公开(公告)号：US09343260B2

公开(公告)日：2016-05-17

申请号：US14000236

申请日：2012-02-29

申请人： Kotoko Urano ,  Takeshi Kawasaki ,  Noboru Moriya ,  Tomonori Nakano

发明人： Kotoko Urano ,  Takeshi Kawasaki ,  Noboru Moriya ,  Tomonori Nakano

IPC分类号： H01J3/14 ,  H01J37/153

CPC分类号： H01J37/153 ,  H01J2237/1534

摘要： In order to realize a multiple assembled easily with high accuracy, a multipole having assembly accuracy within 10 micrometer and within several seconds of angle is achieved by fixing multipole elements by being guided by grooves provided on an inner side of a cylindrical housing to form the multipole.

摘要翻译： 为了实现高精度的多次组装，通过由设置在圆柱形壳体的内侧上的槽引导固定多极元件来实现具有10微米和几秒钟内的组装精度的多极，以形成多极 。

公开(公告)号：US08772732B2

公开(公告)日：2014-07-08

申请号：US13502754

申请日：2010-09-29

申请人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose

发明人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose

IPC分类号： H01J37/28

CPC分类号： H01J37/153 ,  H01J37/28

摘要： Disclosed is a scanning charged particle beam apparatus equipped with an aberration corrector, contrived to eliminate resolution degradation in tilt observation by a chromatic third-order aperture aberration without relying on a specific optical system. A controller of the scanning charged particle beam apparatus provides a chromatic third-order aperture aberration measurement method relevant to tilt observation of a specimen. Further, the controller has a chromatic aberration control function relevant to tilt observation of a specimen. By means of the chromatic aberration control function, the controller controls a chromatic aberration to be positive or negative, rather than remaining at 0, in order to eliminate an image blur which occurs in a direction parallel to the specimen surface due to a chromatic third-order aperture aberration and a chromatic aberration at a tilt angle (t1) under observation and another tilt angle (−t1) axially opposite to the tilt angle.

摘要翻译： 公开了一种装备有像差校正器的扫描带电粒子束装置，其被设计为消除了通过彩色三阶孔径像差的倾斜观察中的分辨率劣化，而不依赖于特定的光学系统。 扫描带电粒子束装置的控制器提供与样本的倾斜观察相关的彩色三阶孔径像差测量方法。 此外，控制器具有与样本的倾斜观察相关的色差控制功能。 通过色差控制功能，控制器将色差控制为正或负，而不是保持在0，以消除由于色差三分之一而在与样本表面平行的方向上发生的图像模糊。 在观察时的倾斜角度（t1）和与倾斜角度轴向相反的另一个倾斜角度（-t1）的色差。

公开(公告)号：US08436899B2

公开(公告)日：2013-05-07

申请号：US12535021

申请日：2009-08-04

申请人： Takeshi Kawasaki ,  Tomonori Nakano ,  Kotoko Hirose

发明人： Takeshi Kawasaki ,  Tomonori Nakano ,  Kotoko Hirose

IPC分类号： H04N7/18

CPC分类号： G01N23/203 ,  G01N2223/302

摘要： A tilted illumination observation method and observation device with easy adjustment, high speed, good reproducibility and low cost is provided. A high resolution tilt image of a specimen is obtained by extracting the blurring on the scanning spot occurring during beam tilt from the image (step 6) captured by the tilted beam, and the image (step 4) captured from directly above the standard specimen; and then deconvoluting (step 11, 12) the tilted image of the target specimen (step 10) using the extracted scanning spot from the oblique beam.

摘要翻译： 提供了一种倾斜的照明观察方法和观察装置，其调节方便，速度快，再现性好，成本低。 通过从由倾斜光束拍摄的图像（步骤6）和从标准样品的正上方捕获的图像（步骤4）提取在光束倾斜期间发生的扫描点上的模糊，获得样本的高分辨率倾斜图像。 然后使用来自倾斜光束的提取的扫描光点对目标样本的倾斜图像进行去卷积（步骤11,12）（步骤10）。

公开(公告)号：US07915582B2

公开(公告)日：2011-03-29

申请号：US11958698

申请日：2007-12-18

申请人： Kotoko Hirose ,  Takeshi Kawasaki ,  Haruo Yoda ,  Tomonori Nakano

发明人： Kotoko Hirose ,  Takeshi Kawasaki ,  Haruo Yoda ,  Tomonori Nakano

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  H01J37/21 ,  H01J37/222 ,  H01J2237/216

摘要： A method for estimation of a probe shape, in a scanning electron microscope provided with an aberration corrector, and the method is designed so as to obtain a probe image, by inputting to a computer an image taken in a just-focused state and an image taken in a de-focused state, as an image data; preparing a correlation window by automatically determining a size of a correlation window image, based on an input data size and an output data size; executing cross-correlation calculation between the correlation window and a reference area; and repeating this calculation while shifting the reference area, so as to obtain a cross-correlation matrix, in order to stably obtain the probe image, without receiving effects of use conditions or noises.

