公开(公告)号：US08450906B2

公开(公告)日：2013-05-28

申请号：US13449072

申请日：2012-04-17

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Masafumi Iwaki ,  Masanori Ueda ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Motoaki Hara

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Masafumi Iwaki ,  Masanori Ueda ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Motoaki Hara

IPC分类号： H01L41/09 ,  H03H9/00

CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/132 ,  H03H9/706

摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the substrate and the lower electrode, an upper electrode provided on the piezoelectric film, and an additional pattern, a cavity being formed between the lower electrode and the substrate in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film, the additional pattern being provided in a position that is on the lower electrode and includes an interface between the resonance portion and a non-resonance portion.

摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在基板和下电极上的压电膜，设置在压电膜上的上电极和附加图案，空腔形成在该基板 所述下电极和所述基板在所述下电极和所述上电极通过所述压电膜彼此面对的共振部中，所述附加图案设置在所述下电极上并且包括所述共振部和所述共振部之间的界面的位置 非共振部分。

公开(公告)号：US20110006860A1

公开(公告)日：2011-01-13

申请号：US12921150

申请日：2008-03-04

申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

IPC分类号： H03H9/17 ,  H01L41/053

CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/023

摘要： A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

摘要翻译： 本发明的压电薄膜谐振器具有基板1，设置在基板1上并由绝缘体形成的中间层7，设置在中间层7上的下部电极3，设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5，其间插入压电膜4，其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中，或在下部电极3和中间层7之间，并且空间6的区域包含在谐振区域8中。通过这种结构，振动能量从基板 可以抑制共振部分，从而提高质量因素。

公开(公告)号：US20100060384A1

公开(公告)日：2010-03-11

申请号：US12494990

申请日：2009-06-30

申请人： Shinji TANIGUCHI ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

发明人： Shinji TANIGUCHI ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

IPC分类号： H03H9/205 ,  H01L41/04

CPC分类号： H03H9/173 ,  H03H9/02133 ,  H03H9/132 ,  H03H9/205 ,  H03H9/564 ,  H03H9/568

摘要： A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

摘要翻译： 滤波器具有多个压电薄膜谐振器，其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠，其轮廓包括曲线。 在多个压电薄膜谐振器中，相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​，可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此，可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。

公开(公告)号：US08653908B2

公开(公告)日：2014-02-18

申请号：US12921150

申请日：2008-03-04

申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

IPC分类号： H03H9/54

CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/023

摘要： A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

摘要翻译： 本发明的压电薄膜谐振器具有基板1，设置在基板1上并由绝缘体形成的中间层7，设置在中间层7上的下部电极3，设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5，其间插入压电膜4，其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中，或在下部电极3和中间层7之间，并且空间6的区域包含在谐振区域8中。通过这种结构，振动能量从基板 可以抑制共振部分，从而提高质量因素。

公开(公告)号：US08240015B2

公开(公告)日：2012-08-14

申请号：US12627412

申请日：2009-11-30

申请人： Takeshi Sakashita ,  Motoaki Hara ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Takeshi Sakashita ,  Motoaki Hara ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H04R17/10 ,  H01L41/22 ,  B05D5/12

CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/173 ,  H03H9/605 ,  H03H9/706 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method of producing a piezoelectric thin film resonator is provided. A sacrificial layer is formed on a part of the piezoelectric film. The sacrificial layer is patterned, and thereafter an upper electrode is formed on the piezoelectric layer. The method further includes removing the sacrificial layer formed on the piezoelectric layer; and patterning the piezoelectric film. In the step of removing the sacrificial layer, the sacrificial layer is removed such that at least a portion of the periphery of the upper electrode has a reversely tapered shape that reflects the tapered portion of the sacrificial layer, and in the step of patterning the piezoelectric film, the piezoelectric film is removed such that a lower end of the reversely tapered periphery of the upper electrode is placed so as to coincide with or to be in the vicinity of an end portion of the patterned piezoelectric film.

