公开(公告)号：US07126128B2

公开(公告)日：2006-10-24

申请号：US11052799

申请日：2005-02-09

申请人： Mitsushi Ikeda ,  Masaki Atsuta ,  Toshiyuki Oka ,  Kenichi Mori ,  Akira Kinno

发明人： Mitsushi Ikeda ,  Masaki Atsuta ,  Toshiyuki Oka ,  Kenichi Mori ,  Akira Kinno

IPC分类号： G01J1/24 ,  H01L25/00 ,  H01L27/00

CPC分类号： H01L27/14676 ,  H01L31/032 ,  H01L31/115

摘要： A flat panel X-ray detector, including an X-ray-electric-charge converting film containing a metal halide and serving to convert an incident X-ray into an electric charge, a pair of electrodes formed on both surfaces of the X-ray-electric-charge converting film, and a blocking layer formed in contact with at least one surface of the X-ray-electric-charge converting film and containing a substance selected from the group consisting of a metal oxide, a metal nitride, a metal halide oxide, a first mixture of at least two of these materials, and a second mixture of a metal halide and any of these materials.

摘要翻译： 一种平板X射线检测器，包括含有金属卤化物并用于将入射的X射线转换成电荷的X射线电荷转换膜，形成在X射线的两个表面上的一对电极 电荷转换膜和与X射线电荷转换膜的至少一个表面接触形成的阻挡层，并且含有选自金属氧化物，金属氮化物，金属 卤化物氧化物，这些材料中的至少两种的第一混合物和金属卤化物和这些材料中的任何一种的第二混合物。

公开(公告)号：US20060237647A1

公开(公告)日：2006-10-26

申请号：US11414483

申请日：2006-05-01

申请人： Mitsushi Ikeda ,  Akira Kinno ,  Toshiyuki Oka

发明人： Mitsushi Ikeda ,  Akira Kinno ,  Toshiyuki Oka

IPC分类号： G02F1/01

CPC分类号： H04N5/357 ,  H01L27/14609 ,  H01L27/14676 ,  H04N5/32 ,  H04N5/378

摘要： Signal output of an X-ray-electric conversion layer prevents instability of operation due to variation of a threshold voltage of TFT mounted to read a signal. Pixel electrodes 17 are arranged in an array on the X-ray-electric conversion layer. Variation of the threshold voltage (Vth) is suppressed by applying in compensatory manner a voltage pulse for switch-off having a polarity opposite to an average polarity of a voltage for switch-on at operating period to the gate electrode of a field effect type TFT for pixel switching connected to each pixel electrode to read a signal.

摘要翻译： X射线电转换层的信号输出防止由于安装的TFT的阈值电压的变化而读取信号而导致的操作不稳定。 像素电极17以X射线电转换层的阵列排列。 通过以补偿的方式施加具有与操作周期的接通电压的平均极性相反的极性的关断电压脉冲来抑制阈值电压（V SUB）的变化， 用于像素切换的场效应TFT的栅电极连接到每个像素电极以读取信号。

公开(公告)号：US20050253077A1

公开(公告)日：2005-11-17

申请号：US11052799

申请日：2005-02-09

申请人： Mitsushi Ikeda ,  Masaki Atsuta ,  Toshiyuki Oka ,  Kenichi Mori ,  Akira Kinno

发明人： Mitsushi Ikeda ,  Masaki Atsuta ,  Toshiyuki Oka ,  Kenichi Mori ,  Akira Kinno

IPC分类号： G01T1/24 ,  H01L27/146 ,  H01L31/032 ,  H01L31/115

CPC分类号： H01L27/14676 ,  H01L31/032 ,  H01L31/115

摘要： A flat panel X-ray detector, including an X-ray-electric-charge converting film containing a metal halide and serving to convert an incident X-ray into an electric charge, a pair of electrodes formed on both surfaces of the X-ray-electric-charge converting film, and a blocking layer formed in contact with at least one surface of the X-ray-electric-charge converting film and containing a substance selected from the group consisting of a metal oxide, a metal nitride, a metal halide oxide, a first mixture of at least two of these materials, and a second mixture of a metal halide and any of these materials.

