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21.发明授权公开(公告)号：US07243441B2
公开(公告)日：2007-07-17
申请号：US10986878
申请日：2004-11-15
IPC分类号： G01B5/00
CPC分类号： G01Q30/02 , G01B11/0625 , G01Q30/04
摘要： A method an apparatus for measuring the depths of many fine holes formed in the surface of a sample by etching. Positional information on a plurality of hole patterns is acquired by scanning, with a stylus, the surface of the sample in which the hole patterns are formed by etching. The depths of the plurality of hole patterns are measured by scanning, with the stylus, bottom faces of the plurality of hole patterns and the surface of the sample in the respective vicinities of the hole patterns on the basis of the positional information that has been acquired. Information on distribution of the depths of the plurality of hole patterns is displayed on a screen on the basis of information on the measured depths of the plurality of hole patterns and the positional information on each of the hole patterns.
摘要翻译： 一种用于通过蚀刻来测量在样品表面形成的许多细孔的深度的装置的方法。 通过用触笔扫描其中通过蚀刻形成孔图案的样品的表面来获取关于多个孔图案的位置信息。 基于已经获得的位置信息，通过使用触针将多个孔图案的底面和孔图案的各附近的样品表面扫描来测量多个孔图案的深度 。 基于关于多个孔图案的测量深度的信息和关于每个孔图案的位置信息的信息，在屏幕上显示关于多个孔图案的深度分布的信息。
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公开(公告)号：US20070051887A1
公开(公告)日：2007-03-08
申请号：US11513411
申请日：2006-08-31
申请人： Kishio Hidaka , Motoyuki Hirooka , Mitsuo Hayashibara , Tadashi Fujieda , Hiroki Tanaka , Noriaki Takeshi , Takafumi Morimoto , Satoshi Sekino , Masato Takashina , Yuki Uozumi
发明人： Kishio Hidaka , Motoyuki Hirooka , Mitsuo Hayashibara , Tadashi Fujieda , Hiroki Tanaka , Noriaki Takeshi , Takafumi Morimoto , Satoshi Sekino , Masato Takashina , Yuki Uozumi
IPC分类号： G21K7/00
摘要： The present invention provides a cantilever having a base fixed to an inspecting apparatus, a beam protruding from the base, and a probe fixed to an end of the beam, wherein: the probe is formed by use of a carbon nanotube; and the probe is fixed by metal layers from at least two directions when the cantilever is operated, the probe protrudes in a direction in which a sample is fixed. It is possible to prevent the probe from warping and suppress image failures during observation of a sample.
摘要翻译： 本发明提供了一种悬臂，其具有固定在检查装置上的基座，从基座突出的梁和固定在梁的端部的探针，其中：通过使用碳纳米管形成探针; 并且当悬臂被操作时，探针从至少两个方向由金属层固定，探针沿固定样品的方向突出。 可以在观察样品期间防止探头翘曲并抑制图像故障。
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公开(公告)号：US06229607B1
公开(公告)日：2001-05-08
申请号：US09182048
申请日：1998-10-29
IPC分类号： G01B1114
CPC分类号： G01Q10/04 , Y10S977/87
摘要： A fine movement mechanism unit is configured by a supporting member, two fixed sections fixed to this supporting member, two pairs of parallel-plate flexural sections disposed between the two fixed sections, an X fine movement mechanism, a Y fine movement mechanism, and a Z fine movement mechanism. The X fine movement mechanism has an X moving section movable in an X direction, connected to each of the two fixed sections through the two pairs of parallel-plate flexural sections, and two X direction piezoelectric actuators causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections, a Y moving section movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator causing the Z moving section to move.
摘要翻译： 精细运动机构单元由支撑构件构成，固定在该支撑构件上的两个固定部，设置在两个固定部之间的两对平行板弯曲部，X微移动机构，Y细移动机构和 Z精细机芯。 X精细机构具有可沿X方向移动的X移动部，通过两对平行板弯曲部连接到两个固定部中的每一个，以及使X移动部移动的两个X方向压电致动器。 设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分，Y方向移动的Y移动部分，通过另外两对平行板弯曲部分连接到X移动部分 以及两个Y方向的压电致动器，其使Y移动部相对于X移动部移动。 配置在Y移动部上的Z细移动机构具有能够沿与X方向和Y方向垂直的Z方向移动的Z移动部，Z方向的压电致动器使Z移动部移动。
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公开(公告)号：US20100043108A1
公开(公告)日：2010-02-18
申请号：US12262208
申请日：2008-10-31
申请人： Motoyuki Hirooka , Makoto Okai , Takafumi Morimoto , Satoshi Sekino , Hiroki Tanaka , Masato Takashina , Yuuki Uozumi
发明人： Motoyuki Hirooka , Makoto Okai , Takafumi Morimoto , Satoshi Sekino , Hiroki Tanaka , Masato Takashina , Yuuki Uozumi
IPC分类号： G01B5/28
CPC分类号： G01Q70/12
摘要： In a tip having a carbon nanotube tip used to a scanning probe microscope, its length of the tip is adjusted in a several order of 10 nm and the tip maintains cylindrical shape up to the extremity portion.
