公开(公告)号：US20240234094A9

公开(公告)日：2024-07-11

申请号：US18232123

申请日：2023-08-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Changho KIM ,  Hyeongmo KANG ,  Illsang KO ,  Dooyoung GWAK ,  Kyungsun KIM ,  Namkyun KIM ,  Yirop KIM ,  Jihwan KIM ,  Seungbo SHIM ,  Minyoung HUR

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32128 ,  H01J37/32165 ,  H01J37/3244 ,  H01J2237/334

Abstract: Provided is a plasma control method including applying gas to a chamber having a wafer loaded therein, generating plasma by applying both radio frequency (RF) power associated with a first voltage at a first frequency and a second voltage at a second frequency that is lower than the first frequency to the chamber for a first time, cutting off the RF power after the first time elapses, continuously applying the second voltage of the second frequency to the chamber for a second time, cutting off the second voltage after the second time elapses, continuously maintaining an off state of the RF power and an off state of the voltage for a third time, and performing an etching process on the wafer by using the plasma formed by the RF power and the second voltage after the third time elapses, wherein the RF power is a sine wave, and the second voltage is a square wave of a periodic pulse form.

公开(公告)号：US20230388441A1

公开(公告)日：2023-11-30

申请号：US18447790

申请日：2023-08-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junghoon PARK ,  Jeonggyu JO ,  Seungbo SHIM ,  Dongil SON

IPC: H04N5/262 ,  H04N23/611 ,  H04N23/90

CPC classification number: H04N5/2624 ,  H04N5/2628 ,  H04N23/611 ,  H04N23/90

Abstract: An electronic device may include: a first camera module that captures a first image at a first angle of view; a second camera module that captures a second image at a second angle of view different from the first angle of view; and a processor configured to activate the second camera module in response to a case in which at least one of objects detected in the first image deviates from the first angle of view.

公开(公告)号：US20230197423A1

公开(公告)日：2023-06-22

申请号：US17942368

申请日：2022-09-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungyong LIM ,  Chansoo KANG ,  Youngdo KIM ,  Namkyun KIM ,  Sungyeol KIM ,  Sangki NAM ,  Seungbo SHIM ,  Kyungmin LEE

IPC: H01J37/32 ,  G01J1/44

CPC classification number: H01J37/32935 ,  G01J1/44 ,  H01J37/32174 ,  G01J2001/446

Abstract: A diagnostic device for diagnosing distribution of a radical in a plasma processing chamber, the diagnostic device, may include a spectrometer receiving an optical signal through at least one optical channel connected to the plasma processing chamber, and performing spectral analysis on the optical signal in response to a synchronization signal corresponding to each of states of a multi-level pulse applied to the plasma processing chamber and a synchronizer generating the synchronization signal corresponding to each of the states of the multi-level pulse.

公开(公告)号：US20230010881A1

公开(公告)日：2023-01-12

申请号：US17591751

申请日：2022-02-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byeongsang KIM ,  Dougyong SUNG ,  Sungjin KIM ,  Yunhwan KIM ,  Inseok SEO ,  Seungbo SHIM ,  Naohiko OKUNISHI ,  Minyoung HUR

IPC: G01R27/16 ,  H01L21/683 ,  H01L21/67 ,  C23C16/52 ,  H01L21/66 ,  C23C16/455

Abstract: An impedance measurement jig may include a first contact plate, a second contact plate, a cover plate, a plug, and an analyzer. The first contact plate may make electrical contact with an ESC in a substrate-processing apparatus. The second contact plate may make electrical contact with a focus ring configured to surround the ESC. The cover plate may be configured to cover an upper surface of the substrate-processing apparatus. The plug may be installed at the cover plate to selectively make contact with the first contact plate or the second contact plate. The analyzer may individually apply a power to the first contact plate and the second contact plate through the plug to measure an impedance of the ESC and an impedance of the focus ring. Thus, the impedances of the ESC and the focus ring may be individually measured to inspect the ESC and/or the focus ring.

公开(公告)号：US20220361335A1

公开(公告)日：2022-11-10

申请号：US17431917

申请日：2021-08-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seungbo SHIM ,  Junghoon PARK ,  Dongil SON

IPC: H05K1/14 ,  H05K1/18 ,  H05K1/02 ,  H05K7/14 ,  H04M1/02

Abstract: According to various embodiments of the disclosure, an electronic device may comprise: a display, a first circuit board disposed under the display, at least one component disposed on one surface of the first circuit board, an interposer surrounding at least two sides of the at least one component and disposed on the first circuit board, and a second circuit board spaced apart from the first circuit board and including an area joined with the interposer. The interposer may include: a first interposer portion disposed along a first area of the first circuit board, a first end of the first interposer having at least a portion including a non-shielding area, and a second interposer portion disposed along a second area, adjacent to the first area, of the first circuit board, a second end of the second interposer facing the first end and having at least a portion including a non-shielding area.

