Contact ring design for reducing bubble and electrolyte effects during electrochemical plating in manufacturing
    21.
    发明申请
    Contact ring design for reducing bubble and electrolyte effects during electrochemical plating in manufacturing 有权
    接触环设计,用于在电化学电镀期间减少制造中的气泡和电解质效应

    公开(公告)号:US20060086608A1

    公开(公告)日:2006-04-27

    申请号:US10973851

    申请日:2004-10-25

    IPC分类号: C25B9/00

    摘要: A contact ring for use in electroplating of a substrate material is constructed such that fluid (e.g., electrolyte) is allowed to flow radially away from the axis of a toroidal support ring, thus preventing the trapping of fluids between the substrate and the toroidal support ring. The contact ring is constructed with a series of openings arranged about the circumference of the ring and wherein an electrical contact is placed in the path of each opening so any fluid passing through the opening also passes around the associated electrical contact. Further, the electrical contacts are also placed such that a substrate (e.g., a semiconductor wafer) can be placed inside the support ring so as to electrically contact the electrical contacts. The toroidal support ring has an aerodynamically streamlined cross-section at the openings, such that fluid flows through the openings with reduced aerodynamic drag.

    摘要翻译: 用于电镀基底材料的接触环被构造成使得允许流体(例如电解质)径向地远离环形支撑环的轴线流动,从而防止流体在基底和环形支撑环之间的捕获 。 接触环由围绕环的圆周布置的一系列开口构成,并且其中电接触被放置在每个开口的路径中,使得通过开口的任何流体也绕过相关联的电接触。 此外,电触点也被放置成使得衬底(例如,半导体晶片)可以放置在支撑环内,以便电接触电触点。 环形支撑环在开口处具有空气动力学流线型的横截面,使得流体以减小的空气动力学阻力流过开口。

    Integrated barrier and seed layer for copper interconnect technology
    22.
    发明申请
    Integrated barrier and seed layer for copper interconnect technology 有权
    铜互连技术的集成屏障和种子层

    公开(公告)号:US20060063375A1

    公开(公告)日:2006-03-23

    申请号:US10945777

    申请日:2004-09-20

    IPC分类号: H01L21/4763

    摘要: An integrated barrier and seed layer that is useful for creating conductive pathways in semiconductor devices. The barrier portion of the integrated layer prevents diffusion of the conductive material into the underlying dielectric substrate while the seed portion provides an appropriate foundation upon which to deposit the conductive material. The barrier portion of the integrated layer is formed of a metal nitride, while the seed portion is formed of ruthenium or a ruthenium alloy. The metal nitride forms an effective barrier layer while the ruthenium or ruthenium alloy forms an effective seed layer for a metal such as copper. In some embodiments, the integrated layer is formed in a way so that its composition changes gradually from one region to the next.

    摘要翻译: 集成的屏障和种子层,可用于在半导体器件中产生导电通路。 集成层的阻挡部分防止导电材料扩散到下面的电介质基底中,同时种子部分提供了沉积导电材料的适当基础。 集成层的阻挡部分由金属氮化物形成,而种子部分由钌或钌合金形成。 金属氮化物形成有效的阻挡层,而钌或钌合金形成金属如铜的有效晶种层。 在一些实施例中,集成层以使其组成从一个区域逐渐变化到下一个区域的方式形成。

    Method for high volume manufacturing of thin film batteries
    23.
    发明授权
    Method for high volume manufacturing of thin film batteries 有权
    薄膜电池大批量生产方法

    公开(公告)号:US08168318B2

    公开(公告)日:2012-05-01

    申请号:US12257049

    申请日:2008-10-23

    IPC分类号: H01M6/16 H01M6/18 H01M6/46

    摘要: Concepts and methods are provided to reduce the cost and complexity of thin film battery (TFB) high volume manufacturing by eliminating and/or minimizing the use of conventional physical (shadow) masks. Laser scribing and other alternative physical maskless patterning techniques meet certain or all of the patterning requirements. In one embodiment, a method of manufacturing thin film batteries comprises providing a substrate, depositing layers corresponding to a thin film battery structure on the substrate, the layers including, in order of deposition, a cathode, an electrolyte and an anode, wherein at least one of the deposited layers is unpatterned by a physical mask during deposition, depositing a protective coating, and scribing the layers and the protective coating. Further, the edges of the layers may be covered by an encapsulation layer. Furthermore, the layers may be deposited on two substrates and then laminated to form the thin film battery.

