Mems magnetically actuated switches and associated switching arrays
    12.
    发明授权
    Mems magnetically actuated switches and associated switching arrays 失效
    Mems磁力驱动开关和相关的开关阵列

    公开(公告)号:US06366186B1

    公开(公告)日:2002-04-02

    申请号:US09487976

    申请日:2000-01-20

    CPC classification number: H01H50/005 H01H67/22 H01H2001/0078 H01H2036/0093

    Abstract: A MEMS electrical cross-point switch is provided that includes a microelectronic substrate, a magnetic element attached to the microelectronic substrate that is free to move in a predetermined direction in response to a magnetic field and an electrical element connected to the magnetic element for movement therewith to selectively switch electric current. In one embodiment the magnetic element and the electrical element are connected via a tethering device that acts as a platform for the magnetic and electrical elements. The electrical cross-point switch may also comprise a clamping element that serves to lock the switch in an open or closed position to circumvent the magnetic actuation of the switch. In another embodiment, the invention provides for a MEMS electrical cross-point switching array that includes a microelectronic substrate, a magnetic field source in circuit with said microelectronic substrate, a plurality of first and second electrical lines disposed on the microelectronic substrate in an array formation, and a plurality of the in-plane MEMS electrical cross-point switches as described above disposed at the cross point of a first and second electrical line. In one embodiment the array is configured in a N×N or N×M array having a series of crossing first and second electrical load lines. In another configuration the array has a series of first electrical load lines that extend radially from a central point of reference and a series of second electrical load lines that extend outward, in spoke-like fashion, from the central point of reference.

    Abstract translation: 提供了一种MEMS电交叉点开关,其包括微电子衬底,附接到微电子衬底的磁性元件,其响应于磁场而在预定方向上自由移动,并且连接到磁性元件的电气元件用于与其一起运动 以选择性地切换电流。 在一个实施例中,磁性元件和电气元件通过用作磁性元件和电气元件的平台的束缚装置连接。 电交叉点开关还可以包括夹紧元件,其用于将开关锁定在打开或关闭位置,以绕开开关的磁致动。 在另一个实施例中,本发明提供了一种MEMS电交叉点开关阵列,其包括微电子衬底,与所述微电子衬底的电路中的磁场源,设置在微电子衬底上的阵列形成中的多个第一和第二电线 以及设置在第一和第二电线的交叉点处的多个如上所述的面内MEMS电气交叉点开关。 在一个实施例中,阵列被配置在具有一系列交叉的第一和第二电负载线的N×N或N×M阵列中。 在另一种配置中,阵列具有从中心参考点径向延伸的一系列第一电负载线,以及一系列第二电负载线,其以辐射状方式从中心参考点向外延伸。

    Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams
    13.
    发明授权
    Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams 失效
    微机电系统包括加热器上的热致动梁,其与热致动梁一起移动

    公开(公告)号:US06333583B1

    公开(公告)日:2001-12-25

    申请号:US09537588

    申请日:2000-03-28

    Abstract: Improved microelectromechanical structures include spaced-apart supports on a microelectronic substrate and a beam that extends between the spaced-apart supports and that expands upon application of heat thereto to thereby cause displacement of the beam between the spaced-apart supports. A heater, located on the beam, applies heat to the beam and displaces with the beam as the beam displaces. Therefore, heat can be directly applied to the arched beam, thereby reducing thermal loss between the heater and the arched beam. Furthermore, an air gap between the heater and arched beam may not need to be heated, thereby allowing improved transient thermal response. Moreover, displacing the heater as the arched beam displaces may further reduce thermal loss and transient thermal response by reducing the separation between the heater and the arched beam as the arched beam displaces.

    Abstract translation: 改进的微机电结构包括微电子衬底上的间隔开的支撑件和在间隔开的支撑件之间延伸的梁,并且在施加热量时膨胀,从而导致梁在间隔开的支撑件之间的位移。 位于梁上的加热器对梁施加热量,并随着梁的移位而与梁一起移位。 因此,可以将热量直接施加到拱形梁上,从而减少加热器与拱形梁之间的热损失。 此外,加热器和拱形梁之间的空气间隙可能不需要被加热,从而允许改善的瞬态热响应。 此外,当拱形梁移位时移动加热器可以通过当拱形梁移位时减小加热器和拱形梁之间的间隔来进一步减少热损失和瞬态热响应。

