-
公开(公告)号：US11610787B2
公开(公告)日：2023-03-21
申请号：US17108473
申请日：2020-12-01
Applicant: Brooks Automation, Inc.
Inventor： Christopher Hofmeister , Martin R. Elliott , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
-
公开(公告)号：US10854478B2
公开(公告)日：2020-12-01
申请号：US16722930
申请日：2019-12-20
Applicant: Brooks Automation, Inc.
Inventor： Christopher Hofmeister , Martin R. Elliott , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
IPC: H01L21/67
Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
-
公开(公告)号：US10541157B2
公开(公告)日：2020-01-21
申请号：US15333021
申请日：2016-10-24
Applicant: Brooks Automation, Inc.
Inventor： Christopher Hofmeister , Martin R. Elliott , Alexander Krupyshev , Joseph Hallisey , Joseph Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
IPC: H01L21/67
Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
-
公开(公告)号：US09024488B2
公开(公告)日：2015-05-05
申请号：US13646282
申请日：2012-10-05
Applicant: Brooks Automation, Inc.
Inventor： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
CPC classification number: H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
Abstract translation: 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。
-
公开(公告)号：US20140178157A1
公开(公告)日：2014-06-26
申请号：US14195086
申请日：2014-03-03
Applicant: Brooks Automation, Inc.
Inventor： Christopher Hofmeister , Martin R. Elliot , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
IPC: H01L21/67
CPC classification number: H01L21/67098 , H01L21/67126 , H01L21/6719 , H01L21/67201
Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.
Abstract translation: 公开了一种半导体加工工具，所述工具具有框架，所述框架形成具有开口的至少一个室，并且具有围绕所述开口的周边的密封表面;门构造成与所述密封表面相互作用以密封所述开口，所述门具有侧面 垂直于所述门密封表面并垂直于衬底的传输平面的至少一个驱动器，以及位于所述框架上的至少一个侧面的至少一个驱动器，所述驱动器基本上垂直于所述门密封表面并且基本上垂直于所述传送 所述驱动器具有至少部分地位于所述密封表面前面的致动器，并且所述致动器联接到所述门的一侧以将所述门从密封位置移动。 至少一个驱动器位于衬底转移区的外部。
-
Patent Agency Ranking
公开(公告)号：US20200166913A1
公开(公告)日：2020-05-28
申请号：US16696822
申请日：2019-11-26
Applicant: Brooks Automation, Inc.
Inventor： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC: G05B19/418 , G05B19/414
Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
-
公开(公告)号：US20180370024A1
公开(公告)日：2018-12-27
申请号：US16121148
申请日：2018-09-04
Applicant: Brooks Automation Inc.
Inventor： Ulysses Gilchrist , Christopher Hofmeister
IPC: B25J9/04 , H01L21/677 , B25J9/10 , B25J9/08
Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
-
公开(公告)号：US10065307B2
公开(公告)日：2018-09-04
申请号：US14071314
申请日：2013-11-04
Applicant: Brooks Automation Inc.
Inventor： Ulysses Gilchrist , Christopher Hofmeister
Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
-
公开(公告)号：US09570330B2
公开(公告)日：2017-02-14
申请号：US14180876
申请日：2014-02-14
Applicant: Brooks Automation, Inc.
Inventor： Christopher Hofmeister , Robert T. Caveney
IPC: H01L21/67 , H01L21/677
CPC classification number: H01L21/67161 , H01L21/67173 , H01L21/67709 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/67742 , Y10S414/139
Abstract: A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes.
Abstract translation: 提供了一种具有限定基本上线性的基板输送路径的输送室的衬底处理装置，每个可连接到腔室的基板保持模块的线性阵列。 衬底传输具有至少一个能够在多于一个基本上线性的衬底传送路径上保持和移动衬底的传送器。 运输室具有不同的输送管，其至少一个可在输送管的两端密封，并且构造成保持与输送管不同的隔离气氛，每个不同的输送管具有一个基板输送路径 其中不同于位于另一个输送管中的另一个输送路径，并且彼此可连通地连接，其中至少一个输送管被配置为提供基板输送通过输送管的不间断过境。
-
公开(公告)号：US20160111308A1
公开(公告)日：2016-04-21
申请号：US14976952
申请日：2015-12-21
Applicant: Brooks Automation, Inc.
Inventor： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
IPC: H01L21/677
Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
-
-
-
-
-
-
-
-
-
Search Results
34
records
(took 0.021 seconds)
