公开(公告)号：US11770978B2

公开(公告)日：2023-09-26

申请号：US17104931

申请日：2020-11-25

Applicant: TDK CORPORATION

Inventor： Yugo Ishitani ,  Tomoyuki Sasaki ,  Yohei Shiokawa

IPC: H10N50/10 ,  G11C11/16 ,  H10B61/00 ,  H10N50/01 ,  H10N50/80 ,  H10N50/85

CPC classification number: H10N50/10 ,  G11C11/161 ,  G11C11/1673 ,  G11C11/1675 ,  H10B61/22 ,  H10N50/01 ,  H10N50/80 ,  H10N50/85

Abstract: A magnetization rotational element includes a spin-orbit torque wiring, and a first ferromagnetic layer which is located in a first direction with respect to the spin-orbit torque wiring and in which spins are injected from the spin-orbit torque wiring. The spin-orbit torque wiring has a plurality of spin generation layers and insertion layers located between the plurality of spin generation layers in the first direction. The insertion layers have a lower electrical resistivity than the spin generation layers.

公开(公告)号：US11641784B2

公开(公告)日：2023-05-02

申请号：US17077165

申请日：2020-10-22

Applicant: TDK CORPORATION

Inventor： Tomoyuki Sasaki ,  Yohei Shiokawa

IPC: H01L27/22 ,  H01L43/04 ,  H01L43/06 ,  H01L43/10 ,  H01L43/14

Abstract: A spin-current magnetization rotational element includes a spin orbit torque wiring extending in a first direction and a first ferromagnetic layer disposed in a second direction intersecting the first direction of the spin orbit torque wiring, the spin orbit torque wiring having a first surface positioned on the side where the first ferromagnetic layer is disposed, and a second surface opposite to the first surface, and the spin orbit torque wiring has a second region on the first surface outside a first region in which the first ferromagnetic layer is disposed, the second region being recessed from the first region to the second surface side.

公开(公告)号：US11063210B2

公开(公告)日：2021-07-13

申请号：US16844249

申请日：2020-04-09

Applicant: TDK CORPORATION

Inventor： Tomoyuki Sasaki ,  Yohei Shiokawa ,  Eiji Komura ,  Keita Suda

IPC: G11B5/31 ,  H01L43/10 ,  G11C11/18 ,  G11C11/16 ,  H01L43/08 ,  H01L43/06 ,  H01F10/32 ,  H01L43/04

Abstract: Provided is a spin-orbit-torque magnetization rotational element that suppresses re-adhesion of impurities during preparation and allows a write current to easily flow. The spin-orbit-torque magnetization rotational element includes a spin-orbit torque wiring that extends in a first direction, and a first ferromagnetic layer that is located on a side of one surface of the spin-orbit torque wiring. A side surface of the spin-orbit torque wiring and a side surface of the first ferromagnetic layer form a continuous inclined surface in any side surface.

公开(公告)号：US10944045B2

公开(公告)日：2021-03-09

申请号：US16271112

申请日：2019-02-08

Applicant: TDK CORPORATION

Inventor： Tomoyuki Sasaki ,  Yohei Shiokawa ,  Atsushi Tsumita

IPC: H01L43/04 ,  G11C11/18 ,  H01L27/22 ,  G11C11/16 ,  H01L43/08 ,  H01L43/10 ,  H01L43/14

Abstract: A magnetic memory including a plurality of magnetoresistance effect elements that hold information, each including a first ferromagnetic metal layer with a fixed magnetization direction, a second ferromagnetic metal layer with a varying magnetization direction, and a non-magnetic layer sandwiched between the first and second ferromagnetic metal layers; a plurality of first control elements that control reading of the information, wherein each of the plurality of first ferromagnetic metal layers is connected to a first control element; a plurality of spin-orbit torque wiring lines that extend in a second direction intersecting with a first direction which is a stacking direction of the magnetoresistance effect elements, wherein each of the second ferromagnetic metal layers is joined to one spin-orbit torque wiring line; a plurality of second control elements that control electric current flowing through the spin-orbit torque wiring lines.

公开(公告)号：US10943631B2

公开(公告)日：2021-03-09

申请号：US16114692

申请日：2018-08-28

Applicant: TDK CORPORATION

Inventor： Tomoyuki Sasaki ,  Yohei Shiokawa ,  Jiro Yoshinari

IPC: G11C11/16 ,  G01R33/09 ,  H01L43/04 ,  H01L43/08 ,  H01L43/10 ,  H01L43/14 ,  H01L43/06 ,  G11C11/18 ,  H01L43/02

Abstract: A spin current magnetization reversing element (100) includes a spin orbit torque wiring layer (101) that extends in one direction, a first ferromagnetic layer (102) that is formed on a first surface (101a) of the spin orbit torque wiring layer, and a first insulating layer (103) that is formed on a second surface (101b) on a side opposite to the first ferromagnetic layer (102) side on the surface of the spin orbit torque wiring layer. The first insulating layer (103) contains boron nitride or aluminum nitride.

