Method for fabricating metal wiring and semiconductor device having the same
    22.
    发明申请
    Method for fabricating metal wiring and semiconductor device having the same 失效
    金属布线的制造方法及具有该金属布线的半导体器件

    公开(公告)号:US20050023698A1

    公开(公告)日:2005-02-03

    申请号:US10902903

    申请日:2004-07-30

    Applicant: Jae-Suk Lee

    Inventor: Jae-Suk Lee

    Abstract: A semiconductor device includes a semiconductor substrate and metal wiring formed by alternately depositing aluminum layers and copper layers on the semiconductor substrate so that a top layer of the metal wiring is an aluminum layer. The metal wiring is fabricated by alternately depositing an aluminum layer and a copper layer on a semiconductor substrate a predetermined number of times to form a metal wiring layer having an aluminum top layer. A photoresist film pattern is formed on the metal wiring layer and metal wiring is formed by performing an etching process on the metal wiring layer using the photoresist film pattern as a mask.

    Abstract translation: 半导体器件包括半导体衬底和通过在半导体衬底上交替沉积铝层和铜层而形成的金属布线,使得金属布线的顶层是铝层。 通过在半导体基板上交替沉积铝层和铜层预定次数来制造金属布线,以形成具有铝顶层的金属布线层。 在金属布线层上形成光致抗蚀剂图案,并且通过使用光致抗蚀剂膜图案作为掩模对金属布线层进行蚀刻处理来形成金属布线。

    Sulfonated poly(arylene ether) having crosslinkable moiety combined in chain of polymer, sulfonated poly(arylene ether) having crosslinkable moieties combined in polymer and at polymer end group, and polymer electrolyte membrane using sulfonated poly(arylene ether)
    27.
    发明授权
    Sulfonated poly(arylene ether) having crosslinkable moiety combined in chain of polymer, sulfonated poly(arylene ether) having crosslinkable moieties combined in polymer and at polymer end group, and polymer electrolyte membrane using sulfonated poly(arylene ether) 失效
    在聚合物链中结合有可交联部分的磺化聚(亚芳基醚),在聚合物和聚合物端基中结合有可交联部分的磺化聚(亚芳基醚)和使用磺化聚(亚芳基醚)的聚合物电解质膜,

    公开(公告)号:US08487070B2

    公开(公告)日:2013-07-16

    申请号:US12246495

    申请日:2008-10-06

    Abstract: A sulfonated poly(arylene ether) copolymer that has a crosslinking structure in a chain of a polymer, a sulfonated poly(arylene ether) copolymer that has a crosslinking structure in and at an end of a chain of a polymer, and a polymer electrolyte film that is formed by using them are disclosed. According to the polycondensation reaction of the sulfonated dihydroxy monomer (HO—SAr1-OH), the none sulfonated dihydroxy monomer (HO—Ar—OH), the crosslinkable dihalide monomer (X—CM-X) and the none sulfonated dihalide monomer (X—Ar—X), the poly(arylene ether) copolymer in which the sulfonic acid is included is synthesized. The formed poly(arylene ether) copolymer has the crosslinkable structure in the chain of the polymer. In addition, by carrying out the polycondensation reaction in respects to the crosslinkable monohydroxy monomer or the crosslinkable monohalide monomer, the crosslinking can be formed at the end of the polymer. Through this, the thermal stability, the mechanical stability, the chemical stability, the film formation ability and the like is the same as or better than those of the Nafion film that is currently commercialized and is used as the polymer electrolyte film, and the proton conductivity and the cell performance are excessively improved. In addition, even though it is exposed to the moisture over a long period of time, since there is no change in the property of the electrolyte film, the dimensional stability is high.

    Abstract translation: 在聚合物链中具有交联结构的磺化聚(亚芳基醚)共聚物,在聚合物链中具有交联结构并在其末端的磺化聚(亚芳基醚)共聚物和聚合物电解质膜 公开了使用它们形成的。 根据磺化二羟基单体(HO-SAr1-OH)的缩聚反应,无磺化二羟基单体(HO-Ar-OH),交联二卤化物单体(X-CM-X)和无磺化二卤化物单体 -Ar-X),其中包含磺酸的聚(亚芳基醚)共聚物被合成。 形成的聚(亚芳基醚)共聚物在聚合物链中具有可交联结构。 此外,通过对可交联单羟基单体或可交联单卤酸酯单体进行缩聚反应,可以在聚合物的末端形成交联。 由此,热稳定性,机械稳定性,化学稳定性,成膜能力等与目前商品化并用作聚合物电解质膜的Nafion膜相同或更好,质子 导电性和电池性能过度改善。 此外,即使长时间暴露于水分,由于电解质膜的性质没有变化,因此尺寸稳定性高。

