公开(公告)号：US20240030011A1

公开(公告)日：2024-01-25

申请号：US18224639

申请日：2023-07-21

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI ,  Norihiko AMIKURA ,  Seiichi KAISE ,  Masatomo KITA

IPC: H01J37/32 ,  B65G47/90

CPC classification number: H01J37/32733 ,  B65G47/90 ,  H01J37/32091

Abstract: This substrate transfer system is provided with: a load-lock module; an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall; a first load port extending outward from the second sidewall along the first direction; and a second load port extending outward from the third sidewall along the first direction.

公开(公告)号：US20200286752A1

公开(公告)日：2020-09-10

申请号：US16809741

申请日：2020-03-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masahiro NUMAKURA ,  Yuki TAKEYAMA

IPC: H01L21/673 ,  H01L21/687 ,  H01L21/67 ,  B65G47/90

Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.

公开(公告)号：US20240182252A1

公开(公告)日：2024-06-06

申请号：US18525935

申请日：2023-12-01

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI ,  Norihiko AMIKURA ,  Seiichi KAISE ,  Masatomo KITA

IPC: B65G47/90

CPC classification number: B65G47/904 ,  B65G2201/0297

Abstract: There is a transfer module comprising: a housing; a load port disposed on a sidewall of the housing, the load port being capable of placing a container accommodating multiple objects to be transferred; a transfer device disposed in the housing and configured to transfer the objects; and a storage unit disposed in the housing and configured to temporarily accommodate the objects, wherein the housing includes: a first sidewall to which a load-lock module is connected; and a second sidewall other than a sidewall facing the first sidewall, to which the load port is connected, wherein the transfer device has a first arm having multiple forks on which the objects are placed, and the transfer device collectively transfers the objects in the container placed on the load port into the storage unit using the first arm.

公开(公告)号：US20130213442A1

公开(公告)日：2013-08-22

申请号：US13757954

申请日：2013-02-04

Applicant: TOKYO ELECTRON LIMITED

Inventor： Seiichi KAISE ,  Shigeki AMEMIYA ,  Shinobu ONODERA ,  Hiroki FUJITA ,  Masaru Nishino ,  Atsushi Rikukawa

IPC: H01L21/677

CPC classification number: H01L21/67772 ,  H01L21/67393

Abstract: A method for purging a substrate container which accommodates in multiple stages a plurality of substrates to be processed by a substrate processing apparatus, the method includes: mounting the substrate container on a mounting unit; connecting a gas supply port provided in the substrate container and a gas supply line provided in a mounting unit; starting supply of a dry gas into the substrate container from a gas supply line before opening a cover of the substrate container; opening the cover of the substrate container while keeping the supply of the dry gas; closing the cover of the substrate container upon completion of processing of the substrates in the substrate container; and stopping the supply of the dry gas after closing the cover of the substrate container.

Abstract translation: 一种用于清洗基板容器的方法，所述方法包括：将所述基板容器安装在安装单元上，所述方法包括：将所述基板容器安装在基板处理装置上， 连接设置在基板容器中的气体供给口和设置在安装单元中的气体供给管线; 在打开基板容器的盖之前，从气体供应管线开始供应干燥气体到基板容器中; 在保持供应干燥气体的同时打开基材容器的盖子; 在基板容器中的基板处理完成时封闭基板容器的盖子; 并且在关闭基板容器的盖子之后停止供应干燥气体。

公开(公告)号：US20240186158A1

公开(公告)日：2024-06-06

申请号：US18525930

申请日：2023-12-01

Applicant: Tokyo Electron Limited

Inventor： Norihiko AMIKURA ,  Makoto SAEGUSA ,  Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masatomo KITA

IPC: H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67196 ,  H01L21/67184 ,  H01L21/67742

Abstract: The present disclosure provides a transfer module, comprising: a first transfer chamber; a second transfer chamber, the second transfer chamber capable of accommodating a container accommodating a plurality of objects; and an opening/closing door configured to partition the first transfer chamber and the second transfer chamber, wherein the first transfer chamber has an accommodation portion configured to accommodate the object to be carried into the second transfer chamber, and the container accommodating the plurality of objects is carried into the second transfer chamber, the plurality of objects are transferred from the container to the accommodation portion in the first transfer chamber, the object is transferred from the accommodation portion into the vacuum transfer module, and the object carried out from the vacuum transfer module is transferred into the container without passing through the accommodation portion.

公开(公告)号：US20200251372A1

公开(公告)日：2020-08-06

申请号：US16782495

申请日：2020-02-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE

IPC: H01L21/683 ,  H01L21/02 ,  H01L21/3065 ,  H05H1/00

Abstract: A carrier includes a jig and a case. The jig is configured to hold at least one consumable to be loaded into or unloaded from a container. The case is configured to store the jig and the consumable held by the jig.

公开(公告)号：US20230290660A1

公开(公告)日：2023-09-14

申请号：US18198928

申请日：2023-05-18

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masahiro NUMAKURA ,  Yuki TAKEYAMA

IPC: H01L21/673 ,  H01L21/687 ,  B65G47/90 ,  H01L21/67

CPC classification number: H01L21/6732 ,  H01L21/68707 ,  B65G47/90 ,  H01L21/67167 ,  H01L21/67265

Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.

公开(公告)号：US20220080476A1

公开(公告)日：2022-03-17

申请号：US17478197

申请日：2021-09-17

Applicant: TOKYO ELECTRON LIMITED

Inventor： Norihiko AMIKURA ,  Hideyuki OSADA ,  Genichi NANASAKI ,  Seiichi KAISE ,  Masatomo KITA ,  Takashi TAKIZAWA ,  Eiji TAKAHASHI

IPC: B08B9/093 ,  H01J37/32 ,  B08B13/00

Abstract: A substrate processing apparatus is disclosed. The apparatus comprises a vacuum transfer chamber including a top surface, a bottom surface, and side surfaces between the top and the bottom surfaces, including a first side surface and a second side surface opposite to the first side surface; a transfer robot, disposed in the vacuum transfer chamber, for transfering a substrate; a load lock module connected to the first side surface; a pipe, connected to a purge gas supply source, for supplying a purge gas into the vacuum transfer chamber; one or more gas ports provided in the top surface in the vicinity of the second side surface and connected to the pipe; and one or more exhaust ports, provided in the bottom surface in the vicinity of the first side surface, to which an exhaust pump for exhausting the purge gas supplied into the vacuum transfer chamber is connected.