摘要翻译： 一种平板X射线检测器，包括含有金属卤化物并用于将入射的X射线转换成电荷的X射线电荷转换膜，形成在X射线的两个表面上的一对电极 电荷转换膜和与X射线电荷转换膜的至少一个表面接触形成的阻挡层，并且含有选自金属氧化物，金属氮化物，金属 卤化物氧化物，这些材料中的至少两种的第一混合物和金属卤化物和这些材料中的任何一种的第二混合物。

公开(公告)号：US5296653A

公开(公告)日：1994-03-22

申请号：US987601

申请日：1992-12-09

申请人： Toshiya Kiyota ,  Mitsushi Ikeda ,  Meiko Ogawa ,  Yoshifumi Ogawa ,  Michio Murooka

发明人： Toshiya Kiyota ,  Mitsushi Ikeda ,  Meiko Ogawa ,  Yoshifumi Ogawa ,  Michio Murooka

IPC分类号： G02F1/1343 ,  G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  G03G5/10 ,  H01B5/14 ,  H01L21/3205 ,  H01L23/52 ,  H01L27/146 ,  H01L29/78 ,  H01L29/786 ,  H01S5/042 ,  H05K1/00

CPC分类号： G03G5/104 ,  G02F1/136286 ,  G02F2001/13629 ,  H01S5/0425

摘要： A multi-layered conductor structure device has a substrate, a first conductor layer formed on the substrate, which provides an electrode or wiring, and an insulating film covering the first conductor layer and the substrate. On the insulating film, a second conductor layer is formed which comprises an indium tin oxide, and which provides an electrode or wiring. The first conductor layer is formed of an alloy of aluminum with copper, gold, boron, bismuth, cobalt, chromium, germanium, iron, molybdenum, niobium, nickel, palladium, platinum, tantalum, titanium, tungsten, and/or silver.

摘要翻译： 多层导体结构器件具有衬底，形成在衬底上的第一导体层，其提供电极或布线，以及覆盖第一导体层和衬底的绝缘膜。 在绝缘膜上形成包括氧化铟锡的第二导体层，并提供电极或布线。 第一导体层由铝与铜，金，硼，铋，钴，铬，锗，铁，钼，铌，镍，钯，铂，钽，钛，钨和/或银的合金形成。

公开(公告)号：US06403965B1

公开(公告)日：2002-06-11

申请号：US09533934

申请日：2000-03-23

申请人： Mitsushi Ikeda ,  Masaki Atsuta ,  Akira Kinno ,  Kouhei Suzuki

发明人： Mitsushi Ikeda ,  Masaki Atsuta ,  Akira Kinno ,  Kouhei Suzuki

IPC分类号： G01T124

CPC分类号： H01L27/14663 ,  H01L27/14659

摘要： An X-ray image detector system includes: a plurality of scanning lines; a plurality of signal lines formed so as to intersect the scanning lines; and a plurality of pixel parts, each of which is formed at a corresponding one of the intersections between the scanning lines and the signal lines so as to form an array; each of said pixel parts having an X-ray-to-charge converting part for converting an incident X-ray to an electric charge, a pixel electrode for receiving the electric charge from the X-ray-to-charge converting part, and a switching element which is operated on the basis of a signal of a corresponding one of the scanning lines, one end of the switching element being connected to the pixel electrode, and the other end of the switching element being connected to a corresponding one of the signal lines, wherein the X-ray-to-charge converting part includes at least a first X-ray-to-charge converting film, and a second X-ray-to-charge converting film having a lower resistivity than that of the first X-ray-to-charge converting film. Thus, it is possible to provide an X-ray image detector system capable of detecting an image even if X-ray irradiation is weak.

摘要翻译： X射线图像检测器系统包括：多条扫描线; 形成为与扫描线相交的多条信号线; 以及多个像素部分，每个像素部分形成在扫描线和信号线之间的相应的一个相交处以形成阵列; 每个所述像素部分具有用于将入射的X射线转换成电荷的X射线电荷转换部分，用于从X射线到电荷转换部分接收电荷的像素电极，以及 开关元件，其基于相应的扫描线的信号而操作，所述开关元件的一端连接到所述像素电极，并且所述开关元件的另一端连接到所述信号中的相应的一个 线，其中所述X射线电荷转换部分至少包括第一X射线电荷转换膜，以及具有比所述第一X射线电荷转换膜低的电阻率的第二X射线电荷转换膜 射 - 电转换膜。 因此，即使X射线照射弱，也可以提供能够检测图像的X射线图像检测器系统。

公开(公告)号：US5566007A

公开(公告)日：1996-10-15

申请号：US299625

申请日：1994-09-02

申请人： Mitsushi Ikeda ,  Kouhei Suzuki ,  Fumio Sugiyama

发明人： Mitsushi Ikeda ,  Kouhei Suzuki ,  Fumio Sugiyama

IPC分类号： G02F1/1335 ,  G02F1/13357

CPC分类号： G02F1/133621

摘要： The present invention provides a liquid crystal display device, having light-converging member provided for each pixel or each pixel row consisting of a plurality of pixels for converging the light incident from the outside, first light path converting member for converting the converged light into a parallel light, light separating member for separating the parallel light into its red-, green- and blue-light components, a liquid crystal cell for controlling the transmitting amount of each light component, and control member for controlling the light transmittance of the liquid crystal cell for a plurality of pixels by applying a voltage to the liquid crystal cell.