摘要翻译： 在具有用于扫描探针显微镜的碳纳米管尖端的尖端中，其尖端的长度被调节为几个数量级的10nm，并且尖端保持圆柱形直到末端部分。
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公开(公告)号：US20080223122A1
公开(公告)日：2008-09-18
申请号：US12023158
申请日：2008-01-31
申请人： Masahiro Watanabe , Toru KURENUMA , Hiroshi Kuroda , Takafumi Morimoto , Shuichi Baba , Toshihiko Nakata , Manabu Edamura , Yukio Kembo
发明人： Masahiro Watanabe , Toru KURENUMA , Hiroshi Kuroda , Takafumi Morimoto , Shuichi Baba , Toshihiko Nakata , Manabu Edamura , Yukio Kembo
IPC分类号： G01B5/28
摘要： A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.
摘要翻译： 扫描探针显微镜，其能够执行不受样品静电荷分布影响的形状测量，其通过检测与测量同步的静电荷引起的静电荷的悬臂的挠曲或振动状态的变化来监测静电荷状态 通过探针和样品之间的相对扫描，进行电位调整，以消除静电电荷分布的影响，从而防止由于放电而引起的探针或样品的损伤，并实现由静电电荷分布引起的测量误差的降低。
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公开(公告)号：US20050012936A1
公开(公告)日：2005-01-20
申请号：US10893364
申请日：2004-07-19
申请人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
发明人： Ken Murayama , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Yoshiyuki Nagano , Takafumi Morimoto , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa
IPC分类号： G01B21/30 , G01B11/24 , G01B11/30 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q30/20 , G01Q60/24 , H01L21/66
摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.
摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。
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公开(公告)号：US5965881A
公开(公告)日：1999-10-12
申请号：US969562
申请日：1997-11-13
申请人： Takafumi Morimoto , Ken Murayama , Sumio Hosaka
发明人： Takafumi Morimoto , Ken Murayama , Sumio Hosaka
IPC分类号： G01B21/30 , G01B7/34 , G01N27/00 , G01N37/00 , G01Q10/06 , G01Q20/00 , G01Q30/04 , G01Q60/24 , G01Q80/00 , H01J37/28
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q20/02 , G01Q30/06 , G01Q60/38 , Y10S977/851 , Y10S977/852
摘要： This scanning probe microscope can accurately obtain information on surfaces of a sample when measuring the sample in a broad range from a slow scanning speed to a fast scanning speed. The scanning probe microscope comprises a cantilever (16) with a probe (15) at its tip, an optical lever mechanism (17,18) for measuring displacement of the cantilever (16), a mechanism for approaching/separating the cantilever against the sample, XY scanning circuit (21), and further comprises a Z axis piezoelectric element (14b) of a tripod for changing the distance between the cantilever and the sample, a control circuit (20) for controlling the distance between the cantilever and the sample to cause a displacement signal s1 obtained from the optical lever mechanism to be identical to a set value s0, and an adder (24) for adding a control signal from the control circuit and a signal based on the deviation between the displacement signal and the set value. The information on the sample surface is obtained from a signal outputted from the adder.
摘要翻译： 当从慢扫描速度到快速扫描速度的宽范围内测量样品时，该扫描探针显微镜可以准确地获得样品表面的信息。 扫描探针显微镜包括在其尖端处具有探针（15）的悬臂（16），用于测量悬臂（16）的位移的光学杠杆机构（17,18），用于使悬臂与样品接近/分离的机构 ，XY扫描电路（21），并且还包括用于改变悬臂与样品之间的距离的三脚架的Z轴压电元件（14b），用于控制悬臂与样品之间的距离的控制电路（20） 使得从光学手柄机构获得的位移信号s1与设定值s0相同，以及用于将来自控制电路的控制信号和基于位移信号与设定值之间的偏差的信号相加的加法器（24） 。 样品表面上的信息是从加法器输出的信号中获得的。
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公开(公告)号：US5870716A
公开(公告)日：1999-02-09
申请号：US538643
申请日：1995-10-04
CPC分类号： G06Q30/06 , G06Q10/087 , G06Q20/20 , G06Q20/201 , G06Q20/202 , G06Q20/203 , G06Q20/209 , G06Q30/0617 , G07F7/00 , G07G1/00
摘要： A shopping system includes store terminals for registering purchase and sale of items, a store processor for collectively managing the store terminals, electronic shelf labels capable of setting classification, etc., of the items, an item information data base for storing the classification of the items and the electronic shelf labels from information from the electronic shelf labels in such a manner as to correspond to each other, and home terminals for executing edition from the information from the store terminal or the store processor by a predetermined logic. The home terminal in this system accumulates the item information from the store terminal as history, determines a mean purchase interval of individual items, and decides and notifies the items to be purchased to the shopper by purchase item determination process of a next shopping day and a next-of-next shopping day inputted by the shopper.
摘要翻译： 购物系统包括用于登记物品的购买和销售的商店终端，用于集体管理商店终端的商店处理器，能够设置分类的电子货架标签等;用于存储商品的分类的商品信息数据库 物品和来自电子货架标签的信息的电子货架标签以彼此对应的方式，以及通过预定逻辑从存储终端或存储处理器的信息执行版本的归属终端。 该系统中的家庭终端将来自商店终端的商品信息作为历史积存，确定各个商品的平均购买间隔，并通过下一个购物日的购买项目确定处理决定并通知购物者要购买的商品，以及 购物者输入的下一个购物日。
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