Computationally-Assisted Multi-Heterodyne Spectroscopy

    公开(公告)号:US20170138791A1

    公开(公告)日:2017-05-18

    申请号:US15259687

    申请日:2016-09-08

    Abstract: According to one aspect, a multi-heterodyne system is disclosed, which comprises a first laser source for generating multi-mode radiation having a frequency spectrum characterized by a first plurality of phase coherent frequencies, and a second laser source for generating multi-mode radiation having a frequency spectrum characterized by a second plurality of phase coherent frequencies. The system further comprises at least one detector for detecting a combination of the multi-mode radiation generated by the first and second laser sources so as to provide a multi-heterodyne signal having a frequency spectrum characterized by a plurality of beat frequencies, each beat frequency corresponding to a pairwise difference in the first and second plurality of phase coherent frequencies. The system further comprises an analyzer for receiving said multi-heterodyne signal and configured to employ a predictive model of the multi-heterodyne signal to provide estimates of any of phase error and timing error associated with the beat frequencies.

    Measurement apparatus and measurement method

    公开(公告)号:US09612108B2

    公开(公告)日:2017-04-04

    申请号:US14657209

    申请日:2015-03-13

    Inventor: Toru Mikami

    Abstract: In accordance with an embodiment, a measurement apparatus includes a library creation unit, a spectral profile acquiring unit, and a measurement unit. The library creation unit creates a library in which a layer stack model is matched to a theoretical profile regarding a pattern of stacked layers. The spectral profile acquiring unit acquires an actual measured profile by applying light to a measurement target pattern obtained when the pattern is actually created. The measurement unit measures the sectional shape of the measurement target pattern by performing fitting of the theoretical profile to the actual measured profile. The layer stack model is created by calculating a feature value that reflects the intensity of reflected light from an interface for each of the layers, determining a priority order of analysis from the feature value, and sequentially performing fitting of the theoretical profile to the measured profile in the determined priority order.

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