摘要翻译： 在设置有像差校正器的扫描电子显微镜中用于估计探针形状的方法，并且该方法被设计成通过向计算机输入以正确聚焦状态拍摄的图像和图像来获得探针图像 以去焦点状态拍摄，作为图像数据; 通过基于输入数据大小和输出数据大小自动确定相关窗口图像的大小来准备相关窗口; 执行相关窗口和参考区域之间的互相关计算; 并且在移动参考区域的同时重复该计算，以获得互相关矩阵，以便稳定地获得探测图像，而不受到使用条件或噪声的影响。

公开(公告)号：US20090039281A1

公开(公告)日：2009-02-12

申请号：US12187635

申请日：2008-08-07

申请人： Takeshi KAWASAKI ,  Noboru Moriya ,  Tomonori Nakano ,  Kotoko Hirose

发明人： Takeshi KAWASAKI ,  Noboru Moriya ,  Tomonori Nakano ,  Kotoko Hirose

IPC分类号： H01J3/14 ,  G01N23/04

CPC分类号： G01N23/20 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/032 ,  H01J2237/1534 ,  H01J2237/28

摘要： The present invention provides an aberration corrector giving excellent assembly accuracy but having fewer parts and fewer adjustment locations in number. In order to achieve it, a multistage multipole is formed by arranging plural combinations of electrodes around an optical axis using alignment blocks, each combination of electrodes being made by brazing-integrating plural electrodes with a ceramic material interposed therebetween.

摘要翻译： 本发明提供一种像差校正器，其具有优异的组装精度，但具有较少的部件和较少的调节位置。 为了实现这一点，通过使用对准块布置围绕光轴的电极的多个组合来形成多级多极，电极的组合通过将陶瓷材料插入其间的多个电极进行钎焊积分而制成。

公开(公告)号：US20090008550A1

公开(公告)日：2009-01-08

申请号：US12121924

申请日：2008-05-16

申请人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Makoto Ezumi

发明人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Makoto Ezumi

IPC分类号： G01N23/00

CPC分类号： H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/221

摘要： A charged particle beam apparatus includes: a correction image acquisition part 52 for making a detector 20 acquire items of two-dimensional image data at different focal positions; a directional differentiation operation part 53 for obtaining directional derivative values in a plurality of directions for each of the items of two-dimensional image data at different focal positions; an aberration parameter calculation part 54 for obtaining aberration parameters according to previously determined methods by using the directional derivative values in a plurality of directions for each of the items of two-dimensional image data; an aberration correction value calculation part 55 for obtaining correction values for aberrations by using the aberration parameters; and a control part 56 for setting the correction values in a correction optical system control means to make an aberration corrector 16 correct the aberrations.

摘要翻译： 带电粒子束装置包括：校正图像获取部52，用于使检测器20获取不同焦点位置处的二维图像数据项; 方向微分运算部53，用于在不同的焦点位置获得每个二维图像数据项的多个方向的方向导数值; 像差参数计算部54，用于根据先前确定的方法通过对于每个二维图像数据使用多个方向上的方向导数值来获得像差参数; 用于通过使用像差参数获得像差的校正值的像差校正值计算部55; 以及用于在校正光学系统控制装置中设置校正值以使像差校正器16校正像差的控制部分56。

公开(公告)号：US20070221860A1

公开(公告)日：2007-09-27

申请号：US11802298

申请日：2007-05-22

申请人： Takeshi Kawasaki ,  Takaho Yoshida ,  Tomonori Nakano

发明人： Takeshi Kawasaki ,  Takaho Yoshida ,  Tomonori Nakano

IPC分类号： H01J3/14

CPC分类号： H01J37/153 ,  H01J37/1478 ,  H01J2237/0458 ,  H01J2237/1534 ,  H01J2237/2611 ,  H01J2237/2809 ,  H01J2237/2817

摘要： A scanning electron microscope includes an electron gun to generate an electron beam, and an electron optical system directing the electron beam to a specimen. The electron optical system includes an objective lens that converges the electron beam to a surface of the specimen, an aberration corrector disposed between the electron gun and the objective lens so as to at least compensate for aberration caused by the objective lens, and a tilter which tilts electron beam to be incident into the aberration corrector. The aberration corrector further compensates for aberration caused by the tilter.