摘要翻译： 提供了一种制造压电薄膜谐振器的方法。 在压电膜的一部分上形成牺牲层。 将牺牲层图案化，然后在压电层上形成上电极。 该方法还包括去除形成在压电层上的牺牲层; 并构图压电膜。 在去除牺牲层的步骤中，去除牺牲层，使得上电极的周边的至少一部分具有反映牺牲层的锥形部分的倒锥形形状，并且在图案化压电 膜，去除压电膜，使得上电极的倒锥形周边的下端被放置成与图案化压电膜的端部一致或靠近。

公开(公告)号：US08125297B2

公开(公告)日：2012-02-28

申请号：US12512794

申请日：2009-07-30

申请人： Masafumi Iwaki ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Masanori Ueda

发明人： Masafumi Iwaki ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Masanori Ueda

IPC分类号： H03H9/70 ,  H03H9/54 ,  H03H9/64 ,  H03H9/72

CPC分类号： H03H9/725 ,  H03H7/18 ,  H03H9/706

摘要： A filter includes: a first filter unit includes: a series resonators connected in series to each other between a first input terminal and a first output terminal; a parallel resonators each having one end connected to one terminal of each of the series resonators; and a common inductance having one end connected to the other ends of the parallel resonators and the other end connected to a ground terminal, and a second filter unit includes: a series resonators connected in series to each other between a second input terminal and a second output terminal; a parallel resonators each having one end connected to one terminal of each of the series resonators; and a common inductance having one end connected to the other ends of the parallel resonators and the other end connected to the ground terminal.

摘要翻译： 滤波器包括：第一滤波器单元，包括：在第一输入端和第一输出端之间彼此串联连接的串联谐振器; 每个并联谐振器的一端连接到每个串联谐振器的一个端子; 以及公共电感，其一端连接到并联谐振器的另一端并且另一端连接到接地端子，并且第二滤波器单元包括：在第二输入端子和第二输入端子之间彼此串联连接的串联谐振器 输出端子 每个并联谐振器的一端连接到每个串联谐振器的一个端子; 以及公共电感，其一端连接到并联谐振器的另一端，另一端连接到接地端子。

公开(公告)号：US08125298B2

公开(公告)日：2012-02-28

申请号：US12684481

申请日：2010-01-08

申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

IPC分类号： H03H9/70 ,  H03H9/72 ,  H03H9/54 ,  H03H9/64

CPC分类号： H03H9/725 ,  H03H9/0571 ,  H03H9/706

摘要： An acoustic wave filter having excellent steepness is provided without adding any exterior components or any new manufacturing steps. A plurality of filters (10-1) each having a first resonator (2a-1) placed in a serial arm and having a resonance frequency frs and an anti-resonance frequency fas, and a second resonator (4a-1) placed in a parallel arm and having a resonance frequency frp and an anti-resonance frequency fap are provided on a same substrate, where the resonance frequency frs of the first resonator is higher than the resonance frequency frp of the second resonator; the anti-resonance frequency fas of the first resonator is higher than the anti-resonance frequency fap of the second resonator; and the filters (10-1) are connected in multiple stages. At least one of the filters (10-1) connected in multiple stages has a third resonator (6-1) having a resonance frequency frp and an anti-resonance frequency fap. The third resonator (6-1) is formed on the substrate and connected to the serial arm in parallel with respect to the first resonator (2a-1).

摘要翻译： 提供了具有优异陡度的声波滤波器，而不增加任何外部部件或任何新的制造步骤。 多个滤波器（10-1），每个滤波器（10-1）具有放置在串联臂中的第一谐振器（2a-1），并具有谐振频率frs和反共振频率fas，以及放置在 平行臂并具有共振频率frp和反共振频率fap设​​置在同一基板上，其中第一谐振器的谐振频率frs高于第二谐振器的谐振频率frp; 第一谐振器的反共振频率fas高于第二谐振器的反共振频率fap; 并且过滤器（10-1）分成多个阶段连接。 多级连接的滤波器（10-1）中的至少一个具有谐振频率frp和反共振频率fap的第三谐振器（6-1）。 第三谐振器（6-1）形成在基板上并相对于第一谐振器（2a-1）并联连接到串联臂。

