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公开(公告)号：US20110080578A1
公开(公告)日：2011-04-07
申请号：US12964249
申请日：2010-12-09
Applicant: Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
Inventor： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/9503
Abstract: A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.
Abstract translation: 缺陷检查装置能够以高灵敏度和高速检查诸如半导体衬底或薄膜衬底的样品的顶部和边缘表面上存在的极小缺陷。 缺陷检查装置具有照明光学系统，多个检测光学单元和信号处理器。 一个或多个检测光学单元接收从样品的边缘部分衍射的光或从夹持样品的边缘把手衍射的光。 一个或多个检测光学单元基于通过监视由检测光学单元接收的衍射光的强度而获得的信号来屏蔽由检测光学单元接收的衍射光，以便检查位于边缘部分附近的样本部分 以及位于边缘把手附近的样品部分。
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公开(公告)号：US07869024B2
公开(公告)日：2011-01-11
申请号：US12414727
申请日：2009-03-31
Applicant: Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
Inventor： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
CPC classification number: G01N21/9501 , G01N21/9503
Abstract: A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.
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公开(公告)号：US07675613B2
公开(公告)日：2010-03-09
申请号：US12362950
申请日：2009-01-30
Applicant: Toshiyuki Nakao , Yoshimasa Oshima , Yuta Urano
Inventor： Toshiyuki Nakao , Yoshimasa Oshima , Yuta Urano
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N2021/887
Abstract: A method for inspecting a defect of a surface of a sample includes irradiating a laser beam on the sample surface a plurality of times so that at least part of an illumination field of the laser beam on the sample surface illuminates a first area of the sample surface each of the plurality of times, detecting a plurality of scattered light rays from the first area caused by the plurality of times of irradiations, correcting errors of detection timings for the plurality of detected scattered light rays, correcting at least one of adding and averaging the plurality of scattered light rays, determining a defect on the sample surface based on a calculation result in accordance with the at least one of the adding and averaging.
Abstract translation: 用于检查样品表面的缺陷的方法包括：将激光束多次照射在样品表面上，使得样品表面上的激光束的照明场的至少一部分照射样品表面的第一区域 多次检测由多次照射引起的来自第一区域的多个散射光线，校正多个检测到的散射光线的检测定时的误差，校正至少一个加法和平均化 多个散射光线，根据加法和平均中的至少一个，基于计算结果确定样品表面上的缺陷。
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公开(公告)号：US20070177136A1
公开(公告)日：2007-08-02
申请号：US11653322
申请日：2007-01-16
Applicant: Hiroyuki Nakano , Akira Hamamatsu , Sachio Uto , Yoshimasa Oshima , Hidetoshi Nishiyama , Yuta Urano , Shunji Maeda
Inventor： Hiroyuki Nakano , Akira Hamamatsu , Sachio Uto , Yoshimasa Oshima , Hidetoshi Nishiyama , Yuta Urano , Shunji Maeda
IPC: G01N21/88
CPC classification number: G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/9513 , G01N2021/95638 , H01L22/12
Abstract: A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been guided to a first or second optical path, and a cylindrical lens 251 and an inclined mirror 2604 are disposed to focus the beam flux that has been directed downward by the mirror, at an inclination angle from a required oblique direction extending horizontally, onto a substrate 1 to be inspected, as a slit-shaped beam 90.
Abstract translation: 缺陷检查装置包括照射光学系统20，检测光学系统30和图像处理器40。 在照射光学系统中，设置反射镜2603以向下反射已经被引导到第一或第二光路的光束，并且设置柱面透镜251和倾斜镜2604以聚焦已导向的光束 作为狭缝状光束90，通过反射镜向下倾斜，从与水平方向延伸的所需倾斜方向倾斜的角度，到被检查的基板1上。
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公开(公告)号：US4423331A
公开(公告)日：1983-12-27
申请号：US242483
申请日：1981-03-11
Applicant: Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Oshima
Inventor： Mitsuyoshi Koizumi , Nobuyuki Akiyama , Yoshimasa Oshima
CPC classification number: G01N21/88
Abstract: A method and apparatus of inspecting a surface of a specimen for the presence of defects, foreign substance and the like are disclosed. The surface has a mark such as a cutting mark formed thereon and composed of fine grooves or recesses extending in a predetermined direction. The surface is scanned two-dimensionally with an irradiating laser beam impinging or illuminating on the specimen surface perpendicularly thereto. Those of the irregularly scattered laser light rays reflected from the specimen surface which are in a first direction perpendicular to the lengthwise direction of the mark are intercepted by a shielding member or caused to pass through regions other than a reflecting region of a reflecting mirror, while those scattered light rays which are in other directions than the first direction are directed to a photoelectric converter tube along a bypass path across the shielding member or through reflection of the mirror. A picture signal derived from the output of the photoelectric converter tube is digitalized into binary picture element signals by a sampling and binary encoding circuit, the resulting signals being then stored in a two-dimensional memory. The presence and forms of defects, foreign substances and the like on the specimen surface are discriminatively determined in dependence on particular combinations of the binary picture element signals stored in the memory.