    Microelectromechanical rotary structures
    14.
    发明授权
    Microelectromechanical rotary structures 有权
    微机电旋转结构

    公开(公告)号:US6137206A

    公开(公告)日:2000-10-24

    申请号:US275058

    申请日:1999-03-23

    Applicant: Edward A. Hill

    Inventor: Edward A. Hill

    Abstract: MEMS (Microelectromechanical System) structures are provided that are designed to rotate in response to thermal actuation or the like. In one embodiment, the MEMS rotary structure includes a hub having one or more radial spoke members that impose a rotational force upon the hub in response to applied changes in temperature. The MEMS rotary structure can also include a ring at least partially encircling the hub and connected to the hub by means of one or more hub spoke members. Controllable clockwise, counterclockwise, or both clockwise and counterclockwise rotation of the hub or ring are provided. The MEMS rotary structures can also include thermal arched beam actuators that are operably connected to the spoke member. As the temperature changes, the thermal arched beam actuators move the spoke members in order to rotate the MEMS structure. Various applications are provided for these rotating MEMS structures, including but not limited to rotary actuators, rotary switches and relays, variable capacitors, variable resistors, shutters, and valves.

    Abstract translation: 提供了MEMS(微机电系统)结构,其被设计成响应于热致动等而旋转。 在一个实施例中,MEMS旋转结构包括具有一个或多个径向辐条构件的轮毂,其响应于施加的温度变化而对轮毂施加旋转力。 MEMS旋转结构还可以包括至少部分地环绕轮毂并通过一个或多个轮毂轮缘构件连接到轮毂的环。 提供顺时针,逆时针或顺时针方向和逆时针方向可旋转的轮毂或环。 MEMS旋转结构还可以包括可操作地连接到辐条构件的热拱形梁致动器。 随着温度的变化,热拱形梁致动器移动辐条部件以旋转MEMS结构。 为这些旋转MEMS结构提供了各种应用,包括但不限于旋转致动器,旋转开关和继电器,可变电容器,可变电阻器,百叶窗和阀门。

    Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays
    15.
    发明授权
    Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays 有权
    多维可扩展位移使微机电致动器结构和阵列

    公开(公告)号:US06218762B1

    公开(公告)日:2001-04-17

    申请号:US09303996

    申请日:1999-05-03

    CPC classification number: H01H1/0036 H01H61/063 H01H2001/0068 H01H2061/006

    Abstract: Microelectromechanical system (MEMS) structures and arrays that provide movement in one, two, and/or three dimensions in response to selective thermal actuation. Significant amounts of scalable displacement are provided. In one embodiment, pairs of thermal arched beams are operably interconnected and thermally actuated to create structures and arrays capable of moving in a plane parallel to the underlying substrate in one and/or two dimensions. One embodiment provides an arched beam operably connected to a crossbeam such that the medial portion arches and alters its separation from the crossbeam when thermally actuated. In another embodiment, at least one thermal arched beam is arched in a nonparallel direction with respect to the plane defined by the underlying substrate. In response to thermal actuation, the medial portion of the arched beam is arched to a greater degree than the end portions of the thermal arched beam, thereby altering the separation of the medial portion from the underlying substrate. One embodiment combines first and second thermal arched beams having medial portions arched in opposed nonparallel directions with respect to the plane defined by the underlying substrate by even greater amounts. In response to thermal actuation, the medial portions thereof arch in opposite nonparallel directions with respect to the underlying substrate, thereby altering the separation of the medial portions from the underlying substrate. Hybrid thermally actuated structures are provided that combine arrays capable of moving in-plane and out of plane, such that motion in all three dimensions may be achieved in response to selective thermal actuation.

    Abstract translation: 微机电系统(MEMS)结构和阵列,其响应于选择性热致动而提供一维,二维和/或三维运动。 提供了大量的可伸缩位移。 在一个实施例中,成对的热拱形梁可操作地互连和热致动以产生能够在一个和/或两个维度上平行于下面的基底的平面中移动的结构和阵列。 一个实施例提供了可操作地连接到横梁的弓形梁,使得当热致动时,内侧部分拱起并改变其与横梁的分离。 在另一个实施例中,至少一个热拱形梁相对于由下面的基底限定的平面以不平行的方式成拱形。 响应于热致动,拱形梁的中间部分比热弯曲梁的端部更大程度地弯曲,从而改变中间部分与下面的基底的分离。 一个实施例组合了第一和第二热拱形梁,其具有相对于由下面的基底限定的平面以相对的非平行方向拱起的中间部分甚至更大的量。 响应于热致动,其中间部分相对于下面的基底以相对的不平行方向拱起,从而改变中间部分与下面的基底的分离。 提供了混合热致动结构,其组合能够在平面内和平面内移动的阵列,使得可以响应于选择性热致动而实现所有三维的运动。

