Supercritical fluid drying system and method of use
    14.
    发明授权
    Supercritical fluid drying system and method of use 失效
    超临界流体干燥系统

    公开(公告)号:US06334266B1

    公开(公告)日:2002-01-01

    申请号:US09665932

    申请日:2000-09-20

    IPC分类号: F26B300

    摘要: A method and apparatus for fabricating and drying wafers, including micro-electro-mechanical system (MEMS) structures, in a second, supercritical processing fluid environment. The apparatus utilizes an inverted pressure vessel connected to a supercritical processing fluid supply and recover system, with an internal heat exchanger connected to external heating and cooling sources, which is closed with a vertically movable base plate. A wafer cassette configured for supporting multiple wafers is submerged in a first processing fluid within a container, which is installed on the base plate for insertion into the pressure vessel. Vessel inlet and outlet tubes extend vertically downward from the ceiling of the pressure vessel to nearly the base plate. Container inlet and outlet tubes extend vertically downward from the ceiling of the pressure vessel to inside the container and nearly to the bottom of the container. The tubes provide for displacement of the first processing fluid with the second processing fluid still in a liquid state, from which it is raised to supercritical state.

    摘要翻译: 一种用于在第二超临界处理流体环境中制造和干燥晶片的方法和装置,包括微电子机械系统(MEMS)结构。 该设备利用与超临界加工流体供应和回收系统连接的倒置压力容器,内部热交换器连接到外部加热和冷却源,该外部加热和冷却源用可垂直移动的基板封闭。 构造成用于支撑多个晶片的晶片盒被浸没在容器内的第一处理流体中,该容器安装在基板上用于插入压力容器中。 容器入口和出口管从压力容器的天花板垂直向下延伸到几乎基板。 容器入口和出口管从压力容器的天花板垂直向下延伸到容器内部并且几乎到容器的底部。 这些管提供第一处理流体与第二处理流体的位移,该第二处理流体仍处于液态,从而将其升高到超临界状态。

    Inverted pressure vessel with shielded closure mechanism
    15.
    发明申请
    Inverted pressure vessel with shielded closure mechanism 失效
    带有屏蔽闭合机构的倒置压力容器

    公开(公告)号:US20010029971A1

    公开(公告)日:2001-10-18

    申请号:US09778124

    申请日:2001-02-05

    IPC分类号: B08B013/00

    摘要: An inverted pressure vessel system for conducting automated industrial processes requiring elevated pressure and temperatures has a vertically movable pedestal for opening and closing the underside loading port, with pedestal drive system and locking mechanism located below the pedestal top and isolated from the chamber opening. The chamber is connectible to a pressure control and process fluid supply system, and has heat exchangers connected to an external source for temperature control. Process fluids are distributed across a central process cavity through divergent inflow and convergent outflow process fluid channels.

    摘要翻译: 用于进行需要升高的压力和温度的自动化工业过程的倒置压力容器系统具有用于打开和关闭下侧装载口的可垂直移动的底座,底座驱动系统和锁定机构位于基座顶部下方并与腔室开口隔离。 该室可连接到压力控制和过程流体供应系统,并具有连接到外部温度控制源的热交换器。 过程流体通过发散流入和汇流流出流体通道分布在中心过程腔中。

    Method for deforming solids in a controlled atmosphere and at adjustable
rates, pressures and temperature
    17.
    发明授权
    Method for deforming solids in a controlled atmosphere and at adjustable rates, pressures and temperature 失效
    在受控气氛和可调节速率,压力和温度下使固体变形的方法

    公开(公告)号:US6159400A

    公开(公告)日:2000-12-12

    申请号:US372083

    申请日:1999-08-11

    摘要: A method for forging, or hot working bulk ceramics, including high temperature superconductors and other sensitive materials, under precisely controlled conditions of pressure, temperature, atmospheric composition, and strain rate. A capsule with massive end plates and with an independent gas supply is located in a modified hot isostatic press (HIP), designed to operate at pressures of up to 200 MPa and at temperatures of up to 1000 C. Essentially uniaxial deformation of a pre-compacted disc with forces of up to 500,000 Newtons (50 tons), and over time scales from seconds to hours can be achieved by separately controlling the pressure in the capsule from that of its surroundings. The separate gas supply to the capsule can also maintain a specified gaseous atmosphere around the disc, up to the operating pressure of the equipment. The apparatus can be designed to tolerate oxygen concentrations of up to 20%.