Abstract translation: 公开了一种检查样品表面存在缺陷，异物等的方法和装置。 该表面具有形成在其上的切割标记和由沿预定方向延伸的细小凹槽或凹部组成的标记。 使用照射激光束在垂直于其的样品表面上照射或照射二维地扫描该表面。 从与标记的长度方向垂直的第一方向从试样表面反射的不规则散射的激光光线被屏蔽部件遮断，或者通过反射镜的反射区域以外的区域，同时 沿着除了第一方向以外的方向的那些散射光线沿着穿过屏蔽部件的旁通路径或者通过反射镜的反射被引导到光电转换管。 从光电转换管的输出得到的图像信号由采样和二进制编码电路数字化成二进制像素信号，然后将所得到的信号存储在二维存储器中。 根据存储在存储器中的二进制像素信号的特定组合，鉴别地确定样本表面上的缺陷，异物等的存在和形式。
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Patent Agency Ranking
公开(公告)号：US4242702A
公开(公告)日：1980-12-30
申请号：US856097
申请日：1977-11-30
Applicant: Asahiro Kuni , Nobuyuki Akiyama , Yoshimasa Oshima
Inventor： Asahiro Kuni , Nobuyuki Akiyama , Yoshimasa Oshima
CPC classification number: G01B11/24 , G01B11/024
Abstract: An apparatus for examining an object such as a contact welded on a leaf spring in respect of geometrical and qualitative factors comprises an image pick-up device such as TV camera for detecting an optical image of the contact and the leaf spring having a dark portion along the contour of the contact and converting the optical image into corresponding video signals which are then compared with a predetermined threshold level to be converted into a binary encoded signal having two logic levels corresponding, respectively, to bright and dark portions of the optical image. Frequency distributions of the binary signal representing the dark portion are determined along two orthogonal directions thereby to define a coordinate of a region in which the contact is located. A first checking device is provided to determine if the above coordinate is located in a preset allowable tolerance range. A second checking device is additionally provided which serves to define a frame of a size differed from that of the contact in dependence on the coordinate thereby dividing the area within the frame into a predetermined number of picture elements in a matrix array, whereby faults of the contact such as injury, welding dust or deformation are detected in dependence upon a predetermined combination of the picture element signals representing the dark portions of the optical image.
Abstract translation: 用于检查诸如接触焊接在板簧上的物体的几何和定性因素的装置包括用于检测接触的光学图像的电视摄像机等图像拾取装置和具有暗部分的板簧 接触的轮廓并将光学图像转换成相应的视频信号，然后将其与预定的阈值电平进行比较，以转换成具有两个逻辑电平的二进制编码信号，该逻辑电平分别对应于光学图像的明暗部分。 根据两个正交方向确定表示暗部分的二进制信号的频率分布，从而定义接触位置的区域的坐标。 提供第一检查装置以确定上述坐标是否位于预设的允许公差范围内。 另外提供另外提供的第二检查装置，其用于根据坐标定义与触点的尺寸不同的尺寸的框架，从而将框架内的区域划分成矩阵阵列中的预定数量的图像元素，由此， 根据表示光学图像的暗部的像素信号的预定组合来检测诸如伤害，焊接灰尘或变形的接触。
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公开(公告)号：US4115762A
公开(公告)日：1978-09-19
申请号：US856096
申请日：1977-11-30
Applicant: Nobuyuki Akiyama , Yoshimasa Oshima
Inventor： Nobuyuki Akiyama , Yoshimasa Oshima
CPC classification number: G01B11/022
Abstract: An alignment pattern detecting apparatus comprises an image pick-up device for scanning and picking up an optical image of alignment pattern formed on a wafer to produce a time-base video signal, and means for sampling at predetermined intervals and converting from analog to digital form the video signal produced by the image pick-up device so that the video signal is returned symmetrically at a predetermined point to determine the degree of matching between the two signals thereby to obtain a point where the degree of matching is the best. This best matching degree point is detected as the center position of the alignment pattern.
