公开(公告)号：US4831304A

公开(公告)日：1989-05-16

申请号：US146383

申请日：1988-01-21

Applicant: Howard A. Dorey ,  Bronislaw J. Suski

Inventor： Howard A. Dorey ,  Bronislaw J. Suski

IPC: G01L1/10 ,  G01L1/16 ,  G01L1/18 ,  G01L9/00

CPC classification number: G01L9/0023 ,  G01L1/162 ,  G01L1/167 ,  G01L1/186 ,  G01L9/002

Abstract: A solid sensor, for sensing a physical parameter such as pressure, comprises a resonantly vibratable beam formed across a cavity in a substrate by micro-machining, and arranged such that changes in the parameter vary its resonant frequency. The beam either consists of or has deposited on it a material exhibiting piezo-electric effect, so that vibration of the beam can be excited by using the effect. This is achieved using light, either by forming a photodiode in the substrate in or near the beam, so that illuminating the photodiode causes a voltage to be applied to the beam, or, in the case where the piezo-electric material exhibits surface piezo-electric effect, by directly illuminating the beam.

公开(公告)号：US11852521B2

公开(公告)日：2023-12-26

申请号：US17473002

申请日：2021-09-13

Applicant: Mitsubishi Electric Corporation

Inventor： Tomonori Kimura ,  Rokuzo Hara

IPC: G01H11/08 ,  G01L1/16 ,  H10N30/30

CPC classification number: G01H11/08 ,  G01L1/167 ,  H10N30/302

Abstract: Disclosed is a vibration sensor including a piezoelectric substrate, a first electrode and a second electrode that are arranged on the piezoelectric substrate, an amplifier electrically connected between the first electrode and the second electrode, and a solid medium having a first surface part in contact with the piezoelectric substrate, and a second surface part disposed opposite to the first surface part and used for contact with a target substance, the solid medium having a sound speed lower than the phase speed of a plate wave in the piezoelectric substrate, in which an oscillation loop includes the piezoelectric substrate, the first electrode, the second electrode, the amplifier, and the solid medium, and a vibration of the target substance is detected as a result of variation in the loop length of the oscillation loop in response to the vibration of the target substance.

公开(公告)号：US20110187233A1

公开(公告)日：2011-08-04

申请号：US12993597

申请日：2009-04-10

Applicant: Alexander A. Karabutov ,  Michail Lyamshev ,  Georgiovich Mikhalevich ,  Manomohan Subuchi ,  Leonidovich Lyemshev ,  Vladislav Mikhalevich ,  Manomohan Subudhl ,  Leonidovich Lyamshev ,  Georgievich Mikhalevich ,  Manomohan Subudhi ,  Upendra Rohatgl

Inventor： Alexander A. Karabutov ,  Michail Lyamshev ,  Georgiovich Mikhalevich ,  Manomohan Subuchi ,  Leonidovich Lyemshev ,  Vladislav Mikhalevich ,  Manomohan Subudhl ,  Leonidovich Lyamshev ,  Georgievich Mikhalevich ,  Manomohan Subudhi ,  Upendra Rohatgl

IPC: H01L41/04

CPC classification number: G01N29/2418 ,  G01L1/165 ,  G01L1/167 ,  G01N29/041 ,  G01N29/043 ,  G01N2291/0289 ,  G01N2291/0421 ,  G01N2291/0422 ,  G01N2291/0423

Abstract: A laser opto-acoustic apparatus and method is applied for nondestructive testing of defects and residual stresses in solids. A nondestructive testing apparatus may have a piezoelectric transducer for measuring oscillations in a solid. The oscillations or waves may be caused from longitudinal, shear, and/or Raleigh waves in the object to be tested. The nondestructive testing apparatus may also include a laser. The laser is capable of generating the longitudinal, shear, and/or Raleigh waves in the object. One method of performing nondestructive testing of materials may include creating at least one of a longitudinal, shear, and/or Raleigh wave in an object and measuring the speed of the wave in the object. The speed of the waves may be compared with the speed of waves in a material without defects to determine whether the object to be tested has defects.

Abstract translation: 激光光声装置和方法用于固体中缺陷和残余应力的非破坏性测试。 非破坏性测试装置可以具有用于测量固体中的振荡的压电换能器。 振荡或波浪可能由被测物体中的纵向，剪切和/或罗利波引起。 无损检测装置也可以包括激光器。 激光能够在物体中产生纵向，剪切和/或罗利波。 执行材料的非破坏性测试的一种方法可以包括在物体中产生纵向，剪切和/或罗利波中的至少一种并测量物体中波的速度。 波的速度可以与没有缺陷的材料中的波的速度进行比较，以确定待测试对象是否具有缺陷。

公开(公告)号：US4717240A

公开(公告)日：1988-01-05

申请号：US888556

申请日：1986-07-21

Applicant: Anthony C. Gilby

Inventor： Anthony C. Gilby

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G02B27/144 ,  G01L1/103 ,  G01L1/167 ,  G01L1/24 ,  G01L9/0023 ,  G02B6/2821

Abstract: Beamsplitter means for directing light in a Michelson interferometric drive and frequency sense scheme for use with a mechanical resonator. In a first embodiment a special prism is used. In a second embodiment a four-port coupler is used.

