摘要:
A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.
摘要:
[Subject] To realize optimum handover in consideration of not only reception environment of a communication terminal itself but also situations on the other party of communication.[Solving Means] A communication terminal includes: a reception environment information measuring unit for measuring information of reception environment around an access point; a transmission environment information measuring unit for measuring information of transmission environment around the access point; an access point search timing determining unit for determining a timing of searching for an access point to which the communication terminal is to be switched by using a combination of the measured reception environment information and transmission environment information; an access point searching unit for searching for an access point to which the communication terminal is to be switched at the access point search timing determined; a handover timing determining unit for determining a timing of handover to the access point to which the communication terminal is to be switched by using a combination of the measured reception environment information and transmission environment information; and a handover unit for performing handover to the searched access point at the determined handover timing.
摘要:
A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, wherein the plurality of fluid control valves includes: a liquid raw material control valve for controlling supply of the liquid raw material to the flow passage; a cleaning solution control valve for controlling supply of a cleaning solution to the flow passage; a purge gas control valve for controlling supply of a purge gas to the flow passage; and a first introducing control valve connectable to the vaporizer for controlling supply of a fluid from the flow passage to the vaporizer, the purge gas control valve, the cleaning solution control valve, the liquid raw material control valve, and the first introducing control valve being mounted on the manifold in this order from an upstream side of the manifold, wherein the flow passage is connected to valve ports of the plurality of control valves respectively, the valve ports communicating with valve openings of the respective control valves, and the flow passage is configured to allow the purge gas supplied from the purge gas control valve to directly flow in the valve ports of the cleaning solution control valve and the liquid raw material control valve placed downstream from the purge gas control valve.
摘要:
The invention has an object to provide a flow path block capable of reducing pressure loss, providing an extremely long flow path and a complex flow path, and achieving weight reduction, and a manufacturing method thereof. A flow path block (1) comprises a block body (11) formed with through holes (21) and a groove (22) communicating with the through holes (21) and a lid member (12) which covers the groove (22). The groove (22) can be formed with any depth and width by a cutting tool to reduce pressure loss. The groove (22) can also be formed in a long shape by the cutting tool, so that a very long flow path can be provided when the groove (22) is covered with the lid member (12). The groove (22) can be made freely by the cutting tool to provide a complex flow path. Further, the thickness of the block body (11) can be reduced to achieve weight reduction.
摘要:
On a plate of birefringent crystal made of an LiNbO3 crystal or an LiTaO3 crystal, a conductive substance is adhered to the whole periphery of side surfaces of the plate that intersect an incident surface of a laser beam, thereby to form a wave plate. A polarizer is provided at the latter stage of the wave plate. A wavelength is monitored based on an output from the polarizer. With this arrangement, based on the use of the LiNbO3 crystal or the LiTaO3 crystal that can be manufactured by a large quantity at low cost, it is possible to obtain polarization characteristics and wavelength discrimination characteristics that are stable against environmental changes such as temperature and external stress, by suppressing the pyroelectric effect and the piezoelectric effect of these materials.
摘要:
In order to effectively detect unwanted residual organic compounds such as photoresist pieces left on a semiconductor substrate after a photolithography step during its fabrication process, the substrate surface is irradiated by an ultraviolet light beam and the fluorescent light emitted by the residual organic compounds is detected by a light-receiving element and converted into an electrical signal.
摘要:
A transmission 7 includes three ball bearings 81A, 81B, 81C, an input shaft 74, an output holding member 83, and an output shaft 72. Each of the ball bearings 81A, 81B, 81C has an inner race, an outer race, and a plurality of rolling elements. The input shaft 74 has an insertion portion inserted into the inner race, and is rotated about the rotation axis of the ball bearing 81A, thereby rotating the inner race. When the inner race is rotated, the rolling elements roll in accordance with the rotation of the inner race. The output holding member 83 includes a holding portion 831 which is held by the rolling elements, and is rotated about the rotation axis of the ball bearing 81C in accordance with rolling of the rolling elements, whereby the output shaft 72 is rotated about the rotation axis of the ball bearing 81C.
摘要:
A flow rate controller is arranged such that a control circuit controls a proportional electromagnetic valve so that a flow rate detected by a flow rate sensor reaches a target flow rate. The proportional electromagnetic valve includes a coil supported in a holder, a bobbin and a fixed core, a valve element and a plate spring placed on a movable core, the valve seat, lead-in path, lead-out path, and orifice being formed in a body. The movable core is displaced by balance between an attractive force of the fixed core generated by excitation of the coil and an urging force of the plate spring, thereby adjusting the position of the valve element with respect to the valve seat to adjust the flow rate of a fluid. The orifice has an inside diameter set to a value of “φ1 mm or more” and an axial length set to a value to have a ratio of “from 0.1 to 0.6 inclusive” to the inside diameter. The lead-out path has an inside diameter set to be larger than the inside diameter of the orifice.
摘要:
A competition avoidance control method for a data transmission-reception system, a data transmission-reception system and a terminal for a data transmission-reception system for reducing electricity consumption by the terminal in wait state to send a PS-POLL. Each terminal sends a PS-POLL to an access point after a designated time has passed. Therefore, the terminals hardly send the PS-POLLs simultaneously to the access point. Thus, the terminals can avoid wasteful standby state, thus consuming lower amount of electricity while waiting to send PS-POLL.
摘要:
To provide a gas supply unit capable of stabilizing a gas supply amount, the gas supply unit includes a mass flow controller, a first fluid control valve connected to the mass flow controller, a second fluid control valve connected in parallel to the first fluid control valve, and a third fluid control valve placed on a secondary side of the second fluid control valve. An opening degree of the third fluid control valve is adjusted based on a pressure difference between secondary pressure of the first fluid control valve and secondary pressure of the second fluid control valve.