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公开(公告)号:US20150054042A1
公开(公告)日:2015-02-26
申请号:US14462724
申请日:2014-08-19
申请人: STMicroelectronics (Crolles 2) SAS , STMicroelectronics SA , Commissariat A L'Energie Atomique et aux Energies Alternatives
发明人: Michel Marty , Sebastien Jouan , Laurent Frey , Salim Boutami
IPC分类号: H01L27/144 , H01L31/101 , H01L29/49 , H01L29/66 , H01L29/16 , H01L31/18 , H01L31/107
CPC分类号: H01L27/1443 , H01L27/14625 , H01L27/14643 , H01L27/14689 , H01L29/16 , H01L29/4916 , H01L29/6656 , H01L31/02327 , H01L31/1016 , H01L31/107 , H01L31/1804
摘要: A photodiode includes at least one central pad arranged on a light-receiving surface of a photodiode semiconductor substrate. The pad is made of a first material and includes lateral sidewalls surrounded by a spacer made of a second material having a different optical index than the first material. The lateral dimensions of the pad are smaller than an operating wavelength of the photodiode. Both the first and second materials are transparent to that operating wavelength. The pads and spacers are formed at a same time gate electrodes and sidewall spacers of MOS transistors are formed.
摘要翻译: 光电二极管包括布置在光电二极管半导体衬底的光接收表面上的至少一个中心衬垫。 衬垫由第一材料制成,并且包括由具有与第一材料不同的光学折射率的第二材料制成的间隔件包围的侧壁。 焊盘的横向尺寸小于光电二极管的工作波长。 第一和第二材料都对该工作波长是透明的。 焊盘和间隔物同时形成栅电极和MOS晶体管的侧壁间隔物。
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公开(公告)号:US11579062B2
公开(公告)日:2023-02-14
申请号:US17305070
申请日:2021-06-30
发明人: Tony Maindron , Salim Boutami , Christophe Kopp
摘要: The invention provides an optical particle sensor (1) comprising: at least one light source (2, 2r, 2g, 2b) configured to emit light rays (20), at least one channel (3) intended to receive a fluid transporting at least one particle (30), and to at least partially receive the light rays (20) emitted by the at least one source (2, 2r, 2g, 2b), such that said light rays (20) are partially scattered by the at least one particle (30), at least one photodetector (4) capable of receiving said scattered light rays (20), said sensor (1) being characterised in that the at least one source (2, 2r, 2g, 2b) has an emission face (21) facing one side (D) of the sensor and in that the at least one photodetector (4) has a receiving face (41) facing the same side (D) of the sensor (1), such that the light rays received by the at least one photodetector are light rays (20b) backscattered by the at least one particle (30), for at least 90% of them.
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公开(公告)号:US11204308B2
公开(公告)日:2021-12-21
申请号:US16480136
申请日:2018-01-25
发明人: Salim Boutami , Sergio Nicoletti
摘要: The present invention relates to a particle detector comprising at least an optical device configured to emit a luminous radiation; and a substrate extending in a plane and defining a channel intended to receive particles, the channel extending principally in a direction perpendicular to the principal plane; characterised in that the detector comprises a matrix of photo detectors and a reflecting surface; the matrix of photo detectors and the reflecting surface being disposed on mutually parallel planes and situated on either side of said portion of the substrate so that a part of the luminous radiation passes through the channel by being diffracted by a particle, then reflects off the reflecting surface, and then reaches the matrix of photo detectors.
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公开(公告)号:US10884225B2
公开(公告)日:2021-01-05
申请号:US16341220
申请日:2017-10-10
发明人: Salim Boutami
IPC分类号: G02B19/00 , G01N21/3504 , G02B17/00 , G01N21/03
摘要: An optical cavity includes: a first elliptical mirror, having a first focal axis A1, and designed to reflect a light beam emitted by a light source; a second elliptical mirror, having a second focal axis A2; a third elliptical mirror, having a third focal axis A3, the light beam exiting from the third elliptical mirror being designed to be received by a detector; a first reflector, arranged to reflect the light beam exiting from first elliptical mirror in the direction of the second elliptical mirror, and arranged to reflect the light beam exiting from second elliptical mirror in the direction of the third elliptical mirror; the first, second and third elliptical mirrors being arranged so that A1, A2 and A3 have a point of intersection F, corresponding to a focus common to the first, second and third elliptical mirrors.