    摘要翻译: 提供了概念和方法,以通过消除和/或最小化常规物理(阴影)掩模的使用来降低薄膜电池(TFB)大批量制造的成本和复杂性。 激光划线和其他可选的物理无掩模图案化技术满足某些或所有图案化要求。 在一个实施例中,制造薄膜电池的方法包括提供衬底,在衬底上沉积与薄膜电池结构相对应的层,所述层按沉积顺序包括阴极,电解质和阳极,其中至少 沉积层中的一个在沉积期间由物理掩模未图案化,沉积保护涂层,以及划刻层和保护涂层。 此外,层的边缘可以被封装层覆盖。 此外,可以将这些层沉积在两个基板上,然后层压以形成薄膜电池。

    Method for manufacturing electrochromic devices
    24.
    发明授权
    Method for manufacturing electrochromic devices 有权
    电致变色器件的制造方法

    公开(公告)号:US08168265B2

    公开(公告)日:2012-05-01

    申请号:US12134437

    申请日:2008-06-06

    摘要: This invention contemplates the use of laser patterning/scribing in electrochromic device manufacture, anywhere during the manufacturing process as deemed appropriate and necessary for electrochromic device manufacturability, yield and functionality, while integrating the laser scribing so as to ensure the active layers of the device are protected to ensure long term reliability. It is envisaged that the laser is used to pattern the component layers of electrochromic devices by directly removing (ablating) the material of the component layers. The invention includes a manufacturing method for an electrochromic device comprising one or more focused laser patterning steps. To minimize redeposition of laser ablated material and particulate formation on device surfaces a number of approaches may be used: (1) ablated material generated by the focused laser patterning may be removed by vacuum suction and/or application of an inert gas jet in the vicinity of the laser ablation of device material; (2) spatial separation of the edges of layers and patterning of lower layers prior to deposition of upper layers; and (3) the laser patterning step may be performed by a laser beam focused directly on the deposited layers from above, by a laser beam directed through the transparent substrate, or by a combination of both.

    摘要翻译: 本发明考虑了在制造过程中的任何地方,在电致变色器件的可制造性,成品率和功能性中被认为是合适的和必要的,在电致变色器件制造中使用激光图案/划线,同时整合激光刻划以确保器件的有源层是 保护以确保长期可靠性。 可以设想,激光器用于通过直接去除(消融)组分层的材料来对电致变色器件的组件层进行图案化。 本发明包括一种用于电致变色器件的制造方法,其包括一个或多个聚焦激光器图案化步骤。 为了最小化激光烧蚀材料的再沉积和器件表面上的颗粒形成,可以使用许多方法:(1)通过聚焦激光图案形成产生的消融材料可以通过在附近的真空抽吸和/或施加惰性气体射流来去除 的器件材料的激光烧蚀; (2)在沉积上层之前层的边缘的空间分离和下层的图案化; 和(3)激光图案化步骤可以通过从上方直接聚焦在沉积层上的激光束,通过引导通过透明衬底的激光束,或通过两者的组合进行。

    Digital broadcasting system and method of processing data in digital broadcasting system
    25.
    发明授权
    Digital broadcasting system and method of processing data in digital broadcasting system 有权
    数字广播系统及数字广播系统数据处理方法

    公开(公告)号:US08141119B2

    公开(公告)日:2012-03-20

    申请号:US12703619

    申请日:2010-02-10

    摘要: A digital broadcast receiver and a control method thereof are disclosed. The control method of the digital broadcast receiver includes receiving a broadcast signal into which mobile service data and main service data are multiplexed, extracting transmission parameter channel (TPC) signaling information and fast information channel (FIC) signaling information from a data group in the received mobile service data, acquiring a program table describing virtual channel information and a service of an ensemble, which is a virtual channel group of the received mobile service data, using the extracted FIC signaling information, selectively detecting a first message descriptor mapped with time information or a second message descriptor not mapped with time information, using the acquired program table, performing a control operation to display a message defined in the detected message descriptor.

    摘要翻译: 公开了一种数字广播接收机及其控制方法。 数字广播接收机的控制方法包括接收移动业务数据和主业务数据被多路复用的广播信号,从接收到的数据组中提取传输参数信道(TPC)信令信息和快速信息信道(FIC)信令信息 移动业务数据,使用所提取的FIC信令信息获取描述虚拟信道信息和作为​​所接收的移动业务数据的虚拟信道组的集合的业务的节目表,选择性地检测与时间信息映射的第一消息描述符或 使用获取的程序表来执行不与时间信息映射的第二消息描述符,执行控制操作以显示在所检测的消息描述符中定义的消息。

    Method for preparing 3-hydroxytetrahydrofuran using cyclodehydration
    26.
    发明授权
    Method for preparing 3-hydroxytetrahydrofuran using cyclodehydration 有权
    使用环化脱水制备3-羟基四氢呋喃的方法

