公开(公告)号：US10133142B2

公开(公告)日：2018-11-20

申请号：US15472946

申请日：2017-03-29

Applicant: Acacia Communications, Inc.

Inventor： Christopher Doerr ,  Long Chen ,  Ricardo Aroca

IPC: G02F1/035 ,  G02F1/225 ,  G02F1/025 ,  G02F1/21

Abstract: An optical Mach Zehnder modulator is described. The optical Mach Zehnder modulator may comprise a plurality of segments separated by curved waveguides. For example, an optical Mach Zehnder modulator may comprise a first waveguide arm having a first pn-junction formed therein, a second waveguide arm having a second pn-junction formed therein, a third waveguide arm coupled to the first waveguide arm via a first curved waveguide and a fourth waveguide arm coupled to the second waveguide arm via a second curved waveguide. The segments may have the same polarities. Alternatively, the segments may have opposite polarities. The different segments may be driven using different RF signals. The RF signals may be delayed from one another.

公开(公告)号：US09989787B2

公开(公告)日：2018-06-05

申请号：US15455917

申请日：2017-03-10

Applicant: Acacia Communications, Inc.

Inventor： Long Chen ,  Christopher Doerr

IPC: G02F1/025 ,  G02F1/015

CPC classification number: G02F1/025 ,  G02F2001/0151

Abstract: Disclosed herein are methods, structures, and devices for a silicon carrier-depletion based modulator with enhanced doping in at least part of slab regions between waveguide core and contact areas. Compared to prior designs, this modulator exhibits lower optical absorption loss and better modulation bandwidth without sacrificing the modulation efficiency when operating at comparable bandwidth settings.

公开(公告)号：US09977269B2

公开(公告)日：2018-05-22

申请号：US15584509

申请日：2017-05-02

Applicant: Acacia Communications, Inc.

Inventor： Long Chen

IPC: G02F1/025 ,  G02B6/134 ,  G02F1/015

CPC classification number: G02F1/025 ,  G02B6/00 ,  G02B6/134 ,  G02F2001/0156

Abstract: Disclosed are designs and methods of fabrication of silicon carrier-depletion based electro-optical modulators having doping configurations that produce modulators exhibiting desirable modulation efficiency, optical absorption loss and bandwidth characteristics. The disclosed method of fabrication of a modulator having such doping configurations utilizes counter doping to create narrow regions of relatively high doping levels near a waveguide center.

公开(公告)号：US20170248806A1

公开(公告)日：2017-08-31

申请号：US15455917

申请日：2017-03-10

Applicant: Acacia Communications, Inc.

Inventor： Long Chen ,  Christopher Doerr

IPC: G02F1/025

CPC classification number: G02F1/025 ,  G02F2001/0151

Abstract: Disclosed herein are methods, structures, and devices for a silicon carrier-depletion based modulator with enhanced doping in at least part of slab regions between waveguide core and contact areas. Compared to prior designs, this modulator exhibits lower optical absorption loss and better modulation bandwidth without sacrificing the modulation efficiency when operating at comparable bandwidth settings.

公开(公告)号：US20170139305A1

公开(公告)日：2017-05-18

申请号：US15386879

申请日：2016-12-21

Applicant: Acacia Communications, Inc.

Inventor： Long Chen

IPC: G02F1/225 ,  G02B6/24

CPC classification number: G02F1/2257 ,  G02B6/122 ,  G02B6/243 ,  G02F2001/212 ,  G02F2201/08

Abstract: Disclosed herein are methods, structures, apparatus and devices for the termination of unused waveguide ports in planar photonic integrated circuits with doped waveguides such that free-carrier absorption therein may advantageously absorb any undesired optical power resulting in a significant reduction of stray light and resulting reflections.

公开(公告)号：US20160202432A1

公开(公告)日：2016-07-14

申请号：US14991816

申请日：2016-01-08

Applicant: Acacia Communications, Inc.

Inventor： Long Chen ,  Christopher Doerr ,  Diedrik Vermeulen

IPC: G02B6/42 ,  G02B6/12 ,  G02B6/122 ,  G02B6/34 ,  G02B6/30 ,  G02B6/28

CPC classification number: G02B6/4225 ,  G02B6/12004 ,  G02B6/122 ,  G02B6/1228 ,  G02B6/2852 ,  G02B6/30 ,  G02B6/34 ,  G02B6/4227 ,  G02B2006/12109 ,  G02B2006/12126

Abstract: A photonic integrated circuit (PIC) may be optically aligned to a plurality of optical components (e.g., an optical fiber array). Optical alignment may be facilitated by the use of an optical impedance element coupled between a first input/output (I/O) optical waveguide and a second I/O optical waveguide of the PIC. The optical impedance element me be configured to be transmissive during optical alignment and to be non-transmissive during the regular operation of the PIC.

