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公开(公告)号：US20080210007A1
公开(公告)日：2008-09-04
申请号：US12010249
申请日：2008-01-23
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
IPC分类号： G01P9/04
CPC分类号： G01C19/5712 , G01C19/5628
摘要： An angular velocity sensor includes: a first tuning-fork vibrator having a first base and first aims extending from the first base in a first direction; a second tuning-fork vibrator having a second bass and second arms extending from the second base in a second direction; and a double gimbal portion mat has a drive gimbal portion vibrating about an axis extending in a fourth direction, and a sense gimbal portion vibrating about an axis extending in a fifth direction and senses an angular velocity about an axis extending in a third direction.
摘要翻译： 角速度传感器包括：第一音叉振子，具有第一基座和第一目标，从第一基座沿第一方向延伸; 具有第二低音和第二臂的第二音叉振子，所述第二音叉和第二臂在第二方向上从所述第二基座延伸; 并且双云母部分垫具有绕围绕第四方向延伸的轴线振动的驱动万向节部分和围绕沿第五方向延伸的轴线振动的感测万向节部分，并感测围绕在第三方向延伸的轴线的角速度。
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公开(公告)号：US20070091079A1
公开(公告)日：2007-04-26
申请号：US11604693
申请日：2006-11-28
IPC分类号： G09G5/00
CPC分类号： G06F3/0436
摘要： Surface acoustic waves are propagated in a lower-left oblique direction and a lower-right oblique direction from an excitation element located on the upper side of a non-piezoelectric substrate and then received by receiving elements located on the left side and the right side, while surface acoustic waves are propagated in an upper-left oblique direction and an upper-right oblique direction from an excitation element located on the lower side of the non-piezoelectric substrate and then received by the receiving elements located on the left side and the right side. Based on the received results at the two receiving elements, a position of an object in contact with the non-piezoelectric substrate is detected. The sensitivity in a region near the diagonal, which is influenced largely by propagation loss of the surface acoustic waves, is improved by increasing the widths of the electrode fingers of the excitation elements and/or the receiving elements, the number of pairs of the electrode fingers, or the aperture width of comb-like electrodes, according to an increase in the propagation distances of the surface acoustic waves, i.e., toward the region near the diagonal.
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公开(公告)号：US07176903B2
公开(公告)日：2007-02-13
申请号：US10781791
申请日：2004-02-20
IPC分类号： G09G5/00
CPC分类号： H03H3/08 , G06F3/0436 , H01L41/047 , H01L41/0477
摘要： A piezoelectric element includes a substrate, a lower electrode on the substrate, a piezoelectric layer on the lower electrode, and an upper electrode on the piezoelectric layer. The upper electrode includes a common base and a plurality of parallel branches extending from the base. The branches are arranged at a regular interval or pitch λ1. The lower electrode faces the branches of the upper electrode via the piezoelectric layer. The thickness h of the piezoelectric layer and the branch pitch λ1 are determined to satisfy an inequality 0.005≦h/λ1≦0.1. The lower electrode has a hillock occurrence rate which is no greater than 0.1%.
摘要翻译： 压电元件包括衬底，衬底上的下电极，下电极上的压电层和压电层上的上电极。 上电极包括公共基座和从基座延伸的多个平行分支。 分支以规则间隔或间距λ1排列。 下电极经由压电层面对上电极的分支。 压电层的厚度h和分支间距λ1确定为满足不等式0.005 <= H /λ1 <= 0.1。 下电极具有不大于0.1％的小丘发生率。
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公开(公告)号：US07079120B2
公开(公告)日：2006-07-18
申请号：US10446153
申请日：2003-05-28
IPC分类号： G09G5/00
CPC分类号： G06F3/0436
摘要： Each of excitation elements and receiving elements placed in a frame region of a non-piezoelectric substrate is constructed by forming a comb-like electrode on the front face of a piezoelectric body and forming a plate electrode (solid electrode) on the rear face thereof. The comb-like electrode is composed of a bus electrode and a plurality of V-shaped electrode fingers extended from the bus electrode. Drawn-round wires are provided to connect the comb-like electrode (bus electrode) and plate electrode to external circuits. Surface acoustic waves from the excitation elements located on the upper side and the lower side are simultaneously propagated in two directions respectively and the propagated surface acoustic waves are received by receiving elements located on the left side and the right side respectively.