Abstract translation: 对准图案检测装置包括用于扫描和拾取形成在晶片上的对准图案的光学图像以产生时基视频信号的图像拾取装置，以及用于以预定间隔进行采样并从模拟形式转换为数字形式的装置 由图像拾取装置产生的视频信号，使得视频信号在预定点对称地返回，以确定两个信号之间的匹配程度，从而获得匹配程度最好的点。 该最佳匹配度点被检测为对准图案的中心位置。
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公开(公告)号：US20120162665A1
公开(公告)日：2012-06-28
申请号：US13404749
申请日：2012-02-24
Applicant: Akira Hamamatsu , Yoshimasa Oshima , Shunji Maeda , Hisae Shibuya , Yuta Urano , Toshiyuki Nakao , Shigenobu Maruyama
Inventor： Akira Hamamatsu , Yoshimasa Oshima , Shunji Maeda , Hisae Shibuya , Yuta Urano , Toshiyuki Nakao , Shigenobu Maruyama
IPC: G01B11/30
CPC classification number: G01B11/303 , G01N21/47 , G01N21/94 , G01N21/9501
Abstract: An inspecting method and apparatus for inspecting a substrate surface includes application of a light to the substrate surface, detection of scattered light or reflected light from the substrate surface due to the applied light at a plurality of positions to obtain a plurality of electrical signals, extraction of a signal in a mutually different frequency band from each of the plurality of electrical signals, and calculation of a value regarding a state of film of the substrate through an arithmetical operation process of a plurality of extracted signals in the frequency bands.
Abstract translation: 用于检查基板表面的检查方法和装置包括：由于在多个位置处施加的光，向基板表面施加光，检测散射光或来自基板表面的反射光，以获得多个电信号，提取 在与所述多个电信号中的每一个相互不同的频带中的信号的信号，以及通过所述频带中的多个提取的信号的算术运算处理来计算关于所述衬底的膜的状态的值。
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公开(公告)号：US20120140211A1
公开(公告)日：2012-06-07
申请号：US13368764
申请日：2012-02-08
Applicant: Yoshimasa OSHIMA , Yuta URANO , Toshiyuki NAKAO
Inventor： Yoshimasa OSHIMA , Yuta URANO , Toshiyuki NAKAO
IPC: G01N21/47
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/94 , G01N2021/4707 , G01N2021/4709 , G01N2021/8864
Abstract: An inspection apparatus and method for detecting defects and haze on a surface of a sample includes illumination optics which emit light to illuminate an inspection region on the surface of the sample from an oblique direction relative to the inspection region, first detection optics which detect first scattered light from the inspection region and having a beam analyzer through an optical path, second detection optics which detect second scattered light from the inspection region, the second scattered light being scattered from a direction different than a direction of the first scattered light, and a signal-processing unit which treats different processings for a first signal of the detected first scattered light and for a second signal of the detected second scattered light and detecting defects and haze on the surface of the sample on the basis of at least one of the first signal and the second signal.
Abstract translation: 用于检测样品表面的缺陷和雾度的检查装置和方法包括发射光的照明光学器件，以从相对于检查区域的倾斜方向照射样品表面上的检查区域，第一检测光学器件检测第一散射 来自检查区域的光并且具有通过光路的光束分析器，第二检测光学器件检测来自检查区域的第二散射光，第二散射光从不同于第一散射光的方向的方向散射，以及信号 处理单元，其针对检测到的第一散射光的第一信号和检测到的第二散射光的第二信号处理不同的处理，并且基于第一信号中的至少一个检测样品的表面上的缺陷和雾度 和第二个信号。
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公开(公告)号：US08035808B2
公开(公告)日：2011-10-11
申请号：US12727752
申请日：2010-03-19
Applicant: Yoshimasa Oshima , Toshiyuki Nakao , Shigeru Matsui
Inventor： Yoshimasa Oshima , Toshiyuki Nakao , Shigeru Matsui
CPC classification number: G01N21/9501 , G01N2021/4716
Abstract: A surface defect inspection apparatus and method for irradiating a beam multiple times to a same region on a surface of an inspection sample, detecting each scattered light from the same region by detection optical systems individually to produce plural signals, and wherein irradiating the beam includes performing a line illumination of the beam on a line illumination region of the sample surface. The line illumination region is moved in a longitudinal direction at a pitch shorter than a length of the line illumination region in the longitudinal direction.
Abstract translation: 一种表面缺陷检查装置和方法，用于将多个光束照射到检查样品的表面上的相同区域，分别通过检测光学系统检测来自相同区域的每个散射光以产生多个信号，并且其中照射光束包括执行 在样品表面的线照射区域上的光束的线照明。 线照明区域沿纵向方向以比线照明区域的长度方向的长度短的间距移动。
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