Abstract translation: 光子集成电路（PIC）可以与多个光学部件（例如，光纤阵列）光学对准。 可以通过使用耦合在PIC的第一输入/输出（I / O）光波导和第二I / O光波导之间的光阻抗元件来促进光学对准。 光阻抗元件被配置为在光学对准期间是透射的，并且在PIC的常规操作期间是不透射的。

公开(公告)号：US20160202421A1

公开(公告)日：2016-07-14

申请号：US14991311

申请日：2016-01-08

Applicant: Acacia Communications, Inc.

Inventor： Long Chen

IPC: G02B6/30 ,  G02B6/136

CPC classification number: G02B6/305 ,  G02B6/12002 ,  G02B6/1228 ,  G02B6/136 ,  G02B6/14 ,  G02B2006/12061 ,  G02B2006/121 ,  G02B2006/12152 ,  G02B2006/12195

Abstract: Techniques for forming a facet optical coupler that includes a waveguide formed over a trench of a silicon substrate are described. The trench is formed in a silicon substrate and then filled with a dielectric material. The waveguide is patterned on the dielectric material over the trench such that the waveguide is disposed a distance from the first surface. A first end of the waveguide has a first size and a second end of the waveguide distal the first end has a second size different than the first size. A material of the waveguide and the first size define a mode size of the waveguide.

Abstract translation: 描述了形成包括在硅衬底的沟槽上形成的波导的小面光耦合器的技术。 沟槽形成在硅衬底中，然后用电介质材料填充。 波导在沟槽上的电介质材料上图案化，使得波导与第一表面设置一段距离。 波导的第一端具有第一尺寸，并且第一端的远端的波导的第二端具有与第一尺寸不同的第二尺寸。 波导的材料和第一尺寸限定波导的模式尺寸。

公开(公告)号：US12081268B2

公开(公告)日：2024-09-03

申请号：US18094205

申请日：2023-01-06

Applicant: ACACIA COMMUNICATIONS, INC.

Inventor： Long Chen ,  Leonard Jan-Peter Ketelsen

IPC: H01S5/026 ,  G02B6/12 ,  G02B6/13 ,  H04B10/032 ,  H04B10/25 ,  H04B10/50 ,  H04J14/02

CPC classification number: H04B10/50 ,  H04B10/032 ,  H04B10/25 ,  H04J14/0254 ,  G02B6/12 ,  G02B6/13 ,  H01S5/0261 ,  H01S5/0262 ,  H01S5/0265

Abstract: Aspects of the present disclosure are directed to a photonic integrated circuit (PIC) having a resistivity-engineered substrate to suppress radio-frequency (RF) common-mode signals. In some embodiments, a semiconductor substrate is provided that comprises two portions having different levels of resistivity to provide both suppression of common mode signals, and reduction of RF absorption loss for non-common mode RF signals. In such embodiments, a bottom portion of the semiconductor substrate has a low resistivity to suppress common mode via RF absorption, while a top portion of the semiconductor substrate that is adjacent to conductors in the IC has a high resistivity to reduce RF loss.

公开(公告)号：US11650477B2

公开(公告)日：2023-05-16

申请号：US15386879

申请日：2016-12-21

Applicant: Acacia Communications, Inc.

Inventor： Long Chen

IPC: G02B6/24 ,  G02F1/225 ,  G02B6/122 ,  G02F1/21

CPC classification number: G02F1/2257 ,  G02B6/243 ,  G02B6/122 ,  G02F1/212 ,  G02F2201/08

Abstract: Disclosed herein are methods, structures, apparatus and devices for the termination of unused waveguide ports in planar photonic integrated circuits with doped waveguides such that free-carrier absorption therein may advantageously absorb any undesired optical power resulting in a significant reduction of stray light and resulting reflections.

公开(公告)号：US11556020B1

公开(公告)日：2023-01-17

申请号：US16942668

申请日：2020-07-29

Applicant: Acacia Communications, Inc.

Inventor： Long Chen

IPC: G02F1/01 ,  G02B6/293 ,  H01S3/106

Abstract: Integrated wavelength selectors are described. The wavelength selector may include silicon nitride ring resonator disposed vertically between a heater and a temperature sensor. The temperature sensor may be formed of silicon in some embodiments. The wavelength selector may be coupled to the output port of a tunable laser, or may be disposed within a laser cavity.