Abstract:
A semiconductor package apparatus includes a first semiconductor chip bonded onto a substrate of which metal wire turning upward; and a second semiconductor chip conductively bonded onto the first semiconductor chip in a vertical direction such that a metal wire of the second semiconductor chip and the metal wire of the first semiconductor chip have facing points. The semiconductor package apparatus includes a third semiconductor chip conductively bonded onto the first semiconductor chip in the vertical direction to be disposed horizontally with the second semiconductor chip such that a metal wire of the third semiconductor chip and the metal wire of the first semiconductor chip have facing points.
Abstract:
A method of forming a metal wiring of a semiconductor device, and devices thereof. A method of forming a metal wiring, and devices thereof, may maximize semiconductor yield by substantially removing oxide on and/or over a trench and/or by substantially removing a by-product that may remain on and/or over a surface of a wafer. A method of forming a metal wiring of a semiconductor may include forming a dielectric layer on and/or over a metal wiring. A method of forming a metal wiring of a semiconductor may include forming a contact hole, which may expose a partial surface of metal wiring, on and/or over a dielectric layer. A method of forming a metal wiring of a semiconductor may include performing an oxide removing process on and/or over an inner side of a contact hole, and/or performing a by-product removing process on and/or over an inner side wall of a trench.
Abstract:
A semiconductor device includes a substrate formed with a predetermined trench, a plurality of devices fixed into the trench, an etch stop layer on an entire surface of the substrate including the devices while selectively exposing the devices, an interlayer dielectric layer on the etch stop layer, in which the interlayer dielectric layer includes a predetermined via hole and a predetermined trench, and a via plug and a metal line formed on the interlayer dielectric layer while filling the via hole and the trench.
Abstract:
A CMOS Image Sensor (CIS) that minimizes light loss and achieves maximized performance. The CIS includes a plurality of metal wirings provided on and/or over a semiconductor substrate and surrounded, respectively, by a dielectric layer, a silicon layer deposited on and/or over the plurality of metal wirings, a photodiode and a plurality of transistors provided at the silicon layer, a color filter formed on and/or over the transistors, and via-contacts penetrated through the silicon layer, the photodiode being connected to the plurality of metal wirings by the via-contacts and gap-fillers. The photodiodes and the transistors are formed after forming the metal line.
Abstract:
Embodiments relate to a semiconductor device and to a method of fabricating a semiconductor device. According to embodiments, reliability may be enhanced by removing oxide from a barrier metal surface. According to embodiments, a method may include forming an insulating layer on and/or over a metal layer formed on and/or over a substrate, forming a via hole by etching the insulating layer to expose the metal layer, forming a trench by etching a portion of the insulating layer in an area having the via hole formed therein, forming a barrier metal layer on and/or over the insulating layer including the trench and the via hole, performing plasma processing on the barrier metal layer, and forming a seed Cu layer on the barrier metal layer.
Abstract:
An image sensor and a method for fabricating the same having enhanced sensivity. The image sensor enhances sensitivity and minimizes optical loss by isolating color filters from each other using a metal that has superior light reflection properties while having no effect on the color filters during deposition of the metal.
Abstract:
In driving a plasma display device, a driving time is accumulatively calculated, and the number of subfields to which a main reset waveform for initializing every discharge cell is supplied in a first frame in which the accumulative driving time is longer than a reference time is larger than the number of subfields to which the main reset waveform is supplied in a second frame in which the accumulative driving time is shorter than the reference time. By increasing the number of subfields to which the main reset waveform is supplied in a single frame with an increase in the accumulative driving time of the plasma display device, a discharge delay can be reduced by using priming particles formed by a main reset.
Abstract:
A plasma display includes a plasma display panel having a plurality of first electrodes, a plurality of second electrodes, a plurality of third electrodes crossing the first and second electrodes, and discharge cells corresponding to electrode crossings, and a controller configured to control reset, address and sustain operations for a plurality of weighted subfields, and to control a misfire prevention operation, the misfire prevention operation occurring before a main reset operation in a subfield that includes the main reset operation.
Abstract:
An image sensor is provided. The image sensor includes a transistor region over a substrate, an interlayer insulating layer having a via hole over the transistor region, a silicon layer over the interlayer insulating layer, and a photodiode over the silicon layer.
Abstract:
In a plasma display panel, sustain discharge pulses having a first voltage and a second voltage, which is a negative voltage of the first voltage, may be applied to a scan electrode when a sustain electrode is biased with the ground voltage during a sustain period. The second voltage is generated without providing an additional power source but rather by a sustain discharge supply circuit, supplied with the first voltage, that repeatedly performs switching operations to generate the second voltage.