利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

45 条记录 (耗时 0.03 秒)

    Printing method and printing apparatus using split seal paper sheets
    1.
    发明授权
    Printing method and printing apparatus using split seal paper sheets 失效
    打印方法和使用分割密封纸的打印设备

    公开(公告)号：US5813776A

    公开(公告)日：1998-09-29

    申请号：US964830

    申请日：1997-11-05

    申请人： Susumu Fujiwara ,  Toshiyuki Watanabe ,  Yoshiaki Ishikawa ,  Mikio Ichihashi ,  Shigeki Shibuya ,  Nobuo Iwatsuki

    发明人： Susumu Fujiwara ,  Toshiyuki Watanabe ,  Yoshiaki Ishikawa ,  Mikio Ichihashi ,  Shigeki Shibuya ,  Nobuo Iwatsuki

    IPC分类号： B41J2/51 ,  B41J2/325 ,  B41J11/42 ,  B41J19/96 ,  B41J21/17 ,  B41J21/16

    CPC分类号： B41J21/17 ,  B41J11/42

    摘要： A split seal paper sheet in which the width of split seals composing the split seal paper sheet in the direction of conveyance of the paper sheet is smaller than the print width of a serial head is used. One or more of the split seals is/are positioned in one scanning region of the serial head, to print an image on the split seals. Line feed for printing on one or more split seals in the subsequent line is performed in such a manner that the line feed width is the same as the print width of the serial head. Consequently, the entire image is formed on one split seal without conveying the paper sheet (performing line feed). Even if a pitch between lines becomes non-uniform in conveyance of the paper sheet, the image on the split seal is not degraded.

    摘要翻译： 使用组合密封纸在纸张传送方向上的分割密封件的宽度小于串行头的打印宽度的分割密封纸。 分离密封件中的一个或多个定位在串行头的一个扫描区域中，以在分割密封件上打印图像。 在后续行中的一个或多个分割密封件上进行打印的换行进行方式使得换行宽度与串行打印头的打印宽度相同。 因此，整个图像形成在一个分开的密封件上，而不传送纸张（执行换行）。 即使在纸张的输送中线之间的间距变得不均匀，分割密封件上的图像也不会劣化。

    Beam irradiation device
    2.
    发明授权
    Beam irradiation device 失效
    光束照射装置

    公开(公告)号：US07351944B2

    公开(公告)日：2008-04-01

    申请号：US11283999

    申请日：2005-11-22

    申请人： Masato Yamada ,  Hitoshi Terasaki ,  Yoichi Tsuchiya ,  Shuichi Ichiura ,  Masahiro Higuchi ,  Mikio Ichihashi ,  Youichiro Goto ,  Yoshiaki Maeno

    发明人： Masato Yamada ,  Hitoshi Terasaki ,  Yoichi Tsuchiya ,  Shuichi Ichiura ,  Masahiro Higuchi ,  Mikio Ichihashi ,  Youichiro Goto ,  Yoshiaki Maeno

    IPC分类号： G01J1/32 ,  G02B27/40 ,  G02B26/08 ,  H01J3/14 ,  B41J2/47

    CPC分类号： G01S17/42 ,  G01S7/4811 ,  G01S7/4817 ,  G01S7/491 ,  G01S17/48

    摘要： In a beam irradiation device of the present invention, laser beams emitted from a semiconductor laser impinge on an irradiation lens supported by a lens actuator. The laser beams that have passed through the irradiation lens change in outgoing angle in the direction of a y-z plane as the lens actuator is driven. A laser beam scan in the target region is thus performed. A part of the laser beams that have passed through the irradiation lens is reflected and separated by a beam splitter. The separated beams are converged on a PSD through a converging lens. A DSP control circuit monitors a scan position of the laser beams that have passed through the irradiation lens based on a signal from the PSD. When an irradiation position has deviated from a scan trajectory, the DSP control circuit controls an actuator driving circuit to draw the irradiation position back onto the scan trajectory. This beam irradiation device can realize a smooth and stable beam scan operation with a simple construction.

