper element and one between the monolithic body and the cap die. The second gap is smaller than the first gap.

    SEMICONDUCTOR INTEGRATED DEVICE WITH ELECTRICAL CONTACTS BETWEEN STACKED DIES AND CORRESPONDING MANUFACTURING PROCESS
    15.
    发明申请
    SEMICONDUCTOR INTEGRATED DEVICE WITH ELECTRICAL CONTACTS BETWEEN STACKED DIES AND CORRESPONDING MANUFACTURING PROCESS 审中-公开

    公开(公告)号：US20190330056A1

    公开(公告)日：2019-10-31

    申请号：US16509367

    申请日：2019-07-11

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Enri DUQI ,  Lorenzo BALDO ,  Domenico GIUSTI

    IPC: B81C1/00 ,  B81B7/00

    Abstract: An integrated device includes: a first die; a second die coupled in a stacked way on the first die along a vertical axis; a coupling region arranged between facing surfaces of the first die and of the second die, which face one another along the vertical axis and lie in a horizontal plane orthogonal to the vertical axis, for mechanical coupling of the first and second dies; electrical-contact elements carried by the facing surfaces of the first and second dies, aligned in pairs along the vertical axis; and conductive regions arranged between the pairs of electrical-contact elements carried by the facing surfaces of the first and second dies, for their electrical coupling. Supporting elements are arranged at the facing surface of at least one of the first and second dies and elastically support respective electrical-contact elements.

    MICROPUMP MEMS DEVICE FOR MOVING OR EJECTING A FLUID, IN PARTICULAR MICROBLOWER OR FLOWMETER
    19.
    发明申请
    MICROPUMP MEMS DEVICE FOR MOVING OR EJECTING A FLUID, IN PARTICULAR MICROBLOWER OR FLOWMETER 审中-公开

    公开(公告)号：US20200325888A1

    公开(公告)日：2020-10-15

    申请号：US16847521

    申请日：2020-04-13

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Domenico GIUSTI ,  Lorenzo BALDO ,  Enri DUQI

    IPC: F04B43/04 ,  H01L41/09 ,  H01L41/047 ,  H01L27/20 ,  H01L41/31

    Abstract: A micropump device is formed in a monolithic semiconductor body integrating a plurality of actuator elements arranged side-by-side. Each actuator element has a first chamber extending at a distance from a first face of the monolithic body; a membrane arranged between the first face and the first chamber; a piezoelectric element extending on the first face over the membrane; a second chamber, arranged between the first chamber and a second face of the monolithic body; a fluidic inlet path fluidically connecting the second chamber with the outside of the monolithic body; and a fluid outlet opening extending in a transverse direction in the monolithic body from the second face as far as the second chamber, through the first chamber. The monolithic formation of the actuator elements and the possibility of driving the actuator elements at different voltages enable precise adjustment of flows, from very low values to high values.

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