公开(公告)号：US20140185127A1

公开(公告)日：2014-07-03

申请号：US13731511

申请日：2012-12-31

Applicant: PIXTRONIX, INC.

Inventor： Eugene E. Fike, III ,  Timothy J. Brosnihan

IPC: G02B26/00 ,  G09G3/00 ,  G02F1/01

CPC classification number: G02B26/00 ,  B81B3/0005 ,  B81B7/0012 ,  B81B7/0029 ,  B81B2201/045 ,  B81C1/0096 ,  G02B26/02 ,  G02B27/0006 ,  G02F1/0102 ,  G09G3/00

Abstract: This disclosure provides systems, methods and apparatus for preventing particles from entering electromechanical systems (EMS) display devices. In one aspect, an apparatus includes a plate, a substrate supporting at least one EMS device, a seal joining the plate and the substrate to define a cavity therebetween and at least one port for receiving a fluid, and a filter disposed between the port and the EMS device. The filter includes elements formed on at least one of a surface of the substrate and a surface of the plate, defining a gap sized to allow the received fluid to pass and to inhibit non-fluidic particles carried in the fluid from the EMS device.

Abstract translation: 本公开提供了用于防止颗粒进入机电系统（EMS）显示装置的系统，方法和装置。 在一个方面，一种装置包括板，支撑至少一个EMS装置的基板，连接板和基板的密封件，以在其间限定一个空腔，以及用于接收流体的至少一个端口，以及设置在端口和 EMS设备。 过滤器包括形成在基板的表面和板的表面中的至少一个上的元件，其限定了尺寸允许接收的流体通过并且抑制从EMS装置流入的流体中的非流体颗粒的间隙。

公开(公告)号：US08749113B2

公开(公告)日：2014-06-10

申请号：US12954806

申请日：2010-11-26

Applicant: Takayuki Masunaga ,  Hiroaki Yamazaki

Inventor： Takayuki Masunaga ,  Hiroaki Yamazaki

IPC: H02N1/00 ,  H02K5/00

CPC classification number: H01H59/0009 ,  B81B3/007 ,  B81B2201/018 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0172 ,  H02N1/006

Abstract: According to one embodiment, an electrostatic actuator includes an electrode unit, a conductive film body unit, a plurality of first urging units, and a plurality of second urging units. The electrode unit is provided on a substrate. The conductive film body unit is provided opposing the electrode unit. The plurality of first urging units are provided at a first circumferential edge portion of the conductive film body unit to support the film body unit. The plurality of second urging units are provided at a second circumferential edge portion opposing the first circumferential edge portion to support the film body unit. The electrode unit and the conductive film body unit contact or separate by the electrode unit being set to a voltage having a prescribed value. The plurality of first urging units have mutually different rigidities, and the plurality of second urging units have mutually different rigidities.

Abstract translation: 根据一个实施例，静电致动器包括电极单元，导电膜主体单元，多个第一推动单元和多个第二推动单元。 电极单元设置在基板上。 导电膜体单元设置成与电极单元相对。 多个第一推动单元设置在导电膜主体单元的第一圆周边缘部分处以支撑胶片主体单元。 多个第二推动单元设置在与第一周缘部相对的第二周缘部，以支撑胶片主体单元。 由电极单元接触或分离的电极单元和导电膜主体单元被设定为具有规定值的电压。 多个第一推动单元具有相互不同的刚性，并且多个第二推动单元具有相互不同的刚性。

公开(公告)号：US08043882B2

公开(公告)日：2011-10-25

申请号：US12315652

申请日：2008-12-05

Applicant: Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

Inventor： Keiichi Mori ,  Yoshichika Kato ,  Satoshi Yoshida ,  Kenji Kondou ,  Yoshihiko Hamada ,  Osamu Imaki

IPC: H01L21/00

CPC classification number: B81C1/00825 ,  B81B7/0029 ,  B81B2201/045 ,  B81B2203/033 ,  G02B26/0841 ,  Y10T29/49 ,  Y10T29/49002 ,  Y10T307/865

Abstract: A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.