    ANIONIC POLYMERIZATION METHOD FOR STYRENE DERIVATIVE CONTAINING PYRIDINE AS FUNCTIONAL GROUP
    28.
    发明申请
    ANIONIC POLYMERIZATION METHOD FOR STYRENE DERIVATIVE CONTAINING PYRIDINE AS FUNCTIONAL GROUP 失效
    含有吡啶衍生物的苯乙烯衍生物作为官能团的阴离子聚合方法

    公开(公告)号:US20090203861A1

    公开(公告)日:2009-08-13

    申请号:US12335693

    申请日:2008-12-16

    Abstract: An anionic polymerization method for styrene derivative containing pyridine as functional group is provided. The method includes forming a complex of (vinylphenyl)-pyridine and lithium chloride and performing anionic polymerization. Accordingly, a polymer of styrene derivative containing pyridine can be obtained. The polymer has excellent optical properties, and its molecular weight and molecular weight distribution can be controlled.

    Abstract translation: 提供了含吡啶作为官能团的苯乙烯衍生物的阴离子聚合方法。 该方法包括形成(乙烯基苯基) - 吡啶和氯化锂的络合物并进行阴离子聚合。 因此,可以得到含有吡啶的苯乙烯衍生物的聚合物。 聚合物具有优异的光学性能,并且可以控制其分子量和分子量分布。

    Synthesis of Vinylphenylpyridine and Living Anionic Polymerization
    29.
    发明申请
    Synthesis of Vinylphenylpyridine and Living Anionic Polymerization 失效
    乙烯基苯基吡啶和阴离子聚合的合成

    公开(公告)号:US20090105416A1

    公开(公告)日:2009-04-23

    申请号:US12227140

    申请日:2007-04-03

    Abstract: Provided are a vinyl-biphenylpyridine monomer and a polymer thereof. More particularly, the present invention provides a vinyl-biphenylpyridine monomer having a side chain of pyridine or phenylpyridine as a functional group, a homopolymer of which molecular weight and molecular weight distribution are controlled using the monomer, and a block copolymer of which molecular structure and molecular weight are controlled to facilitate synthesis of an organic metal complex. Accordingly, the present invention provides a vinyl-biphenylpyridine monomer and a polymer thereof which are effectively used as nano and optical functional materials.

    Abstract translation: 提供了乙烯基 - 联苯基吡啶单体及其聚合物。 更具体地说,本发明提供了具有吡啶或苯基吡啶作为官能团的侧链的乙烯基联苯基吡啶单体,使用该单体控制分子量和分子量分布的均聚物,以及分子结构和 控制分子量以促进有机金属络合物的合成。 因此,本发明提供了有效地用作纳米和光学功能材料的乙烯基 - 联苯基吡啶单体及其聚合物。

    Semiconductor Devices and Methods for Manufacturing the Same
    30.
    发明申请
    Semiconductor Devices and Methods for Manufacturing the Same 失效
    半导体器件及其制造方法

    公开(公告)号:US20080277791A1

    公开(公告)日:2008-11-13

    申请号:US12178577

    申请日:2008-07-23

    Applicant: Jae-Suk Lee

    Inventor: Jae-Suk Lee

    Abstract: Semiconductor devices having a copper line layer and methods for manufacturing the same are disclosed. An illustrated semiconductor device comprises a damascene insulating layer having a contact hole, a barrier metal layer including a first ruthenium layer, a ruthenium oxide layer and a second ruthenium layer, a seed copper layer formed on the barrier metal layer, and a copper line layer made of a Cu—Ag—Au solid solution. A disclosed example method of manufacturing a semiconductor device reduces and/or prevents contact characteristic degradation of the barrier metal layer with the silicon substrate or the damascene insulating layer. In addition, by forming the copper line layer made of the Cu—Ag—Au solid solution, long term device reliability may be improved.

    Abstract translation: 公开了具有铜线层的半导体器件及其制造方法。 所示的半导体器件包括具有接触孔的镶嵌绝缘层,包含第一钌层,氧化钌层和第二钌层的阻挡金属层,形成在阻挡金属层上的种子铜层,以及铜线层 由Cu-Ag-Au固溶体制成。 公开的制造半导体器件的示例性方法减少和/或防止阻挡金属层与硅衬底或镶嵌绝缘层的接触特性劣化。 此外,通过形成由Cu-Ag-Au固溶体制成的铜线层,可以提高长期的器件可靠性。

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