公开(公告)号：US20230290660A1

公开(公告)日：2023-09-14

申请号：US18198928

申请日：2023-05-18

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masahiro NUMAKURA ,  Yuki TAKEYAMA

IPC: H01L21/673 ,  H01L21/687 ,  B65G47/90 ,  H01L21/67

CPC classification number: H01L21/6732 ,  H01L21/68707 ,  B65G47/90 ,  H01L21/67167 ,  H01L21/67265

Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.

公开(公告)号：US20150146187A1

公开(公告)日：2015-05-28

申请号：US14538918

申请日：2014-11-12

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI

IPC: G03F7/20

CPC classification number: G03F7/70733

Abstract: A substrate carrying device includes pads that hold a substrate, and a hand having recesses formed therein. The pads are placed in the recesses and detachably attached to the hand. Each of the pads includes a flange, and the flange of at least one of the pads includes an outer peripheral part detachably attached to the hand, an elastic part that is able to bend in the recess, and a substrate holding part that rises from an inner edge of the elastic part and holds the substrate by vacuum suction.

Abstract translation: 衬底承载装置包括保持衬底的垫和形成有凹部的手。 垫被放置在凹槽中并且可拆卸地附接到手上。 每个焊盘包括凸缘，并且至少一个焊盘的凸缘包括可拆卸地附接到手的外周部分，能够在凹部中弯曲的弹性部分，以及从基板保持部分 弹性部分的内边缘，并通过真空抽吸保持基板。

公开(公告)号：US20240030011A1

公开(公告)日：2024-01-25

申请号：US18224639

申请日：2023-07-21

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI ,  Norihiko AMIKURA ,  Seiichi KAISE ,  Masatomo KITA

IPC: H01J37/32 ,  B65G47/90

CPC classification number: H01J37/32733 ,  B65G47/90 ,  H01J37/32091

Abstract: This substrate transfer system is provided with: a load-lock module; an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall; a first load port extending outward from the second sidewall along the first direction; and a second load port extending outward from the third sidewall along the first direction.

公开(公告)号：US20210272783A1

公开(公告)日：2021-09-02

申请号：US17187043

申请日：2021-02-26

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI

IPC: H01J37/32

Abstract: A positioning apparatus includes a stage configured to hold a substrate, a first pin configured to hold an edge ring and a second pin separately provided from the first pin and configured to hold the edge ring. The positioning apparatus further includes a rotation mechanism configured to rotate the stage and the first pin, an elevating mechanism configured to raise and lower at least one of the first pin and the second pin and a detection mechanism configured to detect a position of an outer circumference of the substrate held by the stage and a position of an inner circumference of the edge ring held by the first pin.

公开(公告)号：US20210252694A1

公开(公告)日：2021-08-19

申请号：US17172572

申请日：2021-02-10

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI

IPC: B25J9/00 ,  H01L21/677 ,  B25J13/08

Abstract: A method and system for teaching a transfer device including a substrate holder and a first detector disposed at the substrate holder is disclosed. The method comprises detecting a vertical position of an object by the first detector while moving the substrate holder in a vertical direction, and setting a teaching position of the substrate holder in the vertical direction based on the detected vertical position of the object; and setting a teaching position of the substrate holder in a horizontal direction based on a horizontal position of the substrate holder at which the substrate holder is detected by a second detector while moving the substrate holder in the horizontal direction, the second detector being disposed at a position different from a position of the transfer device.

公开(公告)号：US20200321227A1

公开(公告)日：2020-10-08

申请号：US16842087

申请日：2020-04-07

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI

IPC: H01L21/67 ,  H01L21/3065 ,  H01J37/305

Abstract: A substrate processing system includes a first substrate processing chamber, a first substrate transfer chamber connected to the first substrate processing chamber, a second substrate processing chamber, and a second substrate transfer chamber connected to the second substrate processing chamber. The substrate processing system further includes a buffer chamber connected between the first substrate transfer chamber and the second substrate transfer chamber, the buffer chamber having at least one substrate holder. At least a part of the buffer chamber and at least one of the first substrate transfer chamber or the second substrate transfer chamber are vertically overlapped with each other.

公开(公告)号：US20200286752A1

公开(公告)日：2020-09-10

申请号：US16809741

申请日：2020-03-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masahiro NUMAKURA ,  Yuki TAKEYAMA

IPC: H01L21/673 ,  H01L21/687 ,  H01L21/67 ,  B65G47/90

Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.

公开(公告)号：US20160011587A1

公开(公告)日：2016-01-14

申请号：US14794893

申请日：2015-07-09

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masahiro DOGOME ,  Hiroshi IKARI ,  Toshiaki TOYOMAKI ,  Genichi NANASAKI ,  Takehiro SHINDO

IPC: G05B19/418

CPC classification number: G05B19/4189 ,  B25J11/0095 ,  B25J19/0066 ,  B25J21/00 ,  B65G47/91 ,  G05B2219/45031 ,  G05B2219/45054 ,  H01L21/67766 ,  H01L21/68 ,  Y02P90/083 ,  Y02P90/28

Abstract: Provided is a conveyance robot replacement apparatus used for replacing a conveyance robot installed in an atmosphere conveyance chamber of a semiconductor manufacturing apparatus in order to convey a substrate. The conveyance robot replacement apparatus includes a positioning unit configured to determine a position of the conveyance robot replacement apparatus with respect to the atmospheric conveyance chamber, a holding unit configured to suspend the conveyance robot to be supported, a guide portion configured to guide advancing and retreating into and from the atmospheric conveyance chamber of the holding unit by being engaged with the positioning unit, a position adjustment unit configured move the holding unit in each of the longitudinal direction, the horizontal direction, and the vertical direction to adjust a position of the holding unit, and a connecting component connectable to the holding unit as well as the conveyance robot.

Abstract translation: 提供一种输送机器人更换装置，其用于更换安装在半导体制造装置的气氛输送室中的输送机器人，以便输送基板。 所述输送机器人更换装置包括定位单元，所述定位单元构造为确定所述输送机器人更换装置相对于所述大气输送室的位置;保持单元，其构造成将所述运送机器人悬挂在被支撑体上;引导部，其构造成引导前进和后退 通过与所述定位单元接合而进入和离开所述保持单元的大气输送室，所述位置调整单元构造成在所述纵向方向，水平方向和垂直方向中的每一个中移动所述保持单元，以调整所述保持单元的位置 单元，以及可连接到保持单元和输送机器人的连接部件。