    Apparatus and method for performing NMR spectroscopy on solid sample by
rotation
    16.
    发明授权
    Apparatus and method for performing NMR spectroscopy on solid sample by rotation 失效
    通过旋转对固体样品进行NMR光谱的装置和方法

    公开(公告)号:US5886525A

    公开(公告)日:1999-03-23

    申请号:US822138

    申请日:1997-03-17

    CPC classification number: G01R33/4641

    Abstract: Nuclear magnetic resonance analysis of powdery or other randomly oriented solid samples is improved by slowly rotating the sample with a period exceeding the nuclear spin relaxation time of nuclei in the sample. As a result, a relatively large proportion of the crystallites in the sample are brought into resonance, thereby improving the signal to noise ratio of the NMR reading. In addition, information about the width of the entire spectrum can be obtained from analysis of measurements of only a portion of it.

    Abstract translation: 通过以超过样品中核的自旋弛豫时间的周期缓慢旋转样品来改善粉末状或其它随机取向的固体样品的核磁共振分析。 结果,样品中相当大比例的微晶被共振,从而提高NMR读数的信噪比。 另外,关于整个频谱的宽度的信息可以从仅对其一部分的测量的分析中获得。

    Scanner assembly
    17.
    发明授权
    Scanner assembly 有权
    扫描仪装配

    公开(公告)号:US08810873B2

    公开(公告)日:2014-08-19

    申请号:US13050369

    申请日:2011-03-17

    CPC classification number: H04N1/1026 H04N1/1035 H04N2201/0442 H04N2201/0446

    Abstract: A scanner assembly comprising the following components. A scan module having a first surface and configured to receive an image oriented along the first surface. A carriage having a thickness no thicker than a thickness of the scan module perpendicular to the first surface, the carriage configured to receive the scan module and to move the scan module in a direction of travel. A v-bearing coupled to the carriage proximate to one end of the carriage and protruding from the carriage in a direction perpendicular to the first surface. A scan base having a groove and configured to receive the v-bearing. A belt drive configured to move the v-bearing in the groove of the scan base.

    Abstract translation: 一种扫描器组件,包括以下部件。 一种具有第一表面并被配置为接收沿着第一表面定向的图像的扫描模块。 具有不厚于垂直于第一表面的扫描模块的厚度的厚度的托架,托架被配置为接收扫描模块并且沿行进方向移动扫描模块。 一个v轴承,其联接到靠近滑架一端的托架,并在垂直于第一表面的方向上从托架突出。 具有凹槽并被构造成接收v轴承的扫描基座。 皮带驱动器,其构造成将v轴承移动到扫描基座的槽中。

    Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor
    18.
    发明授权
    Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor 有权
    具有包括可变倾斜停止接合部分的倾斜体的微机电设备及其操作和制造方法

    公开(公告)号:US06491404B2

    公开(公告)日:2002-12-10

    申请号:US09860855

    申请日:2001-05-18

    Applicant: Edward A. Hill

    Inventor: Edward A. Hill

    Abstract: A micromechanical apparatus includes a microelectronic substrate and a tiltable body thereon. The tiltable body includes a plate configured to tilt about an axis parallel to the microelectronic substrate and a tilt stop engaging portion disposed axially adjacent the plate. A range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate. The microelectronic substrate may have an opening therein configured to receive the plate, and the tilt stop may include a surface of the microelectronic substrate adjacent the opening. An actuator, such as an electrostatic actuator, may tilt the tiltable body about the axis. Related operation and fabrication methods are also described.

