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公开(公告)号：US06906847B2
公开(公告)日：2005-06-14
申请号：US10305536
申请日：2002-11-26
Applicant: Andrew G. Huibers , Satyadev R. Patel
Inventor： Andrew G. Huibers , Satyadev R. Patel
CPC classification number: G02B26/0833 , B81B7/0077 , B81B2201/042 , B81C1/00896 , B81C1/00904 , B81C2203/0118 , B82Y30/00 , H01L24/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/01041 , H01L2924/01049 , H01L2924/01054 , H01L2924/01058 , H01L2924/01072 , H01L2924/01074 , H01L2924/01077 , H01L2924/01079 , H01L2924/01322 , H01L2924/04953 , H01L2924/10329 , H01L2924/12042 , H01L2924/12044 , H01L2924/14 , H01L2924/1433 , H01L2924/19041 , H01L2924/19042 , H01L2924/3025 , H01L2924/00
Abstract: A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
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公开(公告)号：US06885494B2
公开(公告)日：2005-04-26
申请号：US10366296
申请日：2003-02-12
Applicant: Satyadev R. Patel , Andrew G. Huibers , Peter J. Heureux
Inventor： Satyadev R. Patel , Andrew G. Huibers , Peter J. Heureux
CPC classification number: G02B26/0841
Abstract: A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a mirror plate attached to the hinge structure is provided for use in display systems. The mirror plate is capable of rotating from a non-deflected resting state to a state that is at least 14°, and preferably from 15° to 27° from the non-deflected resting state. In operation, the micro-mirror switches between an “ON”-state and “OFF”-state, which are defined in accordance with a rotational position of the mirror plate. The OFF state can be a non-deflected position of the micro-mirror (generally parallel to the substrate), the same angle (though opposite direction) as the ON state, or an angle less than the ON state (though in the opposite direction). Reflected light from the “ON” and “OFF” states are thus separated and the contrast ratio is improved.
Abstract translation: 提供了一种微镜，其包括基底，形成在基底上的铰链结构和附接到铰链结构的镜板，用于显示系统。 镜板能够从非偏转静止状态旋转到从非偏转静止状态至少为14°，优选为15°至27°的状态。 在操作中，微反射镜在根据镜板的旋转位置限定的“ON”状态和“OFF”状态之间切换。 关闭状态可以是微反射镜（大体上平行于基板）的非偏转位置，与ON状态相同的角度（尽管相反的方向），或者小于ON状态的角度（尽管在相反方向 ）。 因此，从“ON”和“OFF”状态的反射光被分离，并且对比度提高。
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23.发明授权公开(公告)号：US06873450B2
公开(公告)日：2005-03-29
申请号：US10613379
申请日：2003-07-03
Applicant: Satyadev R. Patel , Andrew G. Huibers
Inventor： Satyadev R. Patel , Andrew G. Huibers
IPC: G02B26/00 , G02B26/08 , H01L20060101 , H01L21/00
CPC classification number: G02B26/0841
Abstract: A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
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公开(公告)号：US06844959B2
公开(公告)日：2005-01-18
申请号：US10305509
申请日：2002-11-26
Applicant: Andrew G. Huibers , Satyadev R. Patel , Robert M. Duboc, Jr.
Inventor： Andrew G. Huibers , Satyadev R. Patel , Robert M. Duboc, Jr.
CPC classification number: G02B26/0841 , B82Y30/00 , Y10T428/30
Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
Abstract translation: 公开了投影系统，空间光调制器和用于形成微镜的方法。 衬底包括用于静电偏转微镜元件的电路和电极，微镜元件设置在形成空间光调制器的这种元件的阵列内。 在一个实施例中，衬底是具有电路和电极的硅衬底，用于静电地驱动相邻的微镜元件，并且衬底被完全或选择性地覆盖有光吸收材料。
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公开(公告)号：US06396619B1
公开(公告)日：2002-05-28
申请号：US09637479
申请日：2000-08-11
Applicant: Andrew G. Huibers , Peter J. Heureux
Inventor： Andrew G. Huibers , Peter J. Heureux
IPC: G02B2600
CPC classification number: G02B26/0841
Abstract: A spatial light modulator having one or more deflection limiting mechanisms and process for fabrication therefor. In one embodiment, the mirror support structure has rigid deflection stoppers that limit the tilt angle of the reflective plate. The mirror support structure may also include an attraction electrode that is attached to the back-side of the reflective plate such that the reflective plate may be selectively actuated by electrostatic force. Alternatively, a deflection stopping mechanism can be provided separate from the mirror support structure. The deflection stopping mechanism can be used in conjunction with one or more additional stopping mechanisms such as the abutment of a portion of the reflective plate against the substrate upon which it was constructed. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.
