PIEZOELECTRIC MATERIAL
    14.
    发明申请
    PIEZOELECTRIC MATERIAL 有权
    压电材料

    公开(公告)号:US20090026408A1

    公开(公告)日:2009-01-29

    申请号:US12135980

    申请日:2008-06-09

    IPC分类号: H01L41/187

    CPC分类号: H01L41/1871 H01L41/43

    摘要: The present invention provides a piezoelectric material which can be applied even to the MEMS technique, exhibits satisfactory piezoelectricity even at high ambient temperatures and is environmentally clean, namely, a piezoelectric material including an oxide obtained by forming a solid solution composed of two perovskite oxides A(1)B(1)O3 and A(2)B(2)O3 different from each other in crystalline phase, the oxide being represented by the following general formula (1): X{A(1)B(1)O3}−(1−X){A(2)B(2)O3}  (1) wherein “A(1)” and “A(2)” are each an element including an alkali earth metal and may be the same or different from each other; “B(1)” and “B(2)” each include two or more metal elements, and either one of “B(1)” and “B(2)” contains Cu in a content of 3 atm % or more; and “X” satisfies the relation 0

    摘要翻译: 本发明提供一种甚至可以应用于MEMS技术的压电材料,即使在高环境温度下也表现出令人满意的压电性,并且是环境清洁的,即包括通过形成由两种钙钛矿氧化物A形成的固溶体获得的氧化物的压电材料 (1)在结晶相中彼此不同的B(1)O 3和A(2)B(2)O 3,所述氧化物由以下通式(1)表示:<?in-line-formula description =“In (1)B(1)O3} - (1-X){A(2)B(2)O3}(1)<?在线公式 description =“In-line Formulas”end =“tail”?>其中“A(1)”和“A(2)”分别是包含碱土金属的元素,可以相同或不同; “B(1)”和“B(2)”各自包含两个或更多个金属元素,“B(1)”和“B(2)”中的任一个含有3atm%以上的Cu; 和“X”满足0

    Structure of piezoelectric element and liquid discharge recording head, and method of manufacture therefor
    17.
    发明申请
    Structure of piezoelectric element and liquid discharge recording head, and method of manufacture therefor 失效
    压电元件和液体放电记录头的结构及其制造方法

    公开(公告)号:US20070002103A1

    公开(公告)日:2007-01-04

    申请号:US11515816

    申请日:2006-09-06

    IPC分类号: B41J2/045

    摘要: A piezoelectric element structure comprises a supporting substrate, and a piezoelectric film supported on the supporting substrate, in which the piezoelectric film contains a first layer, and a second layer having zirconium, each provided with perovskite structure, and formed to be in contact with each other or laminated through an intermediate layer, and the temperature is set at 500° C. or more at the time of thin film formation so as to provide the piezoelectric film, and a quick cooling is given from the thin film formation temperature at least to 450° C. with a cooling speed of 30° C./min or more for the formation thereof. The piezoelectric film thus formed is in a small thickness as compared with the conventional piezo-electric film, but presents a large piezoelectric constant, hence making it possible to perform efficient microprocessing thereof reliably.

    摘要翻译: 压电元件结构包括支撑基板和支撑在支撑基板上的压电膜,其中压电膜包含第一层,和具有锆的第二层,每个都具有钙钛矿结构,并形成为与每个 通过中间层进行其他层压,并且在薄膜形成时将温度设定为500℃以上,以提供压电膜,并且从薄膜形成温度至少至 450℃,冷却速度为30℃/分钟以上,形成。 与现有的压电薄膜相比,这样形成的压电薄膜的厚度小,但压电常数大,能够可靠地进行有效的微加工。

    BaTiO3-PbTiO3 series single crystal and method of manufacturing the same piezoelectric type actuator and liquid discharge head using such piezoelectric type actuator
    20.
    发明授权
    BaTiO3-PbTiO3 series single crystal and method of manufacturing the same piezoelectric type actuator and liquid discharge head using such piezoelectric type actuator 失效
    BaTiO3-PbTiO3系列单晶及其制造方法,使用这种压电式致动器的压电式致动器和排液头

    公开(公告)号:US06783588B2

    公开(公告)日:2004-08-31

    申请号:US10014355

    申请日:2001-12-14

    IPC分类号: C30B102

    摘要: BaTiO3—PbTiO3 series single crystal is single-crystallized by heating BaTiO3—PbTiO3 compact powder member or sintered member having a smaller Pb-containing mol number than Ba-containing mol number, while keeping the powder or substance in non-molten condition. In this way, this single crystal can be manufactured at a crystal growing speed faster still and stabilized more, significantly contributing to improving the dielectric loss and electromechanical coupling coefficient for the provision of excellent BaTiO3—PbTiO3 series single crystal in various properties, as well as for the provision of piezoelectric material having a small ratio of lead content, which is particularly excellent in piezoelectric property and productivity.

    摘要翻译: BaTiO3-PbTiO3系单晶通过加热BaTiO3-PbTiO3致密粉末构件或具有比含Ba摩尔数更小的含Pb摩尔数的烧结构件,同时保持粉末或物质处于非熔融状态而单晶。 以这种方式,这种单晶可以更快地以晶体生长速度制造和稳定化,显着地有助于提高各种性能中优良的BaTiO3-PbTiO3系列单晶的介电损耗和机电耦合系数,以及 为了提供压电性能和生产率特别优异的铅含量比小的压电材料。