公开(公告)号：US20160090297A1

公开(公告)日：2016-03-31

申请号：US14502475

申请日：2014-09-30

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael W. Judy ,  George M. Molnar ,  Christopher R. Needham ,  Kemiao Jia

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0048

Abstract: A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

Abstract translation: MEMS产品包括由应力消除间隙围绕并从衬底悬挂的应力隔离MEMS平台。 应力消除间隙提供阻挡机械应力从基板传递到平台的障碍。

公开(公告)号：US20240253979A1

公开(公告)日：2024-08-01

申请号：US18632802

申请日：2024-04-11

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Christopher Needham ,  Andrew Proudman ,  Nikolay Pokrovskiy ,  George M. Molnar, II ,  Laura Cornelia Popa

IPC: B81C1/00 ,  B81B7/00

CPC classification number: B81C1/00325 ,  B81B7/0048 ,  B81C1/00063 ,  B81B2203/01

Abstract: A stress-isolated microelectromechanical systems (MEMS) device and a method of manufacture of the stress-isolated MEMS device are provided. MEMS devices may be sensitive to stress and may provide lower performance when subjected to stress. A stress-isolated MEMS device may be manufactured by etching a trench and/or a cavity in a first side of a substrate and subsequently forming a MEMS device on a surface of a platform opposite the first side of the substrate. Such a stress-isolated MEMS device may exhibit better performance than a MEMS device that is not stress-isolated. Moreover, manufacturing the MEMS device by first forming a trench and cavity on a backside of a wafer, before forming the MEMS device on a suspended platform, provides increased yield and allows for fabrication of smaller parts, in at least some embodiments.

公开(公告)号：US20240003684A1

公开(公告)日：2024-01-04

申请号：US18300053

申请日：2023-04-13

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  Gaurav Vohra ,  Arthur Yurievich Savchenko ,  Xin Zhang

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A gyroscope includes a substrate, a proof mass coupled to the substrate and configured to move in direction of an X axis and in direction of a Y axis orthogonal to the first axis, an X axis shuttle to selectively drive the proof mass along the X axis as a drive axis or sense movement of the proof mass along the X axis as a sense axis in response to the proof mass driven along the Y axis as the drive axis, and a Y axis shuttle to selectively sense movement of the proof mass along the Y axis as a sense axis in response to the proof mass driven along the X axis or drive the proof mass along the Y axis as the drive axis. The X axis shuttle is symmetric to the Y axis shuttle along a diagonal axis that is diagonal to both the X axis and the Y axis. The X and Y axis shuttles have gaps designed for a predetermined DC voltage to generate spring softening (negative cubic nonlinearity) that is equal to spring hardening (positive cubic nonlinearity), ensuring linear motion at high amplitudes (⅓ of the capacitive gap).

公开(公告)号：US11733263B2

公开(公告)日：2023-08-22

申请号：US16138091

申请日：2018-09-21

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang ,  Xin Zhang

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084 ,  G01P2015/0862

Abstract: A three-axis accelerometer includes a single, integrated mass including at least one lateral (x-y) proof mass and at least one vertical (z) proof mass. The vertical proof mass is arranged as a teeter-totter mass, which is located within the lateral proof mass. The vertical proof mass is mechanically coupled to the lateral proof mass with one or more torsional springs, and the lateral proof mass is mechanically coupled to one or more anchors with one or more lateral springs. The at least one vertical proof mass may be symmetrically positioned about one or more axes of the three-axis accelerometer, so that the 3-axis accelerometer has in-plane symmetry. The three-axis accelerometer may be less susceptible for mechanical cross-talk or noise and may provide a smaller packaged solution for sensing acceleration in three directions.

公开(公告)号：US11714102B2

公开(公告)日：2023-08-01

申请号：US17342484

申请日：2021-06-08

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang ,  Xin Zhang

IPC: G01P15/125 ,  G01P15/18 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0021 ,  G01P15/18 ,  B81B2201/0235

Abstract: Disclosed herein are aspects of a multiple-mass, multi-axis microelectromechanical systems (MEMS) accelerometer sensor device with a fully differential sensing design that applies differential drive signals to movable proof masses and senses differential motion signals at sense fingers coupled to a substrate. In some embodiments, capacitance signals from different sense fingers are combined together at a sensing signal node disposed on the substrate supporting the proof masses. In some embodiments, a split shield may be provided, with a first shield underneath a proof mass coupled to the same drive signal applied to the proof mass and a second shield electrically isolated from the first shield provided underneath the sense fingers and biased with a constant voltage to provide shielding for the sense fingers.

公开(公告)号：US11415595B2

公开(公告)日：2022-08-16

申请号：US16457849

申请日：2019-06-28

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  Xin Zhang ,  Michael Judy

IPC: G01P15/08 ,  G01P15/125

Abstract: Single-axis teeter-totter accelerometers having a plurality of anchors are disclosed. The plurality of anchors may be arranged about a rotation axis of the teeter-totter proof mass. Each of the plurality of anchors may be coupled to the proof mass by two torsional springs each extending along the rotation axis. The plurality of anchors allows an increased number of torsional springs to be coupled to the proof mass and thus greater torsional stiffness for the proof mass may be achieved. Due to the higher torsional stiffness, the disclosed single-axis teeter-totter accelerometers may be deployed in high-frequency environments where such increased torsional stiffness is required, for example, around 20 kHz and above.

公开(公告)号：US20220196699A1

公开(公告)日：2022-06-23

申请号：US17555002

申请日：2021-12-17

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Michael Judy

IPC: G01P15/125 ,  G01P1/00

Abstract: A microelectromechanical systems (MEMS) accelerometer is provided, comprising a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis; a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes; and at least one lever coupling the first proof mass to the second proof mass, wherein, the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis; and the MEMS accelerometer exhibits symmetry about the first and second axes.

公开(公告)号：US20210349123A1

公开(公告)日：2021-11-11

申请号：US17380601

申请日：2021-07-20

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang

IPC: G01P15/18 ,  G01P15/125

Abstract: Microelectromechanical system (MEMS) accelerometers are described. The MEMS accelerometers may include multiple proof mass portions collectively forming one proof mass. The entirety of the proof mass may contribute to detection of in-plane acceleration and out-of-plane acceleration. The MEMS accelerometers may detect in-plane and out-of-plane acceleration in a differential fashion. In response to out-of-plane accelerations, some MEMS accelerometers may experience butterfly modes, where one proof mass portion rotates counterclockwise relative to an axis while at the same time another proof mass portion rotates clockwise relative to the same axis. In response to in-plane acceleration, the proof mass portions may experience common translational modes, where the proof mass portions move in the plane along the same direction.

公开(公告)号：US20200081029A1

公开(公告)日：2020-03-12

申请号：US16129755

申请日：2018-09-12

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Gaurav Vohra ,  Michael Judy

IPC: G01P15/125

Abstract: Z-axis teeter-totter accelerometers with embedded movable structures are disclosed. The teeter-totter accelerometer may include an embedded mass which pivots or translates out-of-plane from the teeter-totter beam. The pivoting or translating embedded mass may be positioned to increase the sensitivity of the z-axis accelerometer by providing greater z-axis displacement than the teeter-totter beam itself exhibits.

公开(公告)号：US20180058853A1

公开(公告)日：2018-03-01

申请号：US15253792

申请日：2016-08-31

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Jianglong Zhang ,  Jinbo Kuang

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/5705

Abstract: A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.