摘要翻译： 本发明提供一种液晶显示装置，其具有为每个像素设置的聚光构件或由多个像素组成的每个像素行，用于会聚从外部入射的光，第一光路转换构件，用于将会聚光转换为 用于将平行光分离成其红，绿和蓝光分量的平行光，光分离部​​件，用于控制每个光成分的透射量的液晶单元，以及用于控制液晶的透光率的控制部件 通过向液晶单元施加电压来产生多个像素。

公开(公告)号：US5431773A

公开(公告)日：1995-07-11

申请号：US991954

申请日：1992-12-17

申请人： Mitsushi Ikeda ,  Michio Murooka

发明人： Mitsushi Ikeda ,  Michio Murooka

IPC分类号： G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  H01L21/02 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/336 ,  H01L21/77 ,  H01L21/84 ,  H01L29/49 ,  H01L29/78 ,  H01L29/786 ,  C23F1/00

CPC分类号： H01L29/4908 ,  G02F1/1362 ,  H01L21/31122 ,  H01L28/40 ,  H01L29/66765 ,  G02F2001/13629 ,  H01L27/124

摘要： A method of manufacturing a semiconductor device, which comprises steps of providing a substrate, forming an oxide layer of a metal material, which includes a tantalum or an alloy mainly containing a tantalum on the substrate, placing the substrate into a first chamber, activating an etching gas which includes a fluorine containing gas and an oxygen containing gas, in a second chamber, introducing the activated etching gas into the second chamber, and etching the oxide layer by the introduced gas selectively against the substrate. A method of manufacturing a liquid crystal display device, which comprises steps of providing a substrate, forming an anodic oxide layer of a tantalum containing material on the substrate, forming an etching mask on the anodic oxide layer, placing the substrate into a first region, activating a mixture of fluorine and oxygen containing gas in a second region, apart from the first region, introducing the activated etching gas into the first region through a gas introducing portion, and etching the oxide layer on the substrate selectively against the substrate, by using the etching mask.

摘要翻译： 一种制造半导体器件的方法，包括以下步骤：在衬底上形成包含钽或主要含有钽的合金的金属材料的氧化物层的衬底，将衬底放置在第一腔室中，激活 在第二室中包括含氟气体和含氧气体的蚀刻气体，将活化的蚀刻气体引入到第二室中，并且通过引入的气体选择性地对衬底蚀刻氧化物层。 一种制造液晶显示装置的方法，包括以下步骤：在基板上形成含钽材料的阳极氧化层，在阳极氧化层上形成蚀刻掩模，将基板放置在第一区域中， 在第一区域的第二区域中激活含氟和含氧气体的混合物，通过气体导入部分将活化的蚀刻气体引入第一区域，并通过使用 蚀刻掩模。

公开(公告)号：US06849853B2

公开(公告)日：2005-02-01

申请号：US10262972

申请日：2002-10-03

申请人： Mitsushi Ikeda ,  Kouhei Suzuki ,  Akira Kinno

发明人： Mitsushi Ikeda ,  Kouhei Suzuki ,  Akira Kinno

IPC分类号： G01T1/00 ,  H01L27/146 ,  H01L31/0296 ,  G01J1/24

CPC分类号： H01L27/14659 ,  H01L27/14609 ,  H01L31/0296

摘要： An X-ray flat panel detector includes an X-ray photosensitive film which generates signal charges upon being exposed to incident X-rays, pixel electrodes which are arrayed in contact with the X-ray photosensitive film, a bias voltage application unit which applies a bias voltage to the X-ray photosensitive film so as to make the pixel electrodes collect holes or electrons, which serve as the signal charges generated by the X-ray photosensitive film and have a higher mobility, capacitors which are arranged in correspondence with the pixel electrodes and store the charges generated by the X-ray photosensitive film, switching thin-film transistors which are arranged in correspondence with the pixel electrodes and read the charges in the capacitors, scanning lines which supply a control signal to OPEN/CLOSE-control the switching thin-film transistors, and signal lines which are connected to the switching thin-film transistors to read the charges when the switching thin-film transistors are opened.