    摘要翻译: 在压力,温度,大气成分和应变率的精确控制条件下锻造或热加工散装陶瓷的方法,包括高温超导体和其他敏感材料。 具有大量端板和独立气体供应的胶囊位于改进的热等静压机(HIP)中,设计用于在高达200MPa的压力和高达1000℃的温度下工作。基本上单轴变形 可以通过单独控制胶囊中的压力与其周围的压力来实现压力高达500,000牛顿(50吨)的压实盘,并且可以通过时间尺度从几秒到数小时。 到胶囊的单独的气体供应也可以在盘周围保持指定的气体气氛,直到设备的操作压力。 该设备可以设计成耐受高达20%的氧浓度。

    Rapid densification of materials
    18.
    发明授权
    Rapid densification of materials 失效
    材料快速致密化

    公开(公告)号:US5110542A

    公开(公告)日:1992-05-05

    申请号:US663625

    申请日:1991-03-04

    申请人: Robert M. Conaway

    发明人: Robert M. Conaway

    IPC分类号: B01J3/06 B22F3/15

    CPC分类号: B01J3/06 B22F3/15

    摘要: The present invention describes a process for the compaction and densification of materials using heat and high pressure in which pressure is applied isostatically to the workpiece to be compacted, heat is applied to the pressurized workpiece as rapidly as feasible, effecting thereby full compaction and densification. Heating is terminated and the workpiece cooled while the workpiece is still pressurized. This process effects hot-isostatic-processing of workpieces while reducing the time such workpieces spend at elevated temperatures. The resulting parts can have novel structures, properties or compositions not obtained with other processing procedures.

    摘要翻译: 本发明描述了一种用于使用热和高压的材料的压实和致密化的方法,其中压力被均匀地施加到要压实的工件上,热量被尽可能快地施加到加压工件,从而实现完全压实和致密化。 加热终止,工件冷却,而工件仍然加压。 该工艺对工件进行热等静压加工,同时减少工件在升高的温度下消耗的时间。 所得到的部件可以具有新颖的结构,性能或不是用其它加工方法获得的组合物。

    High pressure cells
    20.
    发明授权
    High pressure cells 失效
    高压电池

    公开(公告)号:US3559242A

    公开(公告)日:1971-02-02

    申请号:US3559242D

    申请日:1968-03-12

    发明人: MARCOVITCH JACOB

    IPC分类号: B01J3/06 C04B33/32 B29C3/00

    摘要: THE INVENTION IS CONCERNED WITH THE METHOD AND APPARATUS FOR GENERATING OR DISSIPATING VERY HIGH PRESSURES BY MEANS OF ENCLOSING A REACTION ZONE IN A CONTINUOUS MASS OF MATERIAL OF LOW TENSILE STRENGTH AND HAVING NO SUDDEN CHANGE IN SECTIONAL SHAPE. THIS MATERIAL IS ENCLOSED IN A SHEATH OF HIGH TENSILE STRENGTH MATERIAL AND PRESSURE MAGNIFYING OR REDUCING BODIES ARE INCLUDED IN THE MASS OF MATERIAL. THIS ASSEMBLY ENABLES VERY HIGH PRESSURES TO BE GENERATED IN THE REACTION ZONE AND CONTROLLED THROUGH ENERGY ABSORBED BY INTERPARTICULATE FRICTION IN THE MASS OF THE LOW TENSILE STRENGTH MATERIAL.