Abstract translation: 具有一个或多个偏转限制机构的空间光调制器及其制造方法。 在一个实施例中，镜支撑结构具有限制反射板的倾斜角度的刚性偏转止动器。 反射镜支撑结构还可以包括附着到反射板的背面的吸引电极，使得反射板可以通过静电力选择性地致动。 或者，偏转止动机构可以与镜支撑结构分开设置。 偏转止动机构可以与一个或多个附加止动机构结合使用，例如反射板的一部分抵靠在其上构造的基板上。 本发明的优点包括：（1）当扭转铰链隐藏在反射板后面时，增加的填充因数; （2）由于较少的散射光学表面暴露，并且由于更大的控制其角度和几何形状的能力，增加了对比度; 和（3）提高几何柔性，以优化机电性能和制造方面的鲁棒性。
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Patent Agency Ranking
公开(公告)号：US20160337161A1
公开(公告)日：2016-11-17
申请号：US13346187
申请日：2012-01-09
Applicant: Andrew G. Huibers
Inventor： Andrew G. Huibers
IPC: G06F15/173
CPC classification number: H04L29/06333 , H04L51/14 , H04L51/32 , H04L67/141 , H04L67/18
Abstract: Some embodiments described in this disclosure provide methods and/or systems to facilitate communication between devices. A first device may detect a first event based on an action performed by a user using the first device. The first device may then send information of the first event to a server. The server can then attempt to match the first event with an event from a set of events based on the information of the first event. The first device may receive a response from the server that indicates whether or not the first event matched a second event that was sent to the server from a second device.
Abstract translation: 在本公开中描述的一些实施例提供了促进设备之间的通信的方法和/或系统。 第一设备可以基于由用户使用第一设备执行的动作来检测第一事件。 然后，第一设备可以将第一事件的信息发送到服务器。 然后，服务器可以基于第一事件的信息来尝试将来自一组事件的事件与第一事件匹配。 第一设备可以从服务器接收指示第一事件是否与从第二设备发送到服务器的第二事件匹配的响应。
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公开(公告)号：US08237731B2
公开(公告)日：2012-08-07
申请号：US12236379
申请日：2008-09-23
Applicant: Andrew G. Huibers , Michael T. Davis , Henry W. Neal , James N. Hall
Inventor： Andrew G. Huibers , Michael T. Davis , Henry W. Neal , James N. Hall
CPC classification number: G09G3/346 , G09G3/2022 , G09G2300/0439 , G09G2310/0235
Abstract: In accordance with the teachings of the present disclosure, a system and method for displaying an image are provided. In one embodiment, the method includes receiving a data stream representing a frame of an image. The data stream may indicate a first color pixel cluster corresponding to a first color and a second color pixel cluster corresponding to a second color. The first color pixel cluster and the second color pixel cluster may be displayed. The first color pixel cluster may be different from the second color pixel cluster.
Abstract translation: 根据本公开的教导，提供了一种用于显示图像的系统和方法。 在一个实施例中，该方法包括接收表示图像帧的数据流。 数据流可以指示对应于第一颜色的第一颜色像素簇和对应于第二颜色的第二颜色像素簇。 可以显示第一颜色像素簇和第二颜色像素簇。 第一颜色像素簇可以不同于第二颜色像素簇。
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公开(公告)号：US20110191823A1
公开(公告)日：2011-08-04
申请号：US12699692
申请日：2010-02-03
Applicant: Andrew G. Huibers
Inventor： Andrew G. Huibers
Abstract: A “bump” occurs when two devices at the same place at the same time indicate their intention to establish a connection for transferring information. A process for validating bumps is described.
Abstract translation: 当同一地点的两台设备同时表示意图建立传送信息的连接时，会发生“碰撞”。 描述了用于验证凸块的过程。
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公开(公告)号：US07787170B2
公开(公告)日：2010-08-31
申请号：US10869539
申请日：2004-06-15
Applicant: Satyadev Patel , Andrew G. Huibers , Peter Richards , Terry Tarn , Dietrich Dehlinger
Inventor： Satyadev Patel , Andrew G. Huibers , Peter Richards , Terry Tarn , Dietrich Dehlinger
IPC: G02B26/00
CPC classification number: G02B26/0841 , B81C3/001 , Y10S359/90 , Y10T156/10
Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
Abstract translation: 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。
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30.发明授权公开(公告)号：US07422920B2
公开(公告)日：2008-09-09
申请号：US11388116
申请日：2006-03-23
Applicant: Satyadev R. Patel , Andrew G. Huibers
Inventor： Satyadev R. Patel , Andrew G. Huibers
IPC: H01L21/00
CPC classification number: B82Y30/00 , G02B26/0841 , H04N5/7458
Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant.
Abstract translation: 公开了一种空间光调制器，以及用于制造这样的调制器的方法，该调制器包括微镜器件阵列。 根据所使用的光源确定中心到中心的距离和相邻的微反射镜装置之间的间隙，以优化光学效率和性能质量。 微反射镜装置包括形成在基底上的铰链支撑件和由铰链支撑件保持的铰链。 镜板通过触点连接到铰链，并且根据镜板的期望的最大旋转角度，相邻微镜之间的最佳间隙和间距来确定镜板和铰链之间的距离。 在制造这种空间光调制器的方法中，将一个牺牲层沉积在衬底上，随后形成镜板，并且另一牺牲层沉积在镜板上，随后形成铰链支架。 通过具有自发气相化学蚀刻剂的相邻反射镜装置之间的小间隙去除两个牺牲层。
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