摘要翻译： X射线平板检测器包括在暴露于入射X射线时产生信号电荷的X射线感光膜，与X射线感光膜接触排列的像素电极，施加了X射线感光膜的偏压施加单元 偏置电压以使得像素电极收集空穴或电子，其用作由X射线感光膜产生的信号电荷并具有较高的迁移率，对应于像素排列的电容器 电极，并存储由X射线感光膜产生的电荷，对应于像素电极排列的开关薄膜晶体管，并读取电容器中的电荷，将控制信号提供给OPEN / CLOSE-控制的扫描线 开关薄膜晶体管和连接到开关薄膜晶体管的信号线，以便当开关薄膜晶体管为 开了

公开(公告)号：US06185274B2

公开(公告)日：2001-02-06

申请号：US09265693

申请日：1999-03-10

申请人： Akira Kinno ,  Masaki Atsuta ,  Takuya Sakaguchi ,  Manabu Tanaka ,  Mitsushi Ikeda ,  Kouhei Suzuki

发明人： Akira Kinno ,  Masaki Atsuta ,  Takuya Sakaguchi ,  Manabu Tanaka ,  Mitsushi Ikeda ,  Kouhei Suzuki

IPC分类号： H05G164

CPC分类号： G01T1/2928

摘要： An image detecting device has a large dynamic range that deals with a plurality of image detecting modes. The image detecting device is composed of pixels e (i, j) arranged in a matrix array. Each pixel has a photoelectric element. In each pixel, a capacitor 102 and a protecting diode 103 are disposed. The capacitor 102 stores electric charge corresponding to the intensity of penetrated light to the relevant pixel. The protecting diode limits the capacitance. A bias voltage is supplied to the protecting diode 103 through a bias line Bias. The bias voltage is adjusted by a bias voltage controlling system 133 corresponding to the frame rate. Thus, the influence of a leak current in the off-state of the protecting diode 103 can be alleviated against electric charge stored in the capacitor 102. Consequently, an image with a high S/N ratio can be obtained regardless of the frame rate.

摘要翻译： 图像检测装置具有处理多个图像检测模式的大动态范围。 图像检测装置由以矩阵阵列排列的像素e（i，j）组成。 每个像素都有一个光电元件。 在每个像素中，设置电容器102和保护二极管103。 电容器102将对应于穿透光强度的电荷存储到相关像素。 保护二极管限制电容。 偏置电压通过偏压线Bias提供给保护二极管103。 偏置电压由对应于帧速率的偏压控制系统133调节。 因此，可以减轻保护二极管103的截止状态下的漏电流对存储在电容器102中的电荷的影响。因此，无论帧速率如何，都可以获得具有高S / N比的图像。

公开(公告)号：US6078365A

公开(公告)日：2000-06-20

申请号：US785018

申请日：1997-01-17

申请人： Tomomasa Ueda ,  Yutaka Onozuka ,  Yujiro Hara ,  Shuichi Saito ,  Mitsushi Ikeda

发明人： Tomomasa Ueda ,  Yutaka Onozuka ,  Yujiro Hara ,  Shuichi Saito ,  Mitsushi Ikeda

IPC分类号： G02F1/1333 ,  G02F1/133 ,  G02F1/1362 ,  G02F1/1368 ,  G02F1/1343 ,  G02F1/136

CPC分类号： G02F1/13454 ,  G02F1/1368 ,  G02F1/136286

摘要： An active matrix liquid crystal panel includes a plurality of thin film transistors respectively arranged adjacent to pixel electrodes, and a plurality of auxiliary capacitances. Each transistor has a semiconductor active layer, a pair of source and drain electrodes, and a gate electrode opposing the active layer via a gate insulating film. Each auxiliary capacitance has upper and lower electrodes, and a dielectric layer sandwiched between the upper and lower electrodes. The gate electrode, the lower electrode, and an address line respectively have portions formed of a common refractory metal film arranged on the insulating surface of a support substrate. The source and drain electrodes, the upper electrode, and a signal line respectively have portions formed of a common Mo film. Each pixel electrode has a portion formed of an ITO film. Each auxiliary capacitance further has an intervening layer between the dielectric layer and the upper electrode. The intervening layer has a portion formed of a semiconductor film common to the active layer of the transistor.

摘要翻译： 有源矩阵液晶面板包括分别与像素电极相邻布置的多个薄膜晶体管和多个辅助电容。 每个晶体管具有半导体有源层，一对源极和漏极电极以及通过栅极绝缘膜与有源层相对的栅电极。 每个辅助电容具有上电极和下电极以及夹在上电极和下电极之间的电介质层。 栅电极，下电极和地址线分别具有由布置在支撑基板的绝缘表面上的公共耐火金属膜形成的部分。 源极和漏极，上电极和信号线分别具有由公共Mo膜形成的部分。 每个像素电极具有由ITO膜形成的部分。 每个辅助电容还在介电层和上电极之间具有中间层。 中间层具有由晶体管的有源层共有的半导体膜形成的部分。