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    FILM BULK ACOUSTIC RESONATOR, FILTER, COMMUNICATION MODULE AND COMMUNICATION APPARATUS
    3.
    发明申请
    FILM BULK ACOUSTIC RESONATOR, FILTER, COMMUNICATION MODULE AND COMMUNICATION APPARATUS 有权
    电影大容量声学谐振器，滤波器，通信模块和通信设备

    公开(公告)号：US20110006860A1

    公开(公告)日：2011-01-13

    申请号：US12921150

    申请日：2008-03-04

    申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    IPC分类号： H03H9/17 ,  H01L41/053

    CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/023

    摘要： A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

    摘要翻译： 本发明的压电薄膜谐振器具有基板1，设置在基板1上并由绝缘体形成的中间层7，设置在中间层7上的下部电极3，设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5，其间插入压电膜4，其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中，或在下部电极3和中间层7之间，并且空间6的区域包含在谐振区域8中。通过这种结构，振动能量从基板 可以抑制共振部分，从而提高质量因素。

    Elastic wave device and method for manufacturing the same
    5.
    发明授权
    Elastic wave device and method for manufacturing the same 有权
    弹性波装置及其制造方法

    公开(公告)号：US08854158B2

    公开(公告)日：2014-10-07

    申请号：US13127215

    申请日：2008-11-28

    申请人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

    发明人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

    IPC分类号： H03H9/54 ,  H03H3/04 ,  H03H9/56 ,  H03H9/17

    CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/564 ,  H03H9/568 ,  H03H2003/0414 ,  H03H2003/0428 ,  Y10T29/42 ,  Y10T29/49005

    摘要： A method of manufacturing an elastic wave device is provided with a lamination step of forming, on a substrate (1), a plurality of elastic wave devices, each of which includes a lower electrode (2), a piezoelectric film (3), and an upper electrode (4); a measuring step for measuring the operation frequency distribution of the elastic wave devices on the substrate (1); and an adjusting step for forming an adjusting region, in which the thickness of the elastic wave device is different from the thicknesses of other portions in a resonance portion of each elastic wave device, corresponding with the distribution of the operation frequencies. The adjusting region is formed so that the size of the area of the adjusting region of the resonator portion of each elastic wave device is different in accordance with the operation frequency distribution that is measured. Thus, the frequency characteristics of the elastic wave devices are easily adjusted by a small number of steps.

    摘要翻译： 一种制造弹性波装置的方法具有层压步骤，在基板（1）上形成多个弹性波装置，每个弹性波装置包括下电极（2），压电薄膜（3）和 上电极（4）; 用于测量衬底（1）上的弹性波器件的操作频率分布的测量步骤; 以及用于形成调整区域的调整步骤，其中弹性波器件的厚度与每个弹性波器件的谐振部分中的其它部分的厚度不同，与对应于操作频率的分布相对应。 调整区域被形成为使得每个弹性波装置的谐振器部分的调整区域的面积的大小根据所测量的操作频率分布而不同。 因此，弹性波器件的频率特性可以通过少量的步骤容易地调节。

    Filter, duplexer and communication apparatus
    8.
    发明授权
    Filter, duplexer and communication apparatus 有权
    滤波器，双工器和通信设备

    公开(公告)号：US08093962B2

    公开(公告)日：2012-01-10

    申请号：US12494990

    申请日：2009-06-30

    申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

    发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

    IPC分类号： H03H9/70 ,  H03H9/54

    CPC分类号： H03H9/173 ,  H03H9/02133 ,  H03H9/132 ,  H03H9/205 ,  H03H9/564 ,  H03H9/568

    摘要： A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

    摘要翻译： 滤波器具有多个压电薄膜谐振器，其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠，其轮廓包括曲线。 在多个压电薄膜谐振器中，相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​，可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此，可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。

    Acoustic wave filter, duplexer using the acoustic wave filter, and communication apparatus using the duplexer
    10.
    发明授权
    Acoustic wave filter, duplexer using the acoustic wave filter, and communication apparatus using the duplexer 有权
    声波滤波器，使用声波滤波器的双工器，以及使用双工器的通信设备

    公开(公告)号：US08125298B2

    公开(公告)日：2012-02-28

    申请号：US12684481

    申请日：2010-01-08

    申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

    IPC分类号： H03H9/70 ,  H03H9/72 ,  H03H9/54 ,  H03H9/64

    CPC分类号： H03H9/725 ,  H03H9/0571 ,  H03H9/706

    摘要： An acoustic wave filter having excellent steepness is provided without adding any exterior components or any new manufacturing steps. A plurality of filters (10-1) each having a first resonator (2a-1) placed in a serial arm and having a resonance frequency frs and an anti-resonance frequency fas, and a second resonator (4a-1) placed in a parallel arm and having a resonance frequency frp and an anti-resonance frequency fap are provided on a same substrate, where the resonance frequency frs of the first resonator is higher than the resonance frequency frp of the second resonator; the anti-resonance frequency fas of the first resonator is higher than the anti-resonance frequency fap of the second resonator; and the filters (10-1) are connected in multiple stages. At least one of the filters (10-1) connected in multiple stages has a third resonator (6-1) having a resonance frequency frp and an anti-resonance frequency fap. The third resonator (6-1) is formed on the substrate and connected to the serial arm in parallel with respect to the first resonator (2a-1).

    摘要翻译： 提供了具有优异陡度的声波滤波器，而不增加任何外部部件或任何新的制造步骤。 多个滤波器（10-1），每个滤波器（10-1）具有放置在串联臂中的第一谐振器（2a-1），并具有谐振频率frs和反共振频率fas，以及放置在 平行臂并具有共振频率frp和反共振频率fap设​​置在同一基板上，其中第一谐振器的谐振频率frs高于第二谐振器的谐振频率frp; 第一谐振器的反共振频率fas高于第二谐振器的反共振频率fap; 并且过滤器（10-1）分成多个阶段连接。 多级连接的滤波器（10-1）中的至少一个具有谐振频率frp和反共振频率fap的第三谐振器（6-1）。 第三谐振器（6-1）形成在基板上并相对于第一谐振器（2a-1）并联连接到串联臂。