Abstract translation: 微型移动装置设置在单晶硅衬底上，可移动元件如活动杆和可移动梳状电极可平行移动到衬底表面，固定部分固定固定在单晶硅衬底上 绝缘层夹在中间。 在单晶硅衬底的不存在固定部分并且可移动部件位于凹部上方的表面区域中形成凹陷。 凹陷形成足够大的间隙，以防止异物引起可动部件的短路和故障。

公开(公告)号：US08004736B2

公开(公告)日：2011-08-23

申请号：US12463312

申请日：2009-05-08

Applicant: Wen-Jian Lin ,  Brian Arbuckle ,  Brian Gally ,  Philip Floyd ,  Lauren Palmateer

Inventor： Wen-Jian Lin ,  Brian Arbuckle ,  Brian Gally ,  Philip Floyd ,  Lauren Palmateer

IPC: G02B26/00

CPC classification number: G02B26/001 ,  B81B7/0012 ,  B81B2201/045

Abstract: A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

Abstract translation: 第一电极和牺牲层依次形成在基板上，然后在第一电极和牺牲层中形成用于形成支撑件的第一开口。 支撑件形成在第一开口中，然后在牺牲层和支撑件上形成第二电极，从而形成微机电系统结构。 之后，使用粘合剂将保护结构粘附并固定到基底上以形成腔室以包围微机电系统结构，并且至少一个第二开口保留在腔室的侧壁上。 随后采用释放蚀刻工艺以通过第二开口去除牺牲层，以便在光学干涉反射结构中形成空腔。 最后，关闭第二个开口以密封衬底和保护结构之间的光学干涉反射结构。

公开(公告)号：US07982937B2

公开(公告)日：2011-07-19

申请号：US10953619

申请日：2004-09-28

Applicant: Shinichi Takeuchi ,  Tsuyoshi Yamamoto

Inventor： Shinichi Takeuchi ,  Tsuyoshi Yamamoto

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  B81B3/004 ,  B81B7/0003 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/3566 ,  G02B6/3584

Abstract: The micro mirror unit includes a substrate, on which are provided a micro mirror reflecting light, a torsion bar supporting the micro mirror, a frame rotatably supporting the torsion bar, and a deformative supporting part which deforms itself to lift the frame away from the substrate and supports the frame in such a lifted condition. This arrangement makes it possible to realize an increased space between the micro mirror and the substrate, thereby realizing an enlarged mirror tilt angel, without increasing the thickness of the sacrifice layer.

Abstract translation: 微反射镜单元包括：基板，在其上设置有反光镜的微反射镜，支撑微反射镜的扭力杆，可旋转地支撑扭杆的框架，以及变形支撑部件，其自身变形以使框架远离基板 并在这种提升状态下支撑框架。 这种布置使得可以实现微反射镜和基板之间的增加的空间，从而实现放大的反射镜倾斜角，而不增加牺牲层的厚度。

公开(公告)号：US07808150B2

公开(公告)日：2010-10-05

申请号：US12607341

申请日：2009-10-28

Applicant: Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

Inventor： Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

IPC: H02N1/00 ,  G02B26/08

CPC classification number: B81B3/004 ,  B81B2201/042 ,  B81B2201/045 ,  H02N1/008

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4.

Abstract translation: 提供能够以降低的电压驱动并且容易制造的致动器及其制造方法。 致动器包括通过间隔件固定到支撑基板4的第二支撑部分31和32，固定在支撑基板4上的固定部分33和34，而不需要间隔件，固定梳状电极331和341一体地形成固定部分33和 并且与间隔开的可动梳状电极211,212啮合，以及用于将固定部33,34连接到第二支撑部31,32的桥接部35,36。固定部33,34固定在 支撑基板4在弯曲桥接部分35和36的同时相对于第二支撑部分31和32偏转到支撑基板4的状态，从而最初偏转固定梳状电极331和341以便脱离 在支撑基板4的厚度方向上与可动梳状电极211和212对准。

公开(公告)号：US07728339B1

公开(公告)日：2010-06-01

申请号：US10139009

申请日：2002-05-03

Applicant: Scott G. Adams ,  Tim Davis

Inventor： Scott G. Adams ,  Tim Davis

IPC: H01L29/207 ,  H01L21/00

CPC classification number: B81B3/0086 ,  B81B2201/045 ,  G02B26/0833

Abstract: A micromechanical structure is described. A region of semiconductor material has a first surface, a second surface opposite to the first surface, and a lateral surface that surrounds the region of semiconductor material. Insulative material covers the first surface and the lateral surface of the region of semiconductor material to provide electrical isolation to the region of semiconductor material by forming a boundary. To form the micromechanical structure, a trench is etched in a semiconductor substrate to surround a region of the semiconductor substrate. A surface of the semiconductor substrate and the trench are oxidized to form a top oxide and a lateral oxide region. A backside of the semiconductor substrate is etched to expose a backside of the region of the semiconductor substrate and a portion of the lateral oxide.