    公开(公告)号:US08124796B2

    公开(公告)日:2012-02-28

    申请号:US12160261

    申请日:2006-01-10

    IPC分类号: C07D307/02

    CPC分类号: C07D307/20

    摘要: Disclosed is a method of preparing 3-hydroxytetrahydrofuran using cyclodehydration. More particularly, this invention relates to a method of preparing 3-hydroxytetrahydrofuran, including subjecting 1,2,4-butanetriol to cyclodehydration under reaction conditions of a reaction temperature of 30˜180° C. and reaction pressure of 5000 psig or less in the presence of a strong acid cation exchange resin catalyst having a sulfonic acid group as an exchange group. According to the method of this invention, 3-hydroxytetrahydrofuran can be economically prepared at higher yield and productivity than when using conventional methods.

    摘要翻译: 公开了使用环化脱水制备3-羟基四氢呋喃的方法。 更具体地说,本发明涉及一种制备3-羟基四氢呋喃的方法,包括在反应温度为30〜180℃,反应压力为5000psig以下的反应条件下使1,2,4-丁三醇进行环化脱水 存在具有磺酸基作为交换基团的强酸阳离子交换树脂催化剂。 根据本发明的方法,与使用常规方法相比,3-羟基四氢呋喃可以以更高的产率和生产率经济地制备。

    DIGITAL BROADCASTING SYSTEM AND METHOD OF PROCESSING DATA IN DIGITAL BROADCASTING SYSTEM
    27.
    发明申请
    DIGITAL BROADCASTING SYSTEM AND METHOD OF PROCESSING DATA IN DIGITAL BROADCASTING SYSTEM 有权
    数字广播系统和数字广播系统中数据处理方法

    公开(公告)号:US20110293038A1

    公开(公告)日:2011-12-01

    申请号:US13206391

    申请日:2011-08-09

    IPC分类号: H04L27/00

    CPC分类号: H04H20/57 H04H20/30 H04H20/59

    摘要: A digital broadcasting system and a data processing method are disclosed. A receiving system of the digital broadcasting system comprises a baseband processor, a management processor and a presentation processor. The baseband processor receives a broadcast signal including mobile service data and main service data, wherein the mobile service data configure a Reed-Solomon (RS) frame. The RS frame includes at least one of the mobile service data and notification messages. The notification messages are packetized in accordance with any one of a first transport protocol and a second transport protocol. The management processor decodes the notification messages from the RS frame in accordance with any one of the first transport protocol and the second transport protocol. The presentation processor directly outputs the decoded notification messages to an output unit in accordance with a channel which transmits the decoded notification messages, or outputs the decoded notification messages to the output unit only if a user selects the notification messages.

    摘要翻译: 公开了数字广播系统和数据处理方法。 数字广播系统的接收系统包括基带处理器,管理处理器和呈现处理器。 基带处理器接收包括移动业务数据和主业务数据的广播信号,其中移动业务数据配置里德 - 所罗门(RS)帧。 RS帧包括移动业务数据和通知消息中的至少一个。 通知消息根据第一传输协议和第二传输协议中的任何一个进行分组。 管理处理器根据第一传输协议和第二传输协议中的任何一个解码来自RS帧的通知消息。 呈现处理器根据发送解码的通知消息的信道直接将解码的通知消息输出到输出单元,或者仅在用户选择通知消息时才将解码的通知消息输出到输出单元。

    PLASMA ENHANCED THERMAL EVAPORATOR
    30.
    发明申请
    PLASMA ENHANCED THERMAL EVAPORATOR 审中-公开
    等离子体增强型热蒸发器

    公开(公告)号:US20100267191A1

    公开(公告)日:2010-10-21

    申请号:US12763856

    申请日:2010-04-20

    IPC分类号: H01L31/18

    摘要: The present invention generally provides a method for forming a photovoltaic device including evaporating a source material to form a large molecule processing gas and flowing the large molecule processing gas through a gas distribution showerhead and into a processing area of a processing chamber having a substrate therein. The method includes generating a small molecule processing gas, and reacting the small molecule processing gas with a film already deposited on a substrate surface to form a semiconductor film. Additionally, apparatuses that may use the methods are also provided to enable continuous inline CIGS type solar cell formation.

    摘要翻译: 本发明通常提供一种形成光伏器件的方法,包括蒸发源材料以形成大分子加工气体,并使大分子处理气体通过气体分配喷头流入其中具有衬底的处理室的处理区域。 该方法包括生成小分子处理气体,并使小分子处理气体与已沉积在基板表面上的膜反应形成半导体膜。 此外,还可以使用可以使用这些方法的装置来实现连续的在线CIGS型太阳能电池的形成。