    摘要翻译： 在本发明的光束照射装置中，从半导体激光器发射的激光束照射在由透镜致动器支撑的照射透镜上。 当透镜致动器被驱动时，穿过照射透镜的激光束在y-z平面的方向上以出射角度改变。 因此执行目标区域中的激光束扫描。 已经通过照射透镜的激光束的一部分被分束器反射和分离。 分离的光束通过会聚透镜会聚在PSD上。 DSP控制电路基于来自PSD的信号监视已经通过照射透镜的激光束的扫描位置。 当照射位置偏离扫描轨迹时，DSP控制电路控制致动器驱动电路将照射位置反射回扫描轨迹。 该光束照射装置能够以简单的结构实现平稳稳定的束扫描操作。

    Method and apparatus for scanning transmission electron microscopy
    4.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06531697B1

    公开(公告)日：2003-03-11

    申请号：US09259334

    申请日：1999-03-01

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3700

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

    Apparatus for introducing oxygen gas
    6.
    发明授权
    Apparatus for introducing oxygen gas 失效
    用于引入氧气的设备

    公开(公告)号：US4772821A

    公开(公告)日：1988-09-20

    申请号：US911786

    申请日：1986-09-26

    申请人： Shigeyuki Hosoki ,  Mikio Ichihashi ,  Keiji Takata ,  Hiroyasu Kaga

    发明人： Shigeyuki Hosoki ,  Mikio Ichihashi ,  Keiji Takata ,  Hiroyasu Kaga

    IPC分类号： H01J37/06 ,  B01J3/02 ,  H01J37/07 ,  H01J37/073 ,  H01J37/18 ,  H01J17/26 ,  A61L9/00

    CPC分类号： H01J37/073 ,  B01J3/02 ,  H01J37/18

    摘要： An oxygen gas introducing apparatus for introducing oxygen gas into a vacuum electron optical column of an electron beam apparatus having an electron beam source as a cathode that needs the oxygen gas is disclosed which comprises a silver cylinder having a closed end and provided on a side wall of the vacuum electron optical column so as to project from an outside atmospheric side to an interior of the vacuum electron optical column, and a heating member electrically insulated and disposed within an interior of the silver cylinder which interior is in communication with the atmosphere.

    摘要翻译： 公开了一种氧气引入装置，用于将氧气引入具有电子束装置的电子束装置的真空电子光学柱中，所述电子束装置具有需要氧气的阴极，该电子束装置包括具有闭合端的银圆筒并设置在侧壁 的真空电子光学柱从外部大气侧突出到真空电子光学柱的内部;以及加热构件，其电绝缘并设置在与气氛连通的银圆筒内部。

    Electron beam metrology system
    7.
    发明授权
    Electron beam metrology system 失效
    电子束计量系统

    公开(公告)号：US4751384A

    公开(公告)日：1988-06-14

    申请号：US13534

    申请日：1987-02-11

    申请人： Hisaya Murakoshi ,  Mikio Ichihashi ,  Hideo Todokoro

    发明人： Hisaya Murakoshi ,  Mikio Ichihashi ,  Hideo Todokoro

    IPC分类号： G01B15/00 ,  H01J37/28 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01B15/00

    摘要： An electron beam metrology system for measuring the width of a pattern on a surface of a sample in such a manner that the surface of the sample is scanned with an electron beam, secondary electrons emitted from the surface are detected to obtain a detection signal, and the width of the pattern is measured by using the detection signal, is disclosed in which a pair of detectors are disposed symmetrically with respect to the optical axis of the electron beam in a scanning direction thereof, a ratio of one of the output signals of the detectors to the other output signal and a ratio of the other output signal to the one output signal are formed, and a sum signal indicative of the sum of two ratios is produced, to be used for measuring the width of the pattern correctly and accurately, without being affected by a change in pattern material.

