Methods of detecting inhomogeneity of a layer and apparatus for performing the same
    11.
    发明授权
    Methods of detecting inhomogeneity of a layer and apparatus for performing the same 有权
    检测层的不均匀性的方法及其执行方法

    公开(公告)号:US09528949B2

    公开(公告)日:2016-12-27

    申请号:US14197737

    申请日:2014-03-05

    CPC classification number: G01N23/20025 G01N2223/611

    Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

    Abstract translation: 在检测层的不均匀性的方法中,入射光可以在第一入射角位置被照射到层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此,可以发现具有斑点的层。

    APPARATUS FOR TESTING ELECTRONIC DEVICES
    12.
    发明申请
    APPARATUS FOR TESTING ELECTRONIC DEVICES 审中-公开
    用于测试电子设备的装置

    公开(公告)号:US20160139198A1

    公开(公告)日:2016-05-19

    申请号:US14920252

    申请日:2015-10-22

    CPC classification number: G01R31/2874 G11C29/06 G11C29/56016

    Abstract: An apparatus for testing electronic devices may include a test chamber, a heating unit, a cooling unit and a controller. The test chamber may include a plurality of slots configured to receive the electronic devices. The heating unit may heat the electronic devices in the slots. The cooling unit may individually cool the electronic devices in the slots. The controller may selectively control operations of the heating unit and the cooling unit in accordance with temperatures in the slots. Thus, the electronic devices may be provided with a uniform test temperature so that reliability of test results may be improved.

    Abstract translation: 用于测试电子设备的设备可以包括测试室,加热单元,冷却单元和控制器。 测试室可以包括被配置为接收电子设备的多个狭槽。 加热单元可以加热槽中的电子设备。 冷却单元可以单独地冷却槽中的电子设备。 控制器可以根据槽中的温度选择性地控制加热单元和冷却单元的操作。 因此,电子设备可以具有均匀的测试温度,从而可以提高测试结果的可靠性。

    Methods of Detecting Inhomogeneity of a Layer and Apparatus for Performing the Same
    15.
    发明申请
    Methods of Detecting Inhomogeneity of a Layer and Apparatus for Performing the Same 有权
    检测层的不均匀性的方法及其执行装置

    公开(公告)号:US20140270078A1

    公开(公告)日:2014-09-18

    申请号:US14197737

    申请日:2014-03-05

    CPC classification number: G01N23/20025 G01N2223/611

    Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

    Abstract translation: 在检测层的不均匀性的方法中,入射光可以在第一入射角位置被照射到该层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此,可以发现具有斑点的层。

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