摘要翻译： 放置在非压电基板的框架区域中的每个激励元件和接收元件通过在压电体的前表面上形成梳状电极并在其后表面上形成平板电极（固体电极）而构成。 梳状电极由总线电极和从总线电极延伸的多个V形电极指构成。 提供拉制圆线以将梳状电极（总线电极）和平板电极连接到外部电路。 来自位于上侧和下侧的激励元件的表面声波分别在两个方向上同时传播，并且传播的声表面波分别由位于左侧和右侧的接收元件接收。
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公开(公告)号：US06951175B2
公开(公告)日：2005-10-04
申请号：US10642930
申请日：2003-08-18
申请人： Yuji Otake , Takahiro Fukagawa , Takashi Katsuki
发明人： Yuji Otake , Takahiro Fukagawa , Takashi Katsuki
IPC分类号： G01N21/956 , H05K1/02 , H05K3/12 , B41F21/12
CPC分类号： H05K3/1216 , B41F33/0036 , B41F33/0081 , B41P2233/50 , B41P2233/52 , G01N21/956 , G01N21/95607 , H05K1/0269 , H05K2203/163
摘要： It is an object of the invention to provide a method for forming printing inspection data in which the use of a mask plate makes it possible to simply and efficiently form the inspecting data.In a method for forming printing inspection data for obtaining mask opening data from an image got by picking-up the image of a mask plate to form the inspecting data, when an image pick-up visual field 20a is sequentially moved to visual field positions having a grid-shaped arrangement to obtain a plurality of images, if incomplete opening parts 16b (X) and (Y) in which parts of the opening parts protrude are detected, ranges BX2 and BY2 which are excluded from an object of data in this image are determined based on these sizes BY1 and BY2. When the image pick-up visual field is moved to an adjacent visual field position, the image pick-up visual field is overlapped on the adjacent image pick-up visual field by BX2, BY2 to include these opening parts in the adjacent image pick-up visual field. Thus, an inconvenience that the opening parts protrude in the image is eliminated so that the inspecting data can be simply and efficiently formed.
摘要翻译： 本发明的目的是提供一种用于形成打印检查数据的方法，其中使用掩模板使得可以简单且有效地形成检查数据。 在形成用于从通过拾取掩模板的图像获得的图像获得掩模开口数据以形成检查数据的打印检查数据的形成方法中，当将图像拾取视野20a依次移动到视野位置 具有网格布置以获得多个图像，如果检测到部分开口部分突出的不完整的开口部分16b（X）和（Y）的范围BX 2和BY 2，其从 基于这些尺寸BY 1和BY 2确定该图像中的数据。 当摄像视野被移动到相邻的视野位置时，通过BX 2，BY 2将图像拾取视野重叠在相邻的摄像视野上，以在相邻的图像中包括这些开口部分 拾起视野。 因此，消除了图像中的开口部分突出的不便，从而可以简单且有效地形成检查数据。
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公开(公告)号：US08283735B2
公开(公告)日：2012-10-09
申请号：US12688302
申请日：2010-01-15
CPC分类号： B32B37/12 , B32B2309/027 , B32B2309/68 , B32B2310/0806 , B32B2457/00 , B81B2207/096 , B81C1/00301 , B81C2203/0118 , B81C2203/019 , H01L23/10 , H01L2924/0002 , H01L2924/00
摘要： A packaged device includes a device substrate and a packaging unit. The device substrate includes a first surface and a device formed in the device substrate. The packaging unit includes an insulating layer which faces the device substrate. The insulating layer includes a second surface bonded to the first surface. A metal concentration of at least part of a peripheral surface in the insulating layer is higher than a metal concentration of an end surface on the device substrate side in the insulating layer. An outline of the first surface is retreated inward from an outline of the second surface.
摘要翻译： 包装装置包括装置基板和包装单元。 器件衬底包括形成在器件衬底中的第一表面和器件。 包装单元包括面向设备基板的绝缘层。 绝缘层包括结合到第一表面的第二表面。 绝缘层中的外围表面的至少一部分的金属浓度高于绝缘层中的器件基板侧的端面的金属浓度。 第一表面的轮廓从第二表面的轮廓向内退回。
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公开(公告)号：US20090139328A1
公开(公告)日：2009-06-04
申请号：US12071862
申请日：2008-02-27
CPC分类号： G01P15/125 , G01C19/5719 , G01P1/023 , G01P15/0802 , H01L23/041 , H01L2924/0002 , Y10T156/1052 , H01L2924/00
摘要： A method is provided for making packaged micro-devices each including a micro movable element, a first packaging member formed with a recess, and a second packaging member formed with another recess. The micro movable element has a movable part. In accordance with the method, a device wafer is prepared for forming a plurality of micromovable elements. A first packaging wafer, formed with a plurality of recesses corresponding in position to the movable parts of the respective movable elements, is bonded to one surface of the device wafer. A second packaging wafer, formed with a plurality of recesses, is bonded to the other surface of the device wafer. The resulting laminate assembly is cut into separate products.