Abstract translation: 分束器用于将光引导到迈克尔逊干涉仪驱动和频率感应方案中，以用于机械谐振器。 在第一实施例中，使用特殊的棱镜。 在第二实施例中，使用四端口耦合器。

公开(公告)号：US4651571A

公开(公告)日：1987-03-24

申请号：US708402

申请日：1985-03-05

Applicant: Stuart M. McGlade

Inventor： Stuart M. McGlade

IPC: G01B7/16 ,  G01B11/16 ,  G01L1/16 ,  H04B10/80 ,  G01L1/10

CPC classification number: H04B10/807 ,  G01B11/16 ,  G01B7/16 ,  G01L1/167

Abstract: A strain sensor includes a quartz crystal element 9 having a resonant frequency which is dependent on strain imposed on it. The crystal element 9 is caused to vibrate at its resonant frequency by pulses of light transmitted along an optical fibre 5 from a remote location indicated generally at 1. A signal produced by the vibration at the resonant frequency is taken from electrodes 10 and 12 and amplified at 13 and 14 before being used to switch on and off a switch 15 controlling a light source 16. The output from the light source 16, consisting of flashes of light of a frequency indicative of the strain, is transmitted along a second optical fibre 19 and is detected by a photocell 20. The frequency of the output of photocell 20 is measured at 21 to give the desired measurement of strain and to provide feedback to the drive unit 3 which determines the frequency of the flashes of light produced at 2.

Abstract translation: 应变传感器包括具有取决于施加在其上的应变的共振频率的石英晶体元件9。 晶体元件9通过沿着光纤5从大体上以1表示的远程位置传输的光的脉冲以其谐振频率振动。由共振频率下的振动产生的信号取自电极10和12并被放大 在13和14之前，用于打开和关闭控制光源16的开关15.来自光源16的由指示应变的频率的闪烁的光源16的输出沿着第二光纤19传送 并由光电管20检测。光电二极管20的输出频率在21处被测量，以产生所需的应变测量值，并向驱动单元3提供反馈信号，驱动单元3确定在2处产生的闪光灯的频率。

公开(公告)号：US4470313A

公开(公告)日：1984-09-11

申请号：US365678

申请日：1982-04-05

Applicant: Richard W. Kalinoski ,  George E. Sgourakes ,  Duane Thompson

Inventor： Richard W. Kalinoski ,  George E. Sgourakes ,  Duane Thompson

IPC: G01L1/10 ,  G01L1/16 ,  G01L9/00 ,  G01P15/10

CPC classification number: G01L9/0014 ,  G01L1/103 ,  G01L1/167 ,  G01P15/10 ,  Y10S73/01

Abstract: A resonant wire instrument for producing a measurement signal, which is derived from the resonant frequency of a vibratable wire tensioned in accordance with the magnitude of a physical variable being measured, wherein a force impulse produced mechanically by an apparatus is applied to displace laterally one end of the vibratable wire so as to excite the wire into resonant motion. In one embodiment, the one end is rigidly attached to a housing and a piston applies a transverse force impulse to that end by momentarily striking the housing. In another embodiment, the one end is connected to a piezoelectric crystal which responds to a short-duration electric field to displace momentarily that end. In one species of this other embodiment, the crystal is made to oscillate at the resonant frequency of the tensioned wire by the application of an alternating-polarity voltage signal that is generated by a voltage source having an output connected to the crystal, and a feedback circuit coupled to receive the measurement signal operates to produce a control signal that is used for controlling the voltage source so that the voltage signal being applied to the crystal has a frequency which varies in accordance with changes in the resonant frequency of the wire.

Abstract translation: 一种用于产生测量信号的共振线路仪器，其根据被测量的物理变量的幅度拉伸的可振动线材的共振频率导出，其中施加由设备机械地产生的力脉冲以横向移位一端 的振动线，以便将线激发成共振运动。 在一个实施例中，一端刚性地附接到壳体，活塞通过瞬间撞击壳体向该端施加横向力冲击。 在另一个实施例中，一端连接到压电晶体，该压电晶体响应于短持续时间的电场以瞬时移动该端。 在该另一实施例的一个种类中，通过施加由具有连接到晶体的输出的电压源产生的交流极性电压信号，使晶体以张紧线的谐振频率振荡，并且反馈 耦合以接收测量信号的电路操作以产生用于控制电压源的控制信号，使得施加到晶体的电压信号具有根据线的谐振频率的变化而变化的频率。