摘要:
The number of sectors which are NV_PCK in an ECC block is detected by a number-of-sectors detection circuit 12, and a control circuit 14 considers, when the detected number of sectors is larger than a predetermined value, that NV_PCK reference processing is not terminated within a time period during which the subsequent ECC block is buffered, to suspend the buffering of the subsequent ECC block.
摘要:
An encryption apparatus and an image forming apparatus are provided, in which measures are taken to prevent the encryption-key code from leaking outside. An encryption-key code is stored in a volatile memory that is soldered to a board. A lithium button-cell is used as backup power supply for the volatile memory. A wire that is provided on the board connects the lithium button-cell to the volatile memory.
摘要:
A lithium battery excellent in initial capacity, high rate discharge performance, low temperature performance and cycle life performance can be provided without the necessity of any special production step.In other words, the present invention lies in a lithium battery having a power-generating element comprising at least a positive electrode, a negative electrode and a separator wherein a gel electrolyte comprising at least a polymer and a liquid electrolyte is used in at least a part of the power-generating element, characterized in that the concentration of lithium salt in the liquid electrolyte is from 1.5 to 5 mols per l of the liquid electrolyte.
摘要:
A method of process control includes the steps of preparing recycling procedure data for each type of film formed on a wafer by diffusion processing, setting a recycle control number for controlling recycling processing based on the recycling procedure data, and outputting a recycling instruction to the recycling apparatus when the prescribed number of non-product wafers are accumulated and when an accept request is received from the recycling apparatus.
摘要:
In a method of inspecting a sample on which a pattern relating to fabrication of a semiconductor device is formed, there are provided a light radiation unit, an acquiring unit, a storage unit, a template, a calculation unit, a correction unit, a defect detection unit and an output unit. Pinhole shape data to be detected of the pattern is stored in the template. The calculation unit calculates the degree of coincidence between the pinhole shape data stored in the template and the measured image data stored in the storage unit in units of a predetermined amount of data. The correction unit corrects a portion of the measured image data corresponding to a value of the degree of coincidence exceeding a second predetermined value in units of the predetermined amount of data, when the degree of coincidence obtained by the calculation unit has exceeded a first predetermined value, thereby correcting the portion of the measured image data including the detected pinhole. The defect detection unit detects a defect in the pattern on the basis of the corrected measured image data portion including the pinhole, which is obtained by the correcting unit, and the measured image data.
摘要:
A split seal paper sheet in which the width of split seals composing the split seal paper sheet in the direction of conveyance of the paper sheet is smaller than the print width of a serial head is used. One or more of the split seals is/are positioned in one scanning region of the serial head, to print an image on the split seals. Line feed for printing on one or more split seals in the subsequent line is performed in such a manner that the line feed width is the same as the print width of the serial head. Consequently, the entire image is formed on one split seal without conveying the paper sheet (performing line feed). Even if a pitch between lines becomes non-uniform in conveyance of the paper sheet, the image on the split seal is not degraded.
摘要:
A pattern defect inspection apparatus comprises a light irradiating portion, a light receive element, a light receive element amplifier, a preparation portion for preparing multi-valued design pattern image data, an offset adjusting portion, a gain adjusting portion, and an inspecting portion. The offset adjusting portion adjusts the offset of the light receive element amplifier such that measurement data of a translucent portion of a pattern on a sample surface corresponds to design pattern image data corresponding to the translucent portion, regarding the translucent portion as a non-transparent portion. The gain adjusting portion adjusts the gain of the light receive element amplifier such that measurement data of a transparent portion of the pattern on the sample surface corresponds to design pattern image data corresponding to the transparent portion.
摘要:
There is provided a pattern generating apparatus in which a figure analyzer analyzes cell data relating to an input figure, figure unfolding sections unfold each basic figure into a figure pattern, the figure unfolding sections are connected in series with pattern memories, the figure unfolding sections and pattern memories are connected in a parallel form to a distribution controller which effects the control operation to cause the figure unfolding sections to effect the unfolding processes for each basic figure unit or each unit obtained by dividing an excessively large figure exceeding a preset threshold value into preset areas, and a readout section having a logical sum circuit for combining partial figure patterns of respective areas from the pattern memories into a single figure pattern outputs the pattern as an output in synchronism with scanning of the input figure.
摘要:
A robot-teaching cassette is used to teach a robot to position a wafer cassette or a substrate cassette on a cassette-supporting base by the robot, without using the wafer cassette or the substrate cassette. The robot-teaching cassette includes a fixing section capable of being fixed in position on the cassette-supporting base, a moving section capable of being held with a robot-chucking section of the robot and moving separately from the fixing section, a light source provided on the fixing section or the moving section, and a target establishing a reference position, for receiving beams emitted by the light source and provided on the fixing section or the moving section.
摘要:
A circular arc illumination apparatus includes a light source section for emitting rays, a condensing optical system for condensing the rays emitted by the light source section, a rotating mirror driven by a motor and reflecting the condensed rays from the condensing optical system, and a circular arc-shaped bending mirror for reflecting the rays reflected by the rotating mirror toward a mask so that the rays become incident on the mask. The apparatus effectively utilizes light emitted by the light source section, exposes an object uniformly, and is practical and economical for exposing a large substrate.