公开(公告)号：US11946131B2

公开(公告)日：2024-04-02

申请号：US15982187

申请日：2018-05-17

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  Edwin Van Den Tillaart ,  William E. Quinn ,  Sven Pekelder ,  Matthew King

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/22 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/00 ,  H10K71/16

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/228 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/60 ,  H10K71/16

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.

公开(公告)号：US11903302B2

公开(公告)日：2024-02-13

申请号：US17549066

申请日：2021-12-13

Applicant: Universal Display Corporation

Inventor： Kent Khuong Nguyen ,  Sriram Krishnaswami ,  Daniel Toet ,  Jeff Hawthorne ,  William E. Quinn

IPC: H10K71/16 ,  H10K71/13 ,  C23C14/50 ,  C23C14/04 ,  C23C14/22 ,  H10K71/10

CPC classification number: H10K71/135 ,  C23C14/04 ,  C23C14/228 ,  C23C14/50 ,  H10K71/164 ,  H10K71/191

Abstract: Systems and methods for depositing materials on a substrate via OVJP are provided. A float table and grippers are used to move and position the substrate relative to one or more OVJP print bars to reduce the chance of damaging or compromising the substrate or prior depositions.

公开(公告)号：US11793059B2

公开(公告)日：2023-10-17

申请号：US17394769

申请日：2021-08-05

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Jason Paynter ,  Gregory McGraw ,  Matthew King

IPC: H10K71/00 ,  H10K50/842 ,  H10K71/60

CPC classification number: H10K71/00 ,  H10K50/8426 ,  H10K71/611 ,  H10K71/811 ,  H10K71/821

Abstract: Techniques and devices are provided for attaching a die to a metal manifold. A metal-containing ink is used to deposit a metal trace on the die and thereby to form a gasket, after which the die is compressed against the manifold to form a sealed connection between the two.

公开(公告)号：US11751468B2

公开(公告)日：2023-09-05

申请号：US17380169

申请日：2021-07-20

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Siddharth Harikrishna Mohan ,  Gregory McGraw ,  Xin Xu

IPC: H10K71/12 ,  C23C14/24 ,  C23C14/12 ,  C23C14/04 ,  C23C14/54 ,  H10K71/00 ,  H10K71/18 ,  B41J2/14 ,  B41M3/00 ,  H10K50/11 ,  H10K101/30 ,  H10K101/40

CPC classification number: H10K71/12 ,  B41J2/14 ,  B41M3/006 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/54 ,  H10K71/00 ,  H10K71/18 ,  H10K50/11 ,  H10K2101/30 ,  H10K2101/40

Abstract: Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

公开(公告)号：US11751426B2

公开(公告)日：2023-09-05

申请号：US15787117

申请日：2017-10-18

Applicant: Universal Display Corporation

Inventor： Siddharth Harikrishna Mohan ,  William E. Quinn ,  Arpit Patel ,  James Robert Kantor

IPC: H10K50/844 ,  H10K71/00 ,  H10K77/10 ,  H10K102/00

CPC classification number: H10K50/8445 ,  H10K71/00 ,  H10K77/111 ,  H10K2102/311 ,  H10K2102/351 ,  Y02E10/549

Abstract: A hybrid permeation barrier having two complementary layers is disclosed. The barrier includes a first layer with a relatively high stress-thickness in the range of −1000 MPa-μm to −200 MPa-μm and a second layer with a relatively low stress-thickness in the range −150 MPa-μm to 300 MPa-μm. The second layer compensates for the stress caused by the first, thereby allowing for a barrier that provides good permeation without causing failure of the device due to delamination.

公开(公告)号：US11746408B2

公开(公告)日：2023-09-05

申请号：US17389694

申请日：2021-07-30

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory Mcgraw ,  Matthew King ,  Gregg Kottas

IPC: C23C14/22 ,  C23C14/12 ,  C23C14/24 ,  H10K50/11 ,  H10K71/10 ,  H10K101/40

CPC classification number: C23C14/228 ,  C23C14/12 ,  C23C14/243 ,  H10K50/11 ,  H10K71/10 ,  H10K2101/40

Abstract: Embodiments of the disclosed subject matter provide a vapor distribution manifold that ejects organic vapor laden gas into a chamber and withdraws chamber gas, where vapor ejected from the manifold is incident on, and condenses onto, a deposition surface within the chamber that moves relative to one or more print heads in a direction orthogonal to a platen normal and a linear extent of the manifold. The volumetric flow of gas withdrawn by the manifold from the chamber may be greater than the volumetric flow of gas injected into the chamber by the manifold. The net outflow of gas from the chamber through the manifold may prevent organic vapor from diffusing beyond the extent of the gap between the manifold and deposition surface. The manifold may be configured so that long axes of delivery and exhaust apertures are perpendicular to a print direction.