公开(公告)号：US08084919B2

公开(公告)日：2011-12-27

申请号：US12535186

申请日：2009-08-04

申请人： Tokihiro Nishihara ,  Motoaki Hara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

发明人： Tokihiro Nishihara ,  Motoaki Hara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

IPC分类号： H01L41/09

CPC分类号： H03H9/174 ,  H03H9/02118 ,  H03H9/13 ,  H03H9/132 ,  H03H9/568 ,  H03H2003/0435

摘要： A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, the lower electrode and the upper electrode opposing each other through the piezoelectric film to form an opposing region, the opposing region including a space at a boundary of the opposing region. The space extends from an innerside to an outer side of the opposing region and is formed in or on the piezoelectric film.

摘要翻译： 压电薄膜谐振器包括基板，形成在基板上的下电极，形成在下电极上的压电薄膜，以及形成在压电薄膜上的上电极，通过压电薄膜相对的下电极和上电极 以形成相对区域，相对区域包括在相对区域的边界处的空间。 该空间从内侧延伸到相对区域的外侧，并且形成在压电膜中或上。

公开(公告)号：US20110241800A1

公开(公告)日：2011-10-06

申请号：US13127215

申请日：2008-11-28

申请人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H03H9/205 ,  H03H3/04

CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/564 ,  H03H9/568 ,  H03H2003/0414 ,  H03H2003/0428 ,  Y10T29/42 ,  Y10T29/49005

摘要： A method of manufacturing an elastic wave device is provided with a lamination step of forming, on a substrate (1), a plurality of elastic wave devices, each of which includes a lower electrode (2), a piezoelectric film (3), and an upper electrode (4); a measuring step for measuring the operation frequency distribution of the elastic wave devices on the substrate (1); and an adjusting step for forming an adjusting region, in which the thickness of the elastic wave device is different from the thicknesses of other portions in a resonance portion of each elastic wave device, corresponding with the distribution of the operation frequencies. The adjusting region is formed so that the size of the area of the adjusting region of the resonator portion of each elastic wave device is different in accordance with the operation frequency distribution that is measured. Thus, the frequency characteristics of the elastic wave devices are easily adjusted by a small number of steps.

摘要翻译： 一种制造弹性波装置的方法具有层压步骤，在基板（1）上形成多个弹性波装置，每个弹性波装置包括下电极（2），压电薄膜（3）和 上电极（4）; 用于测量衬底（1）上的弹性波器件的操作频率分布的测量步骤; 以及用于形成调整区域的调整步骤，其中弹性波器件的厚度与每个弹性波器件的谐振部分中的其它部分的厚度不同，与对应于操作频率的分布相对应。 调整区域被形成为使得每个弹性波装置的谐振器部分的调整区域的面积的大小根据所测量的操作频率分布而不同。 因此，弹性波器件的频率特性可以通过少量的步骤容易地调节。

公开(公告)号：US20100117762A1

公开(公告)日：2010-05-13

申请号：US12547235

申请日：2009-08-25

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Masafumi Iwaki ,  Masanori Ueda ,  Go Endo ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Motoaki Hara

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Masafumi Iwaki ,  Masanori Ueda ,  Go Endo ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Motoaki Hara

IPC分类号： H03H9/15

CPC分类号： H03H9/605 ,  H03H3/02 ,  H03H9/131 ,  H03H9/173 ,  H03H9/587 ,  H03H2003/021

摘要： A resonator includes a substrate, a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. The lower electrode includes a first film provided on the substrate, and a second film that is provided on the first film and has a specific gravity greater than that of the first film. The piezoelectric film is provided on the second film. The upper electrode includes a third film provided on the piezoelectric film, and a fourth film provided on the third film, the third film having a specific gravity greater than that of the fourth film. The third film is thicker than the second film.

摘要翻译： 谐振器包括基板，下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。 下电极包括设置在基板上的第一膜和设置在第一膜上并具有比第一膜大的比重的第二膜。 压电薄膜设置在第二薄膜上。 上电极包括设置在压电膜上的第三膜和设置在第三膜上的第四膜，第三膜的比重大于第四膜的比重。 第三个薄膜比第二个薄膜厚。