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公开(公告)号:US10825936B2
公开(公告)日:2020-11-03
申请号:US15494715
申请日:2017-04-24
发明人: Laurent Frey , Salim Boutami , Jean-Jacques Yon
IPC分类号: H01L31/0216 , G01J5/10 , G01J5/20 , G01J5/04 , G01J5/02 , G02B5/28 , G01J5/08 , G02B26/00 , G01J3/26 , H01L31/0203 , G01J3/02
摘要: A device for detecting electromagnetic radiation includes at least one thermal detector, placed on a substrate; an encapsulating structure forming a cavity housing the thermal detector, including at least one thin encapsulating layer; and at least one Fabry-Perot interference filter, formed by first and second semi-reflective mirrors that are separated from each other by a structured layer. A high-index layer of one of the semi-reflective mirrors is at least partially formed from the thin encapsulating layer.
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公开(公告)号:US10788623B2
公开(公告)日:2020-09-29
申请号:US16308277
申请日:2017-06-08
发明人: Salim Boutami
摘要: An optical device including: a waveguide, including a core having a refractive index, for guiding a quasi monochromatic light radiation, of a central wavelength, in a first direction and transmitting the radiation through an exit facet of the waveguide to the external environment according to a transmission coefficient, the exit facet being substantially perpendicular to the first direction, a filter blade, for example an air blade, disposed in the waveguide, parallel to the exit facet and at a first non-zero distance from the exit facet, the filter blade having, in the first direction, a first thickness, the first distance and the first thickness configured so that the transmission coefficient of the waveguide is equal to a first transmission coefficient at the central wavelength.
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公开(公告)号:US10686092B2
公开(公告)日:2020-06-16
申请号:US16104188
申请日:2018-08-17
发明人: Karim Hassan , Salim Boutami
IPC分类号: H01L31/107 , H01L31/02 , H01L31/0224 , H01L31/18 , H01L31/0232 , G02B6/42
摘要: The invention aims for an avalanche photodiode comprising an absorption zone (2), a multiplication zone (3), a first electrode and a second electrode. The photodiode further comprises a waveguide (10) forming a curved closed circuit capable of guiding a luminous flux over several turns of said circuit. The absorption zone extends over a portion at least of said waveguide, and the multiplication zone, the first and second electrodes extend along one part at least of the curved closed circuit. The waveguide is preferably an edge waveguide forming a ring and comprising an absorption zone made of germanium of width less than 200 nm. The photodiode according to the invention has an improved compacity and an improved bandwidth while limiting the multiplication noise.
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公开(公告)号:US10578437B2
公开(公告)日:2020-03-03
申请号:US16026535
申请日:2018-07-03
发明人: Boris Taurel , Salim Boutami , Laurent Duraffourg
摘要: An optical sensor includes an optical device including a microresonator, laid out to guide a light beam along a closed loop optical path, and an injection and/or extraction waveguide, optically coupled to the microresonator; a photodetector, arranged at the output of the injection and/or extraction waveguide; and an analysis device, receiving a signal supplied by the photodetector, and deducing therefrom information relative to a displacement. The microresonator is constituted of a plurality of elementary waveguides spaced apart from each other, and arranged one after the other according to a loop shaped layout. The optical sensor offers increased sensitivity to the measurement of nanometric displacements.
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公开(公告)号:US10014337B2
公开(公告)日:2018-07-03
申请号:US15280544
申请日:2016-09-29
申请人: STMicroelectronics SA , STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique et aux Energies Alternatives
IPC分类号: H01L21/311 , H01L27/146 , G02B5/20 , G02F1/1335 , G02B5/00 , B82Y20/00
CPC分类号: H01L27/14625 , B82Y20/00 , G02B5/008 , G02B5/201 , G02B5/204 , G02B2207/101 , G02F1/133509 , G02F1/133516 , H01L21/311 , H01L27/14621 , H01L27/14685
摘要: A spectral filter is manufactured using a process wherein a first rectangular bar is formed within a first layer made of a first material, said first rectangular bar being made of a second material having a different optical index. The process further includes, in a second layer over the first layer, a second rectangular bar made of the second material. The second rectangular bar is positioned in contact with the first rectangular bar. The second layer is also made of the first material.
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公开(公告)号:US20170309758A1
公开(公告)日:2017-10-26
申请号:US15494715
申请日:2017-04-24
发明人: Laurent FREY , Salim Boutami , Jean-Jacques Yon
IPC分类号: H01L31/0216 , H01L31/0203 , G01J3/26
CPC分类号: H01L31/02165 , G01J3/26 , G01J5/024 , G01J5/045 , G01J5/0809 , G01J5/10 , G01J5/20 , G02B5/288 , H01L31/0203
摘要: A device for detecting electromagnetic radiation includes at least one thermal detector, placed on a substrate; an encapsulating structure forming a cavity housing the thermal detector, including at least one thin encapsulating layer; and at least one Fabry-Perot interference filter, formed by first and second semi-reflective mirrors that are separated from each other by a structured layer. A high-index layer of one of the semi-reflective mirrors is at least partially formed from the thin encapsulating layer.
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