公开(公告)号：US20210126994A1

公开(公告)日：2021-04-29

申请号：US17074760

申请日：2020-10-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Junghoon PARK ,  Hyunseok KIM ,  Hoyeong LIM ,  Seunggoo KANG ,  Moonki YEO ,  Seungbo SHIM ,  Yongseung YI ,  Dongil SON

IPC: H04M1/02 ,  H02M3/158 ,  G06F1/3203 ,  H05K3/30 ,  H01M10/42

Abstract: According to an embodiment disclosed in the specification, an electronic device comprises a battery disposed inside the electronic device; a printed circuit board (PCB) disposed inside the electronic device; at least one electronic component disposed on the PCB; and a first buck converter having a first end and a second end, wherein the first end is routed to the battery; and a second buck converter having a first end and a second end, wherein the first end is selectively electrically connected to the second end of the first buck converter, and the second end is routed to the at least one electronic component, and wherein the first buck converter and the second buck converter are configured to boost a voltage provided from the battery through an electrical path formed from the battery by the first end of the first buck converter, and the second end of the first buck converter, the first end of the second buck converter and the second end of the second buck converter to the at least one electronic component.

公开(公告)号：US20200013595A1

公开(公告)日：2020-01-09

申请号：US16259185

申请日：2019-01-28

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yongwoo LEE ,  Youngjin NOH ,  Dowon KIM ,  Donghyeon NA ,  Seungbo SHIM

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/683

Abstract: An electrostatic chuck includes a chuck base having a first hole, an upper plate provided on the chuck base, the upper plate having a second hole aligned with the first hole, and an adhesive layer attaching the upper plate to the chuck base, the adhesive layer having a thickness that is less than a diameter of the first hole and equal to a diameter of the second hole.

公开(公告)号：US20250146917A1

公开(公告)日：2025-05-08

申请号：US19018240

申请日：2025-01-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yoonbum NAM ,  Namkyun KIM ,  Seungbo SHIM ,  Donghyeon NA ,  Naohiko OKUNISHI ,  Dongseok HAN ,  Minyoung HUR ,  Byeongsang KIM ,  Kuihyun YOON

IPC: G01N9/24 ,  H01Q1/40 ,  H01Q9/30

Abstract: An apparatus for measuring parameters of plasma includes a cutoff probe. The cutoff probe includes: a first antenna having a line shape and configured to emit a microwave to the plasma in response to the signal provided by at least one processor; a second antenna having a line shape and configured to generate an electrical signal in response to receiving the microwave emitted by the first antenna and transferred through the plasma; a first insulating layer; a second insulating layer; a first shield; a second shield; an end protection layer covering an end of each of the first insulating layer, the second insulating layer, the first shield, and the second shield; a first antenna protection layer, of insulating nature, covering the first antenna; and a second antenna protection layer, of insulating nature, covering the second antenna.

公开(公告)号：US20240136155A1

公开(公告)日：2024-04-25

申请号：US18232123

申请日：2023-08-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Changho KIM ,  Hyeongmo KANG ,  Illsang KO ,  Dooyoung GWAK ,  Kyungsun KIM ,  Namkyun KIM ,  Yirop KIM ,  Jihwan KIM ,  Seungbo SHIM ,  Minyoung HUR

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32128 ,  H01J37/32165 ,  H01J37/3244 ,  H01J2237/334

Abstract: Provided is a plasma control method including applying gas to a chamber having a wafer loaded therein, generating plasma by applying both radio frequency (RF) power associated with a first voltage at a first frequency and a second voltage at a second frequency that is lower than the first frequency to the chamber for a first time, cutting off the RF power after the first time elapses, continuously applying the second voltage of the second frequency to the chamber for a second time, cutting off the second voltage after the second time elapses, continuously maintaining an off state of the RF power and an off state of the voltage for a third time, and performing an etching process on the wafer by using the plasma formed by the RF power and the second voltage after the third time elapses, wherein the RF power is a sine wave, and the second voltage is a square wave of a periodic pulse form.

公开(公告)号：US20230259169A1

公开(公告)日：2023-08-17

申请号：US18308269

申请日：2023-04-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seungbo SHIM ,  Junghyung KIM ,  Hankon KIM ,  Daehee PARK ,  Junkyu PARK ,  Dongil SON ,  Jaehoon SONG ,  Duhoon JUNG ,  Myungkyoon CHUNG

IPC: G06F1/16 ,  G06F21/34

CPC classification number: G06F1/1652 ,  G06F1/1624 ,  G06F21/34

Abstract: An electronic device, according to various embodiments, comprises: a first housing; a second housing movable with respect to the first housing; a motor configured to move the second housing to be retracted and/or drawn out with respect to the first housing; a display having a display area having a size that can be changed according to the movement of the second housing; and a processor operatively connected to the motor and the display. The processor may be configured to: detect an occurrence of an event related to at least one external electronic device connected to the electronic device; determine whether the event satisfies a specified condition for changing the size of the display area; and in response to the event satisfying the specified condition, control the motor to move the second housing to change the size of the display area.