摘要翻译： 提供一种用于制造包括微型可移动元件，形成有凹部的第一包装构件和形成有另一凹部的第二包装构件的包装微型装置的方法。 微动元件具有可动部。 根据该方法，制备用于形成多个微型可移动元件的器件晶片。 形成有与相应可移动元件的可移动部分相对应的多个凹部的第一封装晶片被结合到器件晶片的一个表面。 形成有多个凹部的第二封装晶片被接合到器件晶片的另一个表面。 将所得的层压组件切割成单独的产品。
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公开(公告)号：US20070256497A1
公开(公告)日：2007-11-08
申请号：US11785458
申请日：2007-04-18
申请人： Hiroshi Ishikawa , Takayuki Yamaji , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
发明人： Hiroshi Ishikawa , Takayuki Yamaji , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
IPC分类号： G01P15/08
CPC分类号： G01C19/5607 , G01C19/5628
摘要： An angular velocity sensor includes multiple tuning-fork vibrators, each of which respectively includes a base portion and multiple arm portions extending from the base portion, and a difference in a resonance frequency between the multiple tuning-fork vibrators is at least 2 percent of an average of resonance frequencies of the multiple tuning-fork vibrators.
摘要翻译： 角速度传感器包括多个音叉振动器，每个音叉振动器分别包括基部和从基部延伸的多个臂部分，并且多个音叉振动器之间的谐振频率的差异为至少2％ 多音叉振动器的共振频率的平均值。
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公开(公告)号：US07230612B2
公开(公告)日：2007-06-12
申请号：US10352857
申请日：2003-01-29
CPC分类号： G06F3/0436
摘要： Surface acoustic waves are propagated in a lower-left oblique direction and a lower-right oblique direction from an excitation element located on the upper side of a non-piezoelectric substrate and then received by receiving elements located on the left side and the right side, while surface acoustic waves are propagated in an upper-left oblique direction and an upper-right oblique direction from an excitation element located on the lower side of the non-piezoelectric substrate and then received by the receiving elements located on the left side and the right side. Based on the received results at the two receiving elements, a position of an object in contact with the non-piezoelectric substrate is detected. The sensitivity in a region near the diagonal, which is influenced largely by propagation loss of the surface acoustic waves, is improved by increasing the widths of the electrode fingers of the excitation elements and/or the receiving elements, the number of pairs of the electrode fingers, or the aperture width of comb-like electrodes, according to an increase in the propagation distances of the surface acoustic waves, i.e., toward the region near the diagonal.
摘要翻译： 表面声波从位于非压电基板的上侧的激励元件沿左下斜方向和右下斜方向传播，然后由位于左侧和右侧的接收元件接收， 同时表面声波从位于非压电基板的下侧的激励元件沿左上方倾斜方向和右上斜方向传播，然后由位于左侧和右侧的接收元件接收 侧。 基于两个接收元件的接收结果，检测与非压电基板接触的物体的位置。 通过增加激发元件和/或接收元件的电极指的宽度，电极对的数量来改善受到表面声波的传播损耗很大影响的对角线附近区域的灵敏度 手指或梳状电极的孔径宽度，根据表面声波的传播距离的增加，即朝向对角线附近的区域的增加。
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公开(公告)号：US07184029B2
公开(公告)日：2007-02-27
申请号：US10704778
申请日：2003-11-12
CPC分类号： G06F3/0436
摘要： Each of an excitation element for exciting surface acoustic waves in two directions and a receiving element for receiving surface acoustic waves from two directions is constructed by forming a comb-like electrode on the front surface of a piezoelectric body in the form of a thin film and a plate electrode on the rear surface thereof. The comb-like electrode on the front surface has one line of bus electrode, and a plurality of electrode fingers which are extended from the bus electrode and bent in V-shape in the middle. The voltage in the excitation element and in the receiving element is controlled by providing a terminal resistance for preventing reflection of an applied AC voltage at the terminal end, between the terminal end portion of the comb-like electrode and the plate electrode, or adjusting the resistance value of the bus electrode and/or the plate electrode, or adjusting the capacitance value between the electrode finger and the plate electrode.
摘要翻译： 通过在薄膜的形式的压电体的前表面上形成梳状电极来构成用于激励两个方向上的表面声波的激发元件和用于从两个方向接收表面声波的接收元件， 在其后表面上的平板电极。 前表面上的梳状电极具有一条总线电极线，并且多个电极指从总线电极延伸并在中间弯曲成V形。 励磁元件和接收元件中的电压通过提供终端电阻来控制，用于防止在梳状电极的终端部分与平板电极之间的终端处的施加的AC电压的反射，或者调整 总线电极和/或平板电极的电阻值，或调整电极指和电极之间的电容值。
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