摘要翻译： 扫描电子显微镜包括用于产生电子束的电子枪和将电子束引导到样品的电子光学系统。 电子光学系统包括将电子束会聚到样本表面的物镜，设置在电子枪和物镜之间的像差校正器，以至少补偿由物镜引起的像差，以及倾斜器 倾斜电子束入射到像差校正器中。 像差校正器进一步补偿由倾斜引起的像差。

公开(公告)号：US20060033037A1

公开(公告)日：2006-02-16

申请号：US11196256

申请日：2005-08-04

申请人： Takeshi Kawasaki ,  Takaho Yoshida ,  Tomonori Nakano

发明人： Takeshi Kawasaki ,  Takaho Yoshida ,  Tomonori Nakano

IPC分类号： H01J1/50 ,  H01J3/14

CPC分类号： H01J37/153 ,  H01J37/1478 ,  H01J2237/0458 ,  H01J2237/1534 ,  H01J2237/2611 ,  H01J2237/2809 ,  H01J2237/2817

摘要： The present invention provides a charged particle beam column that does not cause displacement of an image or degradation of a resolution of images when a charged particle beam is tilted at a large angle. In the charged particle beam column including an aberration corrector, a deflector is used to control the direction of incidence of the charged particle beam on a second condenser lens but the object point of a condenser lens is not shifted. Consequently, the converging charged particle beam is tilted at a large angle with respect to the surface of a specimen without the necessity of shifting the object point of an objective lens lying on the optical axis of the charged particle beam column. At this time, the aberration corrector prevents a shift of an image or degradation of a resolution derived from the tilt of the charged particle beam.

摘要翻译： 本发明提供一种带电粒子束柱，当带电粒子束以大角度倾斜时，其不会引起图像的位移或图像的分辨率的劣化。 在包括像差校正器的带电粒子束列中，使用偏转器来控制带电粒子束在第二聚光透镜上的入射方向，但聚光透镜的物点不发生偏移。 因此，会聚带电粒子束相对于试样的表面倾斜大角度，而不需要移动位于带电粒子束柱的光轴上的物镜的物点。 此时，像差校正器防止图像的偏移或由带电粒子束的倾斜导致的分辨率的劣化。

公开(公告)号：US08581190B2

公开(公告)日：2013-11-12

申请号：US13058540

申请日：2009-08-05

申请人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Hiroyuki Ito

发明人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Hiroyuki Ito

IPC分类号： G01N23/225

CPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/26 ,  H01J2237/282

摘要： Disclosed is a scanning charged particle microscope provided with an aberration measuring means that measures high-order geometrical aberration at high precision and high speed. An image obtained by a single-hole aperture and an image obtained by a multiple-hole aperture arranged in a region larger than that for the single-hole aperture are deconvoluted, an aberration quantity is determined based on the profiles of beams tilted in a plurality of directions and the obtained quantity is fed back to an aberration corrector.

摘要翻译： 公开了一种带有像差测量装置的扫描带电粒子显微镜，其以高精度和高速测量高阶几何像差。 通过单孔孔径获得的图像和通过布置在大于单孔孔径的区域中的多孔孔径获得的图像被去卷积，基于多个倾斜的光束的轮廓来确定像差量 的方向和所获得的量被反馈到像差校正器。

公开(公告)号：US08129680B2

公开(公告)日：2012-03-06

申请号：US12367811

申请日：2009-02-09

申请人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： G01N23/225

CPC分类号： H01J37/28 ,  H01J37/153 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/216

摘要： A focused charged particle beam apparatus including an aberration corrector, capable of finding the absolute value of the aberration coefficient at high speed, and capable of making high-accuracy adjustments at high speed. A deflection coil tilts the input beam relative to the object point, and measures the defocus data and aberration quantity at high speed while the beam is tilted from one image, and perform least squares fitting on these results to find the absolute value of the aberration coefficient prior to tilting the beam, and to adjust the aberration corrector.

摘要翻译： 一种聚焦带电粒子束装置，包括像差校正器，能够在高速下找到像差系数的绝对值，并能够高精度地进行高精度的调整。 偏转线圈相对于物点倾斜输入光束，并且当光束从一个图像倾斜时测量散焦数据和高速的像差量，并对这些结果进行最小二乘拟合以找到像差系数的绝对值 在倾斜光束之前，并调整像差校正器。