Abstract:
Apparatus secures in its closed position the door of a chamber capable of maintaining pressure within the chamber. The present invention includes apparatus disposed on the chamber for cooperating to move the door to and from its closed position including at least two members, one of which is movable relative to the chamber. The door is in its closed position when the stationary member and the door are separated from each other by a predetermined distance. The movable member can be forced between the door and the stationary member to separate the door and the stationary member from each other by a predetermined distance. Further, the present invention includes apparatus for preventing the door from assuming its closed position until the movable member is forced between the door and the stationary member.
Abstract:
A vacuum chamber seal at the entry or exit end of a vacuum chamber comprises two rollers 15, 16 one 16 of which is rotatable, defining an air lock gap. A guide tube 18, spaced from the gap but within the chamber, is constructed and disposed to promote and acceleration of the air flowing past it towards the gap resulting in a pressure drop on the roller side of the guide tube and a pressure differential across a web of material passing over the guide tube 18 and through the gap. This differential urges the web into initimate contact with the rotatable roller 16 to prevent oscillation of the web entering the gap.
Abstract:
An impermeable cooled closing plug adapted for closing the end of a semiconductor manufacture processing tube is made of a material selected from the group consisting of quartz, silicon and silicon carbide, which materials have low heat conductivity and high chemical stability. The cooling effects of a cooling liquid supplied to the entrance flange of a processing tube are isolated from the tube closing plug by virtue of the low heat conductivity, thus preventing unwanted condensation effects at the entrance of the tube.
Abstract:
An electrical bushing is provided to facilitate the passage of electrical conductor leads from thermocouples or the like through a pressure barrier. The bushing includes a casing and a deformable, resilient, elastic plug which is disposed in a central conductor receiving bore of the casing in surrounding relationship to the conductors. Thus, when the plug is compressed in a direction axially of the casing, the plug tends to expand laterally radially and into sealing contact with the internal surfaces of the bore and with the electrical conductors.
Abstract:
A method and apparatus for sealing the drive end of a chamber for the preparation and hydrogenation of coal with hydrogen to form hydrocarbons in which the chamber comprises a hollow cylinder with a rotatable element therein having a conveying web thereon and in a sealing region a pressurized sealing substance such as coal particles mixed with oil is fed from a storage container through a feed passage into an annular recess at a pressure higher than that in the chamber so that the sealing substance passes through a conical annular gap which tapers towards the chamber. A further narrower gap on the drive side of the recess leads to a further annular recess from which the sealing substance can be extracted through a return pipe. Pressure comparison means control the feed pressure in the feed passage. The recesses and the annular gap can be provided by machining the rotatable element rather than the hollow cylinder and forward feed screw forms may be provided on the rotatable element in the sealing region.
Abstract:
In a rotary vacuum sealed wafer transport system for transporting semiconductive wafers between ambient atmosphere and subatmospheric pressure within a wafer processing station, the wafers, on a conveyor web pass through a slot in the vacuum chamber of the processing station. The evacuable envelope of the processing station has an external concave face portion intersecting with a generally planar face portion with the slot being positioned generally at the intersection of the concave and planar face portions. A deformable elastic roller, preferably pneumatically inflated, is disposed for rolling sealing engagement with the conveyor web and wafer and for wiping sealing engagement with portions of the planar and concave faces to provide a gas tight seal of the slot while permitting passage of the conveyor web with the wafers thereon into the evacuated wafer processing station. In a preferred embodiment, the conveyor web passes through input and output slots with pneumatic rollers sealing the pair of slots. In the latter case, the rollers are preferably driven in unison to prevent any wiping action of the roller on the surface of the wafer. In an alternative embodiment, the conveyor web is omitted.
Abstract:
Disclosed is a safety closure apparatus for a pressure vessel, particularly for a vessel such as a pump stabilizer which has a gas compartment and a liquid compartment therein, both of which are normally pressurized. The apparatus includes a safety head configured to cover the closure means of the vessel to prevent its actuation; a liquid pressure bleed valve which must be removed before the safety hood can be moved off of the closure means, thereby insuring depressurization of the liquid compartment prior to opening; and gas pressure bleed means automatically operable upon movement of the safety hood off of the closure means, thereby also insuring depressurization of the gas compartment before access can be had to the closure means to actuate it to open the vessel.
Abstract:
A pressure vessel base closure means including a pair of flat disc-like members spaced apart by a peripheral outer cylindrical member and an inner perforated cylindrical member, and there being provided between the two flat disc-like members a plurality of radially directed ribs to provide rigidity to the base closure means. The base closure means is particularly useful for a reactor in which a bed of fluidized solid is maintained by the passage of a gas into the reactor through the base via the chamber between the two flat disc-like members.
Abstract:
A fluid container, such as a pressure vessel, in which a removable closure plug is adapted to sealingly close an open end of a cylindrical vessel. The closure plug is supported relative to the vessel in a manner so that a space is defined between respective surface portions thereof, with a sealing member being disposed in the space. Heat is applied to the vessel to cause movement thereof relative to the closure plug and a compression of said sealing member prior to the final attachment of the closure plug to the vessel.
Abstract:
An access door for a pressure vessel wherein the door itself is the only moving part and the pressure difference between the interior of the chamber and ambient exterior pressure is the only sealing force is provided. The door is in the form of a disc or wafer made of metal or solid plastic material and holds in position a sealing ring having a peripheral groove for receiving one O ring and a groove on the surface facing the door for receiving a second O ring. The door is rolled manually by a substantially radially extending handle. The chamber is cut to receive the door laterally and recessed internally to permit the sealing ring to be moved axially into sealing position in the recess.