公开(公告)号：US10770214B2

公开(公告)日：2020-09-08

申请号：US16292840

申请日：2019-03-05

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa

IPC: H01F10/32 ,  G11C11/16 ,  H01L43/02 ,  H01L27/22 ,  H01L45/00

Abstract: A spin-orbit-torque magnetization rotational element includes: a spin-orbit-torque wiring extending in a first direction; a first ferromagnetic layer laminated on one surface of the spin-orbit-torque wiring; and a first electrode and a second electrode connected to the spin-orbit-torque wiring at positions sandwiching the first ferromagnetic layer in a plan view, wherein at least one of the first electrode and the second electrode includes therein a switching layer configured to shift between a high resistance state and a low resistance state with a predetermined threshold voltage as a boundary to allow an electric current to flow bidirectionally.

公开(公告)号：US10762941B2

公开(公告)日：2020-09-01

申请号：US16412541

申请日：2019-05-15

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa

IPC: G11C11/16 ,  H01L43/10 ,  H01L27/22 ,  H01L43/06 ,  H01L43/08

Abstract: A spin-orbit torque magnetization rotating element includes a spin-orbit torque wiring and a laminated body laminated on the spin-orbit torque wiring. The laminated body includes a first ferromagnetic layer independently having an axis of easy magnetization in a first direction, a nonmagnetic antiferromagnetic coupling layer, and a second ferromagnetic layer independently having an axis of easy magnetization in a second direction, in order from the side of the spin-orbit torque wiring, and the first direction crosses the second direction.

公开(公告)号：US10593868B2

公开(公告)日：2020-03-17

申请号：US16091240

申请日：2018-01-26

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: H01L43/04 ,  H01L43/02 ,  H01L43/10 ,  H01L27/22 ,  H01F10/32 ,  G11C11/16 ,  H01L21/8239 ,  H01L43/08 ,  H01L43/12

Abstract: A spin current magnetization rotating element of the present disclosure includes a first ferromagnetic metal layer and a spin-orbit torque wiring, in which the spin-orbit torque wiring has a structure in which spin conduction layers and interface spin generation layers are alternately laminated, and one of the spin conduction layers is in closest proximity to the first ferromagnetic metal layer.

公开(公告)号：US10593388B2

公开(公告)日：2020-03-17

申请号：US16080848

申请日：2018-01-26

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: G11C11/16 ,  H01L43/04 ,  H01L43/10 ,  H01L27/22 ,  H01L29/82 ,  H01L43/08 ,  H01L27/105 ,  H01L21/8239

Abstract: A spin current magnetization rotational element includes: a first ferromagnetic metal layer for a magnetization direction to be changed; and a spin-orbit torque wiring. The spin-orbit torque wiring has a structure in which a spin conduction layer and an interfacial spin generation layer are alternately laminated in the first direction, the number of a plurality of the interfacial spin generation layers is two or greater, and in the spin-orbit torque wiring, one of the plurality of interfacial spin generation layers is closest to the first ferromagnetic metal layer.

公开(公告)号：US10586916B2

公开(公告)日：2020-03-10

申请号：US15778115

申请日：2016-11-25

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: G11C11/16 ,  G01R33/09 ,  H01L43/08 ,  H03B15/00 ,  H01L43/06 ,  H01L27/22 ,  H01L43/02 ,  H01L43/10 ,  H01L43/14

Abstract: A spin current magnetization reversal element includes: a first ferromagnetic metal layer with a changeable magnetization direction, and a spin-orbit torque wiring, wherein a first direction is defined as a direction perpendicular to a surface of the first ferromagnetic metal layer, the wiring extends in a second direction intersecting the first and is bonded to a first surface of the first ferromagnetic metal layer, wherein the wiring includes a pure spin current generator which is bonded to the metal layer, and a low-resistance portion which is connected to both ends of the generator in the second direction and is formed of a material having a smaller electrical resistivity than the generator, and the generator is formed so that an area of a cross-section orthogonal to the first direction continuously and/or stepwisely increases as it recedes from a bonding surface bonded to the first ferromagnetic metal layer in the first direction.