Abstract translation: 描述微机械结构。 半导体材料的区域具有第一表面，与第一表面相对的第二表面和围绕半导体材料区域的侧表面。 绝缘材料覆盖半导体材料区域的第一表面和侧表面，以通过形成边界来提供对半导体材料区域的电隔离。 为了形成微机械结构，在半导体衬底中蚀刻沟槽以包围半导体衬底的区域。 半导体衬底和沟槽的表面被氧化以形成顶部氧化物和横向氧化物区域。 蚀刻半导体衬底的背面以暴露半导体衬底的区域的背面和一部分横向氧化物。

公开(公告)号：US07684101B2

公开(公告)日：2010-03-23

申请号：US11870465

申请日：2007-10-11

Applicant: John N. Border ,  Herbert J. Erhardt ,  J. Kelly Lee ,  Marek W. Kowarz ,  Robert M. Boysel

Inventor： John N. Border ,  Herbert J. Erhardt ,  J. Kelly Lee ,  Marek W. Kowarz ,  Robert M. Boysel

IPC: G02B26/00

CPC classification number: B81B7/04 ,  B81B2201/045 ,  G02B26/02 ,  G02B26/0841

Abstract: A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

Abstract translation: 微型扫描器阵列具有具有透光部分的框架。 线性微型振荡器元件延伸穿过光透射部分并且彼此平行。 每个微型振动元件具有在长度方向上延伸的平坦叶片，并且第一和第二扭转臂在长度方向上从叶片的每侧向外延伸，叶片延伸穿过透光部分。 至少有一个电极与每个线性微型切割器元件相关联并且在长度方向上平行于微型振动器元件延伸。

公开(公告)号：US20100045137A1

公开(公告)日：2010-02-25

申请号：US12607341

申请日：2009-10-28

Applicant: Mitsuhiro YODA ,  Keiji ISAMOTO ,  Hiroshi TOSHIYOSHI

Inventor： Mitsuhiro YODA ,  Keiji ISAMOTO ,  Hiroshi TOSHIYOSHI

IPC: H02N11/00

CPC classification number: B81B3/004 ,  B81B2201/042 ,  B81B2201/045 ,  H02N1/008

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4.

Abstract translation: 提供能够以降低的电压驱动并且容易制造的致动器及其制造方法。 致动器包括通过间隔件固定到支撑基板4的第二支撑部分31和32，固定在支撑基板4上的固定部分33和34，而不需要间隔件，固定梳状电极331和341一体地形成固定部分33和 并且与间隔开的可动梳状电极211,212啮合，以及用于将固定部33,34连接到第二支撑部31,32的桥接部35,36。固定部33,34固定在 支撑基板4在弯曲桥接部分35和36的同时相对于第二支撑部分31和32偏转到支撑基板4的状态，从而最初偏转固定梳状电极331和341以便脱离 在支撑基板4的厚度方向上与可动梳状电极211和212对准。

公开(公告)号：US07567018B2

公开(公告)日：2009-07-28

申请号：US11400407

申请日：2006-04-10

Applicant: Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

Inventor： Takashi Kawakubo ,  Toshihiko Nagano ,  Kazuhide Abe ,  Michihiko Nishigaki

IPC: H01L41/08

CPC classification number: B81B3/0021 ,  B81B2201/014 ,  B81B2201/045 ,  G02B26/0858 ,  H01G5/18 ,  H01G5/40 ,  H01H2057/006

Abstract: A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.

Abstract translation: 微机械装置包括：第一压电致动器，其包括压电膜，下电极和上电极交错压电膜，并从衬底上的第一固定部分延伸到第一操作端;以及第二压电致动器， 压电致动器经由第一压电致动器的第一操作端处的连接部分并且从连接部分延伸到第二操作端，第二压电致动器比第一压电致动器短。