    摘要翻译： 一种用于以样品表面用电子束扫描的方式测量样品表面上的图案的宽度的电子束计量系统，检测从表面发射的二次电子以获得检测信号，以及 通过使用检测信号测量图案的宽度，公开了一对检测器相对于电子束的光轴在其扫描方向上对称设置，其中一个检测器的输出信号 形成与其他输出信号的检测器和其他输出信号与一个输出信号的比率，并且产生指示两个比率之和的和信号，以用于正确且精确地测量图案的宽度， 而不受图案材料变化的影响。

    Electron beam pattern line width measurement system
    8.
    发明授权
    Electron beam pattern line width measurement system 失效
    电子束图案线宽测量系统

    公开(公告)号：US4740693A

    公开(公告)日：1988-04-26

    申请号：US807681

    申请日：1985-12-11

    申请人： Yoshinori Nakayama ,  Shinji Okazaki ,  Hidehito Obayashi ,  Mikio Ichihashi

    发明人： Yoshinori Nakayama ,  Shinji Okazaki ,  Hidehito Obayashi ,  Mikio Ichihashi

    IPC分类号： G01S13/74 ,  G01B7/02 ,  G01B15/00 ,  H01J37/28 ,  G01B7/14

    CPC分类号： H01J37/28 ,  G01B15/00 ,  G01B7/02

    摘要： Disclosed is an electron beam pattern line width measurement system wherein an electron beam is converged to a fine spot, the electron beam is scanned on a sample formed with a pattern to-be-measured, secondary electrons generated from a surface of the sample by the projection of the electron beam are detected, and the detected signal is processed to determine a line width of the pattern to-be-measured, comprising a secondary electron detector which detects a signal corresponding to an amount of all secondary electrons generated by the scanning, and a secondary electron energy analyzer which selectively detects a signal corresponding to an amount of secondary electrons of specified energy. With the electron beam pattern line width measurement system, it becomes possible to precisely detect a pattern boundary region defined by different sorts of materials in a stepped structure of a small level difference not having been measurable with a prior-art electron beam pattern line width measurement system.

    摘要翻译： 公开了一种电子束图案线宽度测量系统，其中电子束会聚到细微点，电子束在形成有要测量图案的样品上扫描，从样品表面产生的二次电子被 检测电子束的投影，并且处理检测信号以确定要测量的图案的线宽，包括二次电子检测器，其检测对应于由扫描产生的所有二次电子的量的信号， 以及二次电子能量分析器，其选择性地检测与特定能量的二次电子量对应的信号。 利用电子束图案线宽度测量系统，可以精确地检测由现有技术的电子束图案线宽度测量不能测量的小电平差的阶梯式结构中由不同种类的材料限定的图案边界区域 系统。

    Small-dimension measurement system by scanning electron beam
    9.
    发明授权
    Small-dimension measurement system by scanning electron beam 失效
    通过扫描电子束的小尺寸测量系统

    公开(公告)号：US4600839A

    公开(公告)日：1986-07-15

    申请号：US576324

    申请日：1984-02-02

    申请人： Mikio Ichihashi ,  Satoru Fukuhara ,  Masahide Okumura ,  Hisaya Murakoshi

    发明人： Mikio Ichihashi ,  Satoru Fukuhara ,  Masahide Okumura ,  Hisaya Murakoshi

    IPC分类号： G01B15/00 ,  G01R31/305 ,  H01J37/28 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01B15/00 ,  G01R31/305

    摘要： A small-dimension measurement system by scanning electron beam comprises an electron optical column including an electron source for emitting an electron beam to scan a sample, at least one pair of detectors disposed symmetrically with respect to an optical axis of the electron optical column for detecting position information from the sample by scanning of the electron beam, and a signal selecting circuit for subjecting the outputs of the paired detectors to a predetermined signal selection. The signal selecting circuit selectively and alternately provides maximum or peak portions of the outputs of the paired detectors which portions correspond to opposite edge portions of the sample. The output of the signal selecting circuit is applied to a signal processing circuit for conversion into a dimension of a predetermined pattern on the sample.

    摘要翻译： 通过扫描电子束的小尺寸测量系统包括电子光学柱，其包括用于发射电子束以扫描样品的电子源，至少一对相对于电子光学柱的光轴对称设置的检测器，用于检测 通过扫描电子束从样品的位置信息，以及信号选择电路，用于对成对的检测器的输出进行预定的信号选择。 信号选择电路选择性地并且交替地提供成对检测器的输出的最大值或峰值部分，这些部分对应于样品的相对边缘部分。 信号选择电路的输出被施加到信号处理电路，以转换成样本上的预定图案的尺寸。