公开(公告)号：US11683973B2

公开(公告)日：2023-06-20

申请号：US16778200

申请日：2020-01-31

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  William E. Quinn ,  Steven Buswell

IPC: H10K71/13 ,  B05B1/02 ,  C23C16/455 ,  C23C14/22 ,  C23C14/04 ,  C23C16/44 ,  C23C14/12 ,  H01L23/495 ,  H01L23/00 ,  H01L23/31 ,  H01L33/62 ,  H10K71/00 ,  H10K71/16

CPC classification number: H10K71/135 ,  B05B1/02 ,  C23C14/04 ,  C23C14/12 ,  C23C14/228 ,  C23C16/4412 ,  C23C16/45563 ,  H01L23/3142 ,  H01L23/49503 ,  H01L23/49506 ,  H01L23/49513 ,  H01L24/14 ,  H01L24/89 ,  H01L33/62 ,  H10K71/00 ,  H10K71/16

Abstract: Embodiments of the disclosed subject matter provide a device including a carrier plate, and a die including a mating surface with a patterned thin film of metal or metal oxide surface bonded to the carrier plate using a solder preform with voids that overlay the patterned thin film on the die, where the oxide surface is disposed opposite a moat in a mating surface of the carrier plate, and where the voided regions remain free of solder when the solder is reflowed.

公开(公告)号：US11183541B2

公开(公告)日：2021-11-23

申请号：US16941928

申请日：2020-07-29

Applicant: Universal Display Corporation

Inventor： Michael Hack ,  Michael Stuart Weaver ,  William E. Quinn ,  Julia J. Brown

IPC: H01L27/32 ,  H01L51/52 ,  H01L51/56

Abstract: A full-color display and techniques for fabrication thereof are provided. The display includes first and second continuous independently addressable organic emissive layers disposed over a single substrate or between two substrates or portions of a flexible substrate. The use of continuous emissive layers of a limited number of colors allows for a relatively high resolution display to be achieved without the use of fine metal masks or similar components.

公开(公告)号：US10998531B2

公开(公告)日：2021-05-04

申请号：US16184105

申请日：2018-11-08

Applicant: Universal Display Corporation

Inventor： William E. Quinn ,  Gregory McGraw

IPC: H01L51/56 ,  H01L51/50 ,  H01L51/00 ,  C23C14/22 ,  B41J2/04 ,  B41J2/155 ,  C23C14/04 ,  C23C14/12 ,  B41J25/316 ,  B41J25/308

Abstract: Implementations of the disclosed subject matter provide a print bar for organic vapor jet (OVJP) deposition is provided that includes a plurality of n print head segments, where each of the plurality of print head segments may have an OVJP print head. The print bar may include a plurality of distance sensors, where each of the plurality of distance sensors may be configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments. The print bar may include a plurality of not more than n+1 actuators configured to adjust at least one of a position and an orientation of one or more of the plurality of print head segments based upon one or more distances between the substrate and the print bar measured by one or more of the plurality of distance sensors.

公开(公告)号：US10566534B2

公开(公告)日：2020-02-18

申请号：US15291756

申请日：2016-10-12

Applicant: Universal Display Corporation

Inventor： Matthew King ,  William E. Quinn ,  Gregory McGraw ,  Siddharth Harikrishna Mohan ,  Elliot H. Hartford, Jr. ,  Benjamin Swedlove ,  Gregg Kottas ,  Tomasz Trojacki ,  Julia J. Brown

IPC: C23C14/12 ,  C23C14/24 ,  H01L51/56 ,  H01L51/00 ,  H01L51/50 ,  H01L51/52 ,  C23C14/22

Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.