    Abstract translation: 微机械装置包括微电子基板和其上的可倾斜主体。 可倾斜主体包括被配置为围绕平行于微电子衬底的轴线倾斜的板和在板附近轴向设置的倾斜止挡接合部分。 围绕轴线的板的旋转范围通过倾斜停止接合部分与基板上的倾斜挡块的接触来限定。 微电子衬底可以具有构造成接收板的开口,并且倾斜挡块可以包括邻近开口的微电子衬底的表面。 诸如静电致动器的致动器可使倾斜体围绕轴线倾斜。 还描述了相关的操作和制造方法。

    Moveable microelectromechanical mirror structures and associated methods
    19.
    发明授权
    Moveable microelectromechanical mirror structures and associated methods 有权
    可移动微机电镜结构及相关方法

    公开(公告)号:US06428173B1

    公开(公告)日:2002-08-06

    申请号:US09304301

    申请日:1999-05-03

    Abstract: Microelectromechanical structures (MEMS) are provided that are adapted to controllably move mirrors in response to selective thermal actuation. In one embodiment, the MEMS moveable mirror structure includes a thermally actuated microactuator adapted to controllably move along a predetermined path substantially parallel to the first major surface of an underlying microelectronic substrate. A mirror is adapted to move accordingly with the microactuator between a non-actuated and an actuated position. In all positions, the mirror has a mirrored surface disposed out of plane relative to the first major surface of the microelectronic substrate. The microactuator provided herein can include various thermal arched beam actuators, thermally actuated composite beam actuators, arrayed actuators, and combinations thereof. The MEMS moveable mirror structure can also include a mechanical latch and/or an electrostatic latch for controllably clamping the mirror in position. A MEMS moveable mirror array is also provided which permits individualized control of each individual MEMS moveable mirror structure within the array. The MEMS moveable mirror structures and the associated arrays can be used in a variety of applications including applications involving the controlled redirection of electromagnetic radiation. Accordingly, a method of redirecting electromagnetic radiation is provided. A method of fabricating MEMS moveable mirror structures is further provided.

    Abstract translation: 提供微机电结构(MEMS),其适于响应于选择性热致动而可控地移动反射镜。 在一个实施例中,MEMS可移动镜结构包括热致动的微致动器,其适于可控制地沿着基本上平行于下面的微电子衬底的第一主表面的预定路径移动。 镜子适于随着微致动器在非致动位置和致动位置之间相应地移动。 在所有位置,反射镜具有相对于微电子衬底的第一主表面设置在平面外的镜面。 本文提供的微致动器可以包括各种热拱形梁致动器,热致动复合梁致动器,排列的致动器及其组合。 MEMS可移动镜结构还可以包括用于可控地将镜子夹持在适当位置的机械闩锁和/或静电闩锁。 还提供了MEMS移动反射镜阵列,其允许对阵列内的每个单独的MEMS可移动镜像结构进行个性化的控制。 MEMS可移动镜结构和相关阵列可用于各种应用,包括涉及电磁辐射的受控重定向的应用。 因此,提供了一种重定向电磁辐射的方法。 还提供了制造MEMS可移动镜结构的方法。

    Variable capacitors including tandem movers/bimorphs and associated operating methods
    20.
    发明授权
    Variable capacitors including tandem movers/bimorphs and associated operating methods 失效
    可变电容器,包括串联驱动器/双压电晶片和相关操作方法

    公开(公告)号:US06400550B1

    公开(公告)日:2002-06-04

    申请号:US09860213

    申请日:2001-05-18

    CPC classification number: H01G5/16 B81B3/0056

    Abstract: A variable capacitor is provided having first and second capacitor plates, a tandem mover and an actuator. The first and second capacitor plates are positioned such that the first and second capacitor plates face one another in a spaced apart relationship. The tandem mover is configured to move the first and second capacitor plates in tandem in response to changes in ambient temperature to maintain a consistent spaced apart relationship between the capacitor plates. The actuator is then configured to vary the spaced apart relationship between the first and second capacitor plates in response to an external input. The capacitance of the variable capacitor can therefore be varied by increasing and decreasing the spaced apart relationship between the first and second capacitor plates.

    Abstract translation: 提供具有第一和第二电容器板,串联移动器和致动器的可变电容器。 第一和第二电容器板被定位成使得第一和第二电容器板以间隔开的关系彼此面对。 串联移动器被配置成响应于环境温度的变化串联地移动第一和第二电容器板,以保持电容器板之间的一致的间隔开的关系。 致动器然后被配置成响应于外部输入而改变第一和第二电容器板之间的间隔开的关系。 因此,可变电容器的电容可以通过增加和减小第一和第二电